• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1994.05a
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• pp.38-41
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• 1994

The method of passivation for protecting the $Hg_{1-x}Cd_{x}$Te surface is important device fabrication process. Because the surface components are highly reactive leading to its chemical and electrical instability. Especially. the material of detecting for infrared radiation, of which composition is x=0.2 or 0.3, is narrow bandgap semi- conductor. The narrow bandgap semi conductors are largely governed by the properties of the semiconductor surface. The narrow bandgap semi-conductors are largely governed by the properties of the semiconductor surface. The electro-chemical processing of $Hg_{1-x}Cd_{x}$Te allows rigorous control of the surface chemistry and provides an in-suit monitor of surface reaction. So electro-chemical reduction at specific potential can be selectively eliminated the undesirable species on the surface and mainpulated to reproducibly attain the desired stoichiometry. This method shows to assess the quality of chemically treated good $Hg_{1-x}Cd_{x}$Te surface.

• Journal of Sensor Science and Technology
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• v.10 no.1
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• pp.80-85
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• 2001

$Hg_{1-x}Cd_xTe$(MCT) thin films were grown onto ITO glass and titanium plate by stationary cathodic electrodeposition in aqueous solution contained $CdSO_4$, $TeO_2$, and $HgCl_2$. During deposition two main fabrication parameters were taken into account deposition potential and growth temperature. MCT films deposited by varying two parameters were studied by X-ray diffraction, electron probe micro analyser(EPMA) and scanning electron microscope measurements. It was shown by XRD and EPMA measurements that the structure of MCT films was zinc blonde and the composition of MCT films can be controlled with the deposition potential.

• Journal of the Korean Vacuum Society
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• v.6 no.S1
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• pp.34-42
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• 1997

Hg-Te-CdTe superlattices have received much interests over the last several years as a potential material for its applications for detecting devices and optoelectronics. We have grown the HgTe-CdTe superlattice using MBE. in our lab. We have carried out DCRC spectroscopy after growth of HgTe-CdTe superlattice with varying the superlattice periods and controlling the barrier thickness and we have that the presence of the main peak and the satellite peaks. We obtained 20 arcsec of FWHM over 100 periods of superlattice. We also note that high peak intensity shows the high quality of the sample and each layer of superlattice has abrupt interfaces. The angular separation between the main peak(m=0) and the first satellite peak(m=$\pm$1) is increased when the barrier layer thickness in superlatice layers are decreased. The separation between the first setellite peak(m=$\pm$1) and the second satellite peak(m$\pm$2) is increased similarly. The number of the satellite peak is a qualitative measure of the interfacial abruptness of the superlattice.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.247-247
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• 2010

CdTe는 최근 적외선 검출기 개발에 응용하기 위해 활발한 연구가 진행 중인데 이는 HgCdTe(MCT)와 격자 불일치가 0.3% 이하로 대구경 단결정 MCT박막 제작이 용이하기 때문이다. 본 연구에서는 MBE 공정으로 GaAs 물질이 완충층으로 증착된 Si(100)기판을 사용하여 CdTe 물질과 Si기판간의 격자 불일치를 줄여 대면적 CdTe 단결정 박막을 얻고자 완충층의 두께별 결정성 및 표면 특성을 보았다. CdTe 박막의 증착은 Metal Organic Chemical Vapor Deposition system (MOCVD)를 이용하였고 실험결과 2nm의 GaAs 완충층이 사용된 박막에서 단결정 CdTe(400) 박막이 성장 되었으며, GaAs 완충층의 두께가 증가 함에 따라 $1{\mu}m$ 완충층에서는 다결정 박막이 성장 되었다. 본 연구결과는 Si 기판에 성장된 단결정 CdTe층을 이용 대면적 HgCdTe웨이퍼의 제조에 널리 이용 될 수 있으리라 여겨진다.

• Electrical & Electronic Materials
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• v.8 no.3
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• pp.352-356
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• 1995

Native oxide layer on MCT (HgCdTe) has been grown uniformly in H$\_$2/O$\_$2/ electrolyte through anodic oxidation method. It has been determined that anodic oxidation of HgCdTe in H$\_$2/O$\_$2/ electrolyte proceeds immediately with the input of constant currents without any induction time required for anodic oxideation in KOH electrolyte. Oxide layer with the resistivity of 2*10$\^$10/.ohm.cm and the refractive index of 2.1 suggested the possibility of well matching combination layer with ZnS for MCT MIS device. XPS results indicated that the major components of oxide layer grown in H202 solution is TeO$\_$2/ with the possibility of small amounts of CdTeO$\_$3/.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.451-451
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• 2011

적외선 소자의 재료로 쓰이는 액상 에피 성장법(Liquid phase epitaxy: LPE)으로 성장된 HgCdTe (MCT)박막의 Hg 분위기 열처리에 따른 구조적 변화를 고 분해능 투과 전자 현미경으로 관찰하였다. 일반적으로 LPE방법으로 성장된 MCT박막은 성장 방법의 특성상 Te 과다 영역의 성장용액이 사용되므로 상온 냉각 과정에서 박막 내 국부적인 Te 석출물을 형성 시킬 가능성이 높다. 또한, 성장 과정시 높은 Hg 증기압으로 인해 Hg-vacancy가 존재하므로 품질을 저하시키는 요인이 된다. 따라서, 본 실험에서는 Hg-vacancy와 국부적인 Te 석출물의 제거를 위해 Hg 분위기 열처리 공정을 실시하여 박막의 결정성 변화 및 국부적인 조성 변화를 관찰하였다. 실험결과, 열처리에 따른 Hg의 박막 내 공급으로 인한 이차상의 형성 등이 관찰 되었으며 부피 팽창으로 인해 격자의 변형이 관찰 되었다. 이는 투과 전자 현미경의 고 분해능 이미지 와 Gaussian mask filtering 기법으로 보여진 격자 줄무늬상 (lattice fringe)으로 확인 하였다. 또한, 열처리에 따른 국부적인 조성 편기의 해소는 high angle annular dark field scanning TEM(HAADF-STEM)을 이용하여 관찰 하였다.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.4 no.4
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• pp.388-394
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• 1994

A Hg(0.79)Cd(0.21)Te single crystal has been grown by the Traveling Heater Method(THM). Its zinc blend cubic structure is identified from the X-ray diffraction patterns and its lattice constant is determined to be $6.464 {\AA}$ using the least-square method of Cohen. From the values of the lattice constant, the composition x is determined to be 0.21. The electron density is calculated from the relative intensities of the scattered X-ray and compared with the theoretically calculated values. From the electron density distribution, it is shown that the crystal binding of Hg(1-x)Cd(x)Te(MCT) is mainly covalent and has tetrahedron bonds between adjacent atoms.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.29A no.9
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• pp.56-64
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• 1992

Because of a small bandgap energy, a high doping density, and a low operating temperature, the dark current in HgCdTe photodiode is almost composed of a tunneling current. The tunneling current is devided into an indirect tunneling current via traps and a band-to-band direct tunneling current. The indirect tunneling current dominates the dark current for a relatively high temperature and a low reverse bias and forward bias. For a low temperature and a high reverse bias the direct tunneling current dominates. In this paper, to verify the tunneling currents in HgCdTe photodiode, the new tunneling-recombination equation via trap is introduced and tunneling-recombination current is calculated. The new tunneling-recombination equation via trap have the same form as SRH (Shockley-Read-Hall) generation-recombination equation and the tunneling effect is included in recombination times in this equation. Chakrabory and Biswas's equation being introduced, band to band direct tunneling current are calculated. By using these equations, HgCdTe (mole fraction, 0.29 and 0.222) photodiodes are analyzed. Then the temperature dependence of the tunneling-recombination current via trap and band to band direct tunneling current are shown and it can be known what is dominant current according to the applied bias at athe special temperature.

• Electronics and Telecommunications Trends
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• v.3 no.4
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• pp.45-56
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• 1988

적외선검출기용 반도체소자($Hg_1_xCd_xTe$)의 특성 및 응용에 대하여 조사하고, 국외의 연구현황과 국내의 문제점 및 향후 전망에 대하여 기술하였다. $Hg_1_xCd_xTe$는 조성에 따라 검지기 파장영역을 조절할 수 있으며, 그 자체에 검지부와 신호처리부를 집적할 수 있는 monolithic기술이 유망하여 앞으로 중요한 반도체중의 하나로 확립될 것이다.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.34D no.7
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• pp.45-55
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• 1997

Electircal characteristics of HgCdTe photodiodes with a heterostructure to achieve high performance are analyzed numerically. A two-dimensional device simulator which can handle a HgCdTe heterostructure, was developed for this work. The effects of band nonparabolicity, carrier degeneracy, and band-offset of heterointerace are included in a carrier transport model. A unified generation-recombination model includes simultaneously phonon-assisted tunneling and pure tunneling of carriers via traps is newly employed for describing the electric field and temperature dependency of dark current effectively. Furthermore, to accurately predict the effect mole fraction variations on genration rates, ray-trace algorithm is incorporated in the our simulator. Under the various circumstances such as dark, illumination, and surface states, electrical properties of planar heterostructure photodiode are presented and those of homojunction are compared. These results serve as a explanation of cap layer's role on performance.