• 제목/요약/키워드: Cavity length

검색결과 459건 처리시간 0.023초

기판단위 밀봉 패키징을 위한 내압 동공열의 설계 및 강도 평가 (Design and Strength Evaluation of an Anodically Bonded Pressurized Cavity Array for Wafer-Level MEMS Packaging)

  • 강태구;조영호
    • 대한기계학회논문집A
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    • 제25권1호
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    • pp.11-15
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    • 2001
  • We present the design and strength evaluation of an anodically bonded pressurized cavity array, based on the energy release rate measured from the anodically bonded plates of two dissimilar materials. From a theoretical analysis, a simple fracture mechanics model of the pressurized cavity array has been developed. The energy release rate (ERR) of the bonded cavity with an infinite bonding length has been derived in terms of cavity pressure, cavity size, bonding length, plate size and material properties. The ERR with a finite bonding length has been evaluated from the finite element analysis performed for varying cavity and plate sizes. It is found that, for an inter-cavity bonding length greater than the half of the cavity length, the bonding strength of cavity array approaches to that of the infinite plate. For a shorter bonding length, however, the bonding strength of the cavity array is monotonically decreased with the ratio of the bonding length to the cavity length. The critical ERR of 6.21J/㎡ has been measured from anodically bonded silicon-glass plates. A set of critical pressure curves has been generated for varying cavity array sizes, and a design method of the pressurized cavity array has been developed for the failure-free wafer-level packaging of MEMS devices.

Performance Characteristics of a Coaxial Pulsed Plasma Thruster with Teflon Cavity

  • Edamitsu, Toshiaki;Tahara, Hirokazu;Yoshikawa, Takao
    • 한국추진공학회:학술대회논문집
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    • 한국추진공학회 2004년도 제22회 춘계학술대회논문집
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    • pp.577-587
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    • 2004
  • A coaxial pulsed plasma thruster (PPT) with a Teflon cavity was designed, and its performance characteristics were examined varying stored energy, cavity length and capacitance. The PPT was tested as the entire system including the discharge circuit, and the results were explained with both the transfer efficiency and the acceleration efficiency. The transfer efficiency is defined as the fraction of energy in capacitors supplied into plasma, and the acceleration efficiency as the fraction of energy supplied into plasma converted to thrust energy. To estimate these efficiencies, the equivalent plasma resistance was defined and calculated using energy conservation during discharge. The equivalent plasma resistance proportionally increased with cavity length, and therefore the current peak increased with decreasing cavity length. The energy density calculated by the transfer efficiency was increased with decreasing cavity length. As a result, higher acceleration efficiency and lower transfer efficiency were obtained with shorter cavity length. Accordingly, there was an optimal cavity length for the thrust efficiency. The specific impulse and the impulse bit per unit stored energy ranged from 390 s and 50 $\mu$ Ns/J for a cavity length of 34 mm to 825 s and 11 $\mu$ Ns/J for a cavity length of 4 mm when the stored energy was fixed to 21.4J. Thus, it was showed that the performance of this PPT approached that of electromagnetic-acceleration-type PPT with decreasing cavity length. The PPT achieved thrust efficiencies of 10-12% at 21.4 J and 6-7% at 5.35 J at cavity lengths between 14 mm and 29 mm.

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Uniform-fiber-Bragg-grating-based Fabry-Perot Cavity for Passive-optical-network Fault Monitoring

  • Xuan, Zhang;Ning, Ning;Tianfeng, Yang
    • Current Optics and Photonics
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    • 제7권1호
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    • pp.47-53
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    • 2023
  • We propose a centralized passive-optical-network monitoring scheme using the resonance-spectrum properties of a Fabry-Perot cavity based on fiber Bragg gratings. Each cavity consists of two identical uniform fiber Bragg gratings and a varying cavity length or grating length, which can produce a unique single-mode resonance spectrum for the drop-fiber link. The output spectral properties of each cavity can be easily adjusted by the cavity length or the grating length. The resonance spectrum for each cavity is calculated by the transfer-matrix method. To obtain the peak wavelength of the resonance spectrum more accurately, the effective cavity length is introduced. Each drop fiber with a specific resonance spectrum distinguishes between the peak wavelength or linewidth. We also investigate parameters such as reflectivity and bandwidth, which determine the basic performance of the fiber Bragg grating used, and thus the output-spectrum properties of the Fabry-Perot cavity. The feasibility of the proposed scheme is verified using the Optisystem software for a simplified 1 × 8 passive optical network. The proposed scheme provides a simple, effective solution for passive-optical-network monitoring, especially for a high-density network with small end-user distance difference.

고(高) 에너지 전자선(電子線) 치료시(治療時) 체내(體內) 공동(空洞)으로 인(因)한 선량분포(線量分布)의 변동(變動) (Perturbation of Dose Distributions for Air Cavities in Tissue by High Energy Electron)

  • 추성실;이도행;최병숙
    • Journal of Radiation Protection and Research
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    • 제1권1호
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    • pp.22-30
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    • 1976
  • The perturbation of dose distribution adjacent to cavities in high energy electron has shown that the percentage of dose increase varies markedly as a function of the build-up layer, the length and thickness of the cavities, and the electron energy. The dose distribution showed that cavities similar in size to those encountered in the head and neck measured by industrial film dosimetry and corrected by ionization chambers. The most increased doses by measuring are resulted in a localized dose of up to 130% of that measured at the depth of maximum dose within a homogeneous tissue equivalent phantom. The measured values and correction factors of dose perturbation due to air cavities showed in diagrams and would be summarized as follows. 1. In $8{\sim}12MeV$ electron beams, the most marked dose is observed when the build-up layer thickness is 0.5cm and cavity volume is $2{\times}2{\times}2cm^3$. 2. The highest dose point is located under cavity when the energy is increased and cavity length is longer. 3. The cavity length at which the maximum percentage dose occurs decreases with increasing energy. 4. The highest percentage cavity doses are obtained when the energy is high, the build-up layer is thin, the thickness of the cavity is large, and the length of the cavity is approximately 1 to 3cm. 5. The doses of upper portion of cavity are less than the standard dose distribution as 5 to 10%. 6. The maximum range of electron beam are extended as much as thickness of cavity. 7. A cavity having a length of 5cm closely approximates a cavity of infinite length.

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결합형 모드록킹 극초단 색소레이저의 공진기 길이변화 특성 (Cavity-Length Detuning Characteristics of a Hybridly Mode-Locked Ultrashort Pulse Dye Laser)

  • 서정철;정영붕;김동호
    • 한국광학회지
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    • 제1권1호
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    • pp.22-27
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    • 1990
  • 결합형 모드록킹 극초단 색소레이저의 공진기 길이변화에 따른 펄스폭의 변화를 선형 자체상관기를 이용하여 연구하였다. 색소레이저의 공진기 길이가 여기레이저의 공진기 길이와 일치하였을 경우 펄스폭은 0.64ps이며 완벽하게 모드록킹 되었다. 그러나 최적조건보다 색소레이저 공진기 길이가 긴 경우나 짧은 경우에는 펄스폭은 넓어지며 불완전 모드록킹이 되었다. 즉 색소레이저의 공진기 길이가 여기레이저의 공진기 길이보다 길 경우는 자연방출에 의한 noise 때문에 broad base 가 형성되며, 색소 이득이 증가되기 때문에 자체 상관함수의 첨두출력은 최적조건에서의 색소레이저 공진기 길이보다 5 $\mu\textrm{m}$ 긴 조건에서 최대가 되었다. 또 색소레이저의 스펙트럼은 자연방출에 의한 형광 및 색소 이득이 증가되기 때문에 넓게 됨을 관찰할 수 있었다. 그러나 색소레이저의 공진기 길이가 여기 레이저의 공진기 길이보다 짧은 경우에는, 색소 이득이 적게 됨으로 자체 상관함수의 첨두출력도 약하게 되며 스펙트럼의 전반치폭은 좁게 되었다. 한편 최적조건을 벗어나면 스펙트럼의 중심파장이 이동되는 현상을 관찰할 수 있었다.

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Cavitation Instabilities of Hydrofoils and Cascades

  • Tsujimoto, Yoshinobu;Watanabe, Satoshi;Horiguchi, Hironori
    • International Journal of Fluid Machinery and Systems
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    • 제1권1호
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    • pp.38-46
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    • 2008
  • Studies on cavitation instabilities of hydrofoils and cascades are reviewed to obtain fundamental understandings of the instabilities observed in turbopump inducers. Most of them are based on the stability analysis of two-dimensional inviscid cavitating flow. The most important finding of the analysis is that the cavitation instabilities depend only on the mean cavity length. For a hydrofoil, the characteristic length is the chord length and partial/transitional cavity oscillation occurs with shorter/longer cavity than 75% of the chord length. For cascades, the characteristic length is the blade spacing and various modes of instabilities are predicted when the mean cavity is longer than 65% of the spacing. In the last part, rotating choke is shown to occur when the cavity becomes longer than the spacing.

원판 캐비테이터의 환기 초공동에 대한 실험적 연구 (An Experimental Study on Ventilated Supercavitation of the Disk Cavitator)

  • 김병진;최정규;김형태
    • 대한조선학회논문집
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    • 제52권3호
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    • pp.236-247
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    • 2015
  • In this paper, the experimental equipments for ventilated supercavitation in cavitation tunnel is constructed and the basic data of ventilated supercavitation regard to the entrainment coefficient and Froude number is fulfilled. The experiments are conducted for the disk cavitator with injecting air and the pressure inside cavity and the shape of cavity are measured. As the entrainment coefficient increases while the Froude number is kept constant, the ventilated cavitation number decreases to a minimum value which decreases no more even with increasing the air entrainment. The minimum value of ventilated cavitation number, caused by the blockage effect, decreases according to increasing the diameter ratio of test section to cavitator. The cavity length is rapidly enlarged near the minimum cavitation number. In low Froude numbers, the cavity tail is floating up due to buoyancy and the air inside the cavity is evacuated from its rear end with twin-vortex hollow tubes. However, in high Froude numbers, the buoyancy effect is almost negligible and there is no more twin-vortex tubes so that the cavity shape becomes close to axisymmetric. In order to measure the cavity length and width, the two methods, which are to be based on the cavity shapes and the maximum width of cavity, are applied. As the entrainment coefficient increases after the ventilated cavitation number gets down to the minimum cavitation number, the cavity length still increases gradually. These phenomenon can be confirmed by the measurement using the method based on the cavity shapes. On the other hand, when the method based on the maximum width of cavity is used, the length and width of the cavity agree well with a semi-empirical formular of natural cavity. So the method based on the maximum width of cavity can be a valid method for cavitator design.

공명 흡음판 위 가이드 그릴의 형상이 공진기 흡입 유동에 미치는 영향 (Effect of the Shape of a Guide Grill Above a Resonance Type Sound Absorbing Panel on Intake Flow into a Resonator)

  • 배현우;성재용;이동훈
    • 한국생산제조학회지
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    • 제25권3호
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    • pp.182-188
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    • 2016
  • This study investigates cavity flows through a guide grill above a resonator. Vortex distributions and intake flows are simulated for various shapes of the guide grill. The flows are assumed to be compressible, unsteady, and turbulent. Numerical simulations are conducted using a large eddy simulation (LES) model. To analyze the effect of the guide grill shape, three cavity lengths (0.2H, 0.6H, and 1.0H) and cavity angles ($30^{\circ}$, $45^{\circ}$ and $60^{\circ}$) are considered based on resonator height (H). The results show that the vortex generated in the resonator by cavity flow increases with cavity length. Thus, the intake flow is minimum at the smallest cavity length and angle. However, when cavity length is equal to resonator height, the intake flow decreases. The maximum intake flow occurs at a cavity angle $45^{\circ}$ at higher cavity lengths owing to the interaction between the vortex in the resonator and intake flow.

CFD를 이용한 슬롯 다이 헤드 내부의 유체 분포 분석 (Study on Fluid Distribution in Slot-die Head Using CFD)

  • 유수호;김기은;신영균;박종운
    • 반도체디스플레이기술학회지
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    • 제21권4호
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    • pp.39-44
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    • 2022
  • Using a CFD (computational fluid dynamics) simulation tool, we have offered a design guideline of a slot-die head having a simple T-shaped cavity through an analysis of the fluid dynamics in terms of cavity pressure and outlet velocity, which affect the uniformity of coated thin films. We have visualized the fluid flow with a transparent slot-die head where poly(3,4-ethylenedioxythiophene):poly(4-styrenesulfonate) (PEDOT:PSS) is injected. We have shown that the fluid dynamics inside the slot-die head depends sensitively on the cavity depth, cavity length, land length, and channel gap (i.e., shim thickness). Of those, the channel gap is the most critical parameter that determines the uniformity of the pressure and velocity distributions. A pressure drop inside the cavity is shown to be reduced with decreasing shim thickness. To quantify it, we have also calculated the coefficient of variation (CV). In accordance with Hagen-Poiseuille's laws and electron-hydraulic analogy, the CV value is decreased with increasing cavity depth, cavity length, and land length.

양자선 레이저의 공진기 길이 변화에 따른 시간적 및 공간적 특성 (Cavity-Length-Dependent Spectral and Temporal Characteristics of the Quantum Wire Laser)

  • 최영철;김태근
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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    • pp.1094-1097
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    • 2003
  • In this paper, the cavity-length-dependent spectral and temporal characteristics of a V-groove AlGaAs-GaAs quantum wire (QWR) laser at each subband were investigated. At short cavity lasers less than $300{\mu}m$, a discrete wavelength switching from the n=1 to the n=2 subband occurred due to the increased threshold gain, resulting from the increased cavity loss. Using the characteristic of the wavelength shift from n=1 to the n=2 subband with shortening the cavity length, ultrafast lasing behaviors under gain switching at the n=1 and the n=2 subband transition were demonstrated and compared.

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