• Journal of Sensor Science and Technology
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• v.26 no.1
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• pp.24-27
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• 2017

In this study, I developed a simple and low cost process-printing a silver, carbon, dielectric, adhesive layer on PET films using screen printing technology and bonding the two films face-to-face-to fabricate a low price capacitive pressure-mapping sensor. Both electrodes forming the pressure measuring capacitor are arranged between the two PET films similar to a sandwich. Therefore, the sensor has the advantage of minimizing the influence of external noise. In this study, a $10{\times}10$ capacitance-type pressure-mapping sensor was fabricated and its characteristics were analyzed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.487-490
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• 1995

This paper discisses the effects geometric errors on the measurement of error motions of rotor with the cylindrical capacitive displacement sensor. Analytic model of the measuring process with this sensor is derived and this model shows that the effect of geometric errors of sensor is larger than that of rator on the measurement of error motions of rotor. The computer simulation shows effect of periodic errors in this sensor on the measuring orbit.

• Journal of the Semiconductor & Display Technology
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• v.16 no.4
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• pp.63-67
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• 2017

In this study, We developed a simple and low cost capacitive pressure mapping sensor and microcontroller-base lock-in amplifier array. We developed capacitive type pressure mapping sensor by forming the electrode and adhesives on plastic films using only the printing process, and the finishing the process by bonding the two films. Lock-in amplifier array was based on a general purpose microcontroller and had only a charge amplifier as analog circuits. In this study, a $10{\times}10$ capacitive type pressure mapping sensor and lock-in amplifier array was fabricated and its characteristics were analyzed.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.768-771
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• 2001

Non-contacting capacitive sensor, based on principle of the cross capacitor, for measuring of $\mu\textrm{m}$-order displacements have been fabricated and characterized. To overcome disadvantages of the existed capacitive sensors of parallel type with 2-electrodes and 3-electrodes, the developed new sensor was designed to have 4-electrodes, two of them used high and low electrode the other two used as guard electrodes, on a sapphire plate with diameter 17 mm and thickness 0.7 mm, and are symmetrically situated with a constant gap of 0.2 mm between the electrodes. This sensor can be used for measuring the distance between sensor and target not only the metallic but also non-metallic target without ground connection.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.12
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• pp.2590-2597
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• 2002

A new torque measuring apparatus adopting the basic principle of a capacitive type sensor is proposed in this article. Two plate electrodes are working as a capacitive sensor, whose capacitance varies as torque is applied. One end of each plate is connected to the torque carrying shaft. Output characteristics of the torque sensor were theoretically analyzed and its validity was investigated through experiment. Calculations and calibration experiments show that the output is nonlinear, that is, the sensitivity is very high at low torque but decreases as torque increases. The sensitivity of the proposed system is about 100 times roughly higher than that of a conventional 4-strain gauge type torque sensor.

• Journal of Sensor Science and Technology
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• v.19 no.2
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• pp.92-98
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• 2010

The capacitive sensor has a simple structure, compact size and low cost, but a small dynamic range. The small range is caused by use of gap variation. If the sensor takes area variation type with one plate moving horizontally, it can have a large measurable range. While the area variation has relatively low sensitivity, some studies have found methods to improve the sensitivity. Even though the methods are effective, parameters of the results are limited and 2 dimensional. This study provides more practical and 3 dimensional analysis and suggests relations between parameters. Using the results, the optimized design parameters of a high dynamic range capacitive sensor can be found.

• Journal of Sensor Science and Technology
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• v.14 no.4
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• pp.219-224
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• 2005

In this paper, a contact-type linear encoder-like capacitive displacement sensor (CLECDS) is proposed. It is based on the linear encoder capacitive displacement sensor that consists of two substrates with a series of conducting grating in identical size and it is used as a contact sensor of which the two substrates assembled faced to each other after coated with thin dielectric film. It was confirmed that the prototype of this sensor has resolution of about 126nm and measuring range of 20 mm in the test.

• Journal of the Semiconductor & Display Technology
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• v.14 no.2
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• pp.1-7
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• 2015

In this paper, a new capacitive pressure sensor has been proposed for a displacement measurement. The new sensor is mainly composed of a gap of $5{\mu}m$ and a notch of $1{\mu}m$. And the sensor has the performance as the high sensitivity and capacitance compared with a commercial capacitive sensor. Therefore, the advantages of the new capacitive pressure sensor are good sensitivity in normal range, mechanically robust and large overload protection. The analytical model is induced for confirming the performance of the proposed sensor. In addition, FEM (finite elements method) simulation has been performed to verify the analytical model. Firstly, the displacement characteristics of diaphragm membrane were simulated by the analytical model and FEM in the case of different structure and materials. At last, through this analysis, these simulation results can be predicted the change of the performance when the device parameters are varied. And it is used as a design tool to achieve at a set of performance we desired.

• Proceedings of the Korean Institute of Intelligent Systems Conference
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• 2004.04a
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• pp.495-498
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• 2004

In this paper, passive telemetry capacitive humidity sensor system using a RLSE(Recursive Least Square Estimation) technique Is proposed. To overcome the problem like power limits and complications that general passive telemetry sensor system including IC chip has, the principle of inductive coupling is applied to model the sensor system. Specially, by applying the forgetting factor, we show that the accuracy of its estimation can be improved even in the case of time varying parameter and also the convergence time can be reduced.

• The Transactions of the Korean Institute of Electrical Engineers B
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• v.55 no.9
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• pp.443-448
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• 2006

Non-contacting capacitive sensor based on Thompson-Lampard theorem have been fabricated and characterized for measuring of 때 order displacements. To overcome disadvantages of the existed capacitive sensors of parallel plate type with 2-electrodes and 3-electrodes, the developed new sensor was designed to have 4-electrodes with a constant gap of 0.2mm between the electrodes. Two of the electrodes were used as a high potential electrode and a low one, the other two electrodes were used as guard electrodes. These electrodes were made from copper using RF sputtering system on a sapphire plate with diameter 17 mm and thickness 0.7 mm. This sensor can be used for measuring the distance not only between the sensor and metallic target connected to ground potential but also non-metallic target without ground connection.