• 한국전기전자재료학회논문지
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• 제24권4호
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• pp.319-324
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• 2011

This paper dealt with a partial discharge (PD) detection method for insulation diagnosis in cast-resin transformers. To detect PD pulse, a planar-capacitive probe was designed and fabricated. The probe has no insulation problem and can be installed on cast-resin transformers even in operation since it does not connect with high voltage conductor. The PD measurement system consists of the capacitive probe, a coupling network of 100 [kHz] low-cutoff frequency, and an amplifier with a gain of 40 [dB] and a frequency bandwidth of 500 [Hz]~45 [MHz]. A plane-needle and a plane-plane electrode system were fabricated to simulate insulation defects in a cast-resin transformer. Sensitivity of the PD measurement system, which is evaluated by a standard calibrator was 0.35 [mV/pC] for positive and 0.45 [mV/pC] for negative, respectively. The PD detection by the capacitive probe was less sensitive than that by a coupling capacitor according to IEC 60270, but we could analyze the magnitude and the phase distribution of PD pulse.

• 한국전기전자재료학회논문지
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• 제21권1호
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• pp.85-89
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• 2008

An objective of this paper is to develop a partial discharge (PD) measurement device for monitoring gas insulated switches installed in power distribution system. A capacitive voltage probe was studied and designed to detect PD pulse without an electrical connection. The PD measurement device consists of the capacitive voltage probe attached outside of a bushing, a coupling network which attenuates AC voltage by 270 dB, and a low noise amplifier with the gain of 40 dB in ranges of 500 kHz${\sim}$20 MHz. The sensitivity of the prototype device calculated by a calibrator was 1.98 m V /pc. An application experiment was carried out in a 25.8 kV gas insulated switch and the peak pulse of 76.7 pC was detected. From the experimental results, it is expected that the PD measurement device can be applied to online monitoring system of gas insulated switches.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.391-395
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• 2002

This paper described about the ultra-precision profile measurement of aspheric surfaces using contact probing technique. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime utilizing a leaf spring mechanism and a capacitive-type sensor. The contact probe is attached on the z-axis during measurement while aspheric objects are supported on the single point diamond turning machine(SPDTM). The machine xz-axis motions are monitored by a set of two orthogonal plane mirror type laser interferometers. Experimental results show that the contact probing technique developed of On-machine Measurement System in this investigation is capable of providing a repeatability of 20 nanometers with a $\pm$20 uncertainty of 300 nanometers.

• 한국전기전자재료학회논문지
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• 제22권9호
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• pp.786-791
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• 2009

Transformer failures are mostly due to partial discharges (PDs) caused by the deteriorated insulation. It is, therefore, important to monitor PD occurrence in insulation system and prevent their deterioration. The presented paper deals with a PD detection method by a capacitive probe, which easily apply to cast - resin dry - type transformers. The PD detection system consists of a capacitive probe and a low noise amplifier having the frequency bandwidth of 500 $Hz{\sim}30$ MHz. In the experimental set-up, sensitivity of the system is 7.16 mV/pC.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.476-477
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• 2007

This paper described the partial discharge (PD) measurement techniques for diagnosing gas-insulated switches in overhead power distribution system. A capacitive voltage probe to detect PD pulse was designed and fixed on the surface of a bushing. We also designed a coupling network to attenuate AC voltage by 270 dB, and a low-noise amplifier having the gain of 40 dB and 500 kHz~20 MHz 3 dB. From the calibration, it was calculated that the sensitivity of the measurement system was 0.94mV/pC. In the application experiment, we could measure a PD pulse of 45 pC.

• 한국기계가공학회지
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• 제2권3호
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• pp.56-61
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• 2003

This paper described about on-machine profile measurement of aspheric surfaces using contact probing technique in ultra precision machine. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime using a circle leaf spring mechanism and a capacitive-type sensor. The contact probe which is installed on the z-axis is In touch with the aspheric objects which is fixed on the spindle of the diamond turning machine(DTM) during the measuring procedure. The x, z-axis motions of the machine are monitored by a set of two orthogonal plane mirror type laser interferometers. As a results, the developed contact probe on-machine measurement system showed 10 nanometers repeatability with a ${\pm}2{\sigma}$ and uncertainty of 200 nmPv.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.499-499
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• 2012

This study was evaluated on etcher of capacitive coupled plasmas with OES (Optical Emission Spectroscopy) and impedance by VI probe that are widely used for process control and monitoring at semiconductor industry. The experiment was operated at conventional Ar and C4F8 plasma with variable change such as pressure and addition of gas (Atmospheric Leak: N2 and O2), RF, pressure, that are highly possible to impact wafer yield during wafer process, in order to observe OES and VI Probe signals. The sensitivity change on OES and Impedance by Vi probe was analyzed by statistical method to determine healthy of process. The main goal of this study is to understand unwanted tool performance to eventually improve productive capability. It is important for process engineers to actively adjust tool parameter before any serious problem occurs.

• 한국조명전기설비학회:학술대회논문집
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• 한국조명전기설비학회 2008년도 추계학술대회 논문집
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• pp.301-306
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• 2008

Various sensors such as capacitive probe, high frequency current transformer (HFCT), and acoustic emission (AE) probe were applied to a cast resin dry type transformer for partial discharge detection. We designed and fabricated a wideband low-noise amplifier having a gain of 40[dB]. From the experiment which was carried out in the same transformer, the sensitivities were 7.16[mV/pC] for capacitive probe, 3.8[mV/pC] for HFCT, and 17.9[mV/pC] for AE probe.

• 한국정밀공학회지
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• 제12권3호
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• pp.23-31
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• 1995

The sending characteristics of the non-contact type displacement transducers can affect the performances of the magnetic bearing systems when they support the rotating shaft. The probe type displacement sensor detects not only the displacement of the rotor at the sensing position but also the surface irregularitis of the rotor such as surface roughnessand roundness errors. If there exist such measuring errors, the magnetic bearing can not apply proper force against the rotor displacements for the detected signal is the input to the magnetic bearing controllers. The cylindrical shape capacitive transducer can detect the rotor displacement by the integral sum of the charges which are formed between the sensor plates and rotor so that it can reduce the detecting errors induced by the surface irregularities of the rotor. By theore- tical analysis, we compared the sensing characteristics of the cylindrical shape capacitive transducers for the rotors that have some sinusoidal irregularities with that of the ideal probe type displacement transducers.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.90-93
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• 2003

This paper described about the ultra-precision profile measurement of aspheric surfaces using contact probing technique. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime utilizing a circle leaf spring mechanism and a capacitive-type sensor. The, contact probe is attached on the z-axis during measurement while aspheric object are supported on the diamond turning machine(DTM). The machine xz-axis motions are monitored by a set of two orthogonal plane mirror type laser interferometers. Experimental results show that the contact probing technique developed of on-machine measurement system in this investigation is capable of providing a repeatability of 10 nanometers with a $\pm$20 uncertainty of 200nmPv.