A Study on the Measurement Characteristics of Cylindrical Type Capacitive Transducers to the Roundness Errors of Rotor for Magnetic Bearing

자기베어링용 로우터의 형상 오차에 대한 실린더형 캐패시턴스 센서의 측정특성에 관한 연구

The sending characteristics of the non-contact type displacement transducers can affect the performances of the magnetic bearing systems when they support the rotating shaft. The probe type displacement sensor detects not only the displacement of the rotor at the sensing position but also the surface irregularitis of the rotor such as surface roughnessand roundness errors. If there exist such measuring errors, the magnetic bearing can not apply proper force against the rotor displacements for the detected signal is the input to the magnetic bearing controllers. The cylindrical shape capacitive transducer can detect the rotor displacement by the integral sum of the charges which are formed between the sensor plates and rotor so that it can reduce the detecting errors induced by the surface irregularities of the rotor. By theore- tical analysis, we compared the sensing characteristics of the cylindrical shape capacitive transducers for the rotors that have some sinusoidal irregularities with that of the ideal probe type displacement transducers.