• 전기화학회지
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• 제2권3호
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• pp.130-133
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• 1999

본 연구에서는 음주 측정에 적용할 수 있는 다공질 실리콘층으로 된 저농도의 캐퍼시턴스형 알코올 가스 측정용 센서를 제작하고, 상온에서 그 특성을 측정하였다. 기존의 $SnO_2$등의 금속 산화물 반도체를 이용한 센서는 저농도의 알코올을 정확하게 검지하기에 어려울 뿐만 아니라 감도를 높이기 위해 $200\~400^{\circ}C$로 가열이 필요하였다. 이에 비해 다공질 실리콘층을 이용한 센서는 넓은 표면적을 갖고 있어 상온에서도 감도가 양호할 뿐만 아니라 집적화 센서로 제작이 용이한 점을 갖고 있다. 실험은 증류수에 희석한 알코올 수용액을 체온과 같은 $36^{\circ}C$를 비롯하여 25와 $45^{\circ}C$로 유지한 상태에서 0에서 $0.5\%$의 농도범위에 대해서 $0.05\%$의 간격으로 120 Hz와 1 kHz의 두 주파수에서 측정하였다. 그 결과, 양호한 선형성과 함께 120 Hz의 주파수에서 측정하였을 때, $0.1\%$의 알코올 농도의 증분마다 $25,\;36,\;45^{\circ}C$의 알코올 수용액의 온도에 대해 각각 1.1, 2.6 및 $4.6\%$로 캐퍼시턴스의 증가율을 보였다.

• Transactions on Electrical and Electronic Materials
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• 제9권3호
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• pp.128-133
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• 2008

In this paper, in order to analyze property of frequency response in microphone using optical sensor, acousto-optic sensor system has been implemented. The capacitance microphone and fiber-optic transmission path type fiber-optic microphone (FOM) have weaknesses in directivity, size, weight, and price. However suggested optical microphone can be constituted by cheap devices, so it has many benefits like small size, light weight, high directivity, etc. Head part of optical microphone which is suggested in this paper is movable back and forth by sound pressure with the attached reflection plate. Operating point has also been determined by measuring the response characteristics. The choosing the point, which has maximum linearity and sensitivity has changing the distance between optical head and vibrating plate. We measured the output of the O/E transformed signal of the optical microphone while frequency of sound signal is changed using sound measurement /analysis program, "Smaart Live" and "USBPre", which are based on PC, and compared the result from an existing capacitance microphone. The measured optical microphone showed almost similar output characteristics as those of the compared condenser microphone, and its bandwidth performance was about 4 kHz at up to 3 dB.

• 센서학회지
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• 제19권4호
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• pp.285-290
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• 2010

In this paper, a dynamic range(DR) extension technique based on a 3-transistor active pixel sensor(APS) and dual image sampling is proposed. The feature of the proposed APS is that the APS uses two or more photodiodes with different sensitivities, such as a high-sensitivity photodiode and a low-sensitivity photodiode. Compared with previously proposed wide DR(WDR) APS, the proposed approach has several advantages, such as no-external equipments or signal processing, no-additional time-requirement for additional charge accumulation, simple operation and adjustable DR extension by controlling parasitic capacitance and sensitivity of two photodiodes. Approximately 16 dB of DR extension was evaluated from the simulation for the situation of 10 times of sensitivity difference and the same size of parasitic capacitance between those two photodiodes.

• 반도체디스플레이기술학회지
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• 제8권4호
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• pp.21-24
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• 2009

We investigated a nanoscale inertia sensor based on telescoping carbon nanotubes, using classical molecular dynamics simulations. The position of the telescoping nanotubes is controlled by the centrifugal force exerted by the rotation platform, thus, position shifts are determined by the capacitance between carbon nanotubes and the electrode, and the operating frequency of the carbon nanotube oscillator. This measurement system, tracking oscillations of the carbon nanotube oscillator, can be used as the sensor for numerous types of devices, such as motion detectors, accelerometers and acoustic sensors.

• 한국전기전자재료학회논문지
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• 제29권1호
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• pp.23-29
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• 2016

In this paper, in order to quantify the peristalsis occurrence in a guinea pig's large intestine, a miniaturized air-gap capacitive pressure sensor was fabricated through micro-electro-mechanical system (MEMS). The proposed pressure sensor is a two-layered biocompatible polyimide substrate consisting of an air-gap capacitive plates between the substrates. The proposed pressure sensor was designed with a careful consideration of the structure and motility mechanism of the guinea pig's large intestine. Artificial pellets were mounted on a prototype pressure sensor to provide some redundancies in the form of size and shape of the guinea pig feces. Capacitance of a prototype sensor was recorded to be 2.5 ~ 3 pF. This capacitance value was later converted to count value using a lab fabricated data conversion system. Sensitivity of the pressure sensor was recorded to be below 1 mmHg per atmospheric pressure. During in vivo testing, artificial peristalsis caused by drug injection was measured by inserting the prototype pressure sensor into the guinea pig's large intestine and pressure data obtained due to artificial peristalsis was graphed using a labview program. The proposed pressure sensor could measure the pressure changes in the proximal, medial, and distal parts of the large intestine. The results of the experiment confirmed that pressure changes of guinea pig's large intestine was proportional to the degree of drug injection.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.483-486
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• 2003

This paper presents a small capacitance measuring circuit for capacitive sensors. The proposed circuit consists of sinewave generator, detector and demodulator. Results of experiments are shown that the circuit can be able to measure small capacitance exiting in a capacitive sensor filled with a vegetable oil. The sensitivity of the circuit is from 0.4V/pF to 4V/pF and the resolution is from 0.0025 pF to 0.00025 pF.

• Journal of Mechanical Science and Technology
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• 제20권4호
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• pp.505-512
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• 2006

This paper presents an integrated multifunctional sensor based on MEMS technology, which can be used or embedded in mobile devices for environmental monitoring. An absolute pressure sensor, a temperature sensor and a humidity sensor are integrated in one silicon chip of which the size is $5mm\times5mm$. The pressure sensor uses a bulk-micromachined diaphragm structure with the piezoresistors. For temperature sensing, a silicon temperature sensor based on the spreading-resistance principle is designed and fabricated. The humidity sensor is a capacitive humidity sensor which has the polyimide film and interdigitated capacitance electrodes. The different piezoresistive orientation is used for the pressure and temperature sensor to avoid the interference between sensors. Each sensor shows good sensor characteristics except for the humidity sensor. However, the linearity and hysteresis of the humidity sensor can be improved by selecting the proper polymer materials and structures.

• Biomaterials and Biomechanics in Bioengineering
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• 제2권2호
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• pp.71-84
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• 2015

A low-profile flow sensor has been designed, fabricated, and characterized to demonstrate the feasibility for monitoring hemodynamics in cerebral aneurysm. The prototype device is composed of three micro-membranes ($500-{\mu}m$-thick polyurethane film with $6-{\mu}m$-thick layers of nitinol above and below). A novel super-hydrophilic surface treatment offers excellent hemocompatibility for the thin nitinol electrode. A computational study of the deformable mechanics optimizes the design of the flow sensor and the analysis of computational fluid dynamics estimates the flow and pressure profiles within the simulated aneurysm sac. Experimental studies demonstrate the feasibility of the device to monitor intra-aneurysmal hemodynamics in a blood vessel. The mechanical compression test shows the linear relationship between the applied force and the measured capacitance change. Analytical calculation of the resonant frequency shift due to the compression force agrees well with the experimental results. The results have the potential to address important unmet needs in wireless monitoring of intra-aneurysm hemodynamic quiescence.

• 한국멀티미디어학회논문지
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• 제22권11호
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• pp.1280-1287
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• 2019

For developing a wireless implantable device to monitoring the artery variation in real-time. The concept of a special vessel variation measurement capacitive sensor is presented in this paper. The sensor consists of two part; main sensor to measuring the arterial variation, and reference sensor is used to improve the accuracy of the capacitance value variation. Before sensor manufacture, a model of the sensor attached on the artery was designed in 3D to conduct in the FEA simulation to validate the validity and feasibility of the idea. The artery model was designed as layered structures and made of collagenous soft tissues with intima inside, followed by the media and the adventitia. Also, a grease layer was designed in the inner of the arterial wall to imitate the clogged arteries. The simulation was divided into two parts; sensor performance test by changing the diameter of the grease layer, and arterial wall tension test by changing the blood pressure. As the simulation results, the capacitance value measured by the proposed sensor is decreased follow the diameter of the grease increased. Also, large elastic deformation of the arterial wall since changing the blood pressure has been observed.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2009년도 추계학술대회 논문집
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• pp.376-380
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• 2009

Surface acoustic wave (SAW) device is widely used as a bandpass filter, a chemical or physical sensor, and an actuator. In this paper, we propose the capacitive gap measurement system with high precision through the signal processing using SAW device. The research process is mainly composed of theoretical part and experimental part. In theoretical part, equivalent circuit model was used to simulate the SAW response by the change of capacitance. In experimental part, commercialized capacitor was used to see the SAW response by the change of load capacitance. After that, gap adjustment system was made physically and the SAW response by the change of gap which caused the capacitance change was measured. And resolution and stroke was decided comparing the signal change and basic measurement noise level.