• 대한기계학회논문집A
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• 제30권11호
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• pp.1369-1375
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• 2006

In this work, mechanical characteristics of stainless steel diaphragm have been studied as a potential robust substrate and a diaphragm material for micromachined devices. Lamination process techniques combined with traditional micromachining processes have been adopted as suitable fabrication technologies. To illustrate these principles, capacitive pressure sensors based on a stainless steel diaphragm have been designed, fabricated and characterized. The fabrication process for stainless steel micromachined devices keeps the membrane and substrate being at the environment of 8.65MPa pressure and $175^{\circ}C$ for a half hour and then subsequently cooled to $25^{\circ}C$. Each sensor uses a stainless steel substrate, a laminated stainless steel film as a suspended movable plate and a fixed, surface micromachined back electrode of electroplated nickel. The finite element method is adopted to investigate residual stresses formed in the process. Besides, out-of-plane deflections are calculated under pressures on the diaphragm. The sensitivity of the device fabricated using these technologies is 9.03 ppm $kPa^{-1}$ with a net capacitance change of 0.14 pF over a range 0$\sim$180 kPa.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제54권2호
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• pp.69-75
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• 2005

In order to improve the reliability of high voltage rotating machines and mold transformers, it is necessary to understand the breakdown mechanism and life assessment of the high voltage winding parts. Especially the on-line PD test provides the ability to monitor effects, such as slot discharge, internal discharge, and end-winding discharge without interrupting the electrical machines, this method has been proven the major testing technology. Capacitive couplers have been the most widely used sensors for the on-line partial discharge detection in rotating machines nowadays. This paper deals with the electrical characteristics and long-term reliability of a ceramic coupler(CC), which can be easily mounted into high voltage input terminal part, has been developed and tested to continuously measure PD activity during operating condition. This paper presents electrical characteristics (dielectric loss angle, capacitance, PD inception level, breakdown voltage, and frequency response bandwidth) and long-term life test result of the developed 6.6 kV class on-line ceramic coupling sensor. It was found that this sensor had good electrical characteristics to detect PD activity during the operating condition with its detection frequency band is between several and several tens MHz. Also, the voltage life of the 6.6kV class ceramic coupler was calculated over 60 years.

• 한국세라믹학회지
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• 제27권4호
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• pp.529-535
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• 1990

This paper describes the factors which control the impedance-relative humidity characteristics of the TiO2-V2O5 humidity sensor. To obtain the quantitative relationships between impedance and many manufacturing parameters such as V2O5mol%, the sintering time and temperature, various sets of samples are preared and tested. With changing relative hymidity from 20% to 80%, it is measrued that the corresponding capacitance and impedance from the semicircles which complex impedance plots make. As a result we found that the impedance-relative humidity characteristics are mainly controlled by the doping amount of V2O5 total pore volume and bulk resistence of the elements. We can assume the equivalent circuits of each samples and finally control the sintering time to get a linear humidity impedance response curve which plays an important role in device making. 4mol% V2O5-TiO2 specimen sintered at 90$0^{\circ}C$ for 10min. show liear log(Z) vs. RH characteristics and 10mol% V2O5-TiO2 specimen sintered at the same temp. for 20min. show linear (Z) vs. RH.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2008년도 춘계학술대회논문집
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• pp.393-396
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• 2008

Propellant consumption control for space launch vehicle can be achieved by propellant utilization system (PUS) and tank depletion system (TDS). In the course of developing new space launch vehicles, the main target of design is on reducing of space launch vehicle weight, which results in increasing both specific impulse and payload weight. The weights of space launch vehicles are generally allocated to structure, propulsion system, and propellants loaded. The quantity of propellants filled in propellant tanks may be estimated with the propellants actually consumed by propulsion system to complete its mission and the propellants left on-board at the time of engine shut-off. To minimize the remaining quantity of propellants on-board the supplying propellants' O/F ratio should be controlled from the certain time before engine shutdown. To control an O/F ratio, a control system, which accurately measures and compares the remainder of propellants in tanks and pipes, should be needed. This paper solely dedicates its contents to explore the merits and demerits of various level sensor, which is one of the important elements for PUS and TDS, and the transmission and control of signals within space launch vehicle.

• 센서학회지
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• 제8권2호
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• pp.108-114
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• 1999

표면 탄성파 가스센서는 소자의 크기가 작고, 값이 싸며, 가스에 대한 감도가 매우 높고 소자의 신뢰도가 높은 장점을 갖고 있다. 본 연구에서는, $LiTaO_3$ 단결정 압전기판 위에 이중지연선을 갖는 표면 탄성파 $NO_2$ 가스센서를 설계 및 제작하였다. 제조된 IDT의 커패시턴스는 79.3MHz의 주파수에서 326.34pF였다. 임피던스 매칭이 된 IDT의 반사손실은 79.3MHz의 주파수에서 최대인 -16.74dB로 나타났다. SAW 발진기를 성하여 고주파증폭기의 이득을 적절히 조정함으로써 안정된 발진이 이루어짐을 확인하였다. SAW 발진기의 $NO_2$ 가스에 대한 발진주파수의 변이는 28Hz/ppm으로 나타났다.

• 센서학회지
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• 제4권3호
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• pp.15-21
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• 1995

본 논문은 졸겔법에 의해 $TiO_{2}-V_{2}O_{5}$ 습도센서를 제조하고, 미세구조 및 결정구조를 분석하여 습도감지특성이 뛰어난 최적 제조조건을 찾았다. 그레인 크기는 $Ti^{4+}$ 사이트에 치환되는 $V^{5+}$비에 비례하여 증가하였다. X-선 회절분석 결과, $V_{2}O_{5}$비에 관계없이 $V^{5+}$피크는 확인할 수 없었다. 실험결과로부터 $V_{2}O_{5}$비가 1mol%, 열처리온도가 $700^{\circ}C$일때 가장 우수한 습도감지특성을 나타내었다. 시편의 정전용량은 주파수가 증가할수록 감소하였다.

• 한국전기전자재료학회논문지
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• 제16권12S호
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• pp.1232-1236
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• 2003

In this work, we fabricated a gas-sensing device based on porous silicon(PS), and its C-V properties were investigated for sensing alcohol vapor. The structure of the sensor consists of thin Au/oxidized PS/PS/P-Si/Al, where the p-Si is etched anisotropically to be prepared into a membrane-shape. We used alcohol gases vaporized from different alcohol (or ethanol) solutions mixed with pure water at 36$^{\circ}C$, similarly with an alcohol breath measurement to check drunk driving. As the result, I-V curves showed typical tunneling property, and C-V curves were shaped like those of a MIS (metal-insulator-semiconductor) capacitor, where the capacitance in accumulation was increased with alcohol vapor concentration.

• Journal of Power Electronics
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• 제16권3호
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• pp.823-831
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• 2016

A high-efficiency method is proposed to suppress magnetic core imbalance in phase-shifted full-bridge (PSFB) converters. Compared with conventional solutions, such as controlling peak current mode (PCM) or adding DC blocking capacitance, the proposed method has several advantages, such as lower power loss and smaller size, because the additional current sensor or blocking capacitor is removed. A time domain model of the secondary side is built to analyze the relationship between transformer core imbalance and cathode voltage of secondary side rectifiers. An approximate control algorithm is designed to achieve asymmetric phase control, which reduces the effects of imbalance. A 60 V/15 A prototype is built to verify the proposed method. Experimental results show that the numerical difference of primary side peak currents between two adjacent cycles is suppressed from 2 A to approximately 0 A. Meanwhile, compared with the PCM solution, the efficiency of the PSFB converter is slightly improved from 93% to 93.2%.

• 한국전기전자재료학회논문지
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• 제17권6호
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• pp.592-597
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• 2004

Porous silicon(PS) has received much attention as a sensitive material of chemical sensors because of its large internal surface area. In this work, we fabricated gas-sensing devices based on the porous silicon layer which could be applicable to the measurement of blood alcohol content(BAC), and estimated their electrical properties. The structure of the sensor is similar to an MIS (metal-insulator-semiconductor) diode and consists of thin Au/oxidized PS/PS/p-Si/Al, where the p-Si substrate is etched anisotropically to reduce the thickness. We measured C-V curves from two types of the samples with the PS layer treated by the different anodization current density of 60 or 100 mA/cm$^2$, in order to compare the sensitivity. As a result, the magnitude and variation of capacitances from the devices with the PS formed under the current density of 100 mA/cm$^2$ were found to be more detectable due to the larger internal surface.

• 한국컴퓨터정보학회논문지
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• 제17권8호
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• pp.107-114
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• 2012

본 논문에서는 인간의 가장 기본적이며 기초적인 운동인 걸음걸이로부터 검출할 수 있는 걸음 수 및 보행분석을 위해 전도성 섬유를 이용한 전기용량성 압력 센서를 깔창형태로 개발하였다. 개발된 깔창 형태의 센서는 보행시의 압력을 측정하여 보행신호를 검출하고, 검출된 신호를 이용하여 걸음 수 및 자세에 따른 압력 분포를 관찰하였다. 개발된 센서의 성능 검증을 위하여 국제규격의 표준분동을 사용하여 0 kg에서 100 kg 까지 10 kg씩 증가하여 무게에 따른 압력변화를 관찰하였으며, 그 결과 압력에 따라 비선형적인 특성을 가지고 캐패시턴스 값이 증가함을 보였다. 자세에 따른 압력변화 실험과 보행 횟수 검출비교를 위한 실험에서는 건강한 성인남성 다섯 명을 대상으로 4가지의 서로 다른 자세로 있을 때의 압력 변화를 관찰하였고, 보행 횟수 검출을 위해서는 시속 1 km/h와 4 km/h의 두 가지 걸음속도에서 3분 동안 걷게 하여 보행신호를 검출하였다. 상용 만보계 및 관찰자의 수계로 도출된 보수를 비교하였다. 기존의 상용 만보계는 저속(1 km/h)으로 걸었을 때 보수가 잘 측정되지 않은 반면 개발된 센서는 저속에서도 관찰자 수계대비 정확한 보수를 도출 할 수 있었다(상용 만보계 대비 평균 98.06 %의 인식률). 또한 자세에 따라 압력 값을 토대로 사용자의 자세를 모니터링 할 수 있음을 보였다. 본 연구는 향후 스마트폰과 무선 연동하는 스마트 보행관리 시스템을 개발하기 위한 기초연구이다.