• Journal of Electrical Engineering and Technology
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• 제11권6호
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• pp.1769-1776
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• 2016

For on-line partial discharge (PD) monitoring of rotating machines, a novel sensor is proposed, which can be installed on the power lead inside the terminal box of the machine. The sensor has been designed to have high capacitance, and minimal reflection of measured pulses. As a sensitivity of the sensor, transfer impedance $Z_t$ has been measured and compared to conventional coupler-type sensors. A simple method is presented for measuring $Z_t$ of coupler sensors, using a vector network analyzer and a practical lead-cable of rotating machine. Through this method, it became possible to measure the $Z_t$ of coupler sensors including the installation environment of them. The $Z_t$ of the proposed sensor is higher than that of same sized other conventional couplers at frequencies between 30 and 92 MHz. Another sensitivity test has been performed using a PD calibrator as a test pulse source. The proposed sensor has higher measured peak voltage than the conventional coupler type sensors when the same charges were input.

• 전기학회논문지P
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• 제55권1호
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• pp.26-30
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• 2006

For the purpose of developing capacitive humidity sensor having interdigital electrodes, interdigital electrode was modeled and simulated to obtain capacitance and sensitivity as a function of geometric parameters like the structural gap and thickness. For the development of ASIC, switched capacitor signal processing circuits for capacitive humidity sensor were designed and simulated by Cadence using $0.25{\mu}m$ CMOS process parameters. The signal processing circuits are composed of amplifier for voltage gain control, and clock generator for sensor driving and switch control. The characteristics of the fabricated sensors are; 1) sensitivity is 9fF/%R.H., 2) temperature coefficient of offset(TCO) is $0.4%R.H./^{\circ}C$, 3) nonlinearity is 1.2%FS, 4) hysteresis is 1.5%FS in humidity range of $3%R.H.{\sim}98%R.H.$. The response time is 50 seconds in adsorption and 70 seconds in desorption. Fabricated process used in this capacitive humidity sensor having interdigital electrode are just as similar as conventional IC process technology. Therefore this can be easily mass produced with low cost, simple circuit and utilized in many applications for both industrial and environmental measurement and control system, such as monitoring system of environment, automobile, displayer, IC process room, and laboratory etc.

• 한국공작기계학회논문집
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• 제11권2호
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• pp.17-23
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• 2002

A cylindrical capacitance-type spindle displacement sensor was developed and its effectiveness as a system to monitor cutting forces during hard turning was tested in this research. The sensor was installed between the face of spindle cover and the chucking element and measured pure radial motion of the spindle under the condition with presence of roundness error at measured surface. To prove the effectiveness of the developed system hard aiming tests using ceramic inserts and tool steel as workpiece were conducted. The workpiece was hardened up to 65 Rc. The variations of pure radial motion of the spindle ware measured during the cutting tests. The signals from the sensor showed the same pattern of cutting force variations from the tool dynamometer due to the progress of tool wear. As the flank wear of the ceramic tool increased both static component of cutting forces and the amount of center shift of spindle orbit increased, Results from the research showed that the developed sensor could be utilized as an effective and cheap on-line sensing device to monitor cutting conditions and tool performance in the un-manned machining center.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제50권3호
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• pp.144-148
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• 2001

For the purpose of developing capacitive humidity sensor having interdigit electrodes, interdigit electrode was modeled and simulated to obtain capacitance and sensitivity as a function of geometric parameters like the structural gap and thichness. For the development of ASIC, switched capacitor signal conditioning circuits for capacitive humidity sensor were designed and simulated by cadence using 0.25um CMOS process parameters. The signal conditioning circuits are composed of amplifier for voltage gain control, and clock generator for sensor driving and switch control The characteristics of the fabricated sensors are; 1) sensitivity is 9fF/%R.H., 2) temperature coefficient of offset(TCO) is 0.4%R.H./$^{\circ}C$, 3) nonlinearity is 1.2%FS, 4) hysteresis is 1.5%FS in humidity range of 3%R.H. ${\sim}$ 98%R.H.. The response time is 50 seconds in adsorption and 70 seconds in desorption. Fabricated process used in this capacitive humidity sensor having interdigit electrode are just as similar as conventional IC process technology. Therefore this can be easily mass produced with low cost, simple circuit and utilized in many applications for both industrial and environmental measurement and control system, such as monitoring system of environment, automobile, displayer, IC process room, and laboratory etc..

• 로봇학회논문지
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• 제11권2호
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• pp.100-107
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• 2016

To realize a robot hand interacting like a human hand, there are many tactile sensors sensing normal force, shear force, torque, shape, roughness and temperature. This sensing signal is essential to manipulate object accurately with robot hand. In particular, slip sensors make manipulation more accurate and breakless to object. Up to now several slip sensors were developed and applied to robot hand. Many of them used complicate algorithm and signal processing with vibration data. In this paper, we developed novel principle slip sensor using separation layer. These two layers are moved from each other when slip occur. Developed sensor can sense slip signal by measuring this relative displacement between two layers. Also our principle makes slip signal decoupled from normal force and shear force without other sensors. The sensor was fabricated using the NBR(acrylo-nitrile butadiene rubber) and the Ecoflex as substrate and a paper as dielectric. To verify our sensor, slip experiment and normal force decoupling test were conducted.

• JSTS:Journal of Semiconductor Technology and Science
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• 제15권3호
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• pp.349-355
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• 2015

A fully-differential touch-screen sensing architecture is presented to improve noise immunity and also support most multi-touch events minimizing the number of amplifiers and their silicon area. A correlated double sampling function is incorporated to reduce DC offset and low-frequency noises, and a stabilizer circuit is also embedded to minimize inherent transient fluctuations. A prototype of the proposed readout circuit was fabricated in a $0.18{\mu}m$ CMOS process and its differential operation in response to various touch events was experimentally verified. With a 3.3 V supply, the current dissipation was 3.4 mA at normal operation and $140{\mu}A$ in standby mode.

• 전기학회논문지
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• 제58권10호
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• pp.1982-1988
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• 2009

$TiO_2$ films are fabricated using silk printing method. Heat treatment temperature of films is 600[$^{\circ}C$]. From the analysis of microstructure, grain size of $TiO_2$ films is about $0.2{\sim}0.3[{\mu}m]$. Thickness of films is 30.19[${\mu}m$] and surface uniformity of films is good. From the analysis of crystalline structure, $TiO_2$ films transform anatase phase to rutile phase. Capacitance of films increases according to increase relative humidity and decrease measuring frequency. Hysteresis characteristics of capacitance and impedance are best at 45[%RH] and 75[%RH] respectively. Impedance of films increases according to decrease measuring frequency.

• 전기전자학회논문지
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• 제22권2호
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• pp.356-361
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• 2018

고온에서 이용 가능한 수소 센서에 관해 연구하였다. 센서는 $Pd/Ta_2O_5/SiC$으로 구성된 MOS 구조로 제작되었으며, $Ta_2O_5$ 박막은 급속 열 산화법(RTO)법으로 형성하였다. 본 연구에서는 3가지 다른 패턴의 팔라듐(Pd) 전극으로 만든 센서를 제작하여, Pd 전극의 형태가 응답 특성에 미치는 영향을 고찰하였다. 그 결과, 센서는 Pd 전극의 채워진 면적이 클수록, 정전용량의 응답특성이 개선됨을 확인하였다.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2004년도 추계 기술심포지움 초록집
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• pp.3-4
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• 2004

A flexible Packaging scheme, which embedded chip packaging, has been developed using a thinned silicon chip. Mechanical characteristics of thinned silicon chips are examined by bending test and finite element analysis. Thinned silicon chips ($t<50{\mu}m$) are fabricated by chemical etching process to avoid possible surface damages on them. These technologies can be use for a real-time monitoring of blood pressure. Our research targets are implantable blood pressure sensor and its telemetric measurement. By winding round the coronary arteries, we can measure the blood pressure by capacitance variation of blood vessel.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.521-524
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• 2003

This paper is aimed to develop the circuit of a coil-type oil sensor packaged to the automotive engine oil monitoring the deterioration in the driving condition and let a driver notify the optimized time for the exchange of engine oil. By applying the principle which the deterioration of automotive engine oil can be expressed to the dielectric constant, the capacitance bridge circuit and the integrator circuit are designed and packaged to a coil-typed engine oil. In this study. the range of operating temperature of engine oil is experimentally recommended within 55$^{\circ}C$ for the stability of a sensor designed. It is concluded that the characteristics of output voltage converted from the dielectric constant are linearly distributed.