• Journal of Sensor Science and Technology
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• v.5 no.5
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• pp.63-68
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• 1996

In order to implement the integrated capacitive pressure sensors, which contains integrated interface circuits to detect the electrical output signal, several main factors that have a bad effect on the characteristics of sensors must be improved, such as parasitic capacitance effects, temperature/thermal drift, and the leakage current of a readout circuitry. This paper describes the novel design of the dedicated CMOS readout circuitry that is consists of two capacitance to frequency converters and 4 bit digital logic compensating circuits. Dividing the oscillation frequency of a sensing sensor by that of reference sensor, this circuit is designed to eliminate the thermal/temperature drift and the effect of the leakage currents, and to access a digital signals to obtain a high signal-to-noise(S/N)ratio. Therefore, the resolution of this circuit can be increased by increasing the number of the digital bits. Digital compensated circuits of this circuits, except for the C-F converters, are fabricated on a FPGA chip, and fundamental performance of the circuits are evaluated.

• Journal of Institute of Control, Robotics and Systems
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• v.19 no.1
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• pp.10-14
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• 2013

High precision machining technology has become one of the important parts in the development of a precision machine. Such a machine requires high precision positioning as well as high speed on a large workspace. For machining systems having a high precision positioning with a long stroke, it is necessary to examine the repeatability of reference position decision. Though ball-screw driven linear stages equipped linear scale have high precision feed drivers and a long stroke, they have some limitations for reference position decision if they have not equipped the accurate home sensor. This study is performed to experimentally examine the repeatability for home position decision of a magnetic sensor as a home switch of ball-screw driven linear stage by using capacitance probe.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.613-618
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• 2004

CCS was developed and applied to rotating machines because of accurately measuring the spindle error motion without significant efforts. However, researches on the CCS have been focused on ideal cases where circumferential gaps were ignored. This paper presents the effects of circumferential gaps and proposes an optimal CCS considering the circumferential gaps. First, electrostatic analysis of the CCS that includes the circumferential gaps is performed using the FEM, and an additional capacitance due to the circumferential gap can be approximated as an equivalent extended sensor length. Second, a mathematical model of the CCS considering the circumferential gaps is derived, and the optimal CCS is determined through minimization of the weighted error amplification factor. Finally, two CCSs, both considering and ignoring the circumferential gaps, are built, and the effectiveness of the optimal design is verified through simulation and experiment.

• Proceedings of the KIEE Conference
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• 2000.07a
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• pp.128-130
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• 2000

This paper develops the deterioration detecting sensor in oil to monitor and diagnose oil-filled transformer more effectively. The on-line inspection of the oil-filled transformers used the temperature, the changes of the capacitance, the $tan{\delta}$ in oil. This sensor was designed based on the concentric cylindrical type so that it could be placed inside of the oil-filled transformer. And comparing to the existing system, it was proven to be appropriate. Establishment of the proposed sensor helps to build the confidence in monitoring of the oil-filled transformers.

• Proceedings of the Korean Institute of Intelligent Systems Conference
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• 2004.10a
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• pp.515-520
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• 2004

In this paper, a passive telemetry RF capacitive humidity sensor system using a RLSE(Recursive Least Square Estimation) technique is proposed. To overcome these trouble problems such as a power limitation and a estimation complexity that the general passive telemetry sensor system including It chip has, the principle of inductive coupling was applied to the modeling of a passive telemetry RF capacitive humidity sensor system and its capacitance was estimatedd by the RLSE algorithm. Specially, by introducing the optimal forgetting factor, we showed that the accuracy of its estimation was improved even in the time varying system and also the convergence time was reduced.

• Journal of Power System Engineering
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• v.13 no.1
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• pp.65-71
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• 2009

To address the need for new intelligent sensing, this paper introduces nano sensors made of carbon nanotube (CNT) composites and presents their preliminary experiments. Having smart material properties such as piezoresistivity, chemical and bio selectivity, the nano composite can be used as smart electrodes of the nano sensors. The nano composite sensor can detect structural deterioration, chemical contamination and bio signal by means of its impedance measurement (resistance and capacitance). For a structural application, the change of impedance shows specific patterns depending on the structural deterioration and this characteristic is available for an in-situ multi-functional sensor, which can simultaneously detect multi symptoms of the structure. This study is anticipated to develop a new nano sensor detecting multiple symptoms in structural, chemical and bio applications with simple electric circuits.

• Proceedings of the KIEE Conference
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• 1997.07e
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• pp.1871-1873
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• 1997

The conventional current transformers are often take faults and out of order that for detect to over current of electric power lines because electromagnetic interference. But, it is possible to implement protection relay of high reliability using optical magnetic field sensor which are immunity and small size. The optical magnetic field sensor is possible to rapidly detect to over current and recover when electric power line have fault. And it is not necessary to make with capacitance of electric power lines as optical magnetic field sensor is have linearity from 0 to about 20kA. In this study, we designed and constructed compensative feedback circuit in order to minimize of optical power intensity variation with environ- mental variations(temperature, drive current) of light source. And this system have highest optical advantages and reliability.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.29 no.12
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• pp.809-813
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• 2016

We investigated a SiC-based hydrogen gas sensor with MIS (metal-insulator-semiconductor) structure for high temperature applications. The sensor was fabricated by $Pd/TiO_2/SiC$ structure, and a thin titanium dioxide ($TiO_2$) layer was exploited for sensitivity improvement. In the experiment, dependences of I-V characteristics and capacitance response properties on hydrogen gas concentrations from 0 to 2,000 ppm were analyzed at room temperature to $400^{\circ}C$. As the result, our sensor using $TiO_2$ dielectric layer showed possibilities with regard to use in hydrogen gas sensors for high-temperature applications.

• Transactions on Electrical and Electronic Materials
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• v.7 no.4
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• pp.184-188
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• 2006

This work describes efforts in the fabrication and testing of robust microelectromechanical systems (MEMS). Robustness is typically achieved by investigating non-silicon substrates and materials for MEMS fabrication. Some of the traditional MEMS fabrication techniques are applicable to robust MEMS, while other techniques are drawn from other technology areas, such as electronic packaging. The fabrication technologies appropriate for robust MEMS are illustrated through laminated polymer membrane based pressure sensor arrays. Each array uses a stainless steel substrate, a laminated polymer film as a suspended movable plate, and a fixed, surface micromachined back electrode of electroplated nickel. Over an applied pressure range from 0 to 34 kPa, the net capacitance change was approximately 0.14 pF. An important attribute of this design is that only the steel substrate and the pressure sensor inlet is exposed to the flow; i.e., the sensor is self-packaged.

• Proceedings of the KIEE Conference
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• 2002.06a
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• pp.178-183
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• 2002

In this paper, the capacitive sensor which can detect the continuous position of liquid is proposed. The proposed sensor make up copper rod's defect which are oxidized in liquid and float switch's defect which are tired of continuous movements. This sensor make use of what capacitance is varying due to quantity and kind of dielectric in the plane gap. The operating principle of the sensor and the amplifying methode of detecting signal and the methode of apply in computer control system are presented in this paper.