• 대한전자공학회논문지SD
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• 제48권1호
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• pp.1-6
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• 2011

본 논문에서는 미세피치 프로브 카드 제작을 위한 S 모양의 일체형 외팔보 프로브 형성방법에 대하여 기술하였다. 마세 피치 프로브를 위하여 Deep RIE etching을 이용하여 실리콘 트렌치 안에 일체형 프로브 빔과 탑을 형성하는 방법을 사용하였고, 피라미드 팁의 형성을 위하여 KOH 및 TMAH 습식식각을 이용하였으며, 습식식각시 방향성을 가지는 실리콘 웨이퍼에서도 휘어진 형태의 프로브 빔을 형성할 수 있는 건식 식각 및 습식식각 방법을 제시하였다. 따라서 제작된 외팔보 형태의 프로브는 디렘(DRAM), 플레시 메모리 (Flash memory) 용 프로브 카드 제작에 사용될 뿐만 아니라 RF 소자용 프로브 카드, 아이씨 테스트 소켓 (IC test socket)용 프로브 탐침에도 사용 될 것이다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1609-1613
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• 2003

This research focused on the development of automatically exclusive production equipment of corrupad as changing manual system into automatic system to increase the output. Therefore the minimization of the problem of the rewinding mechanism with eccentric cantilever structure is key to the achievement of the high performance for automation production. Proto-type corrupad rewinding machine is manufactured after considering the effect of the rotational vibration and natural frequency of the structure of machine by using 3D design packages such as ADAMS and I-deas. For evaluating the performance of the proto-type machine, simulations of dynamic and static characteristics using 3D design packages, a series of modal tests by accelerometer and measurements of dynamic behavior by high-speed camera for rewinding part, were carried out. As a result, the proto-type machine was not affected with the rotational vibration. Whirling error of eccentric cantilever structure in driving is small. Therefore the machine developed is most suitable to produce corrupad automatically. However reinforcement of the structure in axial direction is required due to so vibration in that direction.

• 한국정밀공학회지
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• 제28권10호
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• pp.1153-1158
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• 2011

Roll-to-roll process is an emerging mass production method for printed and flexible electronics such as touch screen panel, RFID tag, thin film solar cell, and flexible display due to its high throughput. High precision in printing and coating is required to apply functional materials onto substrate. For such reason, every part of the roll-to-roll equipment needs to be precisely fabricated and to retain its precision under regular operation. In this article, the precision of cantilever type idler roller and a novel method to mitigate its deflection under web tension loading are discussed and the method is verified using both the numerical and the experimental works. The proposed method improves the structural rigidity of cantilever type roller whose advantages, such as low capital cost and high web path configurability, are maintained.

• 대한소아치과학회지
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• 제48권2호
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• pp.229-236
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• 2021

하악 제1대구치의 맹출 장애는 매우 드물지만, 발생할 경우 교합 발육에 다양한 문제를 초래할 수 있으므로, 하악 제1대구치의 맹출 장애의 조기 진단과 치료는 매우 중요하다. 이번 연구의 목적은 맹출 장애를 가진 하악 제1대구치의 두 증례에 대한 치료 방법을 제시하는 것이다. 하악 제2유구치를 고정원으로 하는 cantilever-type의 spring을 추가한 견인 장치를 적용하여 매복된 제1대구치 견인을 시행했다. 따라서, 건전한 제2유구치가 존재하는 환자에서 이 장치가 짧은 시간 안에 매복된 하악 제1대구치의 정상적인 맹출을 유도할 수 있음을 확인 할 수 있었다.

• 센서학회지
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• 제26권2호
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• pp.107-113
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• 2017

Energy source of a piezo-electric harvester is vibration. Sources of vibration are machineries operated with high frequencies, constructions and people operated with low frequencies and etc. In this study, we tried to figure out power generation properties over vibrations upon angles of a piezo-cantilever for applying them to movements of the construction and/or people, which are vibration sources at low frequencies. A uni-morph cantilever with a $59mm{\times}29mm{\times}0.2mm$ piezo-electric element attached on a $71mm{\times}46mm{\times}0.25mm$ copperplate was used. A spring was attached to the lower side of the cantilever and a mass was attached on the opposite side. Also, a structure with a specific angle which is an angle in between the ground and the cantilever was prepared and then, connected to a spring or the cantilever. Then, this structure was divided into the A-type and B-type and excited in the direction of z- axis. After that, the angle between the ground and the cantilever was changed and excited by 1 to 10 Hz upon the existence of a spring and/or a mass to compare power generation properties.

• 한국지반공학회:학술대회논문집
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• 한국지반공학회 2000년도 가을 학술발표회 논문집
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• pp.87-94
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• 2000

This paper concerns the distribution of earth pressures on a cantilever wall with unattached reinforcements in the backfill. This type of walls is different from the existing reinforced earth walls in that unattached reinforcements are placed in the backfill of rigid retaining wall such as gravity wall and cantilever wall, instead of connecting reinforcements to the wall segments. Two large-scale prototype tests have been carried out with a 4m high cantilever wall; one with unreinforced backfill, the other with unattached strips in the backfill. The reinforcing effect of unattached strips are discussed based on the earth pressure distribution measured in two large-scale prototype tests. Also, the comparison between measured and predicted earth pressure on a wall with unattached strips are discussed herein to confirm the validity of analytical prediction.

• 정보저장시스템학회:학술대회논문집
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• 정보저장시스템학회 2005년도 추계학술대회 논문집
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• pp.22-25
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• 2005

In this research, a wafar-level transfer method of cantilever array on a conventional CMOS circuit has been developed for high density probe-based data storage. The transferred cantilevers were silicon nitride ($Si_3N_4$) cantilevers integrated with poly silicon heaters and piezoelectric sensors, called thermo-piezoelectric $Si_3N_4$ cantilevers. In this process, we did not use a SOI wafer but a conventional p-type wafer for the fabrication of the thermo-piezoelectric $Si_3N_4$ cantilever arrays. Furthermore, we have developed a very simple transfer process, requiring only one step of cantilever transfer process for the integration of the CMOS wafer and cantilevers. Using this process, we have fabricated a single thermo-piezoelectric $Si_3N_4$ cantilever, and recorded 65nm data bits on a PMMA film and confirmed a charge signal at 5nm of cantilever deflection. And we have successfully applied this method to transfer 34 by 34 thermo-piezoelectric $Si_3N_4$ cantilever arrays on a CMOS wafer. We obtained reading signals from one of the cantilevers.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회B
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• pp.3131-3135
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• 2008

This paper presents an energy harvester using piezoelectric elements that is a kind of generator which converts the mechanical power to the electric one using windmill system with many PZT actuators. In this study, low frequency characteristics of the cantilever-type piezoelectric actuator are experimentally investigated. Advantages of the cantilever use are to take a very large displacement and to improve the endurance of the PZT element. The material of cantilever is an aluminum and three kinds of cantilever of which size is $150[mm]{\times}20[mm]{\times}1.5[mm]$, $170[mm]{\times}20[mm]{\times}1.5[mm]$ and $190[mm]{\times}20[mm]{\times}1.5[mm]$ were experimented, respectively. The cantilever was fixed on the vibrator. The characteristics of frequency and mass variation of cantilever end part such as 0[g], 5[g], 10[g] are investigated. Maximum voltage was outputted at the condition of $150[mm]{\times}20[mm]{\times}1.5[mm]$ and 10[g] of mass. It was confirmed that the lower natural frequency at the larger length of cantilever and at the bigger of mass is gotten.

• 한국세라믹학회:학술대회논문집
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• 한국세라믹학회 2003년도 춘계총회 및 연구발표회 초록집
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• pp.54.1-54
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• 2003

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 춘계학술대회 논문집
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• pp.257-258
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• 2009