• Journal of the Korean Applied Science and Technology
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• v.32 no.2
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• pp.232-239
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• 2015

In this paper, we study the dry transfer technology utilizing PDMS (Polydimethylsiloxane) stamp of a large single-layer graphene grown on Cu-foil as catalytic metal by using Chemical Vapor Deposition (CVD). By changing the surface property of the target substrate through $UV/O_3$ treatment, we can transfer the graphene on the target substrate while minimizing mechanical damages of graphene layer. Multi-layer (1~4 layers) graphene was stacked on $SiO_2/Si$ wafer successfully by repeating thetransfer method/process and then optical transmittance and sheet resistance of graphene layers have been measured as a quality assessment.

• Journal of the Korean Applied Science and Technology
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• v.30 no.3
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• pp.423-430
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• 2013

Carbon coils could be synthesized using $C_2H_2/H_2$ as source gases and $SF_6$ as an incorporated additive gas under thermal chemical vapor deposition (CVD) system. Prior to the carbon coils deposition reaction, two kinds of samples having different combination of Ni catalyst and substrate were employed, namely, a commercially-made $Al_2O_3$ ceramic boat with Ni powders and a commercially-made $Al_2O_3$ substrate with Ni layer. By using a commercially-made $Al_2O_3$ ceramic boat, the synthesis of carbon coils could be enhanced as much as 10 times higher than that of $Al_2O_3$ substrate. Furthermore, the dominant formation of the microsized carbon coils could be obtained by using $Al_2O_3$ ceramic boat. The surface roughness of the supporting substrate of $Al_2O_3$ ceramic boat was understood to be associated with the large scale synthesis of carbon coils as well as the dominant formation of the larger-sized, namely the microsized carbon coils.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.20 no.3
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• pp.133-140
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• 2010

Carbon fiber has many potential applications in a wide array of fields of solar cell, fuel cell, batteries, and polymer matrix composites due to an exceptional mechanical properties and chemical stability. In this study, the effects of catalysts on the property of carbon nanostructures grown on the carbon fiber were systematically investigated. The surface treatment of carbon fiber and catalysts synthesis for carbon nanostructures growth were carried out by one-pot ELP method and thermal CVD, respectively. The surface morphology and crystal structure of carbon nanostructures were examined using a field emission scanning electron microscope and transmission electron microscope. Depending on the type of catalysts and the molar ratio, various types of carbon nanostructures like carbon nanotube, carbon nanofilament, carbon nanospring and etc. were synthesized on the surface of carbon fibers surface.

• Journal of the Korean Applied Science and Technology
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• v.21 no.4
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• pp.289-299
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• 2004

Multi-walled carbon nanotubes (CNTs) were prepared by microwave plasma chemical vapor deposition (MPCVD) using various combination of binary catalysts and methane precursor. The maximum yield (10.3 %) of CNTs was obtained using a methane-hydrogen-nitrogen mixture with volume ratio of 1:1:2 at 1000 W of microwave power. As the microwave power increased up to 1000 W, the deposition yield of CNTs raised from 4.1 % to 10. 3 %. However, the prepared CNTs at 800 W showed the more crystalline structure than those prepared at 1000 W. The prepared CNTs over different binary catalysts had various structural conformations such as aligned cylinder, bamboo, and nanofibers. The Id/Ig value of CNTs over$Fe-Fe/Al_2O_3, $Co-Co/Al_2O_3, and $Co-Cu/Al_2O_3 were in the range of 0.89${\sim}$0.93. Among the various binary catalysts used, $Fe-Co./Al_2O_3 showed the highest yield.

• Journal of radiological science and technology
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• v.27 no.2
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• pp.45-50
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• 2004

Synthesis diamond films have been deposited on the molybdenum substrates using an microwave plasma enhanced chemical vapor deposition method. The effects of deposition time, surface morphology, infrared transmittance and Raman scattering have been studied. Diamond deposited on molybdenum substrate for 100 hours by MW plasma CVD from $CH_4-H_2-O_2$ gas mixture had good crystallity with $100[{\mu}m]$ thickness needed for radiation detector. Diamond radiation detector of M-I-M type was made and the current of radiation detector was increased by increasing X-ray dose.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.385.2-385.2
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• 2014

그래핀은 전기적, 광학적, 역학적, 열적 특성 등이 아주 좋은 소재이다. Thermal Chemical Vapor Deposition (T-CVD) 장비를 이용 저 진공, 고온에서 CH4과 H2를 가스를 사용하여 그래핀을 합성을 하였다. 그래핀은 탄소만으로 이루어진 2차원 층상구조를 가지고 있다. 촉매 금속 위에서 합성이 이루어지기에 합성된 그래핀을 바로 다른 응용하기에는 어려움이 따른다. 따라서 촉매 금속에서 그래핀을 분리하여 원하는 곳으로 옮기는 과정이 필요한데, 이를 전사공정이라 한다. 최근 전기분해를 이용하여 발생되는 수소 버블을 사용하여 그래핀을 촉매로 사용되는 금속으로부터 분리해내는 Electrochemical Delamination(ED) 전사방식이 소개가 되었다. 이러한 전사 방식의 장점은 촉매기판을 제거하지 않음으로써, 다시 재활용이 가능하고, 공정에 필요한 시간이 짧다. 또한 표면에서 직접적으로 분리하는 방식이기에 촉매 금속의 양면을 사용이 가능하다. 이러한 ED방식의 장점이 있기에 공정의 최적 조건을 잡기 위하여 변수들을 바꾸어가면서 실험을 하였다. 전사된 그래핀은 표면을 광학현미경으로 확인하였고, 라만 분광기를 사용하여 라만 스펙트럼과 기본적인 전기특성을 확인하여 특성을 평가하면서, 기존의 전사방식을 사용한 그래핀 샘플과 비교분석 하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.151-152
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• 2007

탄소나노튜브(CNTs)는 우수한 물리적, 화학적, 기계적 특성으로 다양한 분야에서 연구가 진행 되고있다. 특히, field emission displays (FEDs)로의 응용을 위해서는 기본적으로 sodalime glass 위에 직접 CNTs를 성장시켜야 하며, 소자 응용을 위해 기판인 sodalime glass를 왜곡시키는 온도보다 낮은 온도에서 CNT의 수직 성장이 이루어져야 한다. 본 연구에서는 Hot-filament plasma enhanced chemical vapor deposition (HF-PECVD)를 이용하여 합성온도를 400, 450, 500, $550^{\circ}C$로 변화시켰으며 촉매 층인 Ni의 두께를 5~40 nm까지 조절하여 탄소나노튜브를 합성하였다. 저온에서 합성된 탄소나노튜브는 FE-SEM을 이용하여 성장 형태 및 표면 특성을 확인하였으며, 미세구조는 HR-TEM을 이용하여 확인하였다.

• Journal of the Korean Vacuum Society
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• v.6 no.2
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• pp.151-158
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• 1997

Nitrogen incorporated diamond-like carbon films were deposited by r.f. glow discharge of mixtures of benzene and ammonia gases. Mechanical properties, composition and atomic bond structure were investigated when the fraction of ammonia increases from 0 to 0.79 and the negative self bias voltage of cathode from 100 to 900 V. Both the residual compressive stress and the hardness decrease from 1.7 to 1.0 GPa and from 2750Kgf/$\textrm{mm}^2$ to 1700Kgf/$\textrm{mm}^2$, respectively. In addition to hydrogen, triply bonded nitrogens also play a role of teminal sites of the three dimensional atomic bond network. By considering the hydrogen concentration and the nitrogen bond characteristics, it can be shown that the mechanical properties of the films are determined by the content of three dimensional inter-links of $sp^2$ clusters. Although the mechanical properties are affected by the nitrogen addition, its depedence on the negative bias voltage is qualitatively identical to that of pure diamond-like carbon films.

• Korean Journal of Materials Research
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• v.10 no.9
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• pp.648-655
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• 2000

Synthesis of the crystalline film was investigated under the diamond growth condition with altering the addition of the nitrogen from 0% to 95%. With increasing the nitrogen concentration, surface morphology of the film was changed from the diamond film with {100} growth plane to the non-faceted diamond film with nano-scale grains. It also showed that the deposition of the diamond film could be synthesized using only methane and nitrogen gases without hydrogen gas. Separated particles with diamond structure showed an octahedral shaped I the nitrogen ranges between 30% and 80%, and newly formed hexagonal crystals are observed when substrate temperature with diamond structure, however, also identify that the hexagonal crystal was SiCN composite composed of Si, C and N atoms.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.124-124
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• 2000

다이아몬드에 버금가는 높은 경도뿐만 아니라 높은 화학적 안정성 및 열전도성 등 우수한 물리화학적 특성을 가진 입방정 질화붕소(cubic boron nitride)는 마찰.마모, 전자, 광학 등의 여러 분야에서의 산업적 응용이 크게 기대되는 재료이다. 특히 탄화물형성원소에 대해 안정하여 철계금속의 가공을 위한 공구재료로의 응용 또한 크게 기대된다. 이 때문에 각종의 PVD, CVD 공정을 이용하여 c-BN 박막의 합성에 대한 연구가 광범위하게 진행되어 많은 성공사례들이 보고되고 있다. 그러나 c-BN 박막의 유용성에도 불구하고 아직 실제적인 응용이 이루어지지 못한 것은 c-BN 박막의 증착직후 급격한 박리현상 때문이다. 본 연구에서는 평행자기장을 부가한 ME-ARE(Magnetically Enhanced Activated Reactive Evaporation)법을 이용한 c-BN 박막의 합성에서 적용한 증착공정 인자들의 변화에 따른 박리특성 고찰과 함께 다층박막화 및 제 3원소 혼입 방법을 적용하여 박리특성 향상 정도를 조사하였다. BN 박막합성은 전자총에 의해 증발된 보론과 (질소+아르곤) 플라즈마의 활성화반응증착(Activated Reactive Evaporation)에 의해 이루어졌다. 기존의 ARE 장치와 달리 열음극(got cathode)과 양극(anode) 사이에 평행자기장을 부가하여 플라즈마의 증대시켜 반응효율을 높였다. 합성실험용 모재로는 p-type으로 도핑된 (100) Si웨이퍼를 30$\times$40mmzmrl로 절단 후, 10%로 희석된 완충불산용액에 10분간 침적하여 표면의 산화층을 제거한 후 사용하였다. 박막실험실에서의 주요공정변수는 기판바이어스 전압, discharge 전류, Ar/N2가스유량비이었다. 합성된 박막의 결정성 분석을 FTIR을 이용하였으며, BN 박막의상 및 미세구조관찰을 위해 투과전자현미경(TEM;Philips EM400T) 분석을 병행하였고, 박막의 기계적 물성 평가를 위해 미소경도를 측정하였다. 박리특성의 고찰은 대기중에서의 자발적 박리가 일어나 90%이상의 박리가 진행된 시점까지의 시간을 측정하였고, 증착직후 박막의 잔류응력 변화와 연관하여 고찰해 보았다.