• 전기학회논문지
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• 제56권1호
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• pp.132-138
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• 2007

Carbon nanotubes (CNTs) arc grown on Ni catalysts employing an inductively-coupled plasma chemical vapor deposition (ICP-CVD) method. The structural and field-emissive properties of the CNTs grown are characterized in terms of the substrate-bias applied. Characterization using the various techniques, such as field-omission scanning electron microscopy (FESEM), high-resolution transmission electron microscopy (HRTEM), Auger spectroscopy (AES), and Raman spectroscopy, shows that the structural properties of the CNTs, including their physical dimensions and crystal qualities, as well as the nature of vertical growth, are strongly dependent upon the application of substrate bias during CNT growth. It is for the first time observed that the provailing growth mechanism of CNTs, which is either due to tip-driven growth or based-on-catalyst growth, may be influenced by substrate biasing. It is also seen that negatively substrate-biasing would promote the vertical-alignment of the CNTs grown, compared to positively substrate-biasing. However, the CNTs grown under the positively-biased condition display a higher electron-emission capability than those grown under the negatively-biased condition or without any bias applied.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2008년도 제39회 하계학술대회
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• pp.1220-1221
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• 2008

Submicron-sized conical-type tungsten(W) field-emitters based on carbon nanotubes(CNTs) are fabricated with the configuration of CNTs/catalyst(Ni)/buffer(Al/Ni/TiN)/W-tip. This study focuses on elucidating how the Al/Ni/TiN stacked buffer layer affects the structural properties of CNTs and the electron-emission characteristics of CNT-emitters. Field-emission scanning electron microscopy(FESEM), high-resolution transmission electron microscopy(HRTEM), and x-ray photoelectron spectroscopy(XPS) are used to monitor the nanostructures, surface morphologies, chemical bonds of all the catalysts and CNTs grown. The crystalline structure of CNTs is also characterized by Raman spectroscopy. Furthermore, the measurement of field-emission characteristics for the field-emitters fabricated shows that the emitter using the Al/Ni/TiN stacked buffer reveals the excellent performances.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권1호
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• pp.782-785
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• 2007

We studied the effect of current-aging on field emission from carbon nanotubes field emitter arrays (CNT-FEAs) selectively patterned by the resist-assistan tpatterning(RAP) process. After sustaining the electric field when starting emission current density $(J_s)$ is $0.1\;mA/cm^2$ during 40 hrs, it was observed that the field emission property and uniformity were remarkably improved due to the elimination of oxygen atom and thus the reconstruction of carbon bonding at the tip of CNTs during field emission.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 추계학술대회 논문집 전기물성,응용부문
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• pp.36-37
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• 2006

Both negative and positive substrate bias effects on the structural properties and field-emission characteristics are investigated. carbon nanotubes (CNTs) are grown on Ni catalysts employing an inductively-coupled plasma chemical vapor deposition (ICP-CVD) method. Characterization using various techniques, such as field-emission scanning electron microscopy (FESEM), high-resolution transmission electron microscopy (HRTEM), Auger spectroscopy (AES), and Raman spectroscopy, shows that the physical dimension as well as the crystal quality of CNTs grown can be changed and controlled by the application of substrate bias during CNT growth. It is for the first time observed that the prevailing growth mechanism of CNTs, which is either due to tip-driven growth or based-on-catalyst growth, may be influenced by substrate biasing. It is also seen that negative biasing would be more effectively role in the vertical-alignment of CNTs compared to positive biasing. However, the CNTs grown under the positively bias condition display much better electron emission capabilities than those grown under negative bias or without bias. The reasons for all the measured data regarding the structural properties of CNTs are discussed to confirm the correlation with the observed field-emissive properties.

• 반도체디스플레이기술학회지
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• 제12권2호
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• pp.1-6
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• 2013

The effects of interlayer formation and thermal treatment on the field-emission properties of carbon nanotubes (CNTs) were investigated. The CNTs were prepared on tungsten (W) micro-tip substrates using the electrophoretic deposition (EPD) method. The interlayers, such as aluminum (Al) and hafnium (Hf) were coated on the W-tips prior to CNT deposition and after the deposition of CNTs all the species were thermally treated at $700^{\circ}C$ for 30 min. The field-emission properties of CNTs were significantly improved by thermal treatment. The threshold electric field for igniting the electron emission was decreased and the emission current was increased. The Raman spectroscopy results indicated that this was attributed mainly to the enhancement of CNTs by thermal treatment. Also, the CNTs deposited on the interlayers showed the remarkably improved results in the long-term emission stability, especially when they were thermally treated. The X-ray photoelectron spectroscopy (XPS) measurement confirmed that this was resulted from the formation of the additional cohesive forces between the CNTs and the underlying interlayers.

• 한국진공학회지
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• 제16권2호
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• pp.128-133
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• 2007

본 연구에서는 탄소나노튜브의 성장특성을 결정짓는 여러 요소 중 한가지인 촉매층 두께의 변화에 따라서 형성되어지는 탄소 나노튜브의 형태 변화를 관찰하였다. Ni 촉매층은 마그네트론 스퍼터링법을 이용하여 증착하였으며, Ni 촉매층의 두께는 $20{\sim}80\;nm$의 범위에서 설정하였다. 두께에 따른 Ni 촉매층 기판을 hot-filament 플라즈마 화학기상 증착(HF-PECVD) 장치를 이용하여 탄소나노튜브를 합성하였으며, 성장되어진 탄소나노튜브의 성분분석은 에너지 분산형 X-선 측정기(EDS)를 통해 분석하였고, 고배율 투과전자현미경(HRTEM) 분석과 전계방사 주사전자현미경(FESEM) 분석을 통해 성장된 탄소나노튜브 성장 형태를 관찰하였다. 그 결과로써, 고배율 투과전자현미경(TEM) 분석을 통해서는 탄소나노튜브는 내부가 비어있으며, 다중벽으로 구성되어 있는 것을 관찰하였고, 탄소나노튜브 상부에 니켈 금속이 포함된 것을 확인하였다. 이것은 분산형 X-선 측정을 통해 탄소나노튜브의 구성성분이 접착층인 Ti, 촉매층인 Ni 그리고 탄소(C)로 이루어졌음을 다시한번 확인하였으며. 성장형태에서도 알 수 있듯이 탄소나노튜브 성장 전에 행해여지는 전처리는 촉매층의 입자를 변화시키고 변화된 촉매층의 표면은 다른 형태의 탄소나노튜브를 성장시킴을 알 수 있었다. 결과적으로, 40 mn의 촉매층을 지니는 기판에서 가장 좋은 형태를 나타내는 탄소 탄소나노튜브가 성장되었음을 알 수 있다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 Techno-Fair 및 추계학술대회 논문집 전기물성,응용부문
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• pp.90-91
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• 2007

Nano-sized conical-type tungsten(W) field-emitters based on carbon nanotubes(CNTs) are fabricated with the configuration of CNTs/catalyst/buffer/W-tip by adopting various buffer layers, such as TiN, Al, Al/TiN, and Al/hi/TiN. This study focuses on elucidating how the buffer layers affect the structural properties of CNTs and the electron-emission characteristics of CNT-emitters. Field-emission scanning electron microscopy(FESEM) and high-resolution transmission electron microscopy(HRTEM) are used to monitor the nanostructures and surface morphologies of all the catalysts and CNTs grown. The crystalline structure of CNTs is also characterized by Raman spectroscopy. Furthermore, the measurement of field-emission characteristics for all the field-emitters fabricated shows that the emitter using the Al/Ni/TiN stacked buffer reveals the most excellent performances, such as maximum emission current of $202{\mu}A$, threshold field of 2.08V/${\mu}m$, and long-term (up to 24h) stability of emission current.