Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2008.07a
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- Pages.1220-1221
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- 2008
Fabrication of a nano-sized conical-type tungsten field-emitter based on carbon nanotubes
탄소나노튜브를 이용한 텅스텐 나노팁 전계방출기 제작
- Park, Chang-Kyun (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
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Kim, Jong-Pil
(Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
- Kim, Young-Kwang (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
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Park, Jin-Seok
(Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University)
- 박창균 (한양대학교 전자전기제어계측공학과) ;
-
김종필
(한양대학교 전자전기제어계측공학과) ;
- 김영광 (한양대학교 전자전기제어계측공학과) ;
-
박진석
(한양대학교 전자전기제어계측공학과)
- Published : 2008.07.16
Abstract
Submicron-sized conical-type tungsten(W) field-emitters based on carbon nanotubes(CNTs) are fabricated with the configuration of CNTs/catalyst(Ni)/buffer(Al/Ni/TiN)/W-tip. This study focuses on elucidating how the Al/Ni/TiN stacked buffer layer affects the structural properties of CNTs and the electron-emission characteristics of CNT-emitters. Field-emission scanning electron microscopy(FESEM), high-resolution transmission electron microscopy(HRTEM), and x-ray photoelectron spectroscopy(XPS) are used to monitor the nanostructures, surface morphologies, chemical bonds of all the catalysts and CNTs grown. The crystalline structure of CNTs is also characterized by Raman spectroscopy. Furthermore, the measurement of field-emission characteristics for the field-emitters fabricated shows that the emitter using the Al/Ni/TiN stacked buffer reveals the excellent performances.
Keywords