• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2002.11a
• /
• pp.190-194
• /
• 2002

In this study, the etching of Au thin films have been performed in an inductively coupled CF4/Cl2/Ar plasma. The etch properties were measured as the CF4 adds from 0 % to 30 % to the Cl2/(Cl2 + Ar) gas mixing ratio of 0.2. Other parameters were fixed at a rf power of 700 W, a dc bias voltage of 150 V, a chamber pressure of 15 mTorr, and a substrate temperature of $30^{\circ}C$. The highest etch rate of the Au thin film was 370 nm/min at a 10 % additive CF4 into Cl2/(Cl2 + Ar) gas mixing ratio of 0.2. The surface reaction of the etched Au thin films was investigated using x-ray photoelectron spectroscopy (XPS) analysis. From x-ray photoelectron spectroscopy (XPS) analysis, the intensities of Au peaks are changed. There is a chemical reaction between Cl and Au. Au-Cl is hard to remove on the surface because of its high melting point and the etching products can be sputtered by Ar ion bombardment. We obtained the cleaned and steep profile.

• Journal of Surface Science and Engineering
• /
• v.28 no.2
• /
• pp.101-109
• /
• 1995

Electroetching rates of $FeCl_3$ solution were increased according to increasing solution temperature. Activation energy of electroetching at Be'36 and 5A/$dm^2$ condition was 28.3Kcal and also, at Be'46 and 5A/dm$^2$ condition was 33.2Kcal. At Be'36 concentration of $FeCl_3$ solution, electroetching rate were more higher than at Be'46 concentration. Surfaces of etched grooves obtained at 8A/$dm^2$ or higher current density in 46 Be' concentration of $FeCl_3$ solution were observed to be flat and smooth owing to suppressing chemical etching reaction. Distinctly etched boundaries became to be appeared at 2A/$dm^2$ in Be'41 electroetching condition by differential effects. In case of applying 8A/$dm^2$ current density to Be'46 of $FeCl_3$ solution, etching depth were 4 times and side etching were 6 times more than chemical etching case respectively.

• Journal of Industrial Technology
• /
• v.21 no.A
• /
• pp.17-26
• /
• 2001

The fatigue strength of SM55C has significantly decreased by 83% compared with atmosphere where distilled exists due to strong erosive action of acid fog. The reason is inferred in a way that strong acid erosive material such as acid fog act and give rise to multi-site crack on the surface. Several fatigue clacks occurred under the acid fog repeat the process of division and unification on the surface and form a long non-propagating crack throughout the circumference of experimented steel. However, in the depth, many parts do not show much trace of unification, and the depth is not as big as the one of normal crack shape. 10% of $CaCl_2$ causes strong erosive reaction to material. Then eventually make the life of fatigue shooter. On the other hand, 20% of $CaCl_2$ beings about oxidized material organic crack closing due to weak erosive reaction.

• Proceedings of the Korean Society of Soil and Groundwater Environment Conference
• /
• 2005.04a
• /
• pp.352-358
• /
• 2005

This study aims to separate hydrograph into baseflow and event water to calculate baseflow rate during a rainfall in small catchments, Yuseong, Daejeon, The hydrograph of stream during a period with no excess rainfall will decay. The discharge is composed entirely of groundwater contributions. During the period, the Cl concentration of the stream water can be regarded as being in equilibrium with that of the groundwater. Using Cl as a conservative tracer, two-component hydrograph separations were performed from end point of the period to next end point. The required data were obtained by monitoring of the surface water table, along with discharge rate of stream. Cl concentration of rainfall, surface water were measured and recorded. Hydrograph separation, a mixing model using chemical tracer is applied to chemical hydrograph separation technique. These results show that baseflow rates are 31.6% of rainfall in the catchments during study period.

• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 2012.11a
• /
• pp.91-92
• /
• 2012

본 연구에서는 $NaHCO_3$, $CaCl_2$ 용액 중 $Mg^{2+}$의 농도를 조절하며 전착프로세스에 의해 다양한 결정구조의 환경친화적인 탄산칼슘 막을 제작할 수 있었다. 특히, 여기서는 이들 막의 효율-실용적 설계 제작을 위해 상기한 용액 조건 중 NaCl의 첨가 농도를 달리하여 탄산칼슘 막의 석출량을 도출함으로써 최적 석출 속도를 제시할 수 있었다.

• Journal of Surface Science and Engineering
• /
• v.28 no.1
• /
• pp.46-54
• /
• 1995

An electrochromic(EC) cell was constructed using $WO_3$ as a electrochromic material and NiO as a counter electrode, deposited onto ITO-coated glass by the implementation of electron beam evaporation. The electrolytic media were both lithium and proton conducting polymers such as poly-acrylonitrile(PAN)-$LiClO_4$, poly-ethylene oxide(PEO)-$LiClO_4$, poly-vinyl butyral(PVB)-LiCl and PVB-H$_3$$PO_4$. Potentiodynamic cycling of the cells using PAN-$LiClO_4$, or PVB-$H_3$$PO_4$ electrolyte yielded a transmission variation of more than 40% at the wavelength of 632.8 nm within less than 10 sec response time at room temperature. These results indicate that these electrolytes, transparent in gel type, are premising for the application in large area electrochromic windows.

• Proceedings of the Korea Concrete Institute Conference
• /
• 2004.11a
• /
• pp.509-512
• /
• 2004

This research is targeting that estimate the effect on cement concrete pavement with type of chloride deicers. In order to this study objective, when chloride deicers were spread on road surface, thermal characteristics test was conducted. Also, skid resistance test according to types and concentration of chloride deicier, road surface conditions were investigated. As a test results, thermal characteristics with kind of chloride deicier could know that sodium chloride(NaCl) is exothermic reactive material, calcium chloride$(CaCl_2)$ is endothermic reactive material. And, in case of mixed salt of the calcium and sodium chloride, it could know that can change to the exothermic or endothermic reaction according to dosage ratios. Skid value by British Pendulum Tester(BPT) has shown that it is seldom difference between the types($CaCl_2$, NaCl, mixed salt) and solution concentrations(0.5, 0.8, 1.0, 4.0, $10\%$) of chloride deicier comparing with tap water except mixed salt($10\%$ solution concentration).

• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 2011.05a
• /
• pp.135-136
• /
• 2011

본 연구에서는 실리콘 기판위의 형성된 AAO (Anodic Aluminum Oxide)의 barrier layer를 $Cl_2/BCl_3$ gas mixture에서 Neutral Beam Etching (NBE)과 Ion Beam Etching (IBE)로 각각 식각한 후 그 결과를 비교하였다. 이온빔의 경우 나노사이즈의 AAO pore의 charging에 의해 pore 아래쪽의 위치한 barrier layer를 어떤 식각조건에서도 제거하지 못하였다. 하지만, charging effect가 없고, 높은 중성화율을 나타내는 low angle forward reflected 방식의 neutral beam etching (NBE)에서는 $BCl_3$-rich $Cl_2/BCl_3$ gas mixture인 식각조건에서 AAO pore에 휘발성 $BO_xCl_y$를 형성하면서 barrier layer를 제거할 수 있었다.

• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 2007.11a
• /
• pp.75-76
• /
• 2007

ZnS:Cu,Cl phosphor was coated by solid-gel reaction with $SiO_2$ outside layer. The effect of $Cu^{2+}$-doping concentration has been investigated on the luminescence characteristics of ZnS:Cu,Cl blue-green phosphors for inorganic electro luminescent device. Also, SiO2 coated layers' effect on luminescence characteristics. Evaluation of luminescence characteristics dependent on the synthesis conditions is important to get high-performance phosphors properties. EL and PL properties such as luminescence intensity and chromaticity of ZnS:Cu,Cl phosphors synthesized with different concentration of activator, $Cu^{2+}$, were analysed separately

• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 2007.11a
• /
• pp.112-113
• /
• 2007

ZnS:Cn,Cl phosphor was coated by solid-gel reaction with $SiO_2$ outside layer. The effect of $Cu^{2+}$ -doping concentration has been investigated on the luminescence characteristics of ZnS:Cn,Cl blue-green phosphors for inorganic electro luminescent device. Also, SiO2 coated layers' effect on luminescence characteristics. Evaluation of luminescence characteristics dependent on the synthesis conditions is important to get high-performance phosphors properties. EL and PL properties such as luminescence intensity and chromaticity of ZnS:Cn,Cl phosphors synthesized with different concentration of activator, $Cu^{2+}$, were analysed separately