Mechanical Properties of Ti doped Amorphous Carbon Films prepared by CFUBM Sputtering Method (CFUBM Sputtering법으로 증착시킨 티타늄이 첨가된 비정질 탄소 박막의 기계적 특성 연구)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.20 no.8
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- pp.706-710
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- 2007