• Applied Science and Convergence Technology
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• v.24 no.2
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• pp.27-32
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• 2015

We analyzed the destruction patterns of a turbo-molecular pump (TMP) resulting from its sudden exposure of a foreline to the atmospheric pressure due to a destruction of the foreline connecting clamp of an ICP dry etcher for 300 mm wafers during high-vacuum operation ($5{\times}10^{-6}$ Torr). Unlike in the case of view port's breakage, the TMP's rotor module was crashed inside the chamber. The primary damage resulted from the collision of the blades and stators, and the secondary damage resulted from the breaking of the rotor - driving shaft assembly. The fixing screws of the rotor and axial shaft were bent and broken when the TMP controller output the maximum current even after the crash event. Electrical power consumption analysis of the TMP power controller confirmed it. The stress distributions were analyzed by a finite element method using CFD-ACE+ multi physics software. Rotating inertia of each parts and kinetic energies were calculated as well. 68% of the rotational kinetic energy is deposited by the rotor - shaft module.

• Journal of the Semiconductor & Display Technology
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• v.13 no.4
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• pp.1-5
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• 2014

The plasma density distribution in between the electrode and lateral wall of a narrow gap CCP was investigated. The plasma density distribution was obtained using single Langmuir probe, having two peaks of density distribution at the center of electrode and at the peripheral area of electrodes. The plasma density distribution was compared with the RF fluctuation of plasma potential taken from capacitive probe. Ionization reactions obtained from numerical analysis using CFD-$ACE^+$ fluid model based code. The peaks in two region for plasma density and voltage fluctuation have similar spatial distribution according to input power. It was found that plasma density distribution between the electrode and the lateral wall is closely related with the local ionization.

• Journal of Surface Science and Engineering
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• v.52 no.3
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• pp.171-179
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• 2019

We have developed a numerical model to analyze flow dynamics and heat transfer characteristics of the cooling water in a circular rotating magnetron cathode by a moving boundary grid method realized in a commercial multiphysics package, CFD-ACE+. The numerical model is composed of a target, dual mass rotating cathode and cooling water connections. When the inlet and outlet of the cooling water are offset by the same distance from the rotation axis, the temperature at the center is higher by $50^{\circ}C$ at maximum. At 5 mm away from the target surface, the temperature profile showed typical center high characteristic. At heat input of 30 kW, the maximum temperature change of the cooling water hits $6^{\circ}C$ within 0.5 sec under 60 rpm. With a cooling water configuration of center in/edge out, the temperature of the center region of the target gets lowered. Within 100 seconds of plasma operation time, the cooling water temperature keeps getting higher.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2005.11a
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• pp.110-113
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• 2005

This paper presents flow regime maps of two-dimensional, planar diffusers with constant-area ducts at very low Reynolds numbers. They are obtained from numerical calculations using the commercial CFD program CFD-ACE+. The Reynolds numbers considered are 63, 105, and 210. For each Reynolds number, a wide range of geometric parameters of dimensionless diffuser length, which is a ratio of diffuser length to throat width, $1 and divergence half angle $1^{\circ}<\phi<50^{\circ}$ are selected to obtain steady-state solutions. These maps can be served as a guideline to designers for very low Reynolds number diffuser flows.

• Journal of the Korean Electrochemical Society
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• v.7 no.2
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• pp.69-79
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• 2004

To correctly simulate performance characteristics of fuel cells with a modeling method, various physical and chemical phenomena must be considered in fuel cells. In this study, performance characteristics of planar solid oxide fuel cells were simulated by a commercial CFD code, CFD-ACE+. Through simultaneous considerations for mass transfer, heat transfer and charge movement according to electrochemical reactions in the 3-dimensional planar SOFC unit stack, we could successfully predict performance characteristics of solid oxide fuel cells under operation for structural and progress variables. In other words, we solved mass fraction distribution of reactants and products for diffusion and movement, and investigated qualitative and quantitative analysis for performance characteristics in the SOFC unit stack through internal temperature distribution and polarization curve for electrical characteristics. Through this study, we could effectively predict performance characteristics with variables in the unit stack of planar SOFCs and present systematic approach for SOFCs under operation by computer simulation.

• 한국전산유체공학회:학술대회논문집
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• 2004.10a
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• pp.95-99
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• 2004

The developing Smart UAV in KARI supposes high speed flight as like a conventional plane, as well as vertical takeoff and landing as like a helicopter. Therefore, the air intake system should be designed to provide the sufficient air flow to the engine and the maximum possible total pressure recovery at the engine intake screen over a wide range of flight conditions. For this purpose, we designed the intake system using a pilot type intake model and plenum chamber In this paper, we designed the intake model and analyzed the performance of designed intake system using the general-purpose commercial CFD code, CFD-ACE+ For 3-D calculation, we generated mesh using the unstructured gird and used $\kappa-\epsilon$ turbulence model. The analysis results of the total pressure variation and the velocity distribution was illustrated in this paper. The pressure recovery and distortion coefficient at a plane coincident with the compressor inlet were calculated and streamline variation through the intake system was investigated at the worst condition as well as the standard flight condition.

• Journal of ILASS-Korea
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• v.16 no.2
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• pp.69-75
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• 2011

This article presents computational fluid dynamics (CFD) simulations of sub-micron particle movements and flow characteristics in laboratory-scale electrostatic precipitator (ESP) without corona discharge, and for simulation, it uses the commercial CFD program (CFD-ACE) including electrostatic theory and Lagrangian-based equation for sub-micron particle movement. For validation of CFD results, a simple cylindrical type of ESP is simulated and numerical prediction shows fairly good agreement with the analytical solution. In particular, the present study investigates the effect of particle diameter, inlet flow rate, and applied electric potential on particle collection efficiency and compares the numerical prediction with the experimental data, showing good agreement. It is found that the particle collection efficiency decreases with increasing inlet flow rate because the particle detention time becomes shorter, whereas it decreases with the increase in sub-micron particle diameter and with the decrease of applied electric voltage resulting from smaller terminal electrostatic velocity.

• 한국전산유체공학회:학술대회논문집
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• 2003.08a
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• pp.200-205
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• 2003

The Canard rotor/wing (CRW) aircraft concepts offer great potential for application by allowing the use of a common propulsion system for high-speed cruise and low-speed powered lift. Using the rotor for lift in both flight modes increases its utility. In the hovering mode, the exhausted gas from an gas turbine engine is accelerated through the duct system and it provides the tipjet power for rotor system enough to lift the aircraft. In the cruise mode, the rotor is fixed and the exhausted gas is extracted through the main nozzle, such that the aircraft is able to flight with high speed. The duct system was designed using 1-D fanno line flow theory and empirical data. However, the empirical data of the pressure loss coefficient for various bending and dividing ducts were not enough to design our duct system adaptively. Therefore, using 3-D CFD analysis we obtained the pressure loss coefficient for our duct models and chose the appropriate bending or diving duct type. In this paper, we used the CFD-ACE+ software package for the CFD analysis and the modeling of duct system. Through the 3-D CFD analysis, we investigated also the pressure loss and the velocity distributions of the designed whole duct system as well as the blade duct. Comparing the 3-D CFD result with 1-D analysis result, we lessened the uncertainty of the designed duct system and speculated the problem that was not concerned in design state.

• Applied Chemistry for Engineering
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• v.22 no.5
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• pp.566-574
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• 2011

Coal gasifier is a key component for achieving high efficiency in integrated gasification combined cycle and indirect coal liquefaction. Although there have been several successful coal gasifiers that were commercially proven, many different design configurations are still possible for a simple and reliable gasifier operation. Four different gasifier design concepts of dry-feeding were compared in terms of residence time, exit syngas temperature and syngas composition. First, cold-flow simulation was applied to pre-select the configuration concepts, and the hot-flow simulation including chemical reactions was performed to compare the concepts at more actual gasifier operating conditions. There are many limitations in applying CFD method in gasifier design, particularly in estimating slag behavior and slag-tap design. However, the CFD analysis proved to be useful in comparing the widely different gasifier design concepts as a pre-selection tool.

• Applied Chemistry for Engineering
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• v.32 no.1
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• pp.102-109
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• 2021

Recently, an interest in risk calculation methods has been increasing in Korea due to the establishment of classification code for explosive hazardous area on gas facility (KGS CODE GC101), which is based on the international standard of classification of areas - explosive gas atmospheres (IEC 60079-10-1). However, experiments to check for leaks of combustible or toxic gases are very difficult. These experiments can lead to fire, explosion, and toxic poisoning. Therefore, even if someone tries to provide a laboratory for this experiment, it is difficult to install a gas leakage equipment. In this study we find out differences among actual experiments, CFD by using FLACS and calculation based on classification code for explosive hazardous area on gas facility (KGS CODE GC101) by comparing to each other. We develpoed KGS HAC (hazardous area classification) program which based on KGS GC101 for convenience and popularization. As a result, actual gas leak, CFD and KGS HAC are showing slightly different results. The results of dispersion of 1.8 to 2.7 m were shown in the actual experiment, and the CFD and KGS HAC showed a linear increase of about 0.4 to 1 m depending on the increase in a flow rate. In the actual experiment, the application of 3/8" tubes and orifice to take into account the momentum drop resulted in an increase in the hazardous distance of about 1.95 m. Comparing three methods was able to identify similarities between real and CFD, and also similarities and limitations of CFD and KGS HAC. We hope these results will provide a good basis for future experiments and risk calculations.