• 한국전산유체공학회:학술대회논문집
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• 1998.05a
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• pp.174-180
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• 1998

Numerical study of three-dimensional turbulent flow in a forward curved centrifugal fan is presented. Standard $k-{\varepsilon}$ turbulence model and non-orthogonal curvilinear coordinates are used to consider the turbulent flow field and complex geometry. Finite Volume approach is adopted for discretization scheme and structured grid system is used to help convergence. Multiblock grid system is used for flow field and divided into five domains that are inlet, outlet, impeller, tip clearance and scroll. It is assumed that the flow field is steady state and incompressible. This numerical work is performed with commercial CFD-ACE code developed by CFD Research Corporation, and the results are compared wi th the experimental data

• Proceedings of the Korean Vacuum Society Conference
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• 2009.02a
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• pp.84.1-84.1
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• 2009

• Journal of the KSME
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• v.46 no.9 s.310
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• pp.69-72
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• 2006

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2012.10a
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• pp.809-809
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• 2012

• The KSFM Journal of Fluid Machinery
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• v.7 no.5 s.26
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• pp.68-72
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• 2004

• Journal of the Korea Society of Computer and Information
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• v.19 no.2
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• pp.161-171
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• 2014

In this paper the flow dynamics of the flue gas equipment in the desulfurization system was numerically analyzed by simulating the problems for the turbulent and combustion flow from Induced Draft Fan(I.D.Fan) outlet to Booster Up Fan(B.U.Fan) inlet using the commercial CFD software of CFD-ACE+ in CFDRC company for Computational Fluid Dynamic Analysis. The guide vane of this section was examined for the minimum pressure loss and the uniform flow dynamic to B.U.Fan with the proper velocity from I.D,Fan exit to B,U,Fan inlet section at the boiler both the maximum continuous rating and the design base. The guide vanes at I,D.Fan outlet and B.U.Fan inlet were removed and modified by numerical simulation of the CFD analysis. The flue gas at the system had the less pressure loss and the uniform flow dynamics of the flow velocity and flow line by comparing with the old design equipment.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.129-129
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• 2015

Dry etcher, PECVD등의 플라즈마 공정 장비의 구조물에는 유전체로 절연된 금속판들이 사용된다. 플라즈마 이론을 보면 이들 표면의 전위는 양전하 플럭스와 음전하 플럭스가 같아서 순전류가 0이 되는 부유 전위를 갖는다. 금속과 같은 전도체의 표면은 모두 같은 전위를 가져야 한다. 일반적인 플라즈마 시뮬레이션 소프트웨어에는 이런 경계 조건이 선택 가능하지 않다. ESI사의 CFD-ACE+의 사용자 루틴 개발 기능을 이용하여 Fortran90문법으로 경계면 최인접 셀의 중심에서 구한 전자 온도와 경계면의 이온 입사 플럭스로 가중평균을 구한 이온 질량을 맥스웰분포를 가정한 부유 전위식에 대입하여 시뮬레이션을 CCP에서 구현하였다. 원형 챔버의 가장자리에 떠 있는 사각 링 전극을 가정하고 이 전극 표면이 접지 전위일때, 유전체 일때, 본 연구에서 개발한 루틴을 적용한 결과를 Ar CCP에 대해서 비교 분석하였다.

• Applied Science and Convergence Technology
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• v.23 no.4
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• pp.169-178
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• 2014

Fluid model based numerical analysis is done to simulate a low damage etch back system for 20 nm scale semiconductor fabrication. Etch back should be done conformally with very high material selectivity. One possible mechanism is three steps: reactive radical generation, adsorption and thermal desorption. In this study, plasma generation and transport steps are analyzed by a commercial plasma modeling software package, CFD-ACE+. Ar + $CF_4$ ICP was used as a model and the effect of reactive gas inlet position was investigated in 2D and 3D. At 200~300 mTorr of gas pressure, separated gas inlet scheme is analyzed to work well and generated higher density of F and $F_2$ radicals in the lower chamber region while suppressing ions reach to the wafer by a double layer conducting barrier.

• Journal of the Korean institute of surface engineering
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• v.48 no.4
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• pp.179-184
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• 2015

Quadrupole Mass Spectrometers (QMS) is a very useful tool in vacuum process diagnosis. Tungsten filament based ion sources are vulnerable to contamination from process gas monitoring. Common symptoms of quadrupole mass spectrometer malfunction is appearance of unwanted contaminant mass peaks or no detection of any ion peaks. We disassembled used quadrupole mass spectrometer and found out black insulating deposits on inside of ion source parts. Five steps of cleaning procedure were applied and almost full restoration of functions were confirmed in two types of closed ion source quadrupole mass spectrometer. By using a numerical modeling (CFD-ACE+) technique, the electric potential profile of ion source with/without insulating deposit was calculated and showed the possibility of quadrupole mass spectrometer malfunction by the deterioration of designed potential profile inside the ion source.

• Aerospace Engineering and Technology
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• v.3 no.2
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• pp.197-207
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• 2004

The developing Smart UAV in KARI supposes high speed flight as like a conventional plane, as well as vertical takeoff and landing as like a helicopter. Therefore, the air intake system should be designed to provide the sufficient air flow to the engine and the maximum possible total pressure recovery at the engine intake screen over a wide range of flight conditions. For this purpose, we designed the intake system using a pitor type intake model and plenum chamber. In this paper, we designed the intake model and analyzed the performance of designed intake system using the general-purpose commercial CFD code, CFD-ACE+. The analysis results of the total pressure variation and the velocity distribution were illustrated in this paper. The pressure recovery and distortion coefficient at a plane coincident with the compressor inlet were calculated and streamline variation through the intake system was investigated at the worst flight condition as well as the standard flight condition.