• Title/Summary/Keyword: CFD 분석

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Failure analysis of a turbo molecular pump in semiconductor equipments (반도체 장비에서 터보 분자 펌프의 파손 사례 연구)

  • Jeong, Jin-Yong;Ju, Jeong-Hun;O, Sam-Gyun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.120-120
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    • 2018
  • 반도체 소자나 디스플레이 패널 제조 공정에 가장 많이 사용되는 진공 펌프인 터보 분자 펌프는 오일을 사용하지 않고, 설치 방향이 자유로우며 넓은 작동 압력 영역을 가지고 있어서 고가임에도 불구하고 점점 더 사용 영역을 넓혀 가고 있다. 상하의 두 곳에 회전축을 지지하는 베어링이 필요한데, 기계식 금속 베어링을 채용하는 경우에는 반드시 윤활유를 공급해 주어야 하고, 고온, 부식성 또는 산화성 가스의 배기 시에는 퍼지 가스로 비활성인 질소나 알곤등을 이용하여 보호를 해주어야 한다. 반면, 자기 베어링을 채택한 모델은 윤활의 걱정에서 자유로울 수 있기 때문에 채용이 늘어나고 있다. 동일극의 반발력이나 반대극의 인상력을 이용한 구조를 갖게 되는데 갑작스러운 입구 쪽 압력의 증가 시에는 자석 끼리 부딪치는 일이 발생하고 이로 인해서 로터 모듈 전체에 큰 손상을 갖게 되므로 한 곳 정도에 비상용 터치 다운 베어링을 기계식으로 윤활제 없이 설치하기도 한다. 기본적으로 자기 베어링 방식은 로터 모듈의 부상과 제어를 위해서 3축 또는 5축 제어를 하게 되는데 여기에는 전자석의 전류를 미세하게 조정하여 피드백 하는 시스템을 활용하기 때문에 외부에서의 자기장이 일정값 이상 침투하게 되면 제어 회로의 기능에 문제를 일으키게 된다. 또한 축 방향에 수직인 자기장의 강도가 높아지면 고속으로 회전하는 금속 블레이드가 자속을 자르게 되므로 표면에 와전류가 발생하여 문제가 된다. 터보 분자 펌프는 회전자와 고정자 간격이 1 mm 이내로 작아서 약간의 진동이라도 발생하면 회전자와 고정자 간에 충돌이 일어나고 이는 곧 파손으로 이어진다. 그림 1에는 파손 원인 분석을 위한 회전자 모듈의 수치 해석용 모델의 일부를 나타내었고, 그림 2에는 실제로 외부 자기장에 의한 파손이 발생한 사례의 자기 베어링 모듈의 사진을 나타내었다. 본 발표에서는 외부 자기장의 형태에 따라 제어 자기장에 미치는 영향을 CFD-ACE+(ESI corp)를 활용하여 해석하였다.

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Investigation of the Effects of UAV Nozzle Configurations on Aircraft Lock-on Range (무인항공기의 노즐 형상 변화가 Lock-on Range에 미치는 영향에 관한 연구)

  • Kim, Min-Jun;Kang, Dong-Woo;Myong, Rho-Shin;Kim, Won-Cheol
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.43 no.3
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    • pp.204-212
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    • 2015
  • The infrared lock-on range of target aircraft plays a critical role in determining the aircraft survivability. In this investigation, the effects of various UAV engine nozzle configurations on the aircraft lock-on range were theoretically analyzed. A virtual subsonic aircraft was proposed first, based on the mission requirement and the engine performance analysis, and convergent-type nozzles were then designed. After determining thermal flow field and nozzle surface temperature distribution with the CFD code, an additional analysis was conducted to predict the IR signature. Also, atmospheric transmissivity for various latitude and seasons was calculated, using the LOWTRAN code. Finally, the lock-on and lethal envelopes were calculated for different nozzle configurations, assuming the sensor threshold of the given IR guided missile. It was shown that the maximum 55.3% reduction in lock-on range is possible for deformed nozzles with the high aspect ratio.

Development of An Unsteady Navier-Stokes Solver using Implicit Dual Time Stepping Method and DADI Scheme (내재적 이중시간 전진기법과 DADI 기법을 이용한 비정상 Navier-Stokes 코드개발)

  • Lee, Eun-Seok
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.33 no.9
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    • pp.34-40
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    • 2005
  • In present study, a two dimensional unsteady Navier-Stokes solver has been developed using the Diagonalized ADI (DADI) method and implicit dual time stepping method. The jacobian matrices in steady state Navier-Stokes equations are introduced from inviscid flux terms. The implicit treatment of artificial dissipation terms results in a block penta-diagonal matrix system and it becomes a scalar penta-diagonal matrix by diagonalization. In steady state equations about fictitious time, a new residual including a real time derivative term is introduced. From a converged solution about fictitious time, a real time unsteady solution can be obtained, which is called 'implicit dual time stepping method'. For code validation, an oscillating flat plate, a regular Karman vortices past a circular cylinder and shock buffeting around a bicircular airfoil problems are numerically solved. And they are compared with a theoretical solution, experiments and other researcher's computations.

Prediction of Residual Resistance Coefficient of Low-speed Full Ships using Hull Form Variables and Model Test Results (선형변수 및 모형시험결과 데이터베이스를 활용한 저속비대선의 잉여저항계수 추정)

  • Kim, Yoo-Chul;Kim, Myung-Soo;Yang, Kyung-Kyu;Lee, Young-Yeon;Yim, Geun-Tae;Kim, Jin;Hwang, Seung-Hyun;Kim, JungJoong;Kim, Kwang-Soo
    • Journal of the Society of Naval Architects of Korea
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    • v.56 no.5
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    • pp.447-456
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    • 2019
  • In the early stage of ship design, the rapid prediction of resistance of hull forms is required. Although there are more accurate prediction methods such as model test and CFD analysis, statistical methods are still widely used because of their cost-effectiveness and quickness in producing the results. This study suggests the prediction formula for the residual resistance coefficient (Cr) of the low-speed full ships. The formula was derived from the statistical analysis of model test results in KRISO database. In order to improve prediction accuracy, the local variables of hull forms are defined and used for the regression process. The regression formula for these variables using only principal dimensions of hull forms are also provided.

The Simplified Air Barrier System in the Perimeter Area of Building (간이형 에어베리어 시스템 적용사례 분석)

  • Cho, Jin-Kyun;Shin, Seon-Joon;Cha, Ji-Hyoung;Sung, Jae-Ho;Hong, Min-Ho
    • Proceedings of the SAREK Conference
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    • 2008.06a
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    • pp.906-911
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    • 2008
  • Because the perimeter of buildings is strongly influenced by solar and the outdoor air temperature, the area has different environmental properties compared to the interior of a building, as in summer heat gain, and in winter heat loss. In particular, if the external wall is glass, the characteristics of the glass material make it pervious to outside conditions, thereby making big changes to the thermal environment. By combining shading device and the efficient exhaust system, an energy saving can be achieved compared to no air barrier systems. The simplified air barrier system is developed with the idea that energy could be conserved by carefully and effectively blowing out the air caught between the glass surface and the roller blind. The way it is configured is therefore by making the roller blind's air-path, and by placing the air output ducts in the most optimum positions. This simplified air barrier system will give improvement in the thermal environment of the parameter area that is strongly affected by solar and the outdoor condition.

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Comparative Analysis of Flow Characteristics Using Reflected Pressure Wave at Crossing of Subway Trains in Straight Tunnel (직선터널에서 지하철 열차의 교차운행 시 반사파 간섭에 따른 유동 특성 비교분석)

  • Lee, Deuksun;Cho, Jungmin;Lee, Myeongho;Sung, Jaeyong
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.30 no.3
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    • pp.123-129
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    • 2018
  • In this study, CFD is used to compare and analyze the flow characteristics using reflected pressure wave during the intersection of two trains in straight tunnel. Two tunnels of different lengths; 600 m and 3,400 m were designed and numerical analysis of the flow characteristics of two tunnels carried out by setting the crossing state of the two trains at a constant velocity of 27 m/s form the center of the tunnel. The simulation model was designed using the actual tunnel and subway dimensions The train motion was achieved by using the moving mesh method. For the numerical analysis, $k-{\omega}$ standard turbulence model and an ideal gas were used to set the flow conditions of three-dimensional, compressible and unsteady state. In the analysis results, it was observed that the inside of the long tunnel without interference of the reflected pressure wave was maintained at a pressure lower than the atmospheric pressure and that the flow direction was determined by the pressure gradient and shear flow. On the other hand, the flow velocity in the short tunnel was faster and the pressure fluctuation was noted to have increased due to the reflected pressure wave, with more vortices formed. In addition, the flow velocity was noted to have changed more irregularly.

Numerical Study on Urea Spraying and Mixing Characteristics with Application of Static Mixer in Marine SCR System (박용 탈질 시스템의 혼합기 적용에 따른 요소수용액 분무 및 혼합특성 수치적 연구)

  • Jang, Jaehwan;Park, Hyunchul
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.40 no.7
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    • pp.429-434
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    • 2016
  • Among various De-NOx technologies, Urea-based Selective Catalytic Reduction (SCR) systems are known to be the most effective in marine diesel applications. The spraying and mixing behavior of the urea-water solution has a decisive effect on the system's net efficiency. Therefore, in this study, the spray behavior and ammonia uniformity with and without a static mixer were analyzed by CFD in order to optimize the SCR system. The results showed that the static mixer significantly affected the uniformity of velocity and ammonia concentration. Static mixers may be especially suited for marine SCR systems with space constraints.

Computational Study of Supersonic Chevron Ejector Flows (초음속 Chevron 이젝터 유동에 대한 수치해석적 연구)

  • Kong, Fanshi;Kim, Heuy Dong;Jin, Yingzi
    • Journal of the Korean Society of Propulsion Engineers
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    • v.17 no.6
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    • pp.89-96
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    • 2013
  • Considering the complexity and difficulty on the researching, how to enhance the performance of ejector-diffuser system effectively became a significant task. In the present study, the supersonic nozzle was redesigned using Chevrons installed at the inlet of the secondary stream of the ejector-diffuser system for the purpose of the performance improvement. A CFD method based on Fluent has been applied to simulate the supersonic flows and shock waves inside the ejector. Primary numerical analysis results show that the Chevrons get a positive effect on the ejector flows. The comparison of ejector performance with and without the Chevron was obtained and optimal number of chevron lobe is discussed to increase the performance. The ejector-diffuser system performance is discussed in terms of the entrainment ratio, pressure recovery as well as total pressure loss.

Plasma Uniformity Numerical Modeling of Geometrical Structure for 450 mm Wafer Process System (450 mm 웨이퍼 공정용 System의 기하학적 구조에 따른 플라즈마 균일도 모델링 분석)

  • Yang, Won-Kyun;Joo, Jung-Hoon
    • Journal of the Korean Vacuum Society
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    • v.19 no.3
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    • pp.190-198
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    • 2010
  • Asymmetric model for plasma uniformity by Ar and $CF_4$ was modeled by the antenna structure, the diameter of chamber, and the distance between source and substrate for the development of plasma equipment for 450 mm wafer. The aspect ratio of chamber was divided by diameter, distance from substrate, and pumping port area. And we found the condition with the optimized plasma uniformity by changing the antenna structure. The drift diffusion and quasi-neutrality for simplification were used, and the ion energy function was activated for the surface recombination and etching reaction. The uniformity of plasma density on substrate surface was improved by being far of the distance between substrate wall and chamber wall, and substrate and plasma source. And when the antenna of only 2 turns was used, the plasma uniformity can improve from 20~30% to 4.7%.

Application of Open-source OpenFOAM for Simulating Combustion and Heating Performance in Horizontal CGL Furnace (수평형 CGL 소둔로의 연소 및 가열 성능 해석을 위한 오픈소스 OpenFOAM 기반 전산유체 해석)

  • Kim, GunHong;Oh, Kyung-Teak;Kang, Deok-Hong
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.41 no.8
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    • pp.553-561
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    • 2017
  • The main motivation for this study was to establish a CFD-based procedure for the analysis of heating characteristics, particularly in industrial furnaces. As certain open-source software packages have gained popularity in dealing with complex industrial problems, the OpenFOAM framework was selected for further development of advanced physical models to meet industrial requirements. In this study, the newly developed comprehensive model was applied to simulate physical processes in the full-scale horizontal furnace of a continuous galvanizing line (CGL). The numerical results obtained indicate that the current approach predicts heating characteristics reasonably well. It was also found that radiative heat transfer plays a dominant role in heating the moving strip. To improve the predictability of our method, further work is required to model the turbulence-chemistry interaction realistically, as well as to impose a physically correct thermal wall boundary condition.