• 제목/요약/키워드: CD spectroscopy

검색결과 269건 처리시간 0.034초

PCDS: 반도체 및 디스플레이 공정 시 실시간 입자 분석 및 모니터링 방법

  • 김득현;김용주;강상우;김태성;이준희
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
    • /
    • pp.70.2-70.2
    • /
    • 2015
  • 현재 반도체 및 디스플레이이 공정 분야는 1 um 이상의 입자에서부터 10 nm이하 크기의 오염입자를 제어해야 한다. 현재 오염원인을 파악하기 위해서 사용하는 방법은 공정 완료 후 대상물(웨이퍼 및 글래스)을 CD-SEM (Critical Dimension Scanning Electron Microscope)와 같은 첨단 분석장비를 사용하여 사후 (Ex-situ) 진행하고 있다. 이러한 방법은 오염원이 이미 공정 대상물을 오염시키고 난 후 그 원인을 분석하는 방법으로 그 원인을 찾기가 어려울 뿐만 아니라, 최근 공정관리가 공정 진행 중(In-situ) 행해져야 하는 추세로 봤을 때 합당한 방법이라 할 수 없다. 이를 해결하기 위해 진공공정 중 레이저를 이용하여 측정하고자 하는 여러 시도들이 있었지만, 여전히 긍정적인 답변을 보여주지 못하고 있다. 본 발표에서 소개하는 PCDS (Particle Characteristic Diagonosis System)은 PBMS (Particle Beam Mass Spectrometer)와 SEM (Scanning Electron Microscope), 그리고 EDS (Energy Dispersive X-ray Spectroscopy)를 통합하여 만든 시스템으로 진공공정 중 (In-situ) 챔버 내부에서 발생하고 있는 입자의 크기 분포, 입자의 형상, 그리고 입자의 성분을 실시간으로 분석할 수 있는 방법을 제공한다. 이러한 방법 (PCDS)에 대한 개념과 원리, 그리고 현재까지 개발된 단계에서 얻어진 결과에 대해 소개할 것이다.

  • PDF

WIDEBAND SPECTRAL DISPERSER MADE OF ZnS FOR EXOPLANET CHARACTERIZATION USING SPACE-BORNE TELESCOPES

  • Enya, Keigo;Fujishiro, Naofumi
    • 천문학논총
    • /
    • 제32권1호
    • /
    • pp.343-345
    • /
    • 2017
  • We present the development of a spectral dispersion device for wideband spectroscopy for which the primary scientific objective is the characterization of transiting exoplanets. The principle of the disperser is simple: a grating is fabricated on the surface of a prism. The direction of the spectral dispersion power of the prism is crossed with the grating. Thus, the prism separates the spectrum into individual orders while the grating produces a spectrum for each order. In this work, ZnS was selected as the material for the cross disperser, which was designed to cover the wavelength region, ${\lambda}=0.6-13{\mu}m$, with a spectral resolving power, $R{\geq}50$. A disperser was fabricated, and an evaluation of its surface was conducted. Two spectrometer designs, one adopting ZnS (${\lambda}=0.6-13{\mu}m$, $R{\geq}300$) and the other adopting CdZnTe (${\lambda}=1-23{\mu}m$, $R{\geq}250$), are presented. The spectrometers, each of which has no moving mechanical parts, consist simply of a disperser, a focusing mirror, and a detector.

Synergistic Inhibition of Membrane ATPase and Cell Growth of Helicobacter pylori by ATPase Inhibitors

  • Ki, Mi-Ran;Yun, Soon-Kyu;Lim, Wang-Jin;Hong, Bum-Shik;Hwang, Se-Young
    • Journal of Microbiology and Biotechnology
    • /
    • 제9권4호
    • /
    • pp.414-421
    • /
    • 1999
  • Helicobacter pylori were found to be resistant to azide but sensitive to vanadate, suggesting that defect in the P-type ATPase activity rather than F-type ATPase would be lethal to cell survival or growth. To elucidate the relationship between this enzyme inhibition and H. pylori death, we determined the effect of omeprazole (OMP) plus vanadate on enzyme activity and cell growth. The minimum inhibitory concentration (MIC; ca. 0.8$\mu$mol/disk) of vanadate for H. pylori growth was lowered over l0-fold with the aid of OMP, whereby its inhibitory potential toward the P-type ATPase activity was diametrically increased. Alternatively, we found that this enzyme activity was essential for active transport in H. pylori. From these observations, we strongly suggest that the immediate cause of the growth inhibition of H. pylori cells with OMP and/or vanadate might be defective in the cell's active transport due to the lack of P-type ATPase activity. From the spectral data with circular dichroism (CD) spectroscopy, we found that activated OMP (OAS) at concentration below MIC did not disrupt helical structures of membrane proteins. Separately, we determined the cytopathic effect of OAS by SDS-PAGE, indicating the change in the production of cytoplasmic protein but not cell membrane.

  • PDF

Properties of the Green Gold Alloys with Indium Content

  • Song, Jeongho;Song, Ohsung
    • 한국재료학회지
    • /
    • 제28권4호
    • /
    • pp.221-226
    • /
    • 2018
  • The property changes of 18, 14, and 8K green gold alloys for jewelry are observed by adding 0.0, 3.0, and 5.0 wt% of indium (In), respectively. To check the composition of the alloys, an energy dispersive spectroscopy (EDS) analysis is conducted. Color and microstructure analysis is executed through bare-eye, macro camera, UV-VIS-NIR-colormeter, and optical microscope. The melting point, wetting angle, and hardness are measured using TGA-DTA, a wetting angle tester, and a Vickers hardness tester. The EDS analysis result demonstrates that each of the green gold alloys was manufactured with purposed contents. The color analysis result shows that the color of the alloys is similar to the color of the conventional 4 wt%-Cd 18K green gold, and the green color improves as the In content increases. The micro structure analysis result demonstrates that grain refinement improves as the amount of In increases. Enhancements in the melting point, wettability, and Vickers hardness changes appear as the In content increases and Au content decreases. The hardness is up to 260, which implies good durability. Therefore, the results suggest that the proposed 18, 14, and 8K In-added green gold alloys enhance the properties of jewelry products with regard to the green color, castability, and durability.

표면분석장비를 이용한 CIGS 정량분석

  • 김선희;윤정현;장윤정;이연희
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
    • /
    • pp.279-279
    • /
    • 2013
  • 차세대 태양전지로 주목받는 화합물 박막 태양전지(CIGS, CdTe, etc)는 광흡수계수가 매우 높아 얇은 두께의 광흡수층으로도 빛을 효과적으로 흡수할 수 있으므로 광흡수층의 역할이 매우 중요하며 이에 대한 정확한 정보와 이해는 필수적이다. 특히 GIGS 박막 태양전지의 정량 및 각 원소의 깊이 방향의 분포를 분석하는 것은 박막형 태양전지 개발에 크게 기여한다 [1,2]. 본 실험에서는 조성비를 알고 있는 균질한 CIGS박막을 표준시료로 사용하여 ICP-MS로 측정하여 평균농도를 구한 뒤 TOF-SIMS, D-SIMS, Auger Electron Spectroscopy (AES) 로 깊이 방향 분석 결과를 통해 상대감도(RSF)를 계산한 후 각 원소의 농도로 변환하여 정량분석 결과를 얻었다. 일반적으로 손쉽게 정량적인 정보를 얻는 AES에 비해 정량성이 떨어지는 TOF-SIMS와 D-SIMS는 스퍼터링시 사용되는 Cs 빔과 시료 내 금속과의 클러스터 이온(GaCs+와 InCs+)의 깊이 방향 조성을 이용하면 매트릭스 효과를 배제할 수 있어서 좀 더 정확한 정량 분석이 가능하므로 시료내 금속과 Cs 이 결합된 클러스터 이온의 깊이 방향 조성을 측정하여 각원소의 농도를 계산하였고 스퍼터링 에너지를 포함한 실험 변수에 따른 재현성 및 정량성의 차이를 비교분석하였다. 또한 CIGS층에 불순물로 들어 있는 미량원소들의 깊이 분포도도 함께 관찰하였다.

  • PDF

Influence of the Hydrophobic Amino Acids in the N- and C-Terminal Regions of Pleurocidin on Antifungal Activity

  • Lee, June-Young;Lee, Dong-Gun
    • Journal of Microbiology and Biotechnology
    • /
    • 제20권8호
    • /
    • pp.1192-1195
    • /
    • 2010
  • To investigate the influence of the N- or C-terminal regions of pleurocidin (Ple) peptide on antifungal activity, four analogs partially truncated in the N- or C-terminal regions were designed and synthesized. Circular dichroism (CD) spectroscopy demonstrated that all the analogs maintained an alpha-helical structure. The antifungal susceptibility testing also showed that the analogs exhibited antifungal activities against human fungal pathogens, without hemolytic effects against human erythrocytes. The result further indicated that the analogs had discrepant antifungal activities [Ple>Ple (1-22)>Ple (4-25)>Ple (1- 19)>Ple (7-25)] and that N-terminal deletion affected the activities much more than C-terminal deletion. Hydrophobicity [Ple>Ple (1-22)>Ple (4-25)>Ple (1-19)> Ple (7-25)] was thought to have been one of the consistent factors that influenced these activity patterns, rather than the other primary factors like the helicity [Ple>Ple (4-25) >Ple (1-22)>Ple (1-19)>Ple (7-25)] or the net charge [Ple=Ple (4-25)=Ple (7-25)>Ple (1-22)=Ple (1-19)] of the peptides. In conclusion, the hydrophobic amino acids in the N-terminal region of Ple is more crucial for antifungal activity than those in the C-terminal region.

Interaction of Native and Apo-carbonic Anhydrase with Hydrophobic Adsorbents: A Comparative Structure-function Study

  • Salemi, Zahra;Hosseinkhani, Saman;Ranjbar, Bijan;Nemat-Gorgani, Mohsen
    • BMB Reports
    • /
    • 제39권5호
    • /
    • pp.636-641
    • /
    • 2006
  • Our previous studies indicated that native carbonic anhydrase does not interact with hydrophobic adsorbents and that it acquires this ability upon denaturation. In the present study, an apo form of the enzyme was prepared by removal of zinc and a comparative study was performed on some characteristic features of the apo and native forms by far- and near-UV circular dichroism (CD), intrinsic fluorescent spectroscopy, 1-anilino naphthalene-8-sulfonate (ANS) binding, fluorescence quenching by acrylamide, and Tm measurement. Results indicate that protein flexibility is enhanced and the hydrophobic sites become more exposed upon conversion to the apo form. Accordingly, the apo structure showed a greater affinity for interaction with hydrophobic adsorbents as compared with the native structure. As observed for the native enzyme, heat denaturation of the apo form promoted interaction with alkyl residues present on the adsorbents and, by cooling followed by addition of zinc, catalytically-active immobilized preparations were obtained.

방사선 조사가 분리대두단백의 기능적, 구조적 특성에 미치는 영향 (Effects of gamma irradiation on the functional and structural characteristics of soy protein isolates)

  • 오경남;이숙영
    • 한국식품조리과학회지
    • /
    • 제20권3호
    • /
    • pp.256-264
    • /
    • 2004
  • The effects of irradiation on the functional and structural characteristics of soy protein isolates were studied. Soymilk was irradiated at 1, 5, and l0kGy, after which soy protein isolates were prepared. The functional properties of soy protein isolates were examined including solubility, emulsion capacity and stability, foam capacity and stability, structural properties as represented by SDS-PAGE pattern, and secondary and tertiary structures. The solubility and emulsion capacity were increased by radiation treatment at 1kGy however the values were adversely affected again as dosage was increased above 5kGy. As irradiation dosage increased, an increase of foaming capacity at 1kGy and a decreasing turnover afterwards were also noted in foaming capacity, although the differences were not statistically significant. The SDS-PAGE pattern showed fragmentation and aggregation of protein molecules as affected by irradiation in proportion to the dosage increase. The results of CD and fluorescence spectroscopy revealed increased aperiodic structure contents with the dosage increase. It was assumed that irradiation dosagefrom 5 to l0kGy could initiate minimal denaturation of protein in various foods compared to general heat treatment.

Growth and characterization of $Cu_2ZnSnSe_4$ (CZTSe) thin films by sputtering of binary selenides and selenization

  • Munir, Rahim;Jung, Gwang-Sun;Ahn, Byung-Tae
    • 한국재료학회:학술대회논문집
    • /
    • 한국재료학회 2012년도 춘계학술발표대회
    • /
    • pp.98.2-98.2
    • /
    • 2012
  • Thin film solar cells are growing up in the market due to their high efficiency and low cost. Especially CdTe and $CuInGaSe_2$ based solar cells are leading the other cells, but due to the limited percentage of the elements present in our earth's crust like Tellurium, Indium and Gallium, the price of the solar cells will increase rapidly. Copper Zinc Tin Sulfide (CZTS) and Copper Zinc Tin Selenide (CZTSe) semiconductor (having a kesterite crystal structure) are getting attention for its solar cell application as the absorber layer. CZTS and CZTSe have almost the same crystal structure with more environmentally friendly elements. Various authors have reported growth and characterization of CZTSe films and solar cells with efficiencies about 3.2% to 8.9%. In this study, a novel method to prepare CZTSe has been proposed based on selenization of stacked Copper Selenide ($Cu_2Se$), Tin Selenide ($SnSe_2$) and Zinc Selenide (Zinc Selenide) in six possible stacking combinations. Depositions were carried out through RF magnetron sputtering. Selenization of all the samples was performed in Close Space Sublimation (CSS) in vacuum at different temperatures for three minutes. Characterization of each sample has been performed in Field Emission SEM, XRD, Raman spectroscopy, EDS and Auger. In this study, the properties and results of $Cu_2ZnSnSe_4$ thin films grown by selenization will be presented.

  • PDF

Molecular and Structural Characterization of the Domain 2 of Hepatitis C Virus Non-structural Protein 5A

  • Liang, Yu;Kang, Cong Bao;Yoon, Ho Sup
    • Molecules and Cells
    • /
    • 제22권1호
    • /
    • pp.13-20
    • /
    • 2006
  • Hepatitis C virus (HCV) non-structural protein 5A protein (NS5A), which consists of three functional domains, is involved in regulating viral replication, interferon resistance, and apoptosis. Recently, the three-dimensional structure of the domain 1 was determined. However, currently the molecular basis for the domains 2 and 3 of HCV NS5A is yet to be defined. Toward this end, we expressed, purified the domain 2 of the NS5A (NS5A-D2), and then performed biochemical and structural studies. The purified domain 2 was active and was able to bind NS5B and PKR, biological partners of NS5A. The results from gel filtration, CD analysis, 1D $^1H$ NMR and 2D $^1H-^{15}N$ heteronuclear single quantum correlation (HSQC) spectroscopy indicate that the domain 2 of NS5A appears to be flexible and disordered.