• Proceedings of the Korean Institute of Surface Engineering Conference
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• 1999.10a
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• pp.83-83
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• 1999

• Proceedings of the Korean Magnestics Society Conference
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• 2000.05a
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• pp.136-137
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• 2000

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2002.02a
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• pp.53-60
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• 2002

Recently, the development of aerospace and automobile industries brought new technological challenges, related to the growing complexity of products and new geometry models. High speed machining using 5-Axis milling machine is widely used for 3D sculptured surface parts. 5-axis milling of turbine blade generates the vibration, deflection and twisting caused from thin and cantilever shape. So, the surface roughness and the waviness of workpiece are not good. In this paper, The effects of cutter orientation and lead/tilt angle in 5-Axis high speed ball end-milling of turbine blade were investigated to improve the geometric accuracy and surface integrity. The experiments were performed at lead/tilt angle $15^{\circ}$ of workpiece with four cutter directions such as horizontal outward, horizontal inward, vertical outward, and vertical inward. Workpiece deflection, surface roughness and machined surface were measured with various cutter orientations such as cutting direction, and lead/tilt angle. The results show that when 5-axis machining of turbine blade, the best cutting strategy is horizontal inward direction with tilt angle. The results show that when 5-axis machining of turbine blade, the best cutting strategy is horizontal inward direction with tilt angle.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.6
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• pp.531-537
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• 2006

A micromachined piezoelectric microspeaker was fabricated with a highly c-axis oriented ZnO thin film on a silicon-nitride film having compressive residual stress. When it was measured 3 mm away from the microspeaker in open field, the largest sound pressure level produced by the fabricated microspeaker was about 91 dB at around 2.9 kHz for the applied voltage of $6\;V_{peak-to-peak}$. The key technologies to these successful results were as follows: (1) the usage of a wrinkled diaphragm caused by the high compressive residual stress of silicon-nitride thin film, (2) the usage of the highly c-axis oriented ZnO thin film.

• Korean Journal of Materials Research
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• v.4 no.4
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• pp.459-465
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• 1994

A-axis oriened YBCO thin flims were grown on $LaAIO_{3}$ single crystal substrate by off-axis rf magnetron sputtering method. We used two kinds of process to get a-axis oriented fi1ms;one-step process and two-step process. In one-step process, films are grown in single step in which substrate temperature( $T_s$) is in the range of $590^{\circ}C$ to $680^{\circ}C$. On the other hand, in two step process a-axis oriented thin film templates i f about 30nm thickness is deposited at low temperature first, and subsequently films are grown at elevated temperature to the final thickness of about 100nm. In the case of one step process($T_s$ ~)$600^{\circ}C$), prefered a-axis orientation is dominant and Cu-rich phases segregate at the surface. Segregations decrease and ($00 \ell$) peaks increase upon increasing $T_s$. The films prepared by two step method appeared to have strong(h00) peaks as the deposition rate increased. Microstructure shows pin holes resulted from mixed phases of a-axis and c-axis oriented films. In both cases of one step and two step process, as TS decreases, prepared films show stronger a-axis orientation. However electrical properties of the films are depressed with lower $T_c$ and wider $\Delta T$ as $T_s$ decreases.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.5
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• pp.905-909
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• 2007

Crystalline and micro-structural characteristics of ZnO thin films which were deposited on p-Si(100) with cooling naturally down of pre-heated substrate during RF magnetron sputter deposition, were investigated by XRD and SEM in this paper. The film which was prepared on the substrate which was pre-heated to $400^{\circ}C$ before deposition and then cooled naturally down during deposition, showed the most outstanding c-axis preferred orientation. The ZnO thin film having the best crystalline result were applied to SMR type FBAR device and resonance properties of the device were investigated by network analyzer. It showed that resonance frequency was 2.05 GHz, return loss was -30.64 dB, quality factor was 3169 and electromechanical coupling factor was 0.4 %. This deposition method would be very useful for application of surface acoustic wave filter or film bulk acoustic wave resonator.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.100-103
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• 2001

In order to investigate the magnetic properties of CoCr-based bilayered thin films on kind of underlayer, we introduced amorphous Si layer to Co-Cr(-Ta) magnetic layer as underlayer. With the thickness of CoCr, CoCrTa single layer, crystalline orientation and perpendicular coercivity was improved. It was revealed that by introducing the Si underlayer, the c-axis orientation of CoCr, CoCrTa magnetic layer was improved largely. However, with increasing Si film thickness, perpendicular coercivity and saturation magnetization of Cocr/si, CoCrTa/Si bilayered thin films was decreased. Grain size of bilayered thin films became larger.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07a
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• pp.172-175
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• 2003

ZnO:Al thin film for application to FBAR's bottom electrode using ZnO piezoelectric thin film were prepared by FTS, in order to improve the crystallographic properties of ZnO thin films because the ZnO:Al thin film and ZnO thin films structure is equal each other. So we prepared the ZnO:Al thin film with oxygen gas flow rate. Thickness and c-axis preferred orientation and electric properties of ZnO:Al bottom electrode were evaluated by $\alpha$-step, XRD and 4-point probe..

• Korean Journal of Materials Research
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• v.21 no.3
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• pp.168-173
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• 2011

Precipitation of the ordered icosahedral quasicrystal in Mg-6wt%Zn-1wt%Y alloy has been characterized by transmission electron microscopy observations. The lamellar-type icosahedral qusicrystal phases (I-phase) with the face-centered icosahedral (FCI) structure are observed in alloy after solution treatment at $550^{\circ}C$. In the alloy annealed at $400^{\circ}C$, polygon-shaped I-phases are observed in the ${\alpha}$-Mg matrix. The interfaces of the I-phase with the matrix are facetted and the facets are on five-fold and two- fold plane of the I-phase. The orientation relationship of the I-phase with the matrix is determined to be $[I5]_I//[001]_{Mg}$, $(2f)_I//(2\overline{1}0)_{Mg}$ and $[I2]_I//[311]_{Mg}$, $(5f)_I//(0\overline{1}1)_{Mg}$. The icosahedral grains are occasionally found to be twinned with one of the five-fold axis as the twin axis. The twin boundaries appear to be fairly straight and perpendicular to the fivefold twin axis. The icosahedral twin can be expressed as a rotation of $63.4^{\circ}$ or $116.62^{\circ}$ around two fold zone axis.

• Electrical & Electronic Materials
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• v.8 no.1
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• pp.6-12
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• 1995

High Tc superconducting YBa$_{2}$Cu$_{3}$$O_{7-x}$ thin films were prepared on various substrates by off-axis rf magnetron sputtering method to examine the substrate effects on the film structure and its R-T characteristics. The SEM analysis showed that the surface morphology of the grown YBa$_{2}$Cu$_{3}$O.sub 7-x/, film has different characteristic structure with different substrate used. The film on (100) SrTiO$_{3}$ substrate has critical current density of 3*10$^{5}$ A/cm$^{2}$ at 77K under zero magnetic field. The X-ray diffraction measurements revealed that the films on (100) SrTiO$_{3}$ substrate have mixed a-axis and c-axis normal to the substrate surface and the films on (100) MgO and ZrO$_{2}$/sapphire substrates have c-axis normal orientation to the substrate surface. However, YBa$_{2}$Cu$_{3}$$O_{7-x}$ films on (100) sapphire substrates showed no preferential orientation.ion.