• 제목/요약/키워드: C-F properties

검색결과 1,569건 처리시간 0.034초

Fluorinated amorphous carbon thin films grown by plasma enhanced chemical vapor deposition with $C_4$F$_8$ and $Si_2H_6/He$ for low dielectric constant intermetallic layer dielectrics

  • Kim, Howoon;Shin, Jang-Kyoo;Kwon, Dae-Hyuk;Lee, Gil S.
    • Journal of Korean Vacuum Science & Technology
    • /
    • 제7권2호
    • /
    • pp.33-38
    • /
    • 2003
  • Fluorinated amorphous carbon thin films (a-C:F) for the use of low dielectric constant intermetallic layer dielectrics are deposited by plasma enhanced chemical vapor deposition with $C_4$F$_{8}$ and Si$_2$H$_{6}$/He gas mixture as precursors. To characterize and improve film properties, we changed various conditions such as deposition temperature, and RF power, and we measured the thickness and refractive indexes and FT-IR spectrum before and after annealing. At low temperatures the film properties were very poor although the growth rate was very high. On the other hand, the growth rate was low at high temperature. The growth rate increased in accordance with the deposition pressure. The dielectric constants of samples were in the range of 1.5∼5.5∼5.

  • PDF

저온소결 $Mg_4Nb_2O_9$ 세라믹스의 마이크로파 유전특성 (Microwave Dielectric Properties of Low-temperature Sintered $Mg_4Nb_2O_9$ Ceramics)

  • 이지훈;방재철
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
    • /
    • pp.439-442
    • /
    • 2004
  • The effects of sintering additives on the low-temperature sintering and microwave dielectric properties of $Mg_4Nb_2O_9$ dielectric ceramics were studied. When $3{\sim}20wt%$ of $0.242Bi_2O_3-0.758V_2O_5$ was added, the sintering temperature decreased from $1100{\sim}1300^{\circ}C$ to $950^{\circ}C$ and high density was obtained. When $Mg_4Nb_2O_9$ was sintered at $950^{\circ}C$ with 10wt% of sintering additive, the microwave dielectric properties of $Q{\times}f_0\;=\;80.035GHz,\;\epsilon_r\;=\;13.3\;and\;\tau_f\;=\;-12.9\;ppm/^{\circ}C$ were obtained.

  • PDF

$C_4F_6$-Ar혼합기체에서의 Plasma Discharge Simulation을 위한 $C_4F_6$ 초기단면적 결정 (Determination of the initial cross-sections for the $C_4F_6$ molecule from the electron drift velocity)

  • 이경엽;전병훈
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 2011년도 제42회 하계학술대회
    • /
    • pp.1544-1545
    • /
    • 2011
  • For quantitative understanding of gas discharge phenomena, we should know electron collision cross section. Processing plasma etching of semiconductor, and research are being used in the etching source $C_4F_6$ gas may be used by itself and mixed with other gases are also used. However, the molecular gas $C_4F_6$ study on the characteristics of the electron transport and the cross-sectional area of the decision is still lacking. Therefore, we understand the electron transport characteristics and analysed the electron transport coefficients. And to understand and interpret physical properties of the ionization coefficient ${\alpha}$/N, and the attachment coefficient ${\eta}$/N in $C_4F_6$ gas.

  • PDF

산본 삼성고층 APT에 플라이 애쉬를 혼입한 500kg/$\textrm{cm}^2$이상의 고강도 콘크리트의 최적배합, 시공 및 구조적 연구 (The Construction of High Strength Concrete (500kg/$\textrm{cm}^2$) with Fly-Ash for SAMSUNG APT in San Bon Area)

  • 신성우;이광수;문정일;안종문;안경한;김현모;박희민;장일영
    • 한국콘크리트학회:학술대회논문집
    • /
    • 한국콘크리트학회 1991년도 가을 학술발표회 논문집
    • /
    • pp.162-162
    • /
    • 1991
  • To investigate the properties of High Strength Concrete with Fly-Ash for SAMSUNG San Bon high rised apartment, following variables has been strudied and constructed, successfully. Major variables are F/(F+C), W/C, S/A, Pumping Method, etc.. The results show that 15% of F/(F+C) is the best properties for compressive strength of concrete, temperature reduction and workability.

  • PDF

소결온도와 BCN 초성에 따른 BMT 세라믹스의 구조 및 마이크로파 유전특성 (The Structural and Microwave Dielectric Properties of the BMT Ceramics with Sintering Temperature and BCN Composition Ratio)

  • 최의선;이문기;류기원;이성갑;이영희
    • 대한전기학회논문지:전기물성ㆍ응용부문C
    • /
    • 제51권7호
    • /
    • pp.305-310
    • /
    • 2002
  • The microwave dielectric properties of Ba(Mg$_{1}$3/Ta$_{2}$3/O$_3$-Ba(Co$_{1}$3/Nb$_{2}$3/O$_3$[BMT-BCN] ceramics were investigated. The specimens were prepared by the conventional mixed oxide method with the sintering temperature of 15$25^{\circ}C$~1575$^{\circ}C$. It was found that Ba(Mg$_{1}$3/Ta$_{2}$3/O$_3$[BMT] and BCN formed a solid solution with complex perovskite structure. As increasing the mole fraction of BCN, dielectric constant increased while the temperature coefficient of resonant frequency was changed from positive to negative value. The highest value of quality factor, Q$\times$f$_{0}$=138,205GHz, obtained in the 0.9BMT-0.1BCN ceramics sintered at 1575$^{\circ}C$. In the range of x$\geq$0.4, the dielectric constant was about 30. The 0.55BMT-0.45BCN ceramics sintered at 15$25^{\circ}C$ for 5 hours showed the microwave dielectric properties of $\varepsilon$$_{r}$=30.21, Q$\times$f$_{0}$=85,789GHz and $\tau$$_{f}$=2.9015ppm/$^{\circ}C$.EX>.

직교 이방성의 광탄성 실험법 개발에 관한 연구 I (Study on the Development of Photoelastic Experiment of Orthotropic Material (I))

  • 최선호;황재석
    • 대한기계학회논문집
    • /
    • 제12권1호
    • /
    • pp.8-18
    • /
    • 1988
  • 높은 강도의 재료개발과 항공기, 선박 각종 구조물 등의 여러 분야에서 복합재료의 사용이 증가함에 따라 복합재료 구조물의 응력분포나 응력집중, 파괴 역학 등에 대한 연구가 수행중이다. 이러한 복합체 구조물을 투과용 광탄성 실험을 통하여 해석하고져 할 때는 모델재료가 절대적으로 필요하므로 본 논문에서는 이 재료개발을 위한 내용을 수록하였다.

SiC 장섬유 강화 SiC 기지 복합재료의 고온강도 특성 (High Temeprature Strength Property of Continuous SiC Fiber Reinforced SiC Matrix Composites)

  • 신윤석;이상필;이진경;이준현
    • 한국복합재료학회:학술대회논문집
    • /
    • 한국복합재료학회 2005년도 춘계학술발표대회 논문집
    • /
    • pp.102-105
    • /
    • 2005
  • The mechanical properties of $SiC_f/SiC$ composites reinforced with continuous SiC fiber have been investigated in conjunction with the detailed analysis of their microstructures. Especially, the effect of test temperature on the characterization of $SiC_f/SiC$ composites was examined. In this composite system, a braiding Hi-Nicalon SiC fibric was selected as a reinforcement. $SiC_f/SiC$ composites have been fabricated by the reaction sintering process, using the complex matrix slurry with a constant composition ratio of SiC and C particles. The characterization of $RS-SiC_f/SiC$ composites was investigated by means of SEM, EDS and three point bending test. Based on the mechanical property-microstructure correlation, the high temperature applicability of $RS-SiC_f/SiC$ composites was discussed.

  • PDF

BZN-SZN계 세라믹스의 마이크로파 유전 특성에 미치는 $ZrO_2$의 영향 (Effect of $ZrO_2$Addition on the Microwave Dielectric Properties of BZN-SZN System Ceramics)

  • 윤석규;박우정;양우석;윤대호
    • 한국세라믹학회지
    • /
    • 제38권11호
    • /
    • pp.1042-1045
    • /
    • 2001
  • Ba(Zn$_{1}$3/Nb$_{2}$3/) $O_3$-Sr(Zn$_{1}$3/Nb$_{2}$3/) $O_3$계에 대하여 소결 온도 변화와 Zr $O_2$첨가량에 따른 마이크로파 유전특성을 조사하였다. 동일 조성에서 소결 온도가 증가함에 따라 밀도가 향상되고 공진 주파수의 온도계수($ au$$_{f}$)는 감소하는 경향을 보였으나, 유전상수(K)와 품질계수(Q$\times$f)는 커다란 변화가 없었다. 또한 Zr $O_2$첨가량이 증가함에 따라 소결 시편의 밀도가 향상되었고 더불어 유전상수, 품질계수가 증가하는 경향을 보였으며, 공진 주파수의 온도계수가 감소하는 우수한 특성이 나타났다. 특히, 소결온도 1575$^{\circ}C$, 0.6 wt% Zr $O_2$를 첨가했을 때 유전상수가 최대($\varepsilon$$_{r}$=41)로 나타났으며, 공진 주파수의 온도계수는 1.0wt% Zr $O_2$를 첨가했을 때 최소($\tau$$_{f}$=+0.8ppm/$^{\circ}C$)로서 양호한 값을 얻을 수 있었다.었다.

  • PDF

Aspergillus nidulans FGSC 159의 carboxymethylcellulases의 분리 순화 및 그 성질에 관한 연구 (Purification and Properties of Carboxymethylcellulases from Aspergillus nidulans FGSC 159)

  • 맹필재;홍순우;하영칠
    • 미생물학회지
    • /
    • 제18권3호
    • /
    • pp.133-147
    • /
    • 1980
  • Washed mycelia of Aspergillus nidulans FGSC159 were incubated in CMC minimal liquid medium and the culture filtrate which contained induced extracellular cellulase was fractionated by a three-step procedure including chromatography on Bio-Gel P-150, chromatography on DEAE-Sephadex A-50 and chromatography on Sephadex G-100. Three CMCase components ; F-I-Ia, F-I-Ib and F-II-Ia were prepared. No enzyme activity toward avicel could be detected in these components. Similarly, there was no ${\beta}-glucosidase$ activity. pH-optima of the three components were all 5.0 in acetate buffer. Temperature-optima for the activities of F-I-Ia, F-Ib and F-II-Ia were $45^{\circ}C,\;40^{\circ}C\;and\;50^{\circ}C$, respectively. F-II-Ia was shown to be more thermostable than the other two components. F-II-Ia was proved to have quite a different substrate specificity and action property and action property from those of F-I-Ia and F-I-Ib by product analysis on liquid chromatography.

  • PDF