# Fluorinated amorphous carbon thin films grown by plasma enhanced chemical vapor deposition with $C_4$F$_8$ and $Si_2H_6/He$ for low dielectric constant intermetallic layer dielectrics

• Kim, Howoon (Department of Electronics, Kyungpook National University) ;
• Shin, Jang-Kyoo (Department of Electronics, Kyungpook National University) ;
• Kwon, Dae-Hyuk (School of Electronic & Information Engineering, Kyungil University) ;
• Lee, Gil S. (Department of Electrical Engineering, University of Texas at Dallas)
• Published : 2003.12.01

#### Abstract

Fluorinated amorphous carbon thin films (a-C:F) for the use of low dielectric constant intermetallic layer dielectrics are deposited by plasma enhanced chemical vapor deposition with $C_4$F$_{8}$ and Si$_2$H$_{6}$/He gas mixture as precursors. To characterize and improve film properties, we changed various conditions such as deposition temperature, and RF power, and we measured the thickness and refractive indexes and FT-IR spectrum before and after annealing. At low temperatures the film properties were very poor although the growth rate was very high. On the other hand, the growth rate was low at high temperature. The growth rate increased in accordance with the deposition pressure. The dielectric constants of samples were in the range of 1.5∼5.5∼5.