• Journal of the Korean Society for Nondestructive Testing
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• v.30 no.5
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• pp.458-463
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• 2010

Since the acoustic nonlinearity is sensitive to the minute variation of material properties, the nonlinear ultrasonic technique(NUT) has been considered as a promising method to evaluate the material degradation or fatigue. However, there are certain limitations to apply the conventional NUT using the bulk wave to thin plates. In case of plates, the use of Lamb wave can be considered, however, the propagation characteristics of Lamb wave are completely different with the bulk wave, and thus the separate study for the nonlinearity of Lamb wave is required. For this work, this paper analyzed first the conditions of mode pair suitable for the practical application as well as for the cumulative propagation of quadratic harmonic frequency and summarized the result in for conditions; (1) phase matching, (2) non-zero power flux, (3) group velocity matching, and (4) non-zero out-of-plane displacement. Experimental results in aluminum plates showed that the amplitude of the secondary Lamb wave and nonlinear parameter growed up with increasing propagation distance at the mode pair satisfying the above all conditions and that the ration of nonlinear parameters measured in Al6061-T6 and Al1100-H15 was closed to the ratio of the absolute nonlinear parameters.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2011.05a
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• pp.696-698
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• 2011

We present a new method for the fabrication of film bulk acoustic wave resonator (FBAR) devices that exploits the thin piezoelectric ZnO films particularly sputter-deposited in a mixture of N2O and Ar gases as the reactive and sputtering gases, respectively. Some thermal annealing treatments were performed on the as-deposited ZnO films and also their effects on the resonance characteristics of the FBAR devices were investigated. It was found that with an optimized process, the resonance characteristics of the fabricated FBAR devices could be further improved.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.3
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• pp.566-570
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• 2007

The specific electrical, optical and acoustic properties of Zinc Oxide (ZnO) are important for semiconductor process which has many various applications. Piezoelectric ZnO films has been widely used for such as transducers, bulk and surface acoustic-wave resonators, and acousto-optic devices. In this study, we investigated etch characteristics of ZnO thin films in inductively coupled plasma etch system with $BCl_3/Ar$ gas mixture. The etching characteristics of ZnO thin films were investigated in terms of etch rates and selectivities to $SiO_2$ as a function of $BCl_3/Ar$ gas mixing ratio, RF power, DC bias voltage and process pressure. The maximum ZnO etch rate of 172 nm/min was obtained for $BCl_3$ (80%)/Ar(20%) gas mixture. The chemical states on the etched surface were investigated with X-ray photoelectron spectroscopy (XPS).

• Journal of information and communication convergence engineering
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• v.1 no.3
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• pp.129-132
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• 2003

In this paper, cobalt (Co)-electrode FBAR devices fabricated on seven-layered Bragg Reflectors are presented along with their resonance characteristics. ZnO films are used as the resonating material in FBAR devices where the Co electrode is 3000${\AA}$ thick. All processes are preformed in an RF magnetron sputtering system. As a result of characterization, the resonance characteristics are observed to depend strongly on the quality of ZnO film and Bragg Reflectors. In addition, the FBAR devices with W/$SiO_2$ reflectors show good resonance characteristics in term of return loss and quality-factor (Q-factor).

• Journal of information and communication convergence engineering
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• v.3 no.3
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• pp.131-136
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• 2005

The effects of the deposition temperature on the growth characteristics of the ZnO films were studied for film bulk acoustic wave resonator (FBAR) device applications. All films were deposited using a radio frequency (RF) magnetron sputtering technique. It was found that the growth characteristics of the ZnO films have a strong dependence on the deposition temperature from 25 to $350^{\circ}C$. The ZnO films deposited below $200^{\circ}C$ exhibited reasonably good columnar grain structures with a highly preferred c-axis orientation while those above 200°C showed very poor columnar grain structures with a mixed-axis orientation. This study seems very useful for the future FBAR device applications.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2007.06a
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• pp.437-440
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• 2007

This paper presents the improvement of the resonance characteristics of film bulk acoustic-wave resonator (FBAR) devices fabricated on multilayer Bragg reflectors (BRs) based on inserting ultra-thin chromium (Cr) adhesion layers into BRs and post-annealing processes. The measurements show excellent improvement of return loss $(S_{11})$ and Q-factor by the combined use of Cr adhesion layers and thermal treatments particularly for 120 minutes at $200^{\circ}C$.

• Journal of information and communication convergence engineering
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• v.5 no.4
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• pp.316-319
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• 2007

This paper presents some methods to improve the resonance characteristics of film bulk acoustic-wave resonator (FBAR) devices. The FBAR devices were fabricated on multilayer Bragg reflectors (BR) into which very thin chromium (Cr) adhesion layers were inserted, followed by several kinds of thermal annealing processes. These methods resulted in an excellent device improvement in terms of return loss and Q-factors.

• Journal of information and communication convergence engineering
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• v.6 no.1
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• pp.34-37
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• 2008

Effects of the addition of Cr adhesion layer to $W/SiO_2$ multilayer Bragg reflectors on the resonance characteristics of film bulk acoustic wave resonator (FBAR) devices are presented. Main resonance peaks could be significantly shifted to higher frequency, mainly due to the addition of Cr adhesion layer to multilayer Bragg reflectors and control of the bottom electrode thickness as well. The FBAR devices with the Cr adhesion layer in Bragg reflectors could result in much more improved resonance characteristics at about 3 GHz in terms of return loss and Q-factor.

• Journal of Power System Engineering
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• v.17 no.1
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• pp.36-41
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• 2013

A study of the possible axisymmetric modes that propagate at low frequencies in buried, water-filled pipes is presented. It is well known that for a vacuum-pipe-vacuum system the sole non-torsional axisymmetric mode that exists at low frequencies is the fundamental L(0,1) mode. When a pipe is filled with water and still surrounded by a vacuum it is also known that another mode then appears which at low frequencies is characterized by predominantly axial water-borne displacements. In addition to these modes. this paper explores two other, less well known axisymmetric modes whose exitence depends on the acoustic properties of the outer medium that surrounds a pipe. The predicted characteristics of these modes are presented and the likelihood of them propagating over any significant distance in a buried water pipe is discussed.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2007.10a
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• pp.196-199
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• 2007

In this paper, we studied a ZnO-based film bulk acoustic wave resonator (FBAR) device fabricated on top of a novel multi-layered Bragg reflector with chromium adhesion layers $(0.03{\mu}m-thick)$ inserted. The performance of FBAR device could be significantly improved using proper thermal treatments. At ${\sim}2.75$ GHz, we could achieve good return loss and quality factor (Q). This device fabrication technique will be useful for the future mobile WiMAX applications.