• 제목/요약/키워드: Bonding layer

검색결과 771건 처리시간 0.027초

실리콘/수소/질소의 결합에 따른 MONOS 커패시터의 계면 특성 연구 (Interface Traps Analysis as Bonding of The Silicon/Nitrogen/Hydrogen in MONOS Capacitors)

  • 김희동;안호명;서유정;장영걸;남기현;정홍배;김태근
    • 대한전자공학회논문지SD
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    • 제46권12호
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    • pp.18-23
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    • 2009
  • 본 연구는 실리콘 기판과 실리콘 산화막 사이의 계면 트랩 밀도와 게이트 누설 전류를 조사하여, Metal-Oxide-Nitride-Oxide-Silicon (MONOS) 메모리 소자의 계면 트랩 특성의 수소-질소 열처리 효과를 조사하였다. 고속열처리 방법으로 850도에서 30초 동안 열처리한 MONOS 샘플들을 질소 가스와 수소-질소 혼합 가스를 사용하여 450도에서 30분 동안추가 퍼니스 열처리 공정을 수행하였다. 열처리 하지 않은 것, 질소, 수소-질소로 열처리 한 세 개의 샘플 중에서, 커패시터-전압 측정 결과로부터 수소-질소 열처리 샘플들이 가장 적은 계면 트랩 밀도를 갖는 것을 확인하였다. 또한, 전류-전압 측정 결과에서, 수소-질소 열처리 소자의 누설전류 특성이 개선되었다. 위의 실험 결과로부터, 수소-질소 혼합 가스로 추가 퍼니스 열처리의해 실리콘 기판과 산화막 사이의 계면 트랩 밀도를 상당히 줄일 수 있었다.

가스 조성이 저유전상수 a-C:F 층간절연막의 특성에 미치는 영향 (Effect of gas composition on the characteristics of a-C:F thin films for use as low dielectric constant ILD)

  • 박정원;양성훈;이석형;손세일;오경희;박종완
    • 한국진공학회지
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    • 제7권4호
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    • pp.368-373
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    • 1998
  • 초고집적 회로의 미세화에 따라 다층배선에서 기생저항(parasitic resistance)과 정전 용량의 증가는 RC시정수(time constant)의 증가로 인하여 소자의 동작속도를 제한하고 있 다. 이로 인하여 발생되는 배선지연의 문제를 해결하기 위하여 매우 낮은 유전상수를 갖는 층간 절연물질이 필요하다. 이러한 저유전상수 층간절연물질로서 현재 유기계 물질중의 하 나인 a-C:F이 주목받고 있는 물질이다. 본 연구에서는 ECRCVD를 이용하여 a-C:F박막과 Si기판사이의 밀착력을 향상시키기 위하여 a-C:H박막을 500$\AA$증착한 후 a-C:F을 증착전력 500W에서 원료가스의 유량비($C_2F_6, CH_4/(C_2F_6+CH_4)$))를 0~1.0까지 변화시키면서 상온에서 증착하 였다. a-C:F박막의 특성은 SEM, FT0IR, XPS, C-V meter와 AFM등을 이용하여 두께, 결 합상태, 유전상수, 표면형상 및 표면 거칠기를 관찰하였다. a-C:F박막에서 불소함량은 가스 유량비가 1.0일 경우에는 최대 약31at.%정도 검출되었으며, 가스 유량비가 증가됨에 따라 증 가하였다. 또한 유전상수는 a-C:H의 유전상수 $\varepsilon$=3.8에서 $\varepsilon$=2.35까지 감소하였다. 이는 영 구 쌍극자 모멘트가 1.5인 C-H결합은 감소하고 영구 쌍극자 모멘트가 0.6, 0.5인 CF, CF2결 합이 증가하였기 때문이다. 하지만 $400^{\circ}C$에서 질소분위기로 1시간 동안 furnace열처리 후에 가스유량비가 1.0인 a-C:F박막에서 불소의 함량이 감소하여 C-F결합이 줄어들었다. 이로 인하여 유전상수가 열처리전의 2.7에서 열처리후 3.2까지 상승하였다.

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MACRO-SHEAR BOND STRENGTH AND MICRO-SHEAR BOND STRENGTH OF CEROMER BONDED TO METAL ALLOY AND FIBER REINFORCED COMPOSITE

  • Park Hyung-Yoon;Cho Lee-Ra;Cho Kyung-Mo;Park Chan-Jin
    • 대한치과보철학회지
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    • 제42권6호
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    • pp.654-663
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    • 2004
  • Statement of problem. According to the fracture pattern in several reports, fractures most frequently occur in the interface between the ceromer and the substructure. Purpose. The aim of this in vitro study was to compare the macro shear bond strength and microshear bond strength of a ceromer bonded to a fiber reinforced composite (FRC) as well as metal alloys. Material and methods. Ten of the following substructures, type II gold alloy, Co-Cr alloy, Ni-Cr alloy, and FRC (Vectris) substructures with a 12 mm in diameter, were imbedded in acrylic resin and ground with 400, and 1, 000-grit sandpaper. The metal primer and wetting agent were applied to the sandblasted bonding area of the metal specimens and the FRC specimens, respectively. The ceromer was placed onto a 6 mm diameter and 3 mm height mold in the macro-shear test and 1 mm diameter and 2 mm height mold in the micro-shear test, and then polymerized. The macro- and micro-shear bond strength were measured using a universal testing machine and a micro-shear tester, respectively. The macro- and micro-shear strength were analyzed with ANOVA and a post-hoc Scheffe adjustment ($\alpha$ = .05). The fracture surfaces of the crowns were then examined by scanning electron microscopy to determine the mode of failure. Chi-square test was used to identify the differences in the failure mode. Results. The macro-shear strength and the micro-shear strength differed significantly with the types of substructure (P<.001). Although the ceromer/FRC group showed the highest macroand micro-shear strength, the micro-shear strength was not significantly different from that of the base metal alloy groups. The base metal alloy substructure groups showed the lowest mean macro-shear strength. However, the gold alloy substructure group exhibited the least micro-shear strength. The micro-shear strength was higher than the macro-shear strength excluding the gold alloy substructure group. Adhesive failure was most frequent type of fracture in the ceromer specimens bonded to the gold alloys. Cohesive failure at the ceromer layer was more common in the base metals and FRC substructures. Conclusion. The Vectris substructure had higher shear strength than the other substructures. Although the shear strength of the ceromer bonded to the base metals was lower than that of the gold alloy, the micro-shear strength of the base metals were superior to that of the gold alloy.

Avoidance of Internal Resonances in Hemispherical Resonator Assemblies from Fused Quartz Connected by Indium Solder

  • 세르게이 사라플로프;이희남;박상진
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2013년도 춘계학술대회 논문집
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    • pp.835-841
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    • 2013
  • Modern solid-state gyroscopes (HRG) with hemispherical resonators from high-purity quartz glass and special surface superfinishing and ultrathin gold coating become the best instruments for precise-grade inertial reference units (IRU) targeting long-term space missions. Designing of these sensors could be a notable contribution into development of Korea as a space nation. In participial, 40mm diameter thin-shell resonator from high-purity fused quartz, fabricated as a single-piece with its supporting stem has been designed, machined, etched, tuned, tested, and delivered by STM Co. (ATS of Ukraine) several years ago; an extremely-high Q-factor (upto 10~20 millions) has been shown. Understanding of the best way how to match such a unique sensor with inner glass assembly of the gyro means how to use the high potential in a maximal extent; and this has become the urgent task. Inner quartz glass assembly has a very thin indium (In) layer soldered the resonator and its silica base (case), but effects of internal resonances between operational modal pair of the shell-cup and its side (parasitic) modes can notable degrade the potential of the sensor as a whole, instead of so low level of resonator's intrinsic losses. Unfortunately, there are special combinations of dimensions of the parts (so-called, "resonant sizes"), when intensive losses of energy occurs. The authors proposed to use the length of stem's fixture as an additional design parameter to avoid such cases. So-called, a cyclic scheme of finite element method (FEM) and ANSYS software were employed to estimate different combinations of gyro assembly parameters. This variant has no mismatches of numerical origin due to FEM's discrete mesh. The optimum length and dangerous "resonant lengths" have been found. The special attention has been paid to analyses of 3D effects in a cup-stem transient zone, including determination of a difference between the positions of geometrical Pole of the resonant hemisphere and of its "dynamical Pole", i.e., its real zone of oscillation node. Boundary effects between the shell (cup) and 3D short "beams" (inner and outer stems) have been ranged. The results of the numerical experiments have been compared with the classic model of a quasi-hemispherical shell band with inextensional midsurface, and the solution using Rayleigh's functions of the $1^{st}$ and $2^{nd}$ kinds. To guarantee the truth of the recommended sizes to a designer of the real device, the analytical and FEM results have been compared with experimental data for a party of real resonators. The consistency of the results obtained by different means has been shown with errors less than 5%. The results notably differ from the data published earlier by different researchers.

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석탄 가스화기에서의 고알루미나 내화물의 손상 기구 규명 (Investigation of Degradation Mechanism of High Alumina Refractory in a Coal Gasifier)

  • 김유나;이재구;오명숙
    • 공업화학
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    • 제20권6호
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    • pp.638-645
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    • 2009
  • 가스화기에서 사용된 고알루미나계 내화물을 분석하여 용융 슬래그에 의한 손상 메커니즘을 조사하였다. 내화물 시료에서 슬래그에 의해 심하게 손상된 부분의 깊이는 부착된 슬래그를 포함하여 12~40 mm이었으며 슬래그 접촉면과 평행 방향으로 형성된 균열을 가지고 있었다. 슬래그와 접촉한 내화물은 미세구조에 따라 손상도가 다르게 나타났다. Fused $Al_2O_3$ 그레인의 경우 경계에서만 깨짐과 기공형성이 관찰되었고, tablet $Al_2O_3$의 경우 슬래그가 입자사이로 침투하여 입자 테두리에 Fe-Al 화합물이 관찰되었다. 결합제로 쓰인 calcium aluminate는 고온의 슬래그 접촉면에서는 슬래그에 용해되어 관찰되지 않았다. 큰 grain 주변에는 냉각 시 재결정된 것으로 보이는 막대형의 $Al_2O_3$ 상이 형성되었고 큰 기공들이 관찰되었다. 따라서 고알루미나계 내화물은 고온의 슬래그 경계면에서 결합제가 석탄 슬래그에 용융되고, 냉각 시 막대형의 알루미나를 형성하며, 이 과정에서 구조적인 변화에 의한 크랙이 형성되면서 구조적 스폴링에 의한 물리적 손상의 영향을 받는 것으로 보인다.

Molecular Conductance Switching Processes through Single Ruthenium Complex Molecules in Self-Assembled Monolayers

  • 서소현;이정현;방경숙;이효영
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.27-27
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    • 2011
  • For the design of real applicable molecular devices, current-voltage properties through molecular nanostructures such as metal-molecule-metal junctions (molecular junctions) have been studied extensively. In thiolate monolayers on the gold electrode, the chemical bonding of sulfur to gold and the van der Waals interactions between the alkyl chains of neighboring molecules are important factors in the formation of well-defined monolayers and in the control of the electron transport rate. Charge transport through the molecular junctions depends significantly on the energy levels of molecules relative to the Fermi levels of the contacts and the electronic structure of the molecule. It is important to understand the interfacial electron transport in accordance with the increased film thickness of alkyl chains that are known as an insulating layer, but are required for molecular device fabrication. Thiol-tethered RuII terpyridine complexes were synthesized for a voltage-driven molecular switch and used to understand the switch-on mechanism of the molecular switches of single metal complexes in the solid-state molecular junction in a vacuum. Electrochemical voltammetry and current-voltage (I-V) characteristics are measured to elucidate electron transport processes in the bistable conducting states of single molecular junctions of a molecular switch, Ru(II) terpyridine complexes. (1) On the basis of the Ru-centered electrochemical reaction data, the electron transport rate increases in the mixed self-assembled monolayer (SAM) of Ru(II) terpyridine complexes, indicating strong electronic coupling between the redox center and the substrate, along the molecules. (2) In a low-conducting state before switch-on, I-V characteristics are fitted to a direct tunneling model, and the estimated tunneling decay constant across the Ru(II) terpyridine complex is found to be smaller than that of alkanethiol. (3) The threshold voltages for the switch-on from low- to high-conducting states are identical, corresponding to the electron affinity of the molecules. (4) A high-conducting state after switch-on remains in the reverse voltage sweep, and a linear relationship of the current to the voltage is obtained. These results reveal electron transport paths via the redox centers of the Ru(II) terpyridine complexes, a molecular switch.

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아라미드 섬유 쉬트를 이용한 철골 보 부재의 휨 보강 성능에 관한 실험적 연구 (Experimental Study on the Flexural Performance of Steel Beams Reinforced by AFRP Sheets)

  • 김강석;나환선;김강식;이현주;이강민
    • 한국구조물진단유지관리공학회 논문집
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    • 제15권2호
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    • pp.61-69
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    • 2011
  • 강 구조물의 보강공법으로는 강판 보강공법이 대표적인 방법으로 통용되고 있으나, 일부 구조물에서는 고정 설비 및 기타 간섭물로 인하여 보강 시공이 번거롭고, 보강부재 접합시 원부재의 단면 손실이 수반되는 단점이 있다. 최근, 강재의 원가 상승으로 강판 보강공사의 시공비가 증가되고 있는 실정이다. 반면, 복합소재를 이용한 보강공사의 경우는 재료의 자중이 가벼워서 보강재 취급이 수월하고 내화학성능이 우수하기 때문에 유지비용이 절감되기 때문에 콘크리트 구조물에서는 널리 사용되고 있다. 본 논문에서는 복합소재를 이용한 강 구조물의 보강의 기술적 가능성을 검증하기 위해 강재와 복합소재와의 부착성능 및 보 부재를 통해 휨 보강 성능을 평가하였다. 그 결과, 항복 이전까지는 강재와 아라미드섬유 쉬트가 일체 거동에 따른 보강효과를 예상할 수가 있었다. 또한, 보강 겹수가 증가함에 따라 무보강 실험체 대비 내력이 증가했지만, 예상 보강효과(1 겹에서 12.5 %, 2겹에서 25 %)에 비해 절반 정도의 수준의 개선효과를 보였다. 그 이유는 모든 보강 실험체가 계면파괴로 파단되었고, 이후 아라미드섬유 쉬트가 실험체 내력 개선에 영향을 미치지 못했기 때문이다. 따라서, 최근 복합소재의 재료적 개선 및 접착제의 부착성능 향상으로 인하여 강 구조물의 보강공사에 적용할 수 있는 가능성을 찾을 수 있었으나, 보강성능을 향상시키기 위한 부착성능 향상을 위한 방법에 대한 연구가 필요하다고 판단된다.

Microabrasive로 처리한 상아질표면에 대한 복합레진의 결합강도에 관한 연구 (A STUDY OF THE BOND STRENGTHS OF COMPOSITE RESIN TO DENTIN SURFACES PREPARED WITH MICROABRASIVE)

  • 최경규;민병순
    • Restorative Dentistry and Endodontics
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    • 제22권1호
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    • pp.61-75
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    • 1997
  • The bond strengths of composite resin to tooth dentin vary with the methods of cavity preparation and surface treatment. Recent developments in techniques of dentinal surface treatment have renewed interest in microabrasive as a means of tooth preparation, The purpose of this study was to determine the effects of a new method of cavity preparation on the bond of composite resin to dentin. Freshly extracted 144 healthy human third molars were used in this study. The dentin surfaces prepared with #600 SiC abrasive paper were divided into control and air abrasion groups according to the method of dentin surface preparation using different combinations of delivery pressure, time, and acid etching. The shear bond strengths were measured after the composite resin (Clearfil Photo Bright) was bonded to prepared dentin surfaces by light-curing using a dentin bonding system (All-bond 2), In addition, the average surface roughness was measured to investigate the effect of differently prepared dentin surfaces on the shear bond strengths. The surface changes of prepared dentin and the debonded dentin surfaces were observed with SEM (S-2300, Hitachi Co., Japan). The following results from this-study were obtained ; 1. There was no significant difference of shear bond strengths according to the changes of delivery pressure and time. 2. The shear bond strengths were lower than the control in the air abraded-only groups, but those of the additional acid-etched groups were higher than the control. 3. The shear bond strengths to all air-abraded surfaces were increased by acid etching. 4. The correlation between shear bond strengths and surface roughness was not certain, although the mean surface roughness of all air-abraded surfaces has increased evidently while it has slightly decreased for additional acid etching. 5. On SEM examination, the dentinal tubules were almost occluded in the air abraded-only groups, but those were opened in the additional acid-etched groups. 6. The debonded surfaces were showed adhesive failure mode in the air abraded- only groups, while those were showed mainly the mixed and cohesive failure mode in the additional acid-etched groups. These results suggest that the layer produced during cavity preparation or surface treatment with air abrasion must be removed for maximum bond strength of composite resin to dentin.

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이원중합형 코어 축조용 복합레진의 결합강도에 대한 NaOCI의 영향에 대한 연구 (Influence of Sodium Hypochlorite on Bond Strength of Dual-cured Core Build-up Resin Composite)

  • 이준봉;박종덕;권수미;유미경;이광원
    • 구강회복응용과학지
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    • 제23권4호
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    • pp.283-292
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    • 2007
  • Two-step or one-step bonding systems generally inhibit curing process of dual-cured core build-up resin composite for their adhesive acidity. In addition this dual-cured core build-up resin composite can be applied to dentin of pulp chamber and root at the time that complete the endodontic treatment. The purpose of this investigation was to determine the influence of sodium hypochlorite on rnicrotensile bond strength of dual-cured core build-up resin composite. Extracted human molars were horizontally sectioned with 1mm thickness using low speed diamond saw. After the sectioned specimens were divided into 8 groups, adhesive systems (Clearfil SE-Bond, Prime&Bond NT[2-step, 1-step], Adper Prompt L-Pop) were then applied with or without sodium hypochlorite pretreatment. The treated specimen was filled with dual-cured core build-up resin composite (Luxacore, DMG corp., German). Then light cured for 40 seconds and soaked in $37^{\circ}C$ water bath for 24 hours. After the treated specimen was grinded with 1mm width and measured rnicrotensile bond strength by testing machine. Additionally 8 teeth were prepared for SEM evaluation. The results were as follows. : NaOCl treated groups generally had lower rnicrotensile bond strength but did not show any difference statistically except Adper Prompt L-Pop. When the teeth were treated by NaOCl, though the difference of applied adhesive system, it had no statistically significant difference within the NaOCl treated groups except the relation of between ClearFil SE-Bond adhesive system and Adper Prompt L-Pop adhesive system. In the SEM evaluation, NaOCl treated groups presented relatively long resin tags and incomplete hybrid layer formation generally.

수종(數種) 표면처리제(表面處理劑)에 의(依)한 상아질(象牙質) 표면(表面)의 형태(形態) 변화(變化)에 관(關)한 연구(硏究) (MORPHOLOGICAL CHANGES OF DENTIN SURFACE TREATED WITH VARIOUS DENTIN SURFACE CONDITIONERS)

  • 조진호;최호영;민병순;박상진
    • Restorative Dentistry and Endodontics
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    • 제13권2호
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    • pp.323-334
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    • 1988
  • The purpose of this study was to observe the effect of dentin surface conditioners on the dentin surfaces. Freshly extracted human molars were used in this study. They were stored at $4^{\circ}C$ saline solution before experiment. The crown portions of the teeth were cut in various directions by means of wet diamond point to expose dentin which include transverse, vertical oblique, horizontal and oblique cut to the long axis (Fig. 1). Each tooth was then mounted with self curing acrylic resin in brass ring to expose the flattened dentin surfaces. Final finish was accomplished by grinding the dentin specimens with wet No. 180 and No. 600 grit silicon carbide abrasive paper until a 6.0mm in diameter on a dentin surface was exposed without pulp exposure. The specimens were divided into 9 groups according to the modes of dentin treatment procedure. The following surface treatments were applied on these preparation surfaces; Group 1: unetched (control group) after finish with No. 600 silicon carbide abrasive paper. Group 2: etched with 30% phosphoric acid for 60s Group 3: etched with 10-3 solution for 60s Group 4: Cleaned with 5% NaOCl for 30s Group 5: applied Dentin Adhesit Group 6: cleaned with 5% NaOCl followed by applying the Dentin Adhesit$^{(R)}$ Group 7: applied Photo Bond on the unetched dentin followed by applying the Photo Clearfil Bright Group 8: Etched with 30% phosphoric acid followed by applying Photo Bond and Photo Clearfil Bright Group 9: etched with 10-3 solution followed by applying Photo Bond and Photo Clearfil Bright All the specimens were stored in $37^{\circ}C$ under 50% relative humidity for 24 hours before observations. The specimens in 7, 8, and 9 group, omitting the group 1 to 6, were demineralized in 10% HCl for 10s in order to observe the resin tags. All the specimens in each group were then dried at room temperature. The dried specimens were ion coated with Eiko ion coater (Eiko-engineering Co.), and observed in Hitachi S-430 Scanning electron microscope (Hitachi, Co. Tokyo) at 15KV. The following results were obtained as follows; 1. The smear layers were still remained in group 1,2,4,5, and 6. 2. There is no effect of 5% NaOCl and 30% phosphoric acid on the changes of dentin morphology 3. The dentin treated with 10-3 solution, indicating the tubules opened when the smear layer and the dental plug dissolved. 4. In case of applying the bonding agents the resin tag was not formed at the deep area of dentinal tubules, but in case of applying the Dentin Adhesit$^{(R)}$ that was not.

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