• Title/Summary/Keyword: Bonding layer

Search Result 771, Processing Time 0.029 seconds

Silicon Capacitive Pressure Sensor for Low Pressure Measurements (저 압력 측정을 위한 실리콘 용량형 압력센서)

  • Seo, Hee-Don;Lee, Youn-Hee;Park, Jong-Dae;Choi, Se-Gon
    • Journal of Sensor Science and Technology
    • /
    • v.2 no.1
    • /
    • pp.19-27
    • /
    • 1993
  • Capacitive pressure sensor for low pressure measurements has been fabricated by using $n^{+}$ epitaxial layer electrochemical etching stop and glass-to-silicon electrostatic bonding technique. The sensor had hybrid configuration of a sensor chip, which consists of sensor capacitor and reference capacitor, and two output signal detection IC chips. A fabricated sensor, with a $1.0{\times}1.0 mm^{2}$ square size and a $10{\mu}m$ thick flat diaphragm, showed a 7.1 pF zero pressure capacitance, and 5.2 % F.S, sensitivity in 10 KPa pressure range. By using a capacitance to voltage converter, the thermal zero shift of 0.051 %F.S./$^{\circ}C$ and the thermal sensitivity shift of 0.12 %F.S./$^{\circ}C$ for temperature range of $5{\sim}45^{\circ}C$ were obtained.

  • PDF

Fabrication Process of a Nano-precision Polydimethylsiloxane Replica using Vacuum Pressure-Difference Technique (진공 압력차이법에 의한 나노 정밀도를 가지는 폴리디메틸실록산 형상복제)

  • 박상후;임태우;양동열;공홍진;이광섭
    • Polymer(Korea)
    • /
    • v.28 no.4
    • /
    • pp.305-313
    • /
    • 2004
  • A vacuum pressure-difference technique for making a nano-precision replica is investigated for various applications. Master patterns for replication were fabricated using a nano-replication printing (nRP) process. In the nRP process, any picture and pattern can be replicated from a bitmap figure file in the range of several micrometers with resolution of 200nm. A liquid-state monomer is solidified by two-photon absorption (TPA) induced by a femto-second laser according to a voxel matrix scanning. After polymerization, the remaining monomers were removed simply by using ethanol droplets. And then, a gold metal layer of about 30nm thickness was deposited on the fabricated master patterns prior to polydimethylsiloxane molding for preventing bonding between the master and the polydimethylsiloxane mold. A few gold particles attached on the polydimethylsiloxane stamp during detaching process were removed by a gold selecting etchant. After fabricating the polydimethylsiloxane mold, a nano-precision polydimethylsiloxane replica was reproduced. More precise replica was produced by the vacuum pressure-difference technique that is proposed in this paper. Through this study, direct patterning on a glass plate, replicating a polydimethylsiloxane mold, and reproducing polydimethylsiloxane replica are demonstrated with a vacuum pressure-difference technique for various micro/nano-applications.

Characteristics of PECVD-W thin films deposited on $Si_3N_4$ ($Si_3N_4$상에 PECVD법으로 형성한 텅스텐 박막의 특성)

  • 이찬용;배성찬;최시영
    • Journal of the Korean Vacuum Society
    • /
    • v.7 no.2
    • /
    • pp.141-149
    • /
    • 1998
  • The W thin films were deposited on Si3N4 by a PECVD technique. The effects of substrate temperature and gas flow ratio on the properties of the W films were investigated. The deposition of W films were limited by surface reaction at the temperature range of 150>~$250^{\circ}C$, W films had the deposition rate of 150~530 $\AA$/min and stress of 0.85~$14.35\times10 ^9 \textrm {dynes/cm}^2}$ at various substrate temperatures and $SiH_4/WF_6$ flow ratios. $SiH_4/WF_6$ flow ratio affected the deposition rate and stress of the W films, expecially, excessive flow of SiH4 abruptly changed the structure, chemical bonding, and stress of the W films. Among the deposited W films on TiN, Ti, Mo, NiCr and Al adhesion layer, the one on the Al had the best adhesion property.

  • PDF

A Evaluation of Corrosion Resistance on the Thermal Sprayed Coating Tube and Cladded Tube of the Open Rack Vaporizer (용사코팅튜브와 클래드튜브 기화기에 대한 내식성 평가)

  • Baek Jong-Hyun;Lee Jae-Ho;Kim Yong-Seog;Shin Dong-Hyuck;Kim Woo-Sik
    • Journal of the Korean Institute of Gas
    • /
    • v.2 no.4
    • /
    • pp.67-72
    • /
    • 1998
  • Due to excellent corrosion resistance, in particular against sea water, Al-2wt.$\%$Zn alloys have been used as the sacrifice anode material for tube of the ORV. Al-2wt.$\%$Zn alloys thermal-sprayed coating, however, were spalled on the lower part of ORV due to the lack of bonding strength between base material and coating layer and the dropping energy of sea water, To overcome the problems of the thermal spray coating, we developed the cladded tube manufacturing process by coextrusion of the clad and base metal. The corrosion resistance of cladded tube was improved by two times at least, compared with that of the present thermal spray coated vaporizer tubes.

  • PDF

Cyclic behaviour and modelling of stainless-clad bimetallic steels with various clad ratios

  • Liu, Xinpei;Ban, Huiyong;Zhu, Juncheng;Uy, Brian
    • Steel and Composite Structures
    • /
    • v.34 no.2
    • /
    • pp.189-213
    • /
    • 2020
  • Stainless-clad (SC) bimetallic steels that are manufactured by metallurgically bonding stainless steels as cladding metal and conventional mild steels as substrate metal, are kind of advanced steel plate products. Such advanced composite steels are gaining increasingly widespread usage in a range of engineering structures and have great potential to be used extensively for large civil and building infrastructures. Unfortunately, research work on the SC bimetallic steels from material level to structural design level for the applications in structural engineering field is very limited. Therefore, the aim of this paper is to investigate the material behaviour of the SC bimetallic steels under the cyclic loading which structural steels usually could encounter in seismic scenario. A number of SC bimetallic steel coupon specimens are tested under monotonic and cyclic loadings. The experimental monotonic and cyclic stress-strain curves of the SC bimetallic steels are obtained and analysed. The effects of the clad ratio that is defined as the ratio of the thickness of cladding layer to the total thickness of SC bimetallic steel plate on the monotonic and cyclic behaviour of the SC bimetallic steels are studied. Based on the experimental observations, a cyclic constitutive model with combined hardening criterion is recommended for numerical simulation of the cyclic behaviour of the SC bimetallic steels. The parameters of the constitutive model for the SC bimetallic steels with various clad ratios are calibrated. The research outcome presented in this paper may provide essential reference for further seismic analysis of structures fabricated from the SC bimetallic steels.

Effect of Multiple Reflows on the Mechanical Reliability of Solder Joint in LED Package (LED 패키지 솔더 접합부의 기계적 신뢰성에 미치는 리플로우 횟수의 영향)

  • Lee, Young-Chul;Kim, Kwang-Seok;Ahn, Ji-Hyuk;Yoon, Jeong-Won;Ko, Min-Kwan;Jung, Seung-Boo
    • Korean Journal of Metals and Materials
    • /
    • v.48 no.11
    • /
    • pp.1035-1040
    • /
    • 2010
  • The research efforts on GaN-based light-emitting diodes (LEDs) keep increasing due to their significant impact on the illumination industry. Surface mount technology (SMT) is widely used to mount the LED packages for practical application. In surface mount soldering both the device body and leads are intentionally heated by a reflow process. We studied on the effects of multiple reflows on microstructural variation and joint strength of the solder joints between the LED package and the substrate. In this study, Pb-free Sn-3.0Ag-0.5Cu solder and a finished pad with organic solderability preservatives (OSP) were employed. A $Cu_6Sn_5$ intermetallic compound (IMC) layer was formed during the multiple reflows, and the thickness of the IMC layerincreased with an increasing number of reflows. The shear force decreased after three reflows. From the observation of the fracture surface after a shear test, partially brittle fractures were observed after five reflows.

Interfacial Properties of Friction-Welded TiAl and SCM440 Alloys with Cu as Insert Metal (삽입금속 Cu를 이용한 TiAl 합금과 SCM440의 마찰용접 계면 특성)

  • Park, Sung-Hyun;Kim, Ki-Young;Park, Jong-Moon;Choi, In-Chul;Ito, Kazuhiro;Oh, Myung-Hoon
    • Korean Journal of Materials Research
    • /
    • v.29 no.4
    • /
    • pp.258-263
    • /
    • 2019
  • Since the directly bonded interface between TiAl alloy and SCM440 includes lots of cracks and generated intermetallic compounds(IMCs) such as TiC, FeTi, and $Fe_2Ti$, the interfacial strength can be significantly reduced. Therefore, in this study, Cu is selected as an insert metal to improve the lower tensile strength of the joint between TiAl alloy and SCM440 during friction welding. As a result, newly formed IMCs, such as $Cu_2TiAl$, CuTiAl, and $TiCu_2$, are found at the interface between TiAl alloy and Cu layer and the thickness of IMCs layers is found to vary with friction time. In addition, to determine the relationship between the thickness of the IMCs and the strength of the welded interfaces, a tensile test was performed using sub-size specimens obtained from the center to the peripheral region of the friction-welded interface. The results are discussed in terms of changes in the IMCs and the underlying deformation mechanism. Finally, it is found that the friction welding process needs to be idealized because IMCs generated between TiAl alloy and Cu act to not only increase the bonding strength but also form an easy path of fracture propagation.

Ag Sintering Die Attach Technology for Wide-bandgap Power Semiconductor Packaging (Wide-bandgap 전력반도체 패키징을 위한 Ag 소결 다이접합 기술)

  • Min-Su Kim;Dongjin Kim
    • Journal of the Microelectronics and Packaging Society
    • /
    • v.30 no.1
    • /
    • pp.1-16
    • /
    • 2023
  • Recently, the shift to next-generation wide-bandgap (WBG) power semiconductor for electric vehicle is accelerated due to the need to improve power conversion efficiency and to overcome the limitation of conventional Si power semiconductor. With the adoption of WBG semiconductor, it is also required that the packaging materials for power modules have high temperature durability. As an alternative to conventional high-temperature Pb-based solder, Ag sintering die attach, which is one of the power module packaging process, is receiving attention. In this study, we will introduce the recent research trends on the Ag sintering die attach process. The effects of sintering parameters on the bonding properties and methodology on the exact physical properties of Ag sintered layer by the realization 3D image are discussed. In addition, trends in thermal shock and power cycle reliability test results for power module are discussed.

Pomegranate extract on eroded dentin: antioxidant action, bond strength and morphology of the adhesive interface after aging

  • Thiago Vinicius Cortez;Nathalia Mancioppi Cerqueira;Julia Adornes Gallas;Wanderley Pereira Oliveira;Silmara Aparecida Milori Corona;Aline Evangelista Souza-Gabriel
    • Restorative Dentistry and Endodontics
    • /
    • v.49 no.1
    • /
    • pp.9.1-9.14
    • /
    • 2024
  • Objectives: This study aimed to evaluate the effect of pomegranate solution (Punica granatum) on eroded dentin through antioxidant action, shear bond strength (SBS) and interface morphology. Materials and Methods: The 10% pomegranate peel extract was prepared by the lyophilization method. Punicalagin polyphenol was confirmed by high-performance liquid chromatography. Antioxidant activity was evaluated by capturing the 2,2-diphenyl1-picrylhydrazyl (DPPH) radical. For the SBS, 48 dentin fragments were divided into sound or eroded, and subdivided according to the pretreatment (n = 12): water or P. granatum. The surfaces were restored with self-etch adhesive and a bulk-fill resin (Ecosite; DMG). The SBS was done immediately (24 hours) and after thermal cycling + water storage (12 months). For scanning electron microscopy, 48 dentin fragments (24 sound and 24 eroded) received the same treatments as for SBS (n = 6), and they were analyzed after 24 hours and 12 months. Results: The P. granatum had antioxidant action similar (p = 0.246) to the phenolic standard antioxidants. After 24 hours, eroded dentin had lower SBS than sound dentin (p < 0.001), regardless of the pretreatment. After 12 months, P. granatum maintained the SBS of sound dentin (13.46 ± 3.42 MPa) and eroded dentin (10.96 ± 1.90 MPa) statistically similar. The lowest values were found on eroded dentin treated with water (5.75 ± 1.65 MPa) (p < 0.001). P. granatum on eroded dentin caused peritubular demineralization and hybrid layer with resin tags. Conclusions: The pomegranate extract had antioxidant action and preserved the adhesive interface of the eroded dentin.

A STUDY OF SHEAR BOND STRENGTH OF ER:YAG LASER-IRRADIATED PRIMARY DENTIN (Er:YAG 레이저를 조사한 유치 상아질의 전단결합강도에 관한 연구)

  • Lee, Jin-Hwa;Kim, Jong-Soo;Yoo, Seung-Hoon
    • Journal of the korean academy of Pediatric Dentistry
    • /
    • v.34 no.4
    • /
    • pp.569-578
    • /
    • 2007
  • This study was performed to compare the shear bond strength of self etching system and two bottle bonding system with or without laser preparation. Group I was prepared with high speed rotary instrument and $Prompt^{TM}$ L-$Pop^{TM}$, group II with Er:YAG laser and $Prompt^{TM}$ L-$Pop^{TM}$, group III with Er:YAG laser, 37% phosphoric acid and Single bond, group IV with Er:YAG laser and Single bond and group V with high speed, etching and Single bond. And also observation of the prepared and etched dentin surface were performed under scanning electro-microscope. The possibility of clinical application of laser preparation which might have an advantage to reduce pain for children with less unfavorable noise were evaluated. The results obtained are as follows; 1. Group V showed significantly higher bond strength than other groups. And group IV showed significantly lower bond strength than other groups. 2. There was no significant difference between group I and group III. 3. Group II showed significantly lower bond strength than group I, III, V, but showed significantly higher bond strength than group IV. 4. Under scanning electro-microscope, laser-preparated dentin surface showed high irregularity and no smear layer. The surface showed less irregularities and more exposed dentinal tubules with etching. Laser preparation has many advantages over conventional tooth preparation. But this method showed lower resin bonding strength. Laser preparated tooth surface differed from the conventionally preparated tooth surface. More researches are needed on suitable methods for laser preparated dentin surface.

  • PDF