• Journal of applied mathematics & informatics
• /
• 제9권1호
• /
• pp.27-43
• /
• 2002

Finite element Galerkin solutions for the strongly damped extensible beam equations are considered. The semidiscrete scheme and a fully discrete time Galerkin method are studied and the corresponding stability and error estimates are obtained. Ratios of numerical convergence are given.

• 한국전자파학회논문지
• /
• 제14권4호
• /
• pp.413-420
• /
• 2003

본 논문에서는 위성통신용 능동 위상배열 안테나에서 주파수 스캔 효과에 의하여 발생하는 안테나 빔 패턴의 지향 오차를 보상하는 방법을 제안한다. 능동 위상배열 안테나가 두 개의 빔 패턴을 위하여 두 개의 배열이 직렬 연결되고 배열 수가 비대칭인 경우에, 두 빔의 적용 주파수가 다르고 주파수 간격이 크며 빔 폭이 좁고 스캔각이 크면 안테나는 주파수 스캔 효과에 의해 빔 지향 오차가 발생한다 제안되는 수식을 사용하면, 빔 지향오차 각을 예측하여 계산할 수 있으며 이를 보상하는 능동 위상배열 안테나의 위상제어 값을 계산할 수 있다. 본 논문에서는 첫째 층 32$\times$4 배열과 둘째 층 4$\times$2 배열 구조로부터 두 개의 안테나 빔을 가지고, 7.25 GHz~7.75 GHz 주파수 대역에서 두 빔의 주파수 편차가 최대 500 MHz(6.7 %)이며, 주파수 스캔 범위가 0$^{\circ}$~$\pm$35$^{\circ}$이고, 35.6 dBi 이득과 2.2$^{\circ}$의 3 dB 빔 폭을 가지는 능동 위상배열 안테나 시스템을 제작하고, 주파수 스캔효과에 의한 빔 지향 오차를 제안된 방법의 적용 전과 적용 후에 측정 비교하였다. 주파수 스캔 효과에 의한 빔 지향 오차는 보상 전에 최대 2.5$^{\circ}$였으나, 보상 후에는 최대 0.2$^{\circ}$오차로 감소하였다. 제안된 보상으로 안테나 시스템은 7 dB 신호감쇄가 보상되었다. 제안된 보상으로 능동 위상배열 안테나는 통신을 위한 목표 위성을 정확하게 지향할 수 있다.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 춘계학술대회 논문집
• /
• pp.1186-1189
• /
• 2005

Focused Ion Beam machining is an attractive approach to produce nano-scale 3D structures. However, like other beam-based manufacturing processes, the redeposition of the sputtered material during the machining deteriorates the geometric accuracy of ion beam machining. In this research a new approach to reduce the geometric error in FIB machining is introduced. The observed redeposition phenomena have been compared with existing theoretical model. Although the redeposition effect has good repeatability the prediction of exact amount of geometric error in ion beam machining is difficult. Therefore, proposed method utilizes process control approach. Developed algorithm measures the redeposition amount after every production cycle and modifies next process plan. The method has been implemented to a real FIB machine and the experimental results demonstrated considerable improvement of five micrometer-sized pocket machining.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2003년도 춘계학술대회 논문집
• /
• pp.434-437
• /
• 2003

Evaluation or the patterning accuracy of e-beam lithography machines requires a high precision inspection system that is capable of measuring the true xy-locations of fiducial marks generated by the e-beam machine under test. Fiducial marks are fabricated on a single photo mask over the entire working area in the form of equally spaced two-dimensional grids. In performing the evaluation, the principles of self-calibration enable to determine the deviations of fiducial marks from their nominal xy-locations precisely, not being affected by the motion errors of the inspection system itself. It is. however, the fact that only repeatable motion errors can be eliminated, while random motion errors encountered in probing the locations of fiducial marks are not removed. Even worse, a random error occurring from the measurement of a single mark propagates and affects in determining locations of other marks, which phenomenon in fact limits the ultimate calibration accuracy of e-beam machines. In this paper, we describe an uncertainty analysis that has been made to investigate how random errors affect the final result of self-calibration of e-beam machines when one uses an optical inspection system equipped with high-resolution microscope objectives and a precision xy-stages. The guide of uncertainty analysis recommended by the International Organization for Standardization is faithfully followed along with necessary sensitivity analysis. The uncertainty analysis reveals that among the dominant components of the patterning accuracy of e-beam lithography, the rotationally symmetrical component is most significantly affected by random errors, whose propagation becomes more severe in a cascading manner as the number of fiducial marks increases

• 한국정밀공학회지
• /
• 제26권4호
• /
• pp.128-133
• /
• 2009

Focused-ion-beam (FIB) system is capable of both machining and measuring in nano-scale; hence nano-scale focusing quality is important. This paper investigates design parameters of two electrostatic lenses in order to achieve the best ion beam focusing performance. Commercial SIMION simulator is used to optimize the dimensions of the condenser and objective lenses and investigate the influence of assembly error on focusing quality The simulation results show that the beam focusing quality is not influenced by angle deviation within ${\pm}0.02\;deg$ and geometrical eccentricity within ${\pm}50$ micrometers.

• 대한기계학회논문집B
• /
• 제22권8호
• /
• pp.1073-1082
• /
• 1998

When thermal diffusivity is measured by laser flash method, the thermal diffusivity call be calculated front the assumption of the uniformly heated whole surface of the specimen. It has been known that the approximate 5% error is made by the non-uniform energy distribution on the specimen surface of laser pulse heat source. In this study, to obtain the highly-uniformed laser beam, which has both the low non-uniform heating error from non-uniform laser beam and the energy loss, research was carried out on no transmitting loss by optical fiber and high repetitions. In addition, heating error and thermal diffusivity were measured as the measuring positions were varied and compared with the results using the uniform and the non-uniform laser beams. In addition, dole to using the uniformalized laser beam, the whole surface of the specimen was heated uniformly and as a result, it was the thought that this was very effective to reduce the variations of the errors of the thermal diffusivity as the measuring positions were varied. It can be obtained that when the thermal diffusivity of POCO-AXM-5Q1 of SRM in NBS was measured with both the uniform and the non-uniform laser beams, the dispersion error of the former was from 2 to 2.5%, which was more improved than that of the latter.

• 한국전자통신학회논문지
• /
• 제17권1호
• /
• pp.23-30
• /
• 2022

능동위상배열안테나 시스템은 각 방사 소자에 급전되는 신호의 크기 및 위상을 조절하여 빔 조향, 다중 빔 형성, 적응형 빔 형성 등을 할 수 있다. 능동위상배열안테나 시스템을 이용하여 원하는 방사특성을 얻기 위해서는 각 방사 소자에 정확한 신호의 크기 및 위상값이 급전되어야 한다. 그러나 다양한 원인에 의해 급전 신호 오차가 발생하며, 본 논문에서는 이와 같은 급전 신호의 오차 값을 산출하는 방법을 제안하였다. 제안된 방법은 급전 신호의 오차 추정 절차가 간단하며, 급전 신호 크기 및 위상 오차를 빠르고 정확하게 탐색할 수 있다.

• 반도체디스플레이기술학회지
• /
• 제9권1호
• /
• pp.17-21
• /
• 2010

Currently miniaturized electron-optical columns find their way into electron beam lithography systems. For better lithography process, it is required to make smaller spot size and longer working distance. But, the micro-columns of the multi-beam lithography system suffer from chromatic and spherical aberration, even when the electron beam is exactly on the symmetric axis of the micro-column. The off-axis error of the electron emitting source is expected to become worse with increasing off-axis distance of the focusing spot. Especially the electron beams far from the system optical axis have a non-negligible asymmetric intensity distribution in the micro-column. In this paper, the effect of the off-axis e-beam source is analyzed. To analyze this effect is to introduce a micro-column model of which the e-beam emitting source is aligned with the center of the electron beam by shifting them perpendicular to the system optical axis. The presented solution can be used to analysis the performance of the multi-electron-beam system. The performance parameters, such as the working distances and the focusing position are obtained by the computational simulations as a function of the off-axis distance of the emitting source.

• 한국진공학회지
• /
• 제9권1호
• /
• pp.1-6
• /
• 2000

An unexpected error is produced in calculating the transmission probability of a multipartite duct because of beam and shadow effects, if using a simple summation rule like the Oatley's equation. Particles moving in a tube are directed more or less towards the axis of the tube by the beam effect, and the length of a compound tube shortens virtually by the shadow effect originated from a reduction in the number of particles reaching the corner between two tubes of different cross-sections. Both effects make the transmission probability of the tube connected behind and consequently of the whole duct increase slightly. In this paper sources of the error in the calculation of the transmission probability are analyzed quantitatively and variations in the error depending on the dimensions of cylindrical tubes are calculated.

• Nuclear Engineering and Technology
• /
• 제52권9호
• /
• pp.2064-2071
• /
• 2020

For proton pencil beam scanning (PBS) technology, the accuracy of the dose distribution in a patient is sensitive to the properties of the incident beam. However, mechanical deformation of the proton therapy facility may occur, and this could be an important factor affecting the proton dose distribution in patients. In this paper, we investigated the effect of deformation on an SC200 proton facility's beam isocenter properties. First, mechanical deformation of the PBS nozzle, L-shape plate, and gantry were simulated using a Finite Element code, ANSYS. Then, the impact of the mechanical deformation on the beam's isocenter properties was evaluated using empirical formulas. In addition, we considered the simplest case that could affect the properties of the incident beam (i.e. if only the bending magnet (BG3) has an error in its mounting alignment), and the effect of the beam optics offset on the isocenter characteristics was evaluated. The results showed that the deformation of the beam position in the X and Y direction was less than 0.27 mm, which meets the structural design requirements. Compared to the mechanical deformation of the L-shape plate, the deformation of the gantry had more influence on the beam's isocenter properties. When the error in the mounting alignment of the BG3 is equal to or more than 0.3 mm, the beam deformation at the isocenter exceeds the maximum accepted deformation limits. Generally speaking, for the current design of the SC200 scanning beam delivery system, the effects of mechanical deformation meet the maximum accepted beam deformation limits. In order to further study the effect of the incident beam optics on the isocenter properties, a fine-scale Monte Carlo model including factors relating to the PBS nozzle and the BG3 should be developed in future research.