• Title/Summary/Keyword: Barrier films

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The electrical characteristics of STO dielectric thin films for application of DRAM capacitor. (DRAM 캐패시터 응용을 위한 STO 유전체 박막의 전기적인 특성)

  • 이우선;오금곤;김남오;손경춘;정창수;정용호
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1998.11a
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    • pp.291-294
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    • 1998
  • The objective of this study is to deposited the preparation of STO dielectric thin films on Ag/barrier-mater/Si(N-type 100) bottom electrode using a conventional rf-magnetron sputtering technique with a ceramic target under various conditions. It is demonstrated that the leakage current of films are strongly dependent on the atmosphere during deposition and the substrate temperature. The resistivity properties of films deposited on silicon substrates were very high resistivity. Capacitance of the films properties were the highest value(1000pF) and dependent on substrate temperature.

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Dielectric and Electrical Characteristics of Fatty Acid LB films (지방산계 LB막의 유전 및 전기적 특성)

  • Choi, Yong-Sung;Kim, Do-Kyun;Chang, Jeong-Soo;Kwon, Young-Soo
    • Proceedings of the KIEE Conference
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    • 1998.11c
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    • pp.819-821
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    • 1998
  • Arachidic acid(AA) was used as LB films and its dielectric and conduction characteristics were investigated. The relative dielectric constant(${\varepsilon}_{LB}$) of AA LB films obtained from capacitance-frequency properties was about $3.5{\sim}4.1$. And the conductivity(${\sigma}_{LB}$) of AA LB films obtained from Current-Voltage characteristics was about $2.6{\times}10^{-15}[S/cm]$. Also, the conduction mechanism of current in LB films was dependant on Schottky type and the barrier height obtained from Schottky plot was about 1.4[eV].

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Electrical Properties of Organic Materials as Low Dielectric Constant Materials

  • Oh Teresa;Kim Hong Bae;Kwon Hak Yong;Son Jae Gu
    • Journal of the Semiconductor & Display Technology
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    • v.4 no.3 s.12
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    • pp.5-9
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    • 2005
  • The bonding structure of organic materials such as fluorinated amorphous carbon films was classified into two types due to the chemical shifts. The electrical properties of fluorinated amorphous carbon films also showed very different effect of two types notwithstanding a very little difference. Fluorinated amorphous carbon films with the cross-link break-age structure existed large leakage current resulting from effect of the electron tunneling. Increasing the cation due to the electron-deficient group increased the barrier height of the films with the cross-link amorphous structure, therefore the electric characteristic of the final materials with low dielectric constant was also improved. The lowest dielectric constant is 2.3 at the sample with the cross-link amorphous structure.

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The Resistivity Properties of SrTiO$_3$ Thin Films by Sputtering method. (스퍼터링 방법을 이용한 SrTiO$_3$박막의 저항을 특성)

  • 이우선;손경춘;서용진;김남오;이경섭;김형곤
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.05a
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    • pp.207-210
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    • 1999
  • The objective of this study Is to deposited the preparation of SrTiO$_3$3 dielectric thin films on Ag/barrier-mater/Si(N-type 100) bottom electrode using a conventional rf-magnetron sputtering technique with a ceramic target under various conditions. It is demonstrated that the leakage current of films are strongly dependent on the atmosphere during deposition and the substrate temperature. The resistivity properties of films deposited on silicon substrates were very high resistivity. Capacitance of the films properties were the highest value(1000pF) and dependent on substrate temperature.

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The study on the temperature characteristics of conductivity for SrTiO$_3$ thin films. (산화 스트롬튬 박막 전도도의 온도특성에 관한 연구)

  • 이우선;손경춘;박정기;김상용;장의구
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.11a
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    • pp.437-440
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    • 1999
  • The objective of this study is to deposited the preparation of SrTiO$_3$dielectric thin films on Ag/barrier-mater/Si(N-type 100) bottom electrode using a conventional rf-magnetron sputtering technique with a ceramic target under various conditions. It is demonstrated that the leakage current of films are strongly dependent on the substrate temperature. The current-voltage characteristics are influenced by the Schottky effict. The resistivity properties of films deposited on silicon substrates were very high resistivity. Conduction mechanisms in the films was dependent on the substrate temperature range.

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Characteristic and moisture permeability of SiOxCy thin film synthesized by Atmospheric pressure-plasma enhanced chemical vapor deposition

  • Oh, Seung-Chun;Kim, Sang-Sik;Shin, Jung-Uk
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2011.05a
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    • pp.171-171
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    • 2011
  • Atmospheric pressure- plasma enhanced chemical vapor deposition(AP-PECVD)Processes are recognized as promising and cost effective methods for wide-area coating on sheets of steel, glass, polymeric web, etc. In this study, $SiO_xC_y$ thin films were deposited by using AP-PECVD with a dielectric barrier discharge(DBD). The characteristic of $SiO_xC_y$ thin films were investigated as afunction of the HMDSO/O2/He flow rate. And the moisture permeability of $SiO_xC_y$ thin films was studied. The $SiO_xC_y$ thin films were characterized by the Fourier-transformed Infrared(FT-IR) spectroscopy and also investigated by X-ray photo electron spectroscopy(XPS), Auger Electron Spectroscopy(AES). The moisture permeability of $SiO_xC_y$ thin films was investigated by $H_2O$ permeability tester Detailed experimental results will be demonstrated through th present work.

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Surface Structure and Electrical Properties of Polyurethane LB Monolayers (폴리우레탄 LB단분자막의 표면구조 이미지와 전기적 특성)

  • 서정열;김도균;정상범;유승엽;신훈규;박재철;권영수
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.11a
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    • pp.320-323
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    • 2000
  • We attempted to fabricate polyurethane derivatives (PU-CN, PU-DCM) LB films by using LB method. Also, we investigated the monolayer behavior at the air-water interface by surface pressure-area ($\pi$-A) isotherms. And, the surface morphologies and the physicochemical properties of LB films were investigated by atomic force microscopy (AFM) and UV-vis spectroscopy, respectively. Also, the electrical properties of polyurethane derivatives LB films were investigated by using the conductivity and the dielectric constant. In the AFM images, we conclude that surface morphology of PU-DCM LB films is smooth and homogeneous and has optimal hydrophobicity and good stability, whereas PU-CN LB films give rougher surfaces with more excess material. In the I-V characteristics, the conductivity is different as to the polyurethane derivatives, it is considered that this phenomena could be described by the difference of lumophore pendant which was adhered at PU main chain.

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Hydrogenation of ZnO:Al Thin Films Using Hot Filament

  • An, Il-Sin;Kim, Ok-Kyung;Lee, Chang-Hyo;Ahn, You-Shin
    • Journal of Korean Vacuum Science & Technology
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    • v.4 no.3
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    • pp.86-90
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    • 2000
  • ZnO : Al films were prepared through the optimization process of aluminum content and substrate temperature in rf-magnetron sputtering. When hydrogenation was performed on these films using a hot filament method, all films showed improvement in conductivity although more conductive film showed less improvement. When the substrate temperature ($T_H$) was varied from $25^{\circ}C\;to\;300^{\circ}C$ during hydrogenation, the resistivity was reduced more at higher $T_H$ (more than 30% at $T_H=300^{\circ}C$) Thus, two methods were developed to suppress the dehydrogenation in ZnO : Al films : (1) capping with amorphous silicon thin film as a diffusion barrier, and (2) cooling during hydrogenation.

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Physical Properties of the Films Prepared with Glucomannan Extracted from Amorphophallus konjac (곤약감자 분말에서 추출한 글루코만난을 원료로 제조된 필름의 물리적 성질)

  • Yoo, Min-Hee;Lee, Hyo-Gu;Lim, Seung-Taik
    • Korean Journal of Food Science and Technology
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    • v.29 no.2
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    • pp.255-260
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    • 1997
  • Glucomannan was isolated from konjac (Amorphophallus konjac) flour by precipitating in aqueous alcohol solution. Konjac glucomannan films were prepared at various concentrations up to 1.0% (w/v) in aqueous glycerol solutions. Tensile strength (TS), percent elongation (E), water vapor permeability (WVP) as the barrier property and the solubility of the films were varied with glucomannan concentrations, glycerol contents and storage humidities. TS was decreased as the glucomannan concentration in the film and relative humidity for storage increased, and E was vice versa. WVP showed better barrier properties compared with other polysaccharides films. Glycerol contents in the film significantly affccted TS and E, but did not affect WVP. The glucomannan films were completely dissolved in the water by 150 min stirring at room temperature.

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Surface Modification by Atmospheric Pressure DBDs Plasma: Application to Electroless Ni Plating on ABS Plates

  • Song, Hoshik;Choi, Jin Moon;Kim, Tae Wan
    • Transactions on Electrical and Electronic Materials
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    • v.14 no.3
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    • pp.133-138
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    • 2013
  • Acrylonitrile-butadiene-styrene (ABS) plastic is a polymer material extensively used in electrical and electronic applications. Nickel (Ni) thin film was deposited on ABS by electroless plating, after its surface was treated and modified with atmospheric plasma generated by means of dielectric barrier discharges (DBDs) in air. The method in this study was developed as a pre-treatment for electroless plating using DBDs, and is a dry process featuring fewer processing steps and more environmentally friendliness than the chemical method. After ABS surfaces were modified, surface morphologies were observed using a scanning electron microscope (SEM) to check for any physical changes of the surfaces. Cross-sectional SEM images were taken to observe the binding characteristics between metallic films and ABS after metal plating. According to the SEM images, the depths of ABS by plasma are shallow compared to those modified by chemically treatment. The static contact angles were measured with deionized (DI) water droplets on the modified surfaces in order to observe for any changes in chemical activities and wettability. The surfaces modified by plasma showed smaller contact angles, and their modified states lasted longer than those modified by chemical etching. Adhesion strengths were measured using 3M tape (3M 810D standard) and by 90° peel-off tests. The peel-off test revealed the stronger adhesion of the Ni films on the plasma-modified surfaces than on the chemically modified surfaces. Thermal shock test was performed by changing the temperature drastically to see if any detachment of Ni film from ABS would occur due to the differences in thermal expansion coefficients between them. Only for the plasma-treated samples showed no separation of the Ni films from the ABS surfaces in tests. The adhesion strengths of metallic films on the ABS processed by the method developed in this study are better than those of the chemically processed films.