• Transactions on Electrical and Electronic Materials
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• v.4 no.1
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• pp.15-20
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• 2003

NiCr alloys are prepared onto poly-Si/ $SiO_2$/Si substrates to replace Pt bottom electrode with a new one for integration of high dielectric constant materials. Alloys deposited at Ni and Cr power of 40 and 40 W showed optimum properties in the composition of N $i_{1.6}$C $r_{1.0}$. The grain size of films increases with increasing deposition temperature. The films deposited at 50$0^{\circ}C$ showed a severe agglomeration due to homogeneous nucleation. The NiCr alloys from the rms roughness and resistivity data showed a thermal stability independent of increasing annealing temperature. The 80 nm thick BST films deposited onto N $i_{1.6}$C $r_{1.0}$/poly-Si showed a dielectric constant of 280 and a dissipation factor of about 5 % at 100 kHz. The leakage current density of as-deposited BST films was about 5$\times$10$^{-7}$ A/$\textrm{cm}^2$ at an applied voltage of 1 V. The NiCr alloys are possible to replace Pt bottom electrode with new one to integrate f3r high dielectric constant materials.terials.

• Korean Journal of Materials Research
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• v.25 no.7
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• pp.317-321
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• 2015

The effects of Nb doping on the crystal structure, microstructure, and dielectric ferroelectric and piezoelectric properties of $(Bi_{0.5}Na_{0.5})_{0.935}Ba_{0.065}Ti_{(1-x)}Nb_xO_3-0.01SrZrO_3$ (BNBTNb-SZ, with ${\chi}=0$, 0.01 and 0.02) ceramics have been investigated. X-ray diffraction patterns revealed that all ceramics have a pure perovskite structure with tetragonal symmetry. The grain size of the ceramics slightly decreased and a change in grain morphology from square to spherical shape was observed in the Nb-doped samples. The maximum dielectric constant temperature ($T_m$) increases with increasing amount of Nb; however, ferroelectric-relaxor transition temperature ($T_{F-R}$) and maximum dielectric constant (${\varepsilon}_m$) values decrease gradually. Nb addition disrupted the polarization hysteresis loops of the BNBT-SZ ceramics by leading a reduction in the remnant polarization coercive field and piezoelectric constant.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.152-152
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• 1999

1Gb급 이상 기억소자의 캐패시터 재료로 주목받고 있는 (Ba,Sr)TiO3 [BST] 박막의 전극재료로는 Pt, Ru, Ir과 같은 금속전극과 RuO2, IrO2와 산화물 전도체가 유망한 것으로 알려져 있다. 그런데, DRAM의 집적도가 증가하게 되면, BST같은 고유전율 박막을 유전재료로 사용한다 하더라도, 3차원적인 구조가 불가피하게 때문에 기존의 sputtering 방법으로는 우수한 단차피복성을 얻기 힘들므로, MOCVD법이 필수적이다. 본 연구에서는 기존에 연구되었던 Pt에 비해 식각특성이 우수하고, 비교적 낮은 비저항을 갖는 Ru 박막증착에 대한 연구를 행하였다. 본 연구에서는 수직형의 반응기와 저항 가열 방식의 susceptor로 구성된 저압 유기금속 화학증착기를 사용하여 최대 6inch 직경을 갖는 기판 위에 Ru박막을 증착하였다. Precursor로는 기존에 연구된 적이 없는 bis-(ethyo-$\pi$-cyclopentadienyl)Ru (Ru(C5H4C2H5)2, [Ru(EtCp)2])를 사용하였으며, bubbler의 온도는 85$^{\circ}C$로 하였다. Si, SiO2/Si를 사용하였으며, 증착온도 25$0^{\circ}C$~40$0^{\circ}C$, 증착압력 3Torr의 조건에서 Ru 박막을 증착하였다. Presursor를 운반하는 수송기체로는 Ar을 사용하였으며, carbon과 같은 불순물의 제거를 위해 O2를 첨가하였다. 증착된 박막은 XRD, SEM, 4-point probe등을 통해 구조적, 전기적 특성을 평가하였으며, 열역학 계산을 위해서는 SOLGASMIX-PV프로그램을 사용하였다. Ru 박막의 증착에 있어서 산소의 첨가는 필수적이었으며, Ru 박막의 증착속도는 30$0^{\circ}C$~40$0^{\circ}C$의 온도 영역에서 200$\AA$/min으로 일정하였으며, 첨가된 산소의 양이 적을수록 더 치밀하고 평탄한 표면형상을 보였으며, 또한 더 낮은 전기 전도도를 보였다. 그리고 증착된 박막은 12~15$\mu$$\Omega$cm 정도의 낮은 비저항 값을 나타냈으며 이것은 기존의 sputtering 법에 의해 증착된 Ru 박막의 비저항 값들과 비교될만하다. 한편, 높은 온도, 높은 산소분압 조건에서 RuO2의 형성을 관찰하였으며, 이것은 열역학적인 계산을 통해서 잘 설명할 수 있었다.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.27 no.6B
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• pp.638-644
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• 2002

In this paper, we implemented a three dimensional image display system using stereogram and holographic optical memory techniques which can store many images and reconstruct them automatically. In this system, to store and reconstruct stereo images, incident angle of reference beam must be controlled in real time, so we used BPH(binary phase hologram) and LCD(liquid crystal display) for controlling reference beam. The reference beams are acquired by Fourier transform of BPHs which designed with SA(simulated annealing)algorithm, and the BPHs are represented on the LCD with the 0.05 seconds time interval using application software for reconstructing the stereo images. And input images are represented on the LCD without polarizer/analyzer for maintaining uniform beam intensities regardless of the brightness of input images. The input images and BPHs are edited using application software(Photoshop) with having the same recording scheduled time interval in storing. The reconstructed stereo images are acquired by capturing the output images with CCD camera at the behind of the analyzer which transforms phase information into brightness information of images. In output plane, we used a LCD shutter that is synchronized to a monitor that display alternate left and right eye images for depth perception. We demonstrated optical experiment which store and reconstruct four stereo images in BaTiO$_3$ repeatedly using the proposed holographic optical memory techniques.

• Journal of Sensor Science and Technology
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• v.2 no.1
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• pp.65-74
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• 1993

A miniature size electrostatic induction motor has been fabricated and studied with emphasis on the role of the surface resistivity, the relative dielectric constant and the charge relaxation time constant of the rotor surface materials and the rotor liner materials, which, however, control the surface charge induction and relaxation on the rotor material surface and the field intensity between the rotor and the stator of the motor. It is found that the surface resistivity and/or the relative dielectric constant, and the charge relaxation time constant of the rotor surface material enfluenced significantly to motor speed controlled by the surface charge induction and relaxation on the rotor surface depending on the applied voltage and/or frequency changing. The resistivity of the rotor liner material is also found to be effected to the motor speed greatly by control of the field intensity between the rotor and the stator and of the surface charge distribution of the induced charge on the rotor. As a result, a maximum no load rotor speed of the motor tested was about 5500 rpm at the applied voltage of 4.5 kV and the frequency of 220 Hz for the case of the rotor surface material of $BaTiO_{3}$ 80% in the resin binder layered on the copper-foil rotor liner material.

• Korean Chemical Engineering Research
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• v.43 no.4
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• pp.503-510
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• 2005

In this research, composite alumina was prepared to add the various promoters by sol-gel method and examined its thermal stability. After sintering at $1,200^{\circ}C$, the thermal stability resulted in following order, $Si{\fallingdotseq}La$ > Ti > $Ba{\fallingdotseq}Ce$ > Y > $Zr{\fallingdotseq}Mg$, in accordance with adding the promoters. Especially in case of silica-added alumina, a phase transformation temperature to ${\alpha}$-alumina increased about $150^{\circ}C$ and after sintering at $1,200^{\circ}C$, it showed to maintain in ${\gamma}$-form and ${\delta}$-form alumina phase. Also it showed an increase of surface area from $3m^2/g$ to $71m^2/g$ compared with pure ${\alpha}$-alumina. In the case of silicaadded alumina, the characterization change of this alumina particle resulted in a delay of phase transformation because Si-O-Al bond was increased when sintered at high temperature. In case of lanthanum-added alumina, there was a sintering delay phenomenon in inter-particles as $LaAlO_3$ structure existed. The existence of lanthanum structure was confirmed by XRD and XPS analysis. It appeared on the alumina surface as $La_2O_3$ structure when it was sintered under $1,000^{\circ}C$, as the perovskite structure of $LaAlO_3$ at above $1,000^{\circ}C$ and as the magneto-plumbite structure of $LaAl_{11}O_{18}$ at above $1,300^{\circ}C$.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.6
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• pp.477-480
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• 2010

In this study, we fabricate 3 wt% $Li_2CO_3$ doped $(Ba,Sr)TiO_3$ thick films on the Ag/Pd bottom electrode printed $Al_2O_3$ substrates for the LTCCs (low temperature co-fired ceramics) applications. From the X-ray diffraction analysis, 3 wt% $Li_2CO_3$ doped BST thick films on the Ag/Pd printed $Al_2O_3$ substrates, which sintered at $900^{\circ}C$, showed perovskite structure without any pyro phase. The dielectric properties of 3 wt% $Li_2CO_3$ doped BST thick films are measured from 1 kHz to 1 MHz. To investigate the electrical properties of 3 wt% $Li_2CO_3$ doped BST thick films, we employ the impedance spectroscopy. The complex impedance of 3 wt% $Li_2CO_3$ doped BST thick films are measured from 20 Hz to 1 MHz at the various temperatures.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.190-190
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• 2009

전자산업에의 필수인 커패시터는 소형화, 저저항, 고전압을 향한 추세가 늘고 있으며, 이외에도 고전압 전원, 고전압 회로 등 중전기기에 필요한 고전압, 고용량 커패시터가 사용되고 있다. 중전기기에 사용되는 커패시터는 기기에 따라 틀리지만 내전압이 보통 10kV 이상이고 정전용량이 500pF 안팎이며, 대부분 외국에서 수입에 의존하고 있는 실정이다. 본 연구에서는 $Nb_2O_5$를 2mol% 첨가한 $BaTiO_3$를 일반적인 고상 소결법으로 제조하고 성형 시 crack을 방지하기 위해 binder 및 plasticizer를 사용하였으며, binder 첨가량에 따른 성형밀도를 측정하여 최적의 binder양을 선택하였다. 성형 밀도가 떨어짐에 따라 절연파괴강도가 낮아지기 때문에 성형 밀도를 높이기 위해 CIP를 하였으며, 소결후 capacitance와 d-factor를 측정하여 수치가 허용 범위에 들어 올 경우 전극을 형성하고 표면파괴를 방지하기 위하여 epoxy로 표면코팅을 하였다. DC 60kV용 Hi-pot tester를 사용하여 15kV까지 선형적으로 증가시켜 내전압 테스트를 실시하였으며, 제조 된 커패시터 중 몇 개의 sample을 SEM 및 XRD를 사용하여 미세구조와 결정상을 조사하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.29-32
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• 2004

This work was devoted to an investigation of etching mechanisms for $(Ba,Sr)TiO_3$ (BST) thin films in inductively coupled $CF_4/Ar$ plasma. We have found that an increase of the Ar content in $CF_4/Ar$ plasma causes non-monotonic behavior of BST etch rate, which reaches a maximum value of 40 nm/min at 80% Ar. Langmuir probe measurements show a weak sensitivity of both electron temperature and electron density to the change of $CF_5/Ar$ mixing ratio. O-D model for plasma chemistry gave monotonic changes of both volume densities and fluxes for active species responsible for the etching process. The analysis of surface kinetics confirms the possibility of non-monotonic etch rate behavior due to the concurrence of physical and chemical pathways in ion-assisted chemical reaction.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.36D no.9
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• pp.56-63
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• 1999

Conventional method to improve the response time of the Cat-SPPCM was to increase fanning beam using cylindrical lens. But, in this case the temporal instability of this SPPCM is increased, and fanning beam plays a role as noise, so that it decreases the reflectivity. Thus, fanning beam must be controlled to improve the properties of SPPCM. In this paper, we propose the method to increase the reflectivity of SPPCM and decrease the response time by focusing line-shaped input beam into photorefractive crystal using cylindrical lens and decrease the temporal instability of output beam by using mixed-polarized beam instead of simple extraordinary polarized beam. Optical experiments show that the reflectivity of proposed SPPCM is increased twice and the response time is reduced by 15 times. Also, we observed that the temporal instability of SPPCM is reduced when the polarization angle of the mixed-polarized beam is between $10^{\circ}$ and $30^{\circ}$ . We used a $45^{\circ}-cut\;BaTiO_3$ crystal which has high electro-optical coefficients in optical experiments.