• Journal of IKEEE
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• v.13 no.4
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• pp.23-27
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• 2009

Ohmic contact formation and etching processes for the fabrication of MBE (molecular beam epitaxy) grown GaSb-based p-channel HEMT devices on Si substrate have been studied. Firstly, mesa etching process was established for device isolation, based on both HF-based wet etching and ICP-based dry etching. Ohmic contact process for the source and drain formation was also studied based on Ge/Au/Ni/Au metal stack, which resulted in a contact resistance as low as $0.683\;{\Omega}mm$ with RTA at $320^{\circ}C$ for 60s. Finally, for gate formation of HEMT device, gate recess process was studied based on AZ300 developer and citric acid-based wet etching, in which the latter turned out to have high etching selectivity between GaSb and AlGaSb layers that were used as the cap and the barrier of the device, respectively.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.291.1-291.1
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• 2016

Graphene by one of the two-dimensional (2D) materials has been focused on electronic applications due to its ultrahigh carrier mobility, outstanding thermal conductivity and superior optical properties. Although graphene has many remarkable properties, graphene devices have low on/off current ratio due to its zero bandgap. Despite considerable efforts to open its bandgap, it's hard to obtain appropriate improvements. To solve this problem, heterojunction barristor was proposed based on graphene. Mostly, this heterojunction barristor is made by transition metal dichalcogenides (TMDs), such as molybdenum disulfide ($MoS_2$) and tungsten diselenide ($WSe_2$), which have extremely thickness scalability of TMDs. The heterojunction barristor has the advantage of controlling graphene's Fermi level by applying gate bias, resulting in barrier height modulation between graphene interface and semiconductor. However, charged impurities between graphene and $SiO_2$ cause unexpected p-type doping of graphene. The graphene's Fermi level modulation is expected to be reduced due to this p-doping effect. Charged impurities make carrier mobility in graphene reduced and modulation of graphene's Fermi level limited. In this paper, we investigated theoretically and experimentally a relevance between graphene's Fermi level and p-type doping. Theoretically, when Fermi level is placed at the Dirac point, larger graphene's Fermi level modulation was calculated between -20 V and +20 V of $V_{GS}$. On the contrary, graphene's Fermi level modulation was 0.11 eV when Fermi level is far away from the Dirac point in the same range. Then, we produced two types heterojunction barristors which made by p-type doped graphene and graphene treated 2.4% APTES, respectively. On/off current ratio (32-fold) of graphene treated 2.4% APTES was improved in comparison with p-type doped graphene.

• Journal of Advanced Marine Engineering and Technology
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• v.29 no.5
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• pp.495-501
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• 2005

Al is a active metal that owes its resistance to a thin, protective, barrier oxide surface layer, which is stable in air and neutral aqueous solution. Thus Al alloys are widely used in architectural trim. cold & hot-water storage vessels and piping. However Al and most of its alloy may corrode with some forms such as pitting corrosion, intergranular corrosion and galvanic corrosion in the case of exposure to various industrial and marine atmosphere. Therefore a correct evaluation of corrosion resistance for their Al and Al alloys may be more important in a economical point of view. In this study. a relative evaluation of corrosion resistance for three kinds of Al alloys such as ALDC2, ALDC3, and ALDC8 series was carried out with electrochemical method. There is a tendency that corrosion potential is shifted to positive or negative direction by alloying components regardless of corrosion resistance. Moreover the data of corrosion properties obtained from cathodic Polarization curve, cyclic voltammogram and AC. DC impedance respectively showed a good correspondence each other against the corrosion resistance but variation of corrosion potential. passivity current density of anodic polarization curve and corrosion current density by Tafel extrapolation and Stern-Geary method didn't correspond with not only each other but also considerably the data of corrosion properties discussed above. Therefore it is suggested that an optimum electrochemical evaluation for corrosion resistance of Al alloy is to calculate the diffusion limiting current density of cathodic polarization curve, impedance of AC or DC and polarization resistance of cyclic voltammogram.

• Applied Chemistry for Engineering
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• v.7 no.5
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• pp.813-822
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• 1996

In order to reduce carbon dioxide, one of the major greenhouse gases, a new type of copolymer, poly(alkylene carbonate) has been synthesized. The alternating copolymers have been obtained from carbon dioxide and various epoxides with zinc carboxylate as a catalyst. The number-average molecular weight of the polymer is about 50,000 and polydispersity is rather broad(5~10). The polymers are amorphous, and glass-clear materials that exhibit unusually facile and clean thermal decomposition behavior. Complete decomposition with no carbon residue is observed at elevated temperature even in an inert atmosphere. Terpolymers with bulkier epoxides improve the physical properties of the copolymer with simple epoxides. The decomposition properties of the polymer provide versatile applications such as ceramic, metal, and electronic binders and lost-foam casting. Further application of the polymer for the barrier film or the plasticizer will be investigated.

• Journal of Soil and Groundwater Environment
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• v.20 no.6
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• pp.127-132
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• 2015

In this study, biochar-bead, prepared from biochar powder derived from woody biomass, was used for removal cadmium ion in aqueous solution. Various mixing ratios of alginate solution and biochar powder were used for the production of round shape biochar-bead. An optimum mixing ratio was selected as 1.5% alginate solution and 20 wt% biochar. The produced biochar-bead was characterized by SEM, FT-IR, and XRD analyses. The adsorption capacity of Cd(II) by biochar-bead was found to be 9.72 mg/g which was higher than that by GAC and PAC. According to this study, round shape biochar-bead is expected to be used as a media for reactive barrier or water filtration.

• Journal of Korean Vacuum Science & Technology
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• v.4 no.1
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• pp.23-26
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• 2000

We have fabricated by metal organic chemical vapor deposition (MOCVD) In$\_$0.13/Ga$\_$0.87/N/GaN multiple quantum well (MQW) with thickness as thin as 10 A and barriers also of th same width on (0001) sapphire substrate. We have investigated this thin MQW by steady-state and time-resolved photoluminescence(PL) in picosecond time scale in a wide temperature range from 10 to 290 K. In the PL at 10 K, we observed a broad peak at 3.134 eV which was attributed to the quantum well emission of InGaN. The full width at half maximum (FWHM) of this peak was 129 meV at 10 K and its broadening at low temperatures was considered to be due to compositional fluctuations and interfacial disorder in the alloy. The narrow width of the quantum well was mainly responsible for the broadening of the emission linewidth. We also observed an intense and sharp peak at 3.471 eV of GaN barrier. From the temperature dependent PL measurements, the activation energy of the InGaN quantum well emision peak was estimated to be 69 meV. The lifetime of the quantum well emission was found to be 720 ps at 10 K, which was explained in terms of the exciton localization arising from potential fluctuations.

• Korean Journal of Optics and Photonics
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• v.18 no.5
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• pp.333-336
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• 2007

A Strained Layer Multiquantum-Well (SL-MQW) distributed feedback laser at a wavelength of 1.31 um operating from $-40^{\circ}C$ to $85^{\circ}C$ without any cooling is grown by metal-organic chemical vapor deposition (MOCVD). Lasers with high slope efficiency are achieved through careful optimization of a SL-MQW active layer, especiallyoptimizing the amount of strain, the well thickness, the barrier thickness, the number of wells, and the active layer width. In this paper, we obtain the slope efficiencies of 0.38[mW/mA] and 0.26 [mW/mA] at $25^{\circ}C$ and $85^{\circ}C$, respectively. Threshold currents are 7.1[mA] and 19.8[mA] at $25^{\circ}C$ and $85^{\circ}C$, respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.150-150
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• 2008

본 연구에서는 Wet chemistry damage가 Nanopatterned p-ohmic electrode에 미치는 영향을 연구하였다. Nanopattern은 Metal clustering을 이용하여, P-GaN와 Ohmic형성에 유리한 Pd을 50$\AA$ 적층한 후 Rapid Thermal Annealing방법으로 $850^{\circ}C$, $N_2$분위기에서 3min열처리를 하여 Pd Clustering mask 를 제작하였다. Wet etching은 $85^{\circ}C$, $H_3PO_4$조건에서 시간에 따라 Sample을 Dipping하는 방법으로 시행하였다 Ohmic test를 위해서 Circular - Transmission line Model 방법을 이용하였으며, Atomic Force Microscopy과 Parameter Analyzer로 Nanopatterned GaN surface위에 형성된 Ni/ Au Contact에서의 전기적 분석과, 표면구조분석을 시행하였다. AFM결과 Wet처리시간에 따라서 Etching형상 및 Etch rate이 영향을 받는 것이 확인되었고, Ohmic test에서 Wet chemistry처리에 의한 Tunneling parameter와 Schottky Barrier Height가 크게 증/감함을 관찰하였다. 이러한 결과들은 Wet처리에 의해서 발생된 Defect가 GaN의 표면과 하부에서 발생되며, Deep acceptor trap 및 transfer거동과 밀접한 관련이 있음을 확인 할 수 있었다. 보다 자세한 Transport 및 Wet chemical처리영향에 관한 형성 Mechanism은 후에 I-V-T, I-V, C-V, AFM결과 들을 활용하여 발표할 예정이다.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.45 no.7
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• pp.1-8
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• 2008

We fabricated flexible electrophoretic display(EPD) driven by organic thin film transistors(OTFTs) on plastic substrate. We designed the W/L of OTFT to be 15, considering EPD's transient characteristics. The OTFTs employed bottom contact structure and used Al for gate electrode, the cross-linked polyvinylphenol for gate insulator, pentacene for active layer. The plastic substrate was coated by PVP barrier layer in order to remove the islands which were formed after pre-shrinkage process and caused the electrical short between bottom scan and top data metal lines. Pentacene active layer was confined within the gate electrodes so that the off current was controlled and reduced by gate electrodes. Especially, PVA/Acryl double layers were inserted between EPD panel and OTFT-backplane in order to protect OTFT-backplane from the damages created by lamination process of EPD panel on the backplane and also accommodate pixel electrodes through via holes. From the OTFT-backplane the mobility was $0.21cm^2/V.s$, Ion/Ioff current ratio $10^5$. The OTFT-EPD panel worked successfully and demonstrated to display some patterns.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.40 no.6
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• pp.393-399
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• 2003

The current paper presents a new Mo-MPS rectifier using molybdenum as barrier metal to improve on the low forward voltage drop and power dissipation of the coventional Al-MPS and Pt-MPS rectifier. Electrical characteristics of the fabricated Mo-MPS rectifier are imvestigated compared with Al-MPS and Pt-MPS rectifier. At the same current level, the forward voltage drop of the Mo-MPS was reduced by 0.11V~0.24V compared to that of the conventional MPS rectifier. Accordingly, since the Power dissipation of a rectifier mostly depends on the forward current density and forward voltage drop, the Mo-MPS rectifier achieved improved power dissipation when compared to the conventional MPS rectifier. The reverse breakdown voltage of a Mo-MPS rectifier with 68% Schottky junction area was about 304y. Despite having a lower forward voltage drop than a conventional MPS rectifier, the Mo-MPS rectifier still exhibited a higher reverse breakdown voltage.