• Title/Summary/Keyword: Au/SiON/$SiO_2$

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Electrical Properties of Nano Floating Gate Memory for Using Au and$ Au/SiO_2$ Nanoparticles (Au 및 $Au/SiO_2$ 나노입자를 이용한 나노부유게이트메모리 단일소자의 전기적 특성)

  • Park, Byoung-Jun;Kim, Hyun-Suk;Cho, Kyung-Ah;Kim, Sang-Sig
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.107-108
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    • 2005
  • Au and $Au/SiO_2$ nanoparticles(NPs) were synthesized by the colloidal method. The formation of Au and $Au/SiO_2$ NPs was confirmed using high resolution transmission electron microscopy (HRTEM). Synthesized solutions were deposited on Si wafer. The electrical properties of structures were measured using a semiconductor analyzer and a LCR meter. Capacitance versus voltage hysterisis curves showed the charge storage effect by Au and $Au/SiO_2$ NPs.

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Ferroelectric properties of BLT films deposited on $ZrO_2$Si substrates

  • Park, Jun-Seo;Lee, Gwang-Geun;Park, Kwang-Hun;Jeon, Ho-Seung;Im, Jong-Hyun;Park, Byung-Eun;Kim, Chul-Ju
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.11a
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    • pp.172-173
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    • 2006
  • Metal-ferroelectric-insulator-semiconductor (MFIS) structures with $Bi_{3.35}La_{0.75}Ti_3O_{12}$ (BLT) ferroelectric film and Zirconium oxide ($ZrO_2$) layer were fabricated on p-type Si(100). $ZrO_2$ and BLT films were prepared by sol-gel technique. Surface morphologies of $ZrO_2$ and BLT film were measured by atomic force microscope (AFM). The electrical characteristics of Au/$ZrO_2$/Si and Au/BLT/$ZrO_2$/Si film were investigated by C-V and I-V measurements. No hysteretic characteristics was observed in the C-V curve of the Au/$ZrO_2$/Si structure. The memory window width m C-V curve of the Au/BLT/$ZrO_2$/Si diode was about 1.3 V for a voltage sweep of ${\pm}5$ V. The leakage current of Au/$ZrO_2$/Si and Au/BLT/$ZrO_2$/Si structures were about $3{\times}10^{-8}$ A at 30 MV/cm and $3{\times}10^{-8}$ A at 3 MV/cm, respectively.

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Optical Property of Au-doped $TIO_2/SiO_2$ thin film (금 나노미립자가 함침된 $TiO_2/SiO_2$ 박막의 광학적 성질)

  • Jung, Mie-Won;Kim, Ji-Eun;Lee, Kyung-Chul
    • Journal of the Korean Chemical Society
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    • v.44 no.1
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    • pp.60-67
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    • 2000
  • The wavelength of the surface plasmon absorption depends on the dielectric matrix. $TiO_2/SiO_2$ complex oxide films doped with Au nanoclusters were prepared by sol-gel spin-coating method using $Ti(OPr^i)_4$, $Si(OEt)_4$, and $HAuCl_4{\cdot}7H_2O$. The wavelength of the maximum absorption of Au nanoehrsters in the $TiO_2/SiO_2$ thin films was obtained with lineality from 540 nm to 615 nm depending on the molar ratio of $TiO_2$. The particle sizes and structures of these nanoclusters have been identified through a TEM and X-ray diffraction patterns. The dielectric constants of $TiO_2/SiO_2$ thin films were calculated from the experimental results.

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Effect of Acetate Promotor on the Pd-Au/SiO2-catalyzed Synthesis of Vinyl Acetate from the Reaction of Ethylene with Acetic Acid (Pd-Au/SiO2 촉매에 의한 에틸렌과 아세트산으로부터 비닐 아세트산염의 생성반응에 대한 아세트산염의 촉진 효과)

  • Atashi, Hossein;Motahari, Kazem;Tabrizi, Farshad Farshchi;Sarkari, Majid;Fazlollahi, Farhad
    • Journal of the Korean Chemical Society
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    • v.55 no.1
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    • pp.92-97
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    • 2011
  • The effect of Group I alkali acetate promoters on vinyl acetate (VA) synthesis was evaluated. Catalyst product selectivity and ethylene conversion are compared to the unpromoted catalyst in the fixed-bed reactor with oxidation reaction of ethylene and acetic acid in gaseous phase over Pd-Au/$SiO_2$ catalyst. It was found that: a) the promoters were stabilized on the catalyst surface, b) common effect for the alkali promoted Pd-Au catalysts increaseed in product selectivity and ethylene conversion compared to unpromoted catalyst (these effects increase from top to the bottom of Group I). These promoting effect is due to the common-ion effect of acetate, present in the reaction, resulting in an increase in the activity of the catalyst. In addition a complementary theory for the effect of Au in the structure of the catalyst is proposed the imposition of distribution of palladium particles through decreasing the particle's diameter.

Effect of an Au Nanodot Nucleation Layer on CO Gas Sensing Properties of Nanostructured SnO2 Thin Films

  • Hung, Nguyen Le;Kim, Hyojin;Kim, Dojin
    • Korean Journal of Materials Research
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    • v.24 no.3
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    • pp.152-158
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    • 2014
  • We report the effect of the fabric of the surface microstructure on the CO gas sensing properties of $SnO_2$ thin films deposited on self-assembled Au nanodots ($SnO_2$/Au) that were formed on $SiO_2/Si$ substrates. We characterized structural and morphological properties, comparing them to those of $SnO_2$ thin films deposited directly onto $SiO_2/Si$ substrates. We observed a significant enhancement of CO gas sensing properties in the $SnO_2$/Au gas sensors, specifically exhibiting a high maximum response at $200^{\circ}C$ and quite a low detection limit of 1 ppm level in dry air. In particular, the response of the $SnO_2/Au$ gas sensor was found to reach the maximum value of 32.5 at $200^{\circ}C$, which is roughly 27 times higher than the response (~1.2) of the $SnO_2$ gas sensor obtained at the same operating temperature of $200^{\circ}C$. Furthermore, the $SnO_2/Au$ gas sensors displayed very fast response and recovery behaviors. The observed enhancement in the CO gas sensing properties of the $SnO_2/Au$ sensors is mainly ascribed to the formation of a nanostructured morphology in the active $SnO_2$ layer having a high specific surface-reaction area by the insertion of a nanodot form of Au nucleation layer.

The Properties of Au-Al Alloy Thin Films with a Thermal Evaporator for Purple Gold (퍼플골드를 위한 열증착법으로 제조된 Au-Al 합금 박막의 물성연구)

  • Kim, Jun-Hwan;Song, Oh-Sung
    • Journal of the Korean Vacuum Society
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    • v.17 no.5
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    • pp.466-472
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    • 2008
  • Purple Gold is the alloy consisting of 78wt%Au-22wt%Al, and is expressed as a chemical formula, $AuAl_2$. Lately it is being used for the material of accessories or the decorative ornaments, being one of the colored golds having the peculiar purple color, like White Gold and Pink Gold. Purple Gold has the weak point in shaping through casting process due to the bad malleability and castability, being the intermetalic compound of Au and Al. Therefore, it is possible to produce the final product only by the cutting and the grinding process or to use it as a decorative coat with the thin film evaporation. This study implemented two kinds of thin film experiments. One is the case that heat treatment was made after Au and Al deposition evaporated separately with a weight ratio 78:22 on the 200nm$SiO_2$/Si substrate. The other is the case that the surface deposition was made through the vacuum evaporation, keeping the glass substrate temperature remain room temperature, using the bulk $AuAl_2$ as a source. The final film property was measured, focusing on the Purple Gold's color and thickness through the bare eye inspection, the microstructure analysis, the surface resistance analysis, the color difference analysis, and XRD analysis. Purple Gold was not formed, as the excessive surface agglomeration occurred, in case of being produced and treated thermally with 12.5nmAu/40nmAl/200nm$SiO_2$/Si structure. Our results suggest that of Purple Gold films, showing the same purple color as the bulk's, were successfully deposited with the direct thermal evaporation from the $AuAl_2$ bulk source.

Effects of $SiO_2$ or SiON tunneling gate oxide on Au nano-particles floating gate memory (Au 나노 입자를 이용한 floating gate memory에서 $SiO_2$ or SiON 터널링 게이트 산화막의 영향)

  • Koo, Hyun-Mo;Lee, Woo-Hyun;Cho, Won-Ju;Koo, Sang-Mo;Chung, Hong-Bay;Lee, Dong-Uk;Kim, Jae-Hoon;Lee, Min-Seung;Kim, Eun-Kyu
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.11a
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    • pp.67-68
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    • 2006
  • Floating gate non-volatile memory devices with Au nano-particles embedded in SiON or $SiO_2$ dielectrics were fabricated by digital sputtering method. The size and the density of Au are 4nm and $2{\times}10^{-12}cm^{-2}$, respectively. The floating gate memory of MOSFET with 5nm tunnel oxide and 45nm control oxide have been fabricated. This devices revealed a memory effect which due to proGrainming and erasing works perform by a gate bias stress repeatedly.

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Selective Catalytic Etching of Graphene by SiOx Layer Depletion

  • Lee, Gyeong-Jae;Im, Gyu-Uk;Yang, Mi-Hyeon;Gang, Tae-Hui;Jeong, Seok-Min
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.163.2-163.2
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    • 2014
  • We report catalytic decomposition of few-layer graphene on an $Au/SiO_x/Si$ surface wherein oxygen is supplied by dissociation of the native $SiO_x$ layer at a relatively low temperature of $400^{\circ}C$. The detailed chemical evolution of the graphene covered $SiO_x/Si$ surface with and without gold during the catalytic process is investigated using a spatially resolved photoelectron emission method. The oxygen atoms from the native $SiO_x$ layer activate the gold-mediated catalytic decomposition of the entire graphene layer, resulting in the formation of direct contact between the Au and the Si substrate. The notably low contact resistivity found in this system suggests that the catalytic depletion of a $SiO_x$ layer could realize a new way to micromanufacture high-quality electrical contact.

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Synthesis and Surface Properties of Hierarchical SiO2 Coating Layers by Forming Au Nanoparticles (금 나노입자 형성을 이용한 계층구조 SiO2 코팅층의 제조 및 표면 특성)

  • Kim, Ji Yeong;Kim, Eun-Kyeong;Kim, Sang Sub
    • Korean Journal of Materials Research
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    • v.23 no.1
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    • pp.53-58
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    • 2013
  • Superhydrophobic $SiO_2$ layers with a micro-nano hierarchical surface structure were prepared. $SiO_2$ layers deposited via an electrospray method combined with a sol-gel chemical route were rough on the microscale. Au particles were decorated on the surface of the microscale-rough $SiO_2$ layers by use of the photo-reduction process with different intensities ($0.11-1.9mW/cm^2$) and illumination times (60-240 sec) of ultraviolet light. With the aid of nanoscale Au nanoparticles, this consequently resulted in a micro-nano hierarchical surface structure. Subsequent fluorination treatment with a solution containing trichloro(1H,2H,2H,2H-perfluorooctyl)silane fluorinated the hierarchical $SiO_2$ layers. The change in surface roughness factor was in good agreement with that observed for the water contact angle, where the surface roughness factor developed as a measure needed to evaluate the degree of surface roughness. The resulting $SiO_2$ layers revealed excellent repellency toward various liquid droplets with different surface tensions ranging from 46 to 72.3 mN/m. Especially, the micro-nano hierarchical surface created at an illumination intensity of $0.11mW/cm^2$ and illumination time of 60 sec showed the largest water contact angle of $170^{\circ}$. Based on the Cassie-Baxter and Young-Dupre equations, the surface fraction and work of adhesion for the micronano hierarchical $SiO_2$ layers were evaluated. The work of adhesion was estimated to be less than $3{\times}10^{-3}N/m$ for all the liquid droplets. This exceptionally small work of adhesion is likely to be responsible for the strong repellency of the liquids to the micro-nano hierarchical $SiO_2$ layers.

Effect of Silicon Oxynitride Matrix on the Optical Properties of Au Nanoparticles Dispersed Composite Film (실리콘 산화질화물 기지상 적용에 따른 Au 나노입자 분산 복합체 박막의 광학적 특성)

  • Cho, Sung-Hun;Lee, Kyeong-Seok
    • Korean Journal of Materials Research
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    • v.19 no.12
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    • pp.637-643
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    • 2009
  • In this study, we analyzed the effect of silicon oxynitride matrix on the optical properties of Au nanoparticles dispersed on composite film and explored the effectiveness of the silicon in fine tuning the refractive index of the composite film for applications in optical waveguide devices. The atomic fraction of nitrogen in $SiO_xN_y$ films was controlled by varying the relative flow ratio of nitrogen gas in reactive sputtering and was evaluated optically using an effective medium theory with Bruggeman geometry consisting of a random mixture between $SiO_2$ and $Si_3N_4$. The Au nanoparticles were embedded in the $SiO_xN_y$ matrix by employing the alternating deposition technique and clearly showed an absorption peak due to the excitation of surface plasmon. With increasing nitrogen atomic fraction in the matrix, the surface plasmon resonance wavelength shifted to a longer wavelength (a red-shift) with an enhanced resonance absorption. These characteristics were interpreted using the Maxwell-Garnett effective medium theory. The formation of a guided mode in a slab waveguide consisting of 3 $\mu$m thick Au:$SiO_xN_y$ nanocomposite film was confirmed at the telecommunication wavelength of 1550 nm by prism coupler method and compared with the case of using $SiO_2$ matrix. The use of $SiO_xN_y$ matrix provides an effective way of controlling the mode confinement while maintaining or even enhancing the surface plasmon resonance properties.