• 제목/요약/키워드: Atomically Flat Surface

검색결과 11건 처리시간 0.037초

Preparation of Atomically Flat Si(111)-H Surfaces in Aqueous Ammonium Fluoride Solutions Investigated by Using Electrochemical, In Situ EC-STM and ATR-FTIR Spectroscopic Methods

  • Bae, Sang-Eun;Oh, Mi-Kyung;Min, Nam-Ki;Paek, Se-Hwan;Hong, Suk-In;Lee, Chi-Woo J.
    • Bulletin of the Korean Chemical Society
    • /
    • 제25권12호
    • /
    • pp.1822-1828
    • /
    • 2004
  • Electrochemical, in situ electrochemical scanning tunneling microscope (EC-STM), and attenuated total reflectance-FTIR (ATR-FTIR) spectroscopic methods were employed to investigate the preparation of atomically flat Si(111)-H surface in ammonium fluoride solutions. Electrochemical properties of atomically flat Si(111)-H surface were characterized by anodic oxidation and cathodic hydrogen evolution with the open circuit potential (OCP) of ca. -0.4 V in concentrated ammonium fluoride solutions. As soon as the natural oxide-covered Si(111) electrode was immersed in fluoride solutions, OCP quickly shifted to near -1 V, which was more negative than the flat band potential of silicon surface, indicating that the surface silicon oxide had to be dissolved into the solution. OCP changed to become less negative as the oxide layer was being removed from the silicon surface. In situ EC-STM data showed that the surface was changed from the initial oxidecovered silicon to atomically rough hydrogen-terminated surface and then to atomically flat hydrogenterminated surface as the OCP moved toward less negative potentials. The atomically flat Si(111)-H structure was confirmed by in situ EC-STM and ATR-FTIR data. The dependence of atomically flat Si(111)-H terrace on mis-cut angle was investigated by STM, and the results agreed with those anticipated by calculation. Further, the stability of Si(111)-H was checked by STM in ambient laboratory conditions.

Potential Dependence of Electrochemical Etching Reaction of Si(111) Surface in a Fluoride Solution Studied by Electrochemical and Scanning Tunneling Microscopic Techniques

  • Bae, Sang-Eun;Youn, Young-Sang;Lee, Chi-Woo
    • Journal of Electrochemical Science and Technology
    • /
    • 제11권4호
    • /
    • pp.330-335
    • /
    • 2020
  • Silicon surface nanostructures, which can be easily prepared by electrochemical etching, have attracted considerable attention because of its useful physical properties that facilitate application in diverse fields. In this work, electrochemical and electrochemical-scanning tunneling microscopic (EC-STM) techniques were employed to study the evolution of surface morphology during the electrochemical etching of Si(111)-H in a fluoride solution. The results exhibited that silicon oxide of the Si(111) surface was entirely stripped and then the surface became hydrogen terminated, atomically flat, and anisotropic in the fluoride solution during chemical etching. At the potential more negative than the flat band one, the surface had a tendency to be eroded very slowly, whereas the steps of the terrace were not only etched quickly but the triangular pits also deepened on anodic potentials. These results provided information on the conditions required for the preparation of porous nanostructures on the Si(111) surface, which may be applicable for sensor (or device) preparation (Nanotechnology and Functional Materials for Engineers, Elsevier 2017, pp. 67-91).

Uniform Ag Thin Film Growth on an Sb-terminated Si(111) Surface

  • Park, Kang-Ho;Ha, Jeong-Sook;Lee, El-Hang
    • ETRI Journal
    • /
    • 제19권2호
    • /
    • pp.71-81
    • /
    • 1997
  • We report on the room-temperature-growth of highly uniform and ultrathin Ag films on Sb-terminated Si(111) surfaces, as evidenced from a scanning tunneling microscopy (STM) study in an UHV system. With predeposition of one monolayer (ML) of Sb, uniform growth of Ag islands was observed at room temperature. The Sb layer suppresses the surface diffusion of Ag atoms on Si surface and increases the Ag island density, and then the increased island density is believed to cause coalescence of Ag islands before the beginning of multilayer growth in higher coverages, resulting in the growth of atomically flat and uniform islands on the Sb surfactant layer.

  • PDF

Epitaxial Growth of Bi2Se3 on a Metal Substrate

  • 전정흠;장원준;윤종건;강세종
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
    • /
    • pp.306-306
    • /
    • 2011
  • Three dimensional(3D) topological insulators(TIs) of Bi binary alloys are characterized by a bulk energy gap with strong spin-orbit coupling and metallic surface states protected by time-reversal symmetry. It was reported that film forms of such materials were advantageous over bulk forms due to less defect density and better crystallinity. So far, the films have been prepared on several substrates including semiconductors and graphene. But, there were no studies on metal substrates. For electronic transport experiments and device applications, it is necessary to know epitaxial relation between TIs and metal electrodes. In this study, Atomically flat films of Bi2Se3 were grown on a Au(111) metal substrate by in-situ molecular beam epitaxy. Using home-built scanning tunneling microscope, we observed hexagonal atomic structures which corresponded to the outmost selenium atomic layer of Bi2Se3. Triangular-shaped defects known as Selenium vacancy were also found.

  • PDF

분말 코팅을 위한 원자층 증착법 (Atomic Layer Deposition for Powder Coating)

  • 최석;한정환;최병준
    • 한국분말재료학회지
    • /
    • 제26권3호
    • /
    • pp.243-250
    • /
    • 2019
  • Atomic layer deposition (ALD) is widely used as a tool for the formation of near-atomically flat and uniform thin films in the semiconductor and display industries because of its excellent uniformity. Nowadays, ALD is being extensively used in diverse fields, such as energy and biology. By controlling the reactivity of the surface, either homogeneous or inhomogeneous coating on the shell of nanostructured powder can be accomplished by the ALD process. However, the ALD process on the powder largely depends on the displacement of powder in the reactor. Therefore, the technology for the fluidization of the powder is very important to redistribute its position during the ALD process. Herein, an overview of the three types of ALD reactors to agitate or fluidize the powder to improve the conformality of coating is presented. The principle of fluidization its advantages, examples, and limitations are addressed.

GaAs on Si substrate with dislocation filter layers for wafer-scale integration

  • Kim, HoSung;Kim, Tae-Soo;An, Shinmo;Kim, Duk-Jun;Kim, Kap Joong;Ko, Young-Ho;Ahn, Joon Tae;Han, Won Seok
    • ETRI Journal
    • /
    • 제43권5호
    • /
    • pp.909-915
    • /
    • 2021
  • GaAs on Si grown via metalorganic chemical vapor deposition is demonstrated using various Si substrate thicknesses and three types of dislocation filter layers (DFLs). The bowing was used to measure wafer-scale characteristics. The surface morphology and electron channeling contrast imaging (ECCI) were used to analyze the material quality of GaAs films. Only 3-㎛ bowing was observed using the 725-㎛-thick Si substrate. The bowing shows similar levels among the samples with DFLs, indicating that the Si substrate thickness mostly determines the bowing. According to the surface morphology and ECCI results, the compressive strained indium gallium arsenide/GaAs DFLs show an atomically flat surface with a root mean square value of 1.288 nm and minimum threading dislocation density (TDD) value of 2.4×107 cm-2. For lattice-matched DFLs, the indium gallium phosphide/GaAs DFLs are more effective in reducing the TDD than aluminum gallium arsenide/GaAs DFLs. Finally, we found that the strained DFLs can block propagate TDD effectively. The strained DFLs on the 725-㎛-thick Si substrate can be used for the large-scale integration of GaAs on Si with less bowing and low TDD.

펄스 레이저 증착법으로 layer-by-layer 성장시킨 $YBa_{2}Cu_{3}O_{7}$ 박막의 초전도특성 (Superconducting properties of layer-by-layer grown $YBa_{2}Cu_{3}O_{7}$ thin film prepared by pulsed laser deposition)

  • 김인선;임해용;김동호;박용기;박종철
    • 센서학회지
    • /
    • 제7권1호
    • /
    • pp.61-66
    • /
    • 1998
  • C-축으로 배향된 고품질 $YBa_{2}Cu_{3}O_{7}$ 박막을 펄스레이저 증착법으로 $SrTiO_{3}$(100) 기판위에 제작하였다. STO 기판을 고온 산소열처리로 원시세포 높이의 테라스가 발달한 atomic-flat한 표면상태로 가공하였으며, 이 기판위에 최적의 조건에서 증착된 $YBa_{2}Cu_{3}O_{7}$ 박막은 원시세포단위로 층상으로 적층 성장됨을 알 수 있었다. 이러한 박막은 임계온도${\ge}90$ K, 전이폭${\le}0.6$ K, 상온비저항${\sim}300{\mu}{\Omega}cm$, 잔류저항${\sim}0$ 및 임계전류밀도${\sim}4.6{\times}10^{6}A/cm^{2} $의 초전도 특성을 나타내었다.

  • PDF