• 제목/요약/키워드: Atomic ion beam

검색결과 201건 처리시간 0.028초

순차 스퍼터법으로 제작한 BiSrCaCuO 박막의 부착 특성 (Sticking Characteristics in BiSrCaCuO Thin Film Fabricated by Layer-by-Layer Sputtering Method)

  • 천민우;박용필;김정호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 제5회 학술대회 논문집 일렉트렛트 및 응용기술연구회
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    • pp.45-48
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    • 2003
  • BiSrCaCuO thin films were fabricated by atomic layer-by-layer deposition using an ion beam sputtering method. 10 wt% and 90 wt% ozone mixed with oxygen were used with ultraviolet light irradiation to assist oxidation. At early stages of the atomic layer by layer deposition, two dimensional epitaxial growth which covers the substrate surface would be suppressed by the stress and strain caused by the lattice misfit, then three dimensional growth takes place. Since Cu element is the most difficult to oxidize, only Sr and Bi react with each other predominantly, and forms a buffer layer on the substrate in an amorphous-like structure, which is changed to $SrBi_2O_4$ by in-situ anneal.

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대용량 크라이오 펌프의 수소 흡착특성 (Hydrogen adsorption properties of the large cryosorption pump)

  • 인상렬;김태성
    • 한국진공학회지
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    • 제14권2호
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    • pp.69-77
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    • 2005
  • 중성입자빔 가열장치의 이온원과 빔라인 부품들을 개발하고 시험하기 위해 제작한 부피 $60m^3$의 시험설비에는 특성 비교를 위해 몇 가지 다른 방식으로 제작된 대용량 크라이오 흡착펌프를 장착하여 사용하고 있다. 크라이오 펌프의 활성탄 패널을 냉각시키면서 수소를 적절한 간격으로 도입하여 수소 분압을 측정하고 그 시간적인 변화를 통해 온도에 따른 수소흡착과 방출특성을 분석해 보았으며 관련 파라미터 사이의 상호 영향에 대해 알아보기 위해 시뮬레이션을 수행했다.

초전도 박막의 에피택셜 성장에 관한 연구 (A Study on the Epitaxial Growth of Superconducting Thin Film)

  • 이희갑;박용필;김귀열
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 춘계학술대회 논문집 유기절연재료 전자세라믹 방전플라즈마 일렉트렛트 및 응용기술
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    • pp.208-211
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    • 2002
  • $Bi_2Sr_2CuO_x$(Bi-2201) thin films were fabricated by atomic layer-by-layer deposition using an ion beam sputtering method. 10 wt% and 90 wt% ozone mixed with oxygen were used with ultraviolet light irradiation to assist oxidation. At early stages of the atomic layer by layer deposition, two dimensional epitaxial growth which covers the substrate surface would be suppressed by the stress and strain caused by the lattice misfit, then three dimensional growth takes place. Since Cu element is the most difficult to oxidize, only Sr and Bi react with each other predominantly, and forms a buffer layer on the substrate in an amorphous-like structure, which is changed to $SrBi_2O_4$ by in-situ anneal.

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초저속 순차증착으로 제작한 Bi2212 박막의 특성 (Characteristics of Bi2212 Thin Film Fabricated by Layer-by-Layer Deposition at an Ultra Low Growth rate)

  • 이희갑;박용필;천민우
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2002년도 추계학술대회 논문집 전기물성,응용부문
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    • pp.119-121
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    • 2002
  • $Bi_2Sr_2CuO_x$ thin films were fabricated by atomic layer-by-layer deposition using an ion beam sputtering method, 10 wt% and 90 wt% ozone mixed with oxygen were used with ultraviolet light irradiation to assist oxidation. At early stages of the atomic layer by layer deposition, two dimensional epitaxial growth which covers the substrate surface would be suppressed by the stress and strain caused by the lattice misfit, then three dimensional growth takes place. Since Cu element is the most difficult to oxidize, only Sr and Bi react with each other predominantly, and forms a buffer layer on the substrate in an amorphous-like structure, which is changed to $SrBi_2O_4$ by in-situ anneal.

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Sequential conversion from line defects to atomic clusters in monolayer WS2

  • Gyeong Hee Ryu;Ren-Jie Chan
    • Applied Microscopy
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    • 제50권
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    • pp.27.1-27.6
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    • 2020
  • Transition metal dichalcogenides (TMD), which is composed of a transition metal atom and chalcogen ion atoms, usually form vacancies based on the knock-on threshold of each atom. In particular, when electron beam is irradiated on a monolayer TMD such as MoS2 and WS2, S vacancies are formed preferentially, and they are aligned linearly to constitute line defects. And then, a hole is formed at the point where the successively formed line defects collide, and metal clusters are also formed at the edge of the hole. This study reports a process in which the line defects formed in a monolayer WS2 sheet expends into holes. Here, the process in which the W cluster, which always occurs at the edge of the formed hole, goes through a uniform intermediate phase is explained based on the line defects and the formation behavior of the hole. Further investigation confirms the atomic structure of the intermediate phase using annular dark field scanning transition electron microscopy (ADF-STEM) and image simulation.

Lower the Detection Limits of Accelerator Mass Spectrometry

  • ;송종한;김준곤;김재열;오종주;김종찬
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.243-244
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    • 2013
  • Over the past 15 years, several groups have incorporated radio-frequency quadrupole (RFQ) based instruments before the accelerator in accelerator mass spectrometry (AMS) systems for ion-gas interactions at low kinetic energy (<40 eV). Most AMS systems arebased on a tandem accelerator, which requires negative ions at injection. Typically, AMS sensitivity abundance ratios for radioactive-to-stable isotope are limited to Xr/Xs >10^-15, and the range of isotopes that can be analyzed is limited because of theneed to produce rather large negative ion beams and the presence of atomic isobaric interferences after stripping. The potential of using low-kinetic energy ion-gas interactions for isobar suppression before the accelerator has been demonstrated for several negative ion isobar systems with a prototype RFQ system incorporated into the AMS system at IsoTrace Laboratory, Canada (Ontario, Toronto). Requisite for any such RFQ system applied to very rare isotope analysis is large transmission of the analyte ion. This requires proper phase-space matching between the RFQ acceptance and the ion beam phase space (e.g. 35 keV, ${\varphi}3mm$, +-35 mrad), and the ability to control the average ion energy during interactions with the gas. A segmented RFQ instrument is currently being designed at Korea Institute for Science and Technology (한국과학기술연구원, KIST). It will consist of: a) an initial static voltage electrode deceleration region, to lower the ion energy from 35 keV down to <40 eV at injection into the first RFQ segment; b) the segmented quadrupole ion-gas interaction region; c) a static voltage electrode re-acceleration region for ion injection into a tandem accelerator. Design considerations and modeling will be discussed. This system should greatly lower the detection limits of the 6 MV AMS system currently being commissioned at KIST. As an example, current detection sensitivity of 41Ca/Ca is limited to the order of 10^-15 while the 41Ca/Ca abundance in modern samples is typically 41Ca/Ca~10^-14 - 10^-15. The major atomic isobaric interference in AMS is 41K. Proof-of-principal work at IsoTrace Lab. has demonstrated that a properly designed system can achieve a relative suppression of KF3-/41CaF3- >4 orders of magnitude while maintaining very high transmission of the 41CaF3- ion. This would lower the 41Ca detection limits of the KIST AMS system to at least 41Ca/Ca~10^-19. As Ca is found in bones and shells, this would potentially allow direct dating of valuable anthropological archives and archives relevant to our understanding of the most pronounced climate change events over the past million years that cannot be directly dated with the presently accessible isotopes.

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Development of Laser-driven Proton Source Toward Its Applications

  • Sagisaka, Akito;Daido, Hiroyuki;Pirozhkov, Alexander S.;Yogo, Akifumi;Ogura, Koichi;Orimo, Satoshi;Ma, Jinglong;Mori, Michiaki;Nishiuchi, Mamiko;Bulanov, Sergei V.;Esirkepov, Timur Zh.;Oishi, Yuji;Nayuki, Takuya;Fujii, Takashi;Nemoto, Koshichi;Nagatomo, Hideo
    • Journal of the Optical Society of Korea
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    • 제13권1호
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    • pp.37-41
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    • 2009
  • We observe the proton signals produced by laser interaction with thin-foil targets of polyimide and of copper. We change the thickness of the polyimide target to $7.5{\mu}m$, $12.5{\mu}m$, and $50{\mu}m$. High-energy protons with the maximum energy of ${\sim}2.3\;MeV$ from $7.5{\mu}m$ thick polyimide are observed. This proton beam with the maximum energy of multi-MeV has various applications such as a proton shadowgraphy.

단자엽 모델 식물의 이온화 에너지원에 따른 생리 활성 (Physiological Characterization of Mono-Cotyledonous Model Plant by Ionizing Irradiation)

  • 송미라;김선희;장덕수;강시용;김진백;김상훈;하보근;박용대;김동섭
    • 방사선산업학회지
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    • 제5권1호
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    • pp.7-13
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    • 2011
  • The present study has been performed to compare the physiological analysis of monocot model plant (rice) in response to ionizing irradiations (cosmic-ray, gamma-ray, and Ion beam). Ionizing radiations were implanted into monocot model plant (rice) seed. After irradiation, the seeds were planted in the plastic pots for a growth period of one month. Thereafter, the morphological and physiological characteristics including malondealdehyde (MDA) and chlorophyll content, activities of antioxidant enzymes in irradiation samples were investigated. We are confirmed that the activity level of MDA and chlorophyll content were not changed by ionizing irradiation samples. However, the free radical contents were increased in all irradiated plants. And the activities of SOD, POD, and APX were significantly increased by irradiation compared with non-irradiation plant.

Fabrication of metal nano-wires using carbon nanotube masks

  • Yun, W.S.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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    • pp.175-175
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    • 1999
  • Circumventing problems lying in the conventional lithographic techniques, we devised a new method for the fabrication of nanometer scale metal wires inspired by the unique characteristics of carbon nanotubes (CNTs). Since carbon nanotubes could act as masks when CNT-coated thin Au/Ti layer on a SiO2 surface was physically etched by low energy argon ion bombardment 9ion milling), Au/Ti nano-wires were successfully formed just below the CNTs exactly duplicating their lateral shapes. Cross-sectional analysis by transmission electron microscopy revealed that the edge of the metal wire was very sharply developed indicating the great difference in the milling rates between the CNTs and the metal layer as well as the good directionality of the ion milling. We could easily find a few nanometer-wide Au/Ti wires among the wires of various width. After the formation of nano-wires, the CNTs could be pushed away from the metal nano-wire by atomic force microscopy, The lateral force for the removal of the CNTs are dependent upon the width and shape of the wires. Resistance of the metal nano-wires without the CNTs was also measured through the micro-contacts definted by electron beam lithography. since this CNT-based lithographic technique is, in principle, applicable to any kinds of materials, it can be very useful in exploring the fields of nano-science and technology, especially when it is combines with the CNT manipulation techniques.

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이온빔 스퍼터링으로 제작된 다이아몬드성 카본 필름의 전계 방출 특성 (Field emission properties of diamond-like carbon films deposited by ion beam sputtering)

  • 안상혁;이광렬;전동렬
    • 한국진공학회지
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    • 제8권1호
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    • pp.36-42
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    • 1999
  • 이온빔 스퍼터링 방법으로 n-type si 기판에 고팅된, 수소를 함유하지 않은 다이아몬드성 카본 필름의 전계 방출 특성을 조사하였다. 필름의 구조나 두께에 관계없이 전계 방출 전류는 양극과 시편의 표면사이에서 발생하는 electrical breakdown에 의해 현저히 증가하였으며, 이때의 effective work function은 약 0.1eV의 작은 값을 가지고 있었다. 텅스텐 tip을 이용하여 breakdown에 의해 발생한 시편표면의 손상수위 근처를 scanning 하면서 전계 방출 전류를 측정하여, 전계 방출이 일어나는 정확한 위치를 확인하였다. 전계 방출은 breakdown에 의해 발생한 표면 손상 부위의 모든 곳에서 균일하게 일어나는 것이 아니라 특정 부위에서 집중적으로 관찰되었다. Auger electron spectroscopy와 SEM을 이용한 분석을 통해 손상 부위 중 Si과 C의 화합물이 형성된 곳에서만 절계 방출이 일어나고 있음을 알 수 있었으며, 손상부위의 형상변화는 전계 방출의 충분조건이 아니었다. 본 연구의 결과는 breakdown에 의한 전기 방출 전류의 증가는 시편 표면의 형상 변화에 의한 전계증진의 효과보다는 표면에서 발생하는 화학적 결합의 변화에 기인하고 있음을 보여준다.

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