• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2003.10a
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• pp.89-92
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• 2003

Nano-scratch tests were performed on PMMA thin films spin-coated on a Si substrate using an atomic force microscopy (AFM) with loads ranging from 10nN to 100nN. At low applied loads, a ridge pattern was formed on the PMMA surface. No wear particles were observed during the pattern-forming mild wear. At high applied loads, severe wear occurred accompanied by wear particles. The film with the highest hardness showed the highest wear resistance. Friction force generated during the Scratching was closely related with surface deformation of the film.

• Transactions of Materials Processing
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• v.13 no.1
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• pp.59-64
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• 2004

Nano-scratch tests were performed on PMMA thin films spin-coated on a Si substrate using an atomic force microscopy (AFM) with loads ranging form 10nN to 100nN. At low loads, a ridge pattern was formed on the PMMA thin film surface. No wear particles were observed during the pattern-forming mild wear. At high loads, severe wear by plowing occurred, accompanied by wear particles. The film with the highest hardness showed the highest wear resistance. Friction force generated during the scratching was measured, which was closely related with surface deformation of the film. A simple empirical equation to deduce scratch hardness of the film from a linear fixed-distance scratch test was proposed, and scratching-speed dependency of the scratch hardness was displayed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.55-56
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• 2009

• Proceeding of EDISON Challenge
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• 2013.04a
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• pp.167-177
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• 2013

원자 힘 현미경(Atomic Force Microscopy, AFM) 탐침과 표면 사이의 좁은 틈에서 형성되는 나노미터 크기의 물 메니스커스는 AFM을 사용하여 측정하는 이미지에 영향을 주는 것으로 알려져 있다. 본 연구에서는 격자 기체 기반의 몬테카를로 시뮬레이션을 이용하여 탐침의 곡률과 결합 에너지 특성이 메니스커스의 형상과 그로 인해 발생하는 모세관 힘에 어떠한 영향을 미치는지 알아보았다. 일반적으로 탐침의 곡률이 커질수록, 친수성이 작아질수록 메니스커스 폭은 좁아지고 모세관 힘이 줄어드는 것을 확인하였다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.34 no.4
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• pp.242-245
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• 2021

In this work, we fabricated oxide on an n-type silicon substrate through local anodic oxidation (LAO) using atomic force microscopy (AFM). The resulting oxide thickness was measured and its correlation with load force, scan speed and applied voltage was analyzed. The surface oxide layer was stripped using a buffered oxide etch. Ohmic contacts were created by applying silver paste on the silicon substrate back face. LAO was performed at approximately 70% humidity. The oxide thickness increased with increasing the load force, the voltage, and reducing the scan speed. We confirmed that LAO/AFM can be used to create both lateral and, to some extent, vertical shapes and patterns, as previously shown in the literature.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.159-159
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• 2011

최근 여러 화학 반응에 대해서 일층(1L) 그래핀(graphene)이 복층(multi-layered) 그래핀보다 10 배 이상의 높은 반응성을 보인다는 사실이 알려졌다. 본 실험에서는 기판의 편평도와 기판-그래핀 간의 상호작용이 그래핀의 반응성에 미치는 영향을 이해하기 위해서, AFM(atomic force microscopy)과 라만 분광법을 이용하여 그래핀의 기체상 고온 산화반응을 연구하였다. 기계적 박리법을 통해 산화실리콘(SiO2/Si)과 마이카(mica) 기판 위에 고착된 그래핀 시료를 대조군으로 비교하였다. AFM 형상 분석으로부터 편평도가 낮은 산화실리콘 위에서는 그래핀의 두께가 작을수록 산화 속도가 크다는 사실을 확인하였다. 그러나 편평도가 높은 마이카 기판 위에서는 단일층 그래핀의 산화 속도가 산화실리콘 기판 위에서보다 현저하게 감소하고 두 겹 이상의 두께에서는 반응성의 차이가 없음을 발견하였다. 특히 마이카 위의 단일층 그래핀에서는 복층 그래핀과는 달리 산화에 의한 식각이 거의 일어나지 않아 화학적 안정성이 증대되었음을 알 수 있었다. 본 연구는 기판의 표면구조와 상호 작용을 통해 그래핀의 화학적 특성을 조절 할 수 있다는 가능성을 보여 준다.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.395-400
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• 2005

Nano-scale fabrication of silicon substrate based on the use of atomic force microscopy (AFM) was demonstrated. A specially designed cantilever with diamond tip, allowing the formation of damaged layer on silicon substrate by a simple scratching process, has been applied instead of conventional silicon cantilever for scanning. A thin damaged layer forms in the substrate at the diamond tip-sample junction along scanning path of the tip. The damaged layer withstands against wet chemical etching in aqueous KOH solution. Diamond tip acts as a patterning tool like mask film for lithography process. Hence these sequential processes, called tribo-nanolithography, TNL, can fabricate 2D or 3D micro structures in nanometer range. This study demonstrates the novel fabrication processes of the micro cantilever and diamond tip as a tool for TNL using micro-patterning, wet chemical etching and CVD. The developed TNL tools show outstanding machinability against single crystal silicon wafer. Hence, they are expected to have a possibility for industrial applications as a micro-to-nano machining tool.

• Bulletin of the Korean Chemical Society
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• v.15 no.12
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• pp.1098-1103
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• 1994

Atomic force microscopy (AFM) images of two conducting layered transition-metal ditellurides, $TaTe_2$ and $Ta_{0.5}$$V_{0.5}$$Te_2$, were examined and their surface and bulk structural features were compared. All the measured unit cell parameters from AFM image were consistent and in complete agreement with the results of the X-ray diffraction. The microscopic structures of corrugated surface tellurium sheets were strongly affected by the modification of metal double zig-zag chains underneath Te surface. Large difference in the height amplitudes of AFM images in $TaTe_2$ and $Ta_{0.5}$$V_{0.5}$$Te_2$ phases was observed and this reflects large difference in the surface electron densities of two phases. On surface, the shorter intralayer Te…Te contacts in $TaTe_2$ induce more electron transfer from Te p-block bands to Ta d-block bands, thus electron density on surface observed in $TaTe_2$ is much lower than that of $Ta_{0.5}$$V_{0.5}$$Te_2$. However, in bulk, interlayer Te…Te contacts in V substituted phase are shorter than those in $TaTe_2$ phase, thus tellurium-to-metal electron transfer occurs more easily in $Ta_{0.5}$$V_{0.5}$$Te_2$ phase.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.10b
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• pp.161-162
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• 2002

This study concerns the tribological behaviors of ultra-thin DLC coating with 3 nm thickness deposited in a mixed gas of argon + 20 % hydrogen as a function of humidity. Reciprocating wear tests employing a micro wear tester were performed under various normal loads and relative humidity in air environment. The chemical composition of the original and worn surfaces were studied by Auger electron spectroscopy (AES). It showed that the ultra-thin DLC coating exhibited low friction with enough wear stability at low normal load (0.18 N) and its tribological behavior was strongly dependent on the humidity. The sample surfaces before and after the test were examined using atomic force microscopy (AFM). Capillary force and meniscus areas were discussed in order to explain the influence of humidity on the friction force.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.501-504
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• 2004

This paper describes the fabrication method for atomic force microscopy(AFM) tip with multi-walled carbon nanotube(MWNT). For making a carbon nanotube (CNT) modified tips, AC electric field which cause the dielectrophoresis was used for alignment and deposition of CNTs in this research. By dropping the MWNT solution and applying an electric field between an AFM tip and an electrode, MWNTs which were dispersed into a diluted solution were directly assembled onto the apex of the AFM tips due to the attraction by the dielectrophoretic force. In this case, we investigate the effect of the angle between a tip axis and an electrode. Experimental setup were presented, and then CNT attached AFM tips are successfully shown in this paper.