• Journal of the Korean Society of Safety
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• v.23 no.4
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• pp.42-46
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• 2008

Ionizers are essential in various areas of manufacturing industries to protect electrostatic hazards and to reduce inferior products. For ion sources used in the charge neutralizers, there are corona discharge, soft X-ray, ultraviolet and glow discharge. Glow discharge has lots of attractive properties, such as lower discharge sustaining voltage, no generation of ozone, and so on. In this paper, we did an experimental study to trace the mechanism and stabilization of atmospheric pressure glow discharge using the several size and shape of electrodes. As an experimental result, to sustain conditions of atmospheric pressure glow discharge is that discharge voltage is 360V, discharge current is 12mA, apply frequency is 1kHz between electrodes when positive electrode is molybdenum(Mo) and negative electrode is copper(Cu). We confirmed that the mechanism and stabilization of atmospheric glow discharge is deeply concerned with the shape and material of electrode for discharge. Especially, glow discharge in atmospheric pressure was well generated and sustained according with the physical properties used electrode materials, example melting point, thermal conductivity, and etc.

• Journal of the Korean Society of Safety
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• v.23 no.5
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• pp.49-53
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• 2008

Glow discharge has lots of attractive properties, such as lower discharge sustaining voltage, no generation of ozone, and so on. And more, ionizer was developed recently using an atmospheric pressure glow discharge. On the other hand, ionizer needs a compressed or blown air to transport ion for charged objects. This air is very useful in explosive hazardous area to prevent the explosion of flammable gas and/or vapor by ignition sources, e.g. electrical spark. In this paper, we investigated the ionizing characteristic of atmospheric pressure glow discharge by controlled air flow rate from 5 liters to 60 liters a minute, and compared with decay time between the corona discharge and glow discharge as a function of some direction and distance from discharge ion source. We confirmed that an air flow rate needs 25 liters a minute to sustain the most suitable atmospheric pressure glow discharge and to increase an ionizing efficiency.

• Proceedings of the KIEE Conference
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• 1994.07b
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• pp.1530-1532
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• 1994

This paper describes the discharge characteristics of liquid nitrogen for plane-plane, needle-plane electrode at variation of gap spacing at atmospheric pressure. The important results obtained from this study are as follows. (1) Breakdown voltage of $LN_2$ for needle-plane electrode is higher than that of for plane-plane electrode and discharge duration tine is longer with increase of gap spacing at atmospheric pressure. (2) The formation of bubbles by evaporation is observed in spite of non-applying source at atmospheric pressure and the creation of corona confirmed for plane-plane electrode results from the bubbles. (3) The applied voltage-discharge magnitude( V-Q) characteristics of $LN_2$ showed hysteresis and the discharge magnitude decreasing and corona voltage increasing proportional to the pulse per second at atmospheric pressure.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 1993.10a
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• pp.58-62
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• 1993

This paper shows the discharge characteristics of liquid nitrogen under plane to plane electrode, needle to plance electrode, inserting teflon insulator in plane to plane electrode at atmospheric pressure. The main experimental device of this paper is cryostat. The important results obtained from this study are sa follows. Breakdown voltage of LN2 under N-P electrode is higher than that of under P-P electrode at atmospheric pressure. Breakdown duration time is longer with increase of electode gap under the P-P, N-P electrodes. The formation of bubbles by evaporation is observed in spite of non-applying source at atmospheric pressure and the creation of corona confirmed. Breakdown voltage and breakdown duration time are in proportion to increase of diameter in case of inserting teflon insulator. Partial discharge characteristics of thickness 0.5[mm] is that 채굼 voltage of teflon insulator rose with increase of diameter in each [pps].

• Applied Chemistry for Engineering
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• v.22 no.3
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• pp.261-265
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• 2011

The sterilization effects of atmospheric pressure plasma with the mixture of argon and oxygen were analyzed. The plasma reactor with the shape of dielectric barrier discharge produced the uniform distribution of glow discharge and generated ozone gas effectively according to the various process parameters. The sterilization for E. coli was affected by power, oxygen ratio in the mixture gas, treatment time and distance between reactor and sample. The concentration of ozone was a major source for the sterilization of E. coli, which was enhanced by the increase of power and oxygen ratio. In this study, the effect of atmospheric pressure plasma treatment for the sterilization was confirmed and its result can deliver the atmospheric pressure plasma treatment as the novel sterilization method instead of conventional methods.

• Korean Journal of Materials Research
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• v.25 no.2
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• pp.100-106
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• 2015

Plasma properties of dielectric barrier discharges (DBDs) at atmospheric pressure were measured and characterized using optical emission spectroscopy. Optical emissions were measured from argon, nitrogen, or air discharges generated at 5-9 kV using 20 kHz power supply. Emissions from nitrogen molecules were markedly measured, irrespective of discharge gases. The intensity of emission peaks was increased with applied voltage and electrode gap. The short wavelength peaks (315.9 nm and 337.1 nm) measured at the middle of DBDs were significantly increased with applied voltage. The optical emission from DBDs decreased with the addition of oxygen gas, which was especially significant in argon discharge. Emission from oxygen molecules cannot be measured from air discharge and argon discharge with 4.8% oxygen. The emission intensity at 337.1 nm and 357.7 nm related with nitrogen molecule was sensitively changed with electrode types and discharge voltages. However, the pattern of argon emission spectrum was nearly the same, irrespective of electrode type, oxygen content, and discharge voltage.

• 한국정보디스플레이학회:학술대회논문집
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• 2009.10a
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• pp.1500-1503
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• 2009

In this paper, we studied about atmospheric pressure remote plasma ashing of photoresist(PR), by using a modified dielectric barrier discharge(DBD). The effect of various gas combinations such as $N_2/O_2$, $N_2/O_2+SF_6$ on the changes PR ashing rate was investigated as a function of power. The maximum PR ashing rate of 1850 nm/min was achieved at $N_2$ (70 slm)/ $O_2$ (200 sccm) + $SF_6$ (3 slm). We found that as the oxygen and fluorine radical peaks were increased, the ashing rate is increased, too.

• Journal of the Korean Vacuum Society
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• v.15 no.2
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• pp.117-138
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• 2006

Plasmas can be made by electrical discharge on earth. Most of the plasmas on earth have been generated in low pressure environments where the pressure is less than one millionth of the atmospheric pressure. However, there are many plasma applications which require high pressure plasmas. Therefore, scientists start research on plasma generation at high pressure to avoid use of expensive vacuum equipments. Large-volume inexpensive plasmas are needed in the areas of material processing, environmental protection and improvement, efficient energy source and applications, etc. We therefore developed new methods of plasma generations at high pressure and carried out research of applying these plasmas to high tech industries representing 21 century. These research fields will play pivotal roles in material, environmental and energy science and technology in future.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.23 no.12
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• pp.184-190
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• 2009

Tri-acetyl-cellulose(TAC) film surface was modified by atmospheric-pressure plasma technique to obtain the hydrophilic functional groups and improve the contact angle. TAC film was modified with N2 plasma ionized in dielectric barrier discharge(DBD) reactor under atmospheric pressure. We measured the change of the contact angle and the surface energy with respect to the plasma treatment conditions such as plasma treatment power, discharge gap and Ｎ2 gas flow rate. As the plasma treatment speed of 100[mm/sec], the plasma treatment power of 1.5[kW], discharge gap 2[mm] and the $N_2$ gas flow rate 140[LPM], the best contact angle and the highest surface energy were obtained. The degree of hydrophilization depended strongly on the plasma-treating time and discharge power.

• Korean Journal of Materials Research
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• v.16 no.9
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• pp.543-549
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• 2006

Polyimides (PI) are treated with $He/O_2$ and $He/O_2/NF_3$ atmospheric pressure rf dielectric barrier discharge in order to investigate the roles of $NF_3$ that is one of the PI etching gases. Surface changes are analyzed by x-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), and contact angle measurement. The surface roughness of PI and the ratio of C=O, which is hydrophilic functional group, is more increased by $He/O_2/NF_3$ discharge than by $He/O_2$ discharge. The C=O species on the PI surface is increased up to 30 percent with rf power. The surface roughness of PI is increased from 0.4 to 11 nm with rf power. The water drop contact angles on PI, however, are reduced from $65^{\circ}\;to\;9^{\circ}$ by plasma treatment independently of $NF_3$.