• 한국안전학회지
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• 제23권4호
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• pp.42-46
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• 2008

Ionizers are essential in various areas of manufacturing industries to protect electrostatic hazards and to reduce inferior products. For ion sources used in the charge neutralizers, there are corona discharge, soft X-ray, ultraviolet and glow discharge. Glow discharge has lots of attractive properties, such as lower discharge sustaining voltage, no generation of ozone, and so on. In this paper, we did an experimental study to trace the mechanism and stabilization of atmospheric pressure glow discharge using the several size and shape of electrodes. As an experimental result, to sustain conditions of atmospheric pressure glow discharge is that discharge voltage is 360V, discharge current is 12mA, apply frequency is 1kHz between electrodes when positive electrode is molybdenum(Mo) and negative electrode is copper(Cu). We confirmed that the mechanism and stabilization of atmospheric glow discharge is deeply concerned with the shape and material of electrode for discharge. Especially, glow discharge in atmospheric pressure was well generated and sustained according with the physical properties used electrode materials, example melting point, thermal conductivity, and etc.

• 한국안전학회지
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• 제23권5호
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• pp.49-53
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• 2008

Glow discharge has lots of attractive properties, such as lower discharge sustaining voltage, no generation of ozone, and so on. And more, ionizer was developed recently using an atmospheric pressure glow discharge. On the other hand, ionizer needs a compressed or blown air to transport ion for charged objects. This air is very useful in explosive hazardous area to prevent the explosion of flammable gas and/or vapor by ignition sources, e.g. electrical spark. In this paper, we investigated the ionizing characteristic of atmospheric pressure glow discharge by controlled air flow rate from 5 liters to 60 liters a minute, and compared with decay time between the corona discharge and glow discharge as a function of some direction and distance from discharge ion source. We confirmed that an air flow rate needs 25 liters a minute to sustain the most suitable atmospheric pressure glow discharge and to increase an ionizing efficiency.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1994년도 하계학술대회 논문집 C
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• pp.1530-1532
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• 1994

This paper describes the discharge characteristics of liquid nitrogen for plane-plane, needle-plane electrode at variation of gap spacing at atmospheric pressure. The important results obtained from this study are as follows. (1) Breakdown voltage of $LN_2$ for needle-plane electrode is higher than that of for plane-plane electrode and discharge duration tine is longer with increase of gap spacing at atmospheric pressure. (2) The formation of bubbles by evaporation is observed in spite of non-applying source at atmospheric pressure and the creation of corona confirmed for plane-plane electrode results from the bubbles. (3) The applied voltage-discharge magnitude( V-Q) characteristics of $LN_2$ showed hysteresis and the discharge magnitude decreasing and corona voltage increasing proportional to the pulse per second at atmospheric pressure.

• 한국조명전기설비학회:학술대회논문집
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• 한국조명전기설비학회 1993년도 추계학술발표회논문집
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• pp.58-62
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• 1993

This paper shows the discharge characteristics of liquid nitrogen under plane to plane electrode, needle to plance electrode, inserting teflon insulator in plane to plane electrode at atmospheric pressure. The main experimental device of this paper is cryostat. The important results obtained from this study are sa follows. Breakdown voltage of LN2 under N-P electrode is higher than that of under P-P electrode at atmospheric pressure. Breakdown duration time is longer with increase of electode gap under the P-P, N-P electrodes. The formation of bubbles by evaporation is observed in spite of non-applying source at atmospheric pressure and the creation of corona confirmed. Breakdown voltage and breakdown duration time are in proportion to increase of diameter in case of inserting teflon insulator. Partial discharge characteristics of thickness 0.5[mm] is that 채굼 voltage of teflon insulator rose with increase of diameter in each [pps].

• 공업화학
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• 제22권3호
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• pp.261-265
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• 2011

아르곤과 산소 대기압 플라즈마를 이용한 미생물인 E. coli의 살균효과를 분석하였다. 유전체 격막 방전 형태의 플라즈마 반응기는 아르곤과 산소 혼합기체에서 균일한 플라즈마 방전과 오존 생성에 효과적이었다. 직접적인 대기압 플라즈마 조사에 따른 E. coli의 살균처리 공정에서 산소에 대한 혼합비와 인가전력의 증가는 방전기체의 오존 발생농도를 높여 미생물의 살균효과를 증가시켰다. 반응기와 시료와의 거리는 살균효과를 증가하기 위하여 가급적 작게 하는 것이 효율적이었다. 본 연구를 통하여 대기압 플라즈마는 오존과 같은 산화촉진제의 발생으로 저온에서 E. coli와 같은 미생물을 효과적으로 살균할 수 있어 기존의 살균법을 대체 할 수 있는 차세대 살균기술로서의 개발 가능성을 확인 할 수 있었다.

• 한국재료학회지
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• 제25권2호
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• pp.100-106
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• 2015

Plasma properties of dielectric barrier discharges (DBDs) at atmospheric pressure were measured and characterized using optical emission spectroscopy. Optical emissions were measured from argon, nitrogen, or air discharges generated at 5-9 kV using 20 kHz power supply. Emissions from nitrogen molecules were markedly measured, irrespective of discharge gases. The intensity of emission peaks was increased with applied voltage and electrode gap. The short wavelength peaks (315.9 nm and 337.1 nm) measured at the middle of DBDs were significantly increased with applied voltage. The optical emission from DBDs decreased with the addition of oxygen gas, which was especially significant in argon discharge. Emission from oxygen molecules cannot be measured from air discharge and argon discharge with 4.8% oxygen. The emission intensity at 337.1 nm and 357.7 nm related with nitrogen molecule was sensitively changed with electrode types and discharge voltages. However, the pattern of argon emission spectrum was nearly the same, irrespective of electrode type, oxygen content, and discharge voltage.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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• pp.1500-1503
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• 2009

In this paper, we studied about atmospheric pressure remote plasma ashing of photoresist(PR), by using a modified dielectric barrier discharge(DBD). The effect of various gas combinations such as $N_2/O_2$, $N_2/O_2+SF_6$ on the changes PR ashing rate was investigated as a function of power. The maximum PR ashing rate of 1850 nm/min was achieved at $N_2$ (70 slm)/ $O_2$ (200 sccm) + $SF_6$ (3 slm). We found that as the oxygen and fluorine radical peaks were increased, the ashing rate is increased, too.

• 한국진공학회지
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• 제15권2호
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• pp.117-138
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• 2006

지표면에서 플라즈마는 전기방전에 의하여 만들어낸다. 그래서 대부분의 플라즈마 발생은 1백만분의 1기압보다 더 낮은 기압에서 발생하고 있었다. 그러나 많은 플라즈마 응용은 고기압에서 발생한 플라즈마를 요구하고 있다. 진공펌프와 같은 고가의 장비를 피하기 위하여 과학자들은 1기압이나 그이상의 압력에서 플라즈마를 발생하는 연구를 하기 시작했다. 많은 량의 제료 공정, 환경보호와 개선, 그리고 고효율 에너지 창출과 이용 등의 분야에 플라즈마를 사용할 때에는 오직 더 많은 량의 플라즈마를 더욱 값싸게 만들 때에만 가능한 것이다. 우리는 따라서 고기압에서 플라즈마를 만들어내는 새로운 방법을 개발하고 이러한 플라즈마가 21세기 산업에 적용될 수 있는 새로운 기반을 구축하는 연구를 수행하고 있다. 이러한 기술은 미래의 재료 공정이나, 환경 그리고 에너지 분야에 지대한 영향을 미칠 것으로 생각한다.

• 조명전기설비학회논문지
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• 제23권12호
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• pp.184-190
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• 2009

표면의 친수성 작용기 형성과 접촉각 향상을 위하여 대기압 플라즈마를 이용하여 Tri-acetyl-cellulose(TAC) 필름에 대한 표면개질을 연구하였다. TAC 필름의 표면개질 목적으로 대기압에서 플라즈마를 발생시키기 위한 Dielectric barrier discharge(DBD) 구조의 플라즈마 반응기 내에서 이온화된 질소 플라즈마를 사용하였다. 플라즈마 처리 공정변수인 처리속도, 방전전력, 방전 갭 및 질소 가스 유속을 변화시켜가며 접촉각을 측정하여 접촉각과 표면에너지 변화를 검토하였다. 대기압 플라즈마 처리속도 100[mm/sec], 방전 전력 1.5[kW], 방전 갭 2[mm] 및 $N_2$ 가스유량 140[LPM] 에서 가장 높은 접촉각과 표면에너지 값을 보였다. 표면친수화의 정도는 플라즈마 방전 전력과 처리 시간에 의존하였다.

• 한국재료학회지
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• 제16권9호
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• pp.543-549
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• 2006

Polyimides (PI) are treated with $He/O_2$ and $He/O_2/NF_3$ atmospheric pressure rf dielectric barrier discharge in order to investigate the roles of $NF_3$ that is one of the PI etching gases. Surface changes are analyzed by x-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), and contact angle measurement. The surface roughness of PI and the ratio of C=O, which is hydrophilic functional group, is more increased by $He/O_2/NF_3$ discharge than by $He/O_2$ discharge. The C=O species on the PI surface is increased up to 30 percent with rf power. The surface roughness of PI is increased from 0.4 to 11 nm with rf power. The water drop contact angles on PI, however, are reduced from $65^{\circ}\;to\;9^{\circ}$ by plasma treatment independently of $NF_3$.