• 제목/요약/키워드: Array-type MEMS resonator

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Krylov 부공간에 근거한 모멘트일치법을 이용한 모델차수축소법 및 배열형 MEMS 공진기 주파수응답함수 계산에의 응용 (Model Order Reduction Using Moment-Matching Method Based on Krylov Subspace and Its Application to FRF Calculation for Array-Type MEMS Resonators)

  • 한정삼;고진환
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2008년도 추계학술대회A
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    • pp.436-441
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    • 2008
  • One of important factors in designing array-type MEMS resonators is obtaining a desired frequency response function (FRF) within a specific range. In this paper Krylov subspace-based model order reduction using moment-matching with non-zero expansion points is represented to calculate the FRF of array-type resonators. By matching moments at a frequency around a specific range of the array-type resonators, required FRFs can be efficiently calculated with significantly reduced systems regardless of their operating frequencies. In addition, because of the characteristics of moment-matching method, a minimal order of reduced system with a specified accuracy can be determined through an error indicator using successive reduced models, which is very useful to automate the order reduction process and FRF calculation for structural optimization iterations.

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랜덤 제조 오차를 고려한 모드 편재계수를 최소화하는 반복 배열 마이크로 공진기의 최적설계 (Design of MEMS Resonator Array for Minimization of Mode Localization Factor Subject to Random Fabrication Error)

  • 김욱태;이종원
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2005년도 춘계학술대회논문집
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    • pp.840-845
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    • 2005
  • This paper presents a robust optimal design method for a periodic structure type of MEMS resonator that is vulnerable to mode localization. The robust configuration of such a MEMS resonator to fabrication error is implemented by changing the regularity of periodic structure. For the mathematical convenience, the MEMS resonator is first modeled as a multi pendulum system. The index representing the measure of mode variation is then introduced using the perturbation method and the concept of modal assurance criterion. Finally, the optimal intentional mistuning, minimizing the expectation of the irregularity measure for each substructure, is determined for the normal distributed fabrication error and its robustness in the design of MEMS resonator to the fabrication error is demonstrated with numerical examples.

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랜덤 제조 오차를 고려한 모드 편재계수를 최소화하는 반복 배열 마이크로 공진기의 최적설계 (Design of MEMS Resonator Array for Minimization of Mode Localization Factor Subject to Random Fabrication Error)

  • 김욱태;이종원
    • 한국소음진동공학회논문집
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    • 제15권8호
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    • pp.931-938
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    • 2005
  • This paper presents a robust optimal design method for a periodic structure type of MEMS resonator that is vulnerable to mode localization. The robust configuration of such a MEMS resonator to fabrication error is implemented by changing the regularity of periodic structure For the mathematical convenience, the MEMS resonator is first modeled as a multi-pendulum system. The index representing the measure of mode variation is then introduced using the perturbation method and the concept of modal assurance criterion. Finally, the optimal intentional mistuning, minimizing the expectation of the irregularity measure for each substructure, is determined for the normal distributed fabrication error and its robustness in the design of MEMS resonator to the fabrication error is demonstrated with numerical examples.

크리로프 부공간법에 근거한 모델차수축소기법을 통한 배열형 MEMS 공진기의 주파수응답해석 (Frequency Response Analysis of Array-Type MEMS Resonators by Model Order Reduction Using Krylov Subspace Method)

  • 한정삼;고진환
    • 대한기계학회논문집A
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    • 제33권9호
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    • pp.878-885
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    • 2009
  • One of important factors in designing MEMS resonators for RF filters is obtaining a desired frequency response function (FRF) within a specific frequency range of interest. Because various array-type MEMS resonators have been recently introduced to improve the filter characteristics such as bandwidth, pass-band, and shape factor, the degrees of freedom (DOF) of finite elements for their FRF calculation dramatically increases and therefore raises computational difficulties. In this paper the Krylov subspace-based model order reduction using moment-matching with non-zero expansion points is represented as a numerical solution to perform the frequency response analyses of those array-type MEMS resonators in an efficient way. By matching moments at a frequency around the specific operation range of the array-type resonators, the required FRF can be efficiently calculated regardless of their operating frequency from significantly reduced systems. In addition, because of the characteristics of the moment-matching method, a minimal order of reduced system with a prearranged accuracy can be determined through an error indicator using successive reduced models, which is very useful to automate the order reduction process and FRF calculation for structural optimization iterations. We also found out that the presented method could obtain the FRF of a $6\times6$ array-type resonator within a seventieth of the computational time necessary for the direct method and in addition FRF calculation by the mode superposition method could not even be completed because of a data overflow with a half after calculation of 9,722 eigenmodes.

Krylov 부공간 모델차수축소법을 이용한 주파수응답함수의 직접 설계민감도 해석 (Direct Design Sensitivity Analysis of Frequency Response Function Using Krylov Subspace Based Model Order Reduction)

  • 한정삼
    • 한국전산구조공학회논문집
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    • 제23권2호
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    • pp.153-163
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    • 2010
  • Krylov 부공간 모델차수축소법은 초기 유한요소모델과 축소모델의 전달함수의 계수인 모멘트를 일치시키는 방법을 이용하는 축소기법으로 이미 대형 유한요소모델의 주파수응답함수의 효율적인 계산에 많이 사용되고 있는 방법 중의 하나이다. 본 논문에서는 Krylov 부공간 축소기법을 이용한 관심 주파수영역에 대한 주파수응답 해석과 이를 통하여 계산된 주파수응답의 여러 가지 설계변수에 대한 설계민감도 해석 방법을 제안하였다. 일반적으로 기계시스템의 주파수응답을 고려한 최적설계를 위해서는 설계변수에 대한 관심 주파수영역에서의 주파수응답 및 그의 민감도 정보가 요구되므로, 고려하는 유한요소모델이 대형일 경우에는 관심 주파수영역에서의 반복적인 해석으로 인한 계산비용의 문제가 심각하게 대두된다. 본 논문에서는 축소모델을 이용하여 주파수응답과 주파수응답의 설계민감도 해석을 수행하여 계산의 효율성을 극대화하였다. 계산상 시스템행렬의 민감도 계산에는 시간측면과 구현의 용이성 측면에서 장점이 있는 준해석적 방법을 이용하였다. 수치 예제를 통하여 축소기법을 이용한 주파수응답의 설계민감도 해석 결과를 초기 유한요소모델의 민감도 결과와 비교하여 우수한 정확성 및 효율성을 확인하였다. 본 논문에서 제안된 방법을 주파수응답을 고려하는 최적설계에 이용하는 경우, 결과의 정확성 및 계산비용 측면에서 매우 효과적인 방법이 될 수 있을 것으로 판단된다.