• 한국전기전자재료학회논문지
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• 제18권3호
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• pp.253-258
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• 2005

This paper presents characteristics of CrOx thin-film, which were deposited on $Al_2$O$_3$ wafer by DC reactive magnetron sputtering in an argon-oxide atmosphere for high temperature applications. The present paper deals with a study of the technological characteristics of thin film resistors to provide a control in obtaining temperature coefficients of resistance of given value. The optimized condition of CrOx thin-film were thickness range of 2500 $\AA$ and annealing condition(350 $^{\circ}C$, 1 hr) in oxide partial pressure(3.5${\times}$10$^{-4}$ torr). Under optimum conditions, the CrOx thin-films is obtained a high resistivity, p=340 $\mu$Ωcm, a low temperature coefficient of resistance, TCR=-55 ppm/$^{\circ}C$. The CrOx thin films resistors which were fabricated in this paper had excellent characteristics as high precision resistors.

• 산업기술연구
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• 제19권
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• pp.107-113
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• 1999

The microstructural evolution during mechanical alloying of elemental Fe and Si powders, average composition $Fe_{30}Si_{70}$ and $Fe_{50}Si_{50}$, has been investigated by X-ray diffraction (XRD), Scanning electron microscopy (SEM) and Differential scanning calorimetry (DSC). Mechanical alloying was performed by using a SPEX 8000 Mixer/Mill under argon atmosphere with/without hexane as a process control agent (PCA). In the presence of PCA, the milling process was dominated by fracture resulting in the decrease in particle size to about $1{\mu}m$. The structural development with milling time depended on the average composition of starting powders. The mixture of $Fe_{50}Si_{50}$ and $Fe_{30}Si_{70}$ resulted in the formation of FeSi(${\varepsilon}$ - phase) and $FeSi_2$(${\beta}$ - phase), respectively. In the case of $Fe_{33.3}Si_{66.7}$, a mixture and $FeSi_2({\beta})$ was formed. These results were discussed by considering the thermodynamics and kinetics concerning the milling process.

• 한국분말재료학회지
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• 제17권5호
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• pp.379-384
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• 2010

In the present work, bismuth nanopowders with various particle size distributions were synthesized by controlling argon (Ar) gas flow rate and chamber pressure of a gas condensation (GC) apparatus. From the analyses of transmission electron microscopy (TEM) images and nitrogen gas adsorption results, it was found that as Ar gas flow rate increased, the specific surface area of bismuth increased and the average particles size decreased. On the other hand, as the chamber pressure increased, the specific surface area of bismuth decreased and the average particles size increased. The optimum gas flow rate and chamber pressure for the maximized electrochemical active surface area were determined to be 8 L/min and 50 torr, respectively. The bismuth nanopowders synthesized at the above condition exhibit 13.47 $m^2g^{-1}$ of specific surface area and 45.6 nm of average particles diameter.

• 한국진공학회지
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• 제7권1호
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• pp.43-50
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• 1998

원격플라즈마화학증착(RPCVD)에 의하여 파이렉스 유리 기판 위에 투명전도성 산화 주석막을 제조하였다. RPCVD공정의 주요한 조절변수는 증착시간, 사메틸주석, 산소 및 아 르곤의 유속, 라디오 주파수 출력, 및 기판온도를 포함했다. 양질의 산화주석막을 제조하고 RPCVD공정을 보다 잘 이해하기 위하여 이들 파라미터에 대한 증착속도, 전기적 저항, 광 학적 투과도 및 결정구조의 의존성을 체계적으로 살펴보았다. 산화주석막의 성질에 미치는 이들 파라미터의 영향은 복잡하게 서로 연관되어 있다. 최적화된 증착조건에서 제조된 산화 주석막은 102$\AA$/min의 증착속도, $9.7\times 10^{-3}\Omega$cm의 비저항 및 ~80%의 가시선 투과도를 나 타냈다.

• Bulletin of the Korean Chemical Society
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• 제24권3호
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• pp.285-290
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• 2003

An analytical method for the simultaneous determination of trace Ge, As and Se in biological samples by inductively coupled plasma/mass spectrometry has been investigated. The effects of added organic gas into the coolant argon gas on the analyte signal were studied to improve the detection limit, accuracy and precision. The addition of a small amount of methane (10 mL/min.) into the coolant gas channel improved the ionization of Ge, As and Se. The analytical sensitivity of the proposed Ar/CH₄system was superior by at least two-fold to that of the conventional Ar method. In the present method, the detection limits obtained for Ge, As and Se were 0.014, 0.012 and 0.064 ㎍/L, respectively. The analytical reliability of the proposed method was evaluated by analyzing the certified standard reference materials (SRM). Recoveries of 99.9% for Ge, 103% for As, 96.5% for Se were obtained for NIST SRM of freeze dried urine sample. The proposed method was also applied to the biological samples.

• 한국세라믹학회지
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• 제36권5호
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• pp.471-477
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• 1999

Fe and Fe-Mo binder were used to produce TiB2 based cermet by a pressureless sintering. The densification behaviour of TiB2-Fe-Mo cermet during liquid-phase sintering in argon was studied in relation to binder phase charactertics. The effects of Mo addition and sintering condition on the sintering behaviour and mechanical properties were also investigated. TiB2-based cermets with Fe-Mo binder composition showed a better sinterability than the cermets with only Fe binder. In TiB2-Fe-Mo cermet higher densities in the wide temperature range were obtained and also fully densified sintered cermet were obtained at 1873K The enhancement in the densification phenomenon of TiB2-Fe-Mo system can be explained by improved liquid phase wettability associated with the roles of Mo components as solute atoms. When Fe-Mo binders were used cermets with a finer grain size and enhanced mechanical properties wereproduced and new phases such as Fe2B and Mo2FeB2 were observed in the sintered cermet. The highest bending strength was obtained from the 20vol% Fe-Mo cermet and these hardness-fracture toughness combination in the wide binder compositions is better than that of TiB2-Fe cermet. In order to improve mechanical properties microstructure control with high purity powders is desirable because high purity powders prevent the formation of Fe2B and Mo2FeB2 phase which comsume the ductile binder phase.

• Journal of Magnetics
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• 제15권4호
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• pp.155-158
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• 2010

The HDDR (hydrogenation, disproportionation, desorption, and recombination) process can be used as an effective way of converting a no coercivity Nd-Fe-B ingot material, with a coarse $Nd_2Fe_{14}B$ grain structure, to a highly coercive one with a fine grain structure. Careful control of the HDDR process can lead to an anisotropic powder with good $Nd_2Fe_{14}B$ grain texture; the most critical step for inducing texture is disproportionation. The critical conditions (hydrogen pressure and temperature) for the disproportionation reaction of fully hydrogenated $Nd_{12.5}Fe_{81.1-(x+y)}B_{6.4}Ga_xNb_y$ (x = 0 or 0.3, y = 0 or 0.2) alloys, in different atmospheres of pure hydrogen and a mixed gas of hydrogen and argon, was investigated with TPA (thermopiezic analyser). From this, the hydrogen pressure-temperature diagram showing the critical conditions was established. The critical disproportionation temperature of the fully hydrogenated $Nd_{12.5}Fe_{81.1-(x+y)}B_{6.4}Ga_xNb_y$ alloys was slightly increased as the hydrogen pressure decreased in both pure hydrogen and mixed gas. The critical disproportionation temperature of the hydrogenated alloys was higher in the mixed gas than in pure hydrogen. Addition of Ga and Nb increased the critical disproportionation temperature of the fully hydrogenated Nd-Fe-B alloys.

• 한국표면공학회지
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• 제45권2호
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• pp.89-94
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• 2012

A study to replace a high temperature thermal carbonization process with microwave plasma process is carried for PAN fiber as a starting material. Near atmospheric pressure microwave plasma (1 Torr~45 Torr) was used to control to get the fiber temperature up to $1,000^{\circ}C$. Even argon is an inert gas, its plasma state include high internal energy particles; ion (15.76 eV) and metastable (11.52 eV). They are very effective to lower the necessary thermal temperature for carbonization of PAN fiber and the resultant thermal budget. The carbonization process was confirmed by both EDS (energy dispersive spectroscopy) of plasma treated fibers and OES (optical emission spectroscopy) during processing step as a real time monitoring tool. The same trend of decreasing oxygen content was observed in both diagnostic methods.

• 대한기계학회논문집B
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• 제30권5호
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• pp.397-404
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• 2006

Effects of surface defect distribution on flame instability during flame-surface interaction are experimentally investigated. To examine chemical quenching phenomenon which is caused by radical adsorption and recombination processes on the surface, thermally grown silicon oxide plates with well-defined defect density were prepared. ion implantation technique was used to control the number of defects, i.e. oxygen vacancies. In an attempt to preferentially remove oxygen atoms from silicon dioxide surface, argon ions with low energy level from 3keV to 5keV were irradiated at the incident angle of $60^{\circ}$. Compositional and structural modification of $SiO_2$ induced by low-energy $Ar^+$ ion irradiation has been characterized by Atomic Force Microscopy (AFM) and X-ray Photoelectron Spectroscopy (XPS). It has been found that as the ion energy is increased, the number of structural defect is also increased and non-stoichiometric condition of $SiO_x({\le}2)$ is enhanced.

• Journal of Microbiology and Biotechnology
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• 제32권5호
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• pp.672-679
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• 2022

Microbial lipases are used widely in the synthesis of various compounds due to their substrate specificity and position specificity. 4-Ethyl malate (4-EM) made from diethyl malate (DEM) is an important starting material used to make argon fluoride (ArF) photoresist. We tested several microbial lipases and found that Photobacterium lipolyticum M37 lipase position-specifically hydrolyzed DEM to produce 4-EM. We purified the reaction product through silica gel chromatography and confirmed that it was 4-EM through nuclear magnetic resonance analysis. To mass-produce 4-EM, DEM hydrolysis reaction was performed using an enzyme reactor system that could automatically control the temperature and pH. Effects of temperature and pH on the reaction process were investigated. As a result, 50℃ and pH 4.0 were confirmed as optimal reaction conditions, meaning that M37 was specifically an acid lipase. When the substrate concentration was increased to 6% corresponding to 0.32 M, the reaction yield reached almost 100%. When the substrate concentration was further increased to 12%, the reaction yield was 81%. This enzyme reactor system and position-specific M37 lipase can be used to mass-produce 4-EM, which is required to synthesize ArF photoresist.