• 한국표면공학회지
• /
• 제29권5호
• /
• pp.415-423
• /
• 1996

Thin film technologies for fabricating SQUIDs involve etching and deposition procedures with the proper substrate materials and $YBa_2Cu_3O_{7-d}$ (YBCO) as the high $T_c$ superconductor. YBCO were prepared on various substrates of MgO, $SrTiO_3$, and $LaAlO_3$ by using off-axis magnetron sputtering methods and annealing in-situ. The parameters of film fabrication processes had been optimized to yield good quality films in terms of the critical temperature $T_c$ and the critical current density $J_c$. The optimized processes yielded $T_C$>90K along with $J_c$>$10_6A$$extrm{cm}^2$ at 77K and>$2\times10_7A/Cm^2$ at 5K. We fabricated step-edge type dc-SQUIDs and directly coupled magnetometers, producing step edges on MgO(100) substrates by etching with Ar-ion beam, depositing YBCO material on them, then patterning them by using ion-milling technique. Circuitizing washer-shape SQUIDs to possess a pair of step-edge junctions of 2-5$\mu$ line width with a high angle>$50^{\circ}C$ , we examined their I-V characteristics thoroughly and Shapiro steps clearly as we irradiate microwaves of 8-20 GHz frequency.

• 한국재료학회지
• /
• 제3권3호
• /
• pp.276-281
• /
• 1993

3원계 U-Ce-O산화물의 소결거동을 연구하기 위하여 $UO_2$ 및 $CeO_2$분말을 ball-mill 방법으로 혼합한 (U, Ce)$O_2$의 영향이고, 나중에 나타나는 극대점은 $CeO_2$의 영향 때문이다. 또한 $Ceo_{2}$함량이 증가할수록 소결이 지연됨을 알수 있었다. 동일한 10wt. % $CeO_2$함량에서, 4시간동안 ball-milling을 하였을때가 소결속도는 가장 빨랐다.

• Progress in Superconductivity
• /
• 제9권1호
• /
• pp.80-84
• /
• 2007

Charcoal was used as a carbon source for improving the critical current density of $MgB_2$ and the effect of annealing temperature on the $J_c$ of $MgB_2$ was investigated. The charcoal powder used in this study was $1{\sim}2$ microns in size and was prepared by wet attrition milling. $MgB_2$ bulk samples with a nominal composition of $Mg(B_{0.95}C_{0.05})_2$ were prepared by in situ process of Mg and B powders. The powder mixture was uniaxially compacted into pellets and heat treated at temperatures of $650^{\circ}C\;-\;1000^{\circ}C$ for 30 minutes in flowing Ar gas. It was found that superconducting transition temperature of $Mg(B_{0.95}C_{0.05})_2$ decreased by charcoal additions which indicates the carbon substitution for boron site. $J_c$ of $Mg(B_{0.95}C_{0.05})_2$ was lower than that of the undoped $MgB_2$ at the magnetic fields smaller than 4 Tesla, while it was higher than that of the undoped sample especially at the magnetic field higher than 4 T. High temperature annealing seems to be effective in increasing $J_c$ due to the enhanced carbon diffusion into boron sites.

• 한국재료학회지
• /
• 제8권11호
• /
• pp.1038-1042
• /
• 1998

$Nd_5Pr_7Fe_{82}B_6$ 및 $Nd_{12}Fe_{82}B_6$ 조성의 1차 용유된 ingot에 대하여 기계적 분쇄처리 및 열처리를 행하고 결정구조 및 자기적 특성을 측정하였다. Ar 분위기 하에서 330시간 분쇄처리한 결과 $2~3\mu\textrm{m}$크기의 입자가 얻어졌으며, x-선 회절도로부터 각 입자는 미세한 결정립으로 구성되어 있음을 알았다. 330시간 분쇄처리된 분말을 $600^{\circ}C$에서 2시간 열처리함으로써 항자계가 18.36-18.79kOe, 최대에너지적이 8.32-8.38 MGOe인 자기적 특성을 얻었다. 열처리 온도가 높아지면 자기적 특성이 향상되었으나, 기계적 분쇄처리에 의한 ingot의 미세결정화 과정이 최적의 자기적 특성을 얻는데 더욱 중요하였다.

• 한국분말재료학회지
• /
• 제24권1호
• /
• pp.41-45
• /
• 2017

The effects of the heat treatment temperature and of the atmosphere on the dehydrogenation and hydrogen reduction of ball-milled $TiH_2-WO_3$ powder mixtures are investigated for the synthesis of Ti-W powders with controlled microstructure. Homogeneously mixed powders with refined $TiH_2$ particles are successfully prepared by ball milling for 24h. X-ray diffraction (XRD) analyses show that the powder mixture heat-treated in Ar atmosphere is composed of Ti, $Ti_2O$, and W phases, regardless of the heat treatment temperature. However, XRD results for the powder mixture, heat-treated at $600^{\circ}C$ in a hydrogen atmosphere, show $TiH_2$ and TiH peaks as well as reaction phase peaks of Ti oxides and W, while the powder mixture heat-treated at $900^{\circ}C$ exhibits only XRD peaks attributed to Ti oxides and W. The formation behavior of the reaction phases that are dependent on the heat treatment temperature and on the atmosphere is explained by thermodynamic considerations for the dehydrogenation reaction of $TiH_2$, the hydrogen reduction of $WO_3$ and the partial oxidation of dehydrogenated Ti.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2011년도 제40회 동계학술대회 초록집
• /
• pp.277-277
• /
• 2011

Mo-Cu 합금은 고강도이고 우수한 열전도성 및 전기전도성를 가지는 특성이 있어 현재 방열소재, 반도체 부품, 자동차 부품 등 여러 응용분야에서 연구가 활발히 진행되고 있다. 본 연구에서는 서로 고용성이 없는 Mo-Cu 합금을 제조하기 위해서 Mo, Cu 분말을 PBM (Planetary Ball Milling) 방법을 이용하여 제조 하였으며, 제조된 분말은 SPS (Spark Plasma Sintering) 공정을 이용하여 소결체를 제조하였다. Mo-Cu의 조성 변화는 Cu의 함유량을 각각 5at%Cu, 10at%Cu, 20at%Cu로 조절하여 수행하였으며, PBM 의 공정 변수로 회전수(RPM), 볼과 분말의 비율, 분산제의 양, 볼밀 시간, 분위기 변화를 주어 최적조건을 얻기 위한 실험을 진행하였다. PBM 방법을 이용하여 제조한 분말은 PSA (Particle Size Analysis)에 의해 분말의 크기를 측정하고 EDS(Energy Disperse X-ray Spectrometer) 분석에 의해 조성을 확인하였으며, XRD (X-Ray Diffraction) 분석에 의해 Cu peak이 사라지는 조건을 PBM의 최적조건으로 잡고 실험을 진행하였다. 소결체를 고밀도화하기 위해 소결공정을 SPS 방식으로 하였으며 소결체의 경도, 내마모성, 마찰계수 일함수 등을 분석하기 위해 소결체의 크기를 직경 30 mm 및 두께 5 mm로 설계하였고, 소결 공정 변수로 소결온도를 각각 $900^{\circ}C$, $1000^{\circ}C$, $1100^{\circ}C$, 소결압력을 50MPa, 60MPa, 70MPa, 유지시간을 0분, 10분, 20분으로 차이를 주어, 소결체의 밀도차이와 물성차이를 분석하였다. 그 결과 PBM의 최적조건으로는 5at%Cu 에서는 10h, 10at%Cu, 20at%Cu 에서는 20h의 최적의 밀링 시간을 확인하였고, 다른 공정 변수의 최적조건으로는 회전수 300RPM, 10:1의 볼과 분말 비, 분산제 4wt%, Ar 분위기라는 조건을 얻을 수 있었다. 각각의 공정변수 변화에 따른 소결체 최적밀도 달성조건, 소결체 물성 및 전기적 특성 등의 상관관계에 관하여 보고한다.

• 한국분말재료학회지
• /
• 제25권4호
• /
• pp.322-326
• /
• 2018

The hydrogen reduction behavior of $MoO_3-CuO$ powder mixture for the synthesis of homogeneous Mo-20 wt% Cu composite powder is investigated. The reduction behavior of ball-milled powder mixture is analyzed by XRD and temperature programmed reduction method at various heating rates in Ar-10% $H_2$ atmosphere. The XRD analysis of the heat-treated powder at $300^{\circ}C$ shows Cu, $MoO_3$, and $Cu_2MoO_5$ phases. In contrast, the powder mixture heated at $400^{\circ}C$ is composed of Cu and $MoO_2$ phases. The hydrogen reduction kinetic is evaluated by the amount of peak shift with heating rates. The activation energies for the reduction, estimated by the slope of the Kissinger plot, are measured as 112.2 kJ/mol and 65.2 kJ/mol, depending on the reduction steps from CuO to Cu and from $MoO_3$ to $MoO_2$, respectively. The measured activation energy for the reduction of $MoO_3$ is explained by the effect of pre-reduced Cu particles. The powder mixture, hydrogen-reduced at $700^{\circ}C$, shows the dispersion of nano-sized Cu agglomerates on the surface of Mo powders.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2009년도 제38회 동계학술대회 초록집
• /
• pp.448-448
• /
• 2010

Magnetic random access memory (MRAM) has made a prominent progress in memory performance and has brought a bright prospect for the next generation nonvolatile memory technologies due to its excellent advantages. Dry etching process of magnetic thin films is one of the important issues for the magnetic devices such as magnetic tunneling junctions (MTJs) based MRAM. CoFeB is a well-known soft ferromagnetic material, of particular interest for magnetic tunnel junctions (MTJs) and other devices based on tunneling magneto-resistance (TMR), such as spin-transfer-torque MRAM. One particular example is the CoFeB - MgO - CoFeB system, which has already been integrated in MRAM. In all of these applications, knowledge of control over the etching properties of CoFeB is crucial. Recently, transferring the pattern by using milling is a commonly used, although the redeposition of back-sputtered etch products on the sidewalls and the low etch rate of this method are main disadvantages. So the other method which has reported about much higher etch rates of >$50{\AA}/s$ for magnetic multi-layer structures using $Cl_2$/Ar plasmas is proposed. However, the chlorinated etch residues on the sidewalls of the etched features tend to severely corrode the magnetic material. Besides avoiding corrosion, during etching facets format the sidewalls of the mask due to physical sputtering of the mask material. Therefore, in this work, magnetic material such as CoFeB was etched in an ICP etching system using the gases which can be expected to form volatile metallo-organic compounds. As the gases, carbon monoxide (CO) and ammonia ($NH_3$) were used as etching gases to form carbonyl volatiles, and the etched features of CoFeB thin films under by Ta masking material were observed with electron microscopy to confirm etched resolution. And the etch conditions such as bias power, gas combination flow, process pressure, and source power were varied to find out and control the properties of magnetic layer during the process.

• 한국분말재료학회지
• /
• 제26권5호
• /
• pp.410-414
• /
• 2019

The hydrogen reduction behavior of the $CuO-SCo_3O_4$ powder mixture for the synthesis of the homogeneous Cu-15at%Co composite powder has been investigated. The composite powder is prepared by ball milling the oxide powders, followed by a hydrogen reduction process. The reduction behavior of the ball-milled powder mixture is analyzed by X-ray diffraction (XRD) and temperature-programmed reduction at different heating rates in an Ar-10%H2 atmosphere. The scanning electron microscopy and XRD results reveal that the hydrogen-reduced powder mixture is composed of fine agglomerates of nanosized Cu and Co particles. The hydrogen reduction kinetics is studied by determining the degree of peak shift as a function of the heating rate. The activation energies for the reduction of the oxide powders estimated from the slopes of the Kissinger plots are 58.1 kJ/mol and 65.8 kJ/mol, depending on the reduction reaction: CuO to Cu and $SCo_3O_4$ to Co, respectively. The measured temperature and activation energy for the reduction of $SCo_3O_4$ are explained on the basis of the effect of pre-reduced Cu particles.

• 한국재료학회지
• /
• 제4권6호
• /
• pp.681-686
• /
• 1994

$YBa_{2}Cu_{3}O_{7-x}$결정입계 접합을 이용한 마이크로파 감지소자 $YBa_{2}Cu_{3}O_{7-x}$초전도체 박막을 화학증착법을 이용하여 $LaAIO_{3}$단결정 위에 증착하여 임계온도 90K이상 임계전류밀도 $10^5/A \textrm{cm}^2$(77K) 이상의 우수한 박막을 제작하였다. 이를 포토작업과 이온밀링을 실시하여 수 마이크로미터 크기의 브릿지 형태로 만든 후 이들의 전류전압 특성을 조사하였다. 브릿지에 입사된 마이크로파의 크기에 따라 브릿지 간의 임계전류값의 저하가 관찰되었으며 동시에 샤피로스텝을 관찰할 수 있었다.