• 한국표면공학회지
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• 제52권4호
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• pp.211-226
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• 2019

Optical thin films were deposited by using a reactive pulsed DC magnetron sputtering method with a high density plasma(HDP). In this study, the effect of sputtering process conditions on the microstructure and optical properties of $SiO_2$, $TiO_2$, $Nb_2O_5$ thin films was clarified. These thin films had flat and dense microstructure, stable stoichiometric composition at the optimal conditions of low working pressure, high pulsed DC power and RF power(HDP). Also, the refractive index of the $SiO_2$ thin films was almost constant, but the refractive indices of $TiO_2$ and $Nb_2O_5$ thin films were changed depending on the microstructure of these films. Antireflection films of $Air/SiO_2/Nb_2O_5/SiO_2/Nb_2O_5/SiO_2/Nb_2O_5/Glass$ structure designed by Macleod program were manufactured by our developed sputtering system. Transmittance and reflectance of the manufactured multilayer films showed outstanding value with the level of 95% and 0.3%, respectively, and also had excellent durability.

• 전자공학회논문지A
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• 제32A권11호
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• pp.44-51
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• 1995

Homogeneous, compositionally graded, and superlattice-like silicon oxynitride(SiON) dielectric layers, with the refractive index varying from 1.46 to 2.05 as a function of film thickness, were grown by computer-controlled plasma-enhanced chemical vapor deposition (PECVD) using silane, nitrogen, and nitrous oxide reactant gases. An antireflection(AR) coating and thin-film electroluminescent(TFEL) devices with multiple dielectrics were designed and fabricated using real time control of reactant gases of the PECVD system.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.129-130
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• 2008

• Journal of the Optical Society of Korea
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• 제4권2호
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• pp.86-88
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• 2000

A sequence of functions are examined for the gradient-index AR thin film between two dielectric media and are used as the starting profiles in optimization to improve AR performance. Sinusoidal functions were quite efficient to use as components of the index change in the optimization. It is shown that there exist a number of gradient-index profiles which exhibit excellent AR-performance after control of the gradient-index profiles.

• Applied Science and Convergence Technology
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• 제23권5호
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• pp.284-288
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• 2014

We present tapered nanostructures fabricated on a selective area of gallium phosphide substrates for advanced optoelectronic device applications. A lithography-free fabrication process was accomplished by dry etching of metal nanoparticles. Thermal dewetting of micro-patterned metal thin films provides etch masks for tapered nanostructures. This simple process also allows the formation of plasmonic surfaces with corrugated shapes. Rigorous coupled-wave analysis calculations provide design guidelines for tapered nanostructures on gallium phosphide substrates.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2008년도 추계학술대회 초록집
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• pp.55-55
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• 2008

반사방지막은 태양전지 셀 제작에 적용되고 있으며, 효율을 향상시키기 위하여 $SiO_2$, $TiO_2$를 이용한 Multi-layer 반사방지막을 적용하였다. Multi-layer의 효과가 기존의 SiN 반사방지막에 비하여 광수집의 향상에 영향을 주었음을 알 수 있었다.

• 한국응용과학기술학회지
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• 제33권3호
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• pp.483-491
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• 2016

나노실리카가 코팅된 유리 표면은 나노실리카 표면에 존재하는 친수성 수산기로 인해 방담성이 매우 증가하나, 실외에 설치된 유리에 코팅된 경우는 비에 의해 씻겨 나가 방담 특성의 내구성이 급격히 감소한다. 또한 나노실리카가 코팅된 유리 표면의 토폴로지는 광투과율 또는 반사방지 특성을 좌우하는 매우 중요한 인자이다. 이러한 나노실리카 코팅의 특성에 관한 내구성을 향상시키기 위하여 가교제로 테트라에틸오르소실리케이트 (TEOS)를 사용하여 나노실리카 (Ludox) 현탁액으로 친수성 나노실리카피막을 제조하였다. 산성 또는 염기성 수용액 중에서의 TEOS의 가수 분해 최적 조건도 물에 대한 접촉각 측정을 통하여 조사하였다. pH=4의 산성 조건에서 1.5 wt% 나노실리카-TEOS 코팅액으로 얻은 최종 투명한 친수성 코팅층은 매우 향상된 친수성에 대한 내구성뿐만 아니라, 코팅하지 않은 유리에 비해 약 2 % 포인트 정도 높은 가시광투과율을 나타내었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.149-149
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• 2010

The double-layer antireflection (DLAR) coatings have significant advantages over single-layer antireflection (SLAR) coatings. This is because they will be able to cover a broad range of the solar spectrum which would enhance the overall performance of solar cells. Moreover films deposited at high frequency are expected to show excellent and UV-stable passivation in the refractive index that we adopted. In this work, we present a novel DLAR coating using SiNx:H thin films with refractive indices 1.9 and 2.3 as the top and bottom layers. This approach is cost effective when compared to earlier DLAR coatings with two different materials. SiNx:H films were deposited by Plasma enhanced chemical vapor deposition (PECVD) technique using $SiH_4$, $NH_3$ and $N_2$ gases with flow rates 20~80sccm, 200sccm and 85 sccm respectively. The RF power, plasma frequency and substrate temperature for the deposition were 300W, 13.56 MHz and $450^{\circ}C$, respectively. The optimum thickness and refractive indices values for DLAR coatings were estimated theoretically using Macleod simulation software as 82.24 nm for 1.9 and 68.58 nm for 2.3 respectively. Solar cells were fabricated with SLAR and DLAR coatings of SiNx:H films and compared the cell efficacy. SiNx:H> films deposited at a substrate temperature of $450^{\circ}C$ and that at 300 W power showed best effective minority carrier lifetime around $50.8\;{\mu}s$. Average reflectance values of SLAR coatings with refractive indices 1.9, 2.05 and 2.3 were 10.1%, 9.66% and 9.33% respectively. In contrast, optimized DLAR coating showed a reflectance value as low as 8.98% in the wavelength range 300nm - 1100nm.

• 한국광학회지
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• 제29권6호
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• pp.262-267
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• 2018

본 논문에서는 유기발광다이오드 디스플레이(OLED)의 광 효율을 향상시키기 위해 방사방지필름을 새롭게 디자인하였다. 현재 상용화되고 있는 편광판의 편광도와 투과율을 변화시켜 OLED 반사방지필름에 사용하였을 경우 정면과 측면방향의 반사특성을 계산하였다. 그 결과 편광도가 99.995%나 99.990%인 상용화된 편광판의 편광도를 99.9% 수준으로 떨어뜨릴 경우, 반사방지필름의 평균 시감반사율은 사람의 눈으로 알아차리기 힘든 약 0.1% (증가율 환산 2.5%) 상승한 반면, 투과율은 기존보다 약 1.63~3.34%(증가율 환산 4.2~8.2%) 상승하였다. 이 결과는 기존 OLED에서 저반사율을 유지하면서 광효율을 상승시킬 수 있는 광학설계 조건을 제시하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.250-250
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• 2009

The fabricated the nanostructural patterns on the surface of SiN antireflection layer of polycrystalline Si solar cell using anodic aluminum oxide (AAO) masks in an inductively coupled plasma(ICP) etching process. The AAO nanopattern mask has the hole size of about 70~75nm and lattice constant of 100~120nm. The transferred nano-patterns were observed by the scanning electron microscope (SEM). The voltage of patterned Si solar cell enhanced.