• 한국산학기술학회논문지
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• 제17권9호
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• pp.718-723
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• 2016

중형 차량용 에어컨에 사용되는 스크롤 압축기는 토크변동이 적고 에너지 효율이 높으며, 소음이 적어 적용이 확대되어 가고 있다. 또한 경량화에 따라 압축기를 구성하는 주요부품이 스틸에서 알루미늄으로 변경하는 등 소재에 대한 연구가 활발히 이루어지고 있다. 또한 스크롤 압축기는 고정 스크롤과 선회 스크롤의 인벌루트 랩의 가공 정밀도가 $10{\mu}m$ 이하로 정밀도가 높은 전용장비와 전용 툴은 물론 숙련된 가공기술이 요구되므로 가공 품질을 확인하기 위하여 표면조도와 윤곽도를 측정하였으며, 알루미늄을 모재로하여 양극 산화 처리하여 사용되고 있는 선회스크롤의 경도를 향상시키기 위한 방법의 일환으로 봉공처리를 수행에 따른 특성들을 살펴보았다. 알루미늄 소재는 Al-Mg-Cu계 합금으로 미량의 Ni, Fe, Zn 이 부가된 것으로 나타났으며, 표면조도는 $3{\mu}m$이하로 가공 정밀도 기준 $10{\mu}m$를 만족하였다. 또한 양극산화 후 나노다이아몬드, CNT로 봉공처리 한 경우 경도는 450 이상으로 수봉공처리의 경우 보다 50% 이상 경도가 향상됨을 알 수 있었으며, 봉공재로 사용하기 위한 소재로서 탄소나노튜브나 나노다이아몬드는 큰 차이를 보이지 않았다.

• 한국산학기술학회논문지
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• 제4권4호
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• pp.361-365
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• 2003

Oxide etcher장비에서 실리콘 웨이퍼를 잡고 공정을 수행할 수 있는 단극 (unipolar) 형태의 E-chuck을 제작하였다. 단극 형태의 E-chuck을 개발하기 위하여 핵심기술인 폴리이미드 박막의 코팅기술과 알미늄 표면의 양극처리기술을 개발하였다. E-chutk은 폴리이미드 재료를 표면 물질로 사용하여 플라스마에 의한 표면 손상을 최소화하였다. Oxide etcher 장비에 사용되는 핵심 부품인 E-chuck의 제조 과정을 살펴보고 히터 내장형 E-chuck을 위한 박막형 전열체 기술을 개발하였다.

• 반도체디스플레이기술학회지
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• 제1권1호
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• pp.9-13
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• 2002

A polyimide-type electrostatic chuck (ESC) was fabricated for the application of holding 8-inch silicon wafers in the oxide etching equipment. For the fabrication of the unipolar ESC, core technologies such as coating of polyimide films and anodizing treatment of aluminum surface were developed. The polyimide films were prepared on top of thin coated copper substrates for the good electrical contacts, and the helium gas cooling technique was used for the temperature uniformity of the silicon wafers. The ESC was essentially working with an unipolar operation, which was easier to fabricate and operate compared to a bipolar operation. The chucking force of the ESC has been measured to be about 580 gf when the applied voltage was 1.5 kV, which was considered to be enough force to hold wafers during the dry etching processing. The employment of the ESC in etcher system could make 8% enhancement of the wafer processing yield.

• 구강회복응용과학지
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• 제24권4호
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• pp.361-369
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• 2008

본 연구의 목적은 다공성의 티타늄 산화막에 불소를 처리한 결과를 평가하는 것이다. 디스크에 양극산화법을 통하여 다공성의 티타늄산화막표면을 얻은 후 불소를 처리하고 일정시간동안 Hank액에 침전을 시켰다. 양극산화를 통해 일정거칠기의 표면을 얻었으며 SEM과 XRD를 통하여 표면의 형상과 성분을 분석하였다. 생성된 표면은 빠른 표면 활성도를 보였으며, 적절한 거칠기와 좋은 골반응으로 골유착에 기여할 수 있을 것으로 여겨진다.

• 한국표면공학회지
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• 제17권3호
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• pp.78-86
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• 1984

Hard anodic oxide film was investigated formed on pure aluminium with various temperature (30$^{\circ}-60^{\circ}C$), current densities (1.5-3.0A/$dm^2$) and concentrations(3-15g/l) of oxalic acid in 0.5M malic acid bath. The resulting characteristic of the anodic oxide film obtained were summarized as follows in the view point of physical and mechanical properties in relation with the above process variables. 1. The film thickness increased with oxalic acid concentration and bath temperature, while the reversed phenomena were obtained at a high concentration of oxalic acid and high temperature due to the severe dissolution of the anodic oxide film. 2. The hardness and the abrasion resistance were improved by lowering the addition of oxalic acid and the bath temperature. This feature was directly dependent on the porosity formed on the anodic oxide film. 3. The maximum hardness of anodic oxide film showed Hv 579 in the temperature of 30$^{\circ}C$ with the current density, 2.5A/$dm^2$ in the 0.5M malic acid bath mixed with 5g/l oxalic acid.

• Corrosion Science and Technology
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• 제21권6호
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• pp.487-494
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• 2022

Anodizing is a typical electrochemical surface treatment method that can improve the corrosion and insulating properties of aluminum alloys. The anodization process can obtain a dense structure. It can be used to artificially grow the thickness of an anodization film. Aluminum 3003 alloy used in this study is the most commonly used alloy for batteries due to its high strength and excellent formability as well as its weldability and corrosion resistance. Aluminum 3003 alloy was anodized at 0 ℃ with 0.3 M oxalic acid at 20 V, 40 V, or 60 V for 1 hour, 6 hours, or 12 hours. As a result of analyzing the composition of each specimen with an Energy Dispersive Spectrometer (EDS), aluminum was converted into an oxide film. The thickness of the formed anodization film increased when the applied voltage and anodization time increased. High corrosion potential values and low corrosion current density values were observed for the thickest oxide layer. The anodization film formed by anodization acted as a protective layer. The electrical resistance increased as the applied voltage and anodization time increased.

• Composites Research
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• 제13권4호
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• pp.42-53
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• 2000

차세대 항공기소재로 관심을 가지고 있는 Al 7075/CFRP 적층 복합재인 CARALL(CARbon ALuminum Laminates)하이브리드 복합소재 제조를 위한 중요조건중의 하나인 Al 표면처리조건과 경화방법에 대해 조사하였다. 항공기용 Al 전처리 중 대표적인 것으로 증기탈지, 크롬산 양극산화 피막처리, 황산-중크롬산 나트륨 에칭처리 및 인산 양극산화 피막처리공정이 있다. 본 실험에서는 상기 전처리 공정을 모두 항공 규격에 준해서 실시하여 Lap shear 및 Bell peel strength를 비교함으로써 효과적인 접착강도를 나타내는 표면처리 공정을 찾아내고, 시편의 자연표면상태를 그대로 관찰할 수 있는 AFM(Atomic Force Microscope)장비를 이용하여 각 전처리 시편의 표면형상을 측정함으로써 표면형상과 접착강도와의 상관관계를 고찰 하였다. 그리고 Al 표면처리와 별도로 Al과 접착제 및 탄소섬유 프리프레그를 동시에 경화시키는 방법과 탄소섬유 프리프레그를 미리 경화시킨후 다시 Al과 탄소섬유 라미네이트를 접착필름을 이용하여 재 접착시키는 이차 경화법을 적용하여 상호 접착강도 및 물성을 비교하였다. 또한 이차경화법에서의 오토클레이브 압력 변화와 DMA(Dynamic Mechanical Analysis) 장비를 이용한 접착필름의 유리전이온도($T_g$) 측정을 통해 효과적인 공정압력 및 접착내구성 유지에 필요한 최소 경화시간을 파악하였다. 상기 결과로부터 정밀 치수관리가 필요하며 고접착강도, 내구성 항공기 부품을 제작하기 위한 알루미늄 표면처리 공정과 복합재 경화공정 조건을 제시하고자 하였다.

• 한국재료학회지
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• 제14권9호
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• pp.607-613
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• 2004

This study was to investigate the surface properties of electrochemically oxidized Ti-6Al-7Nb alloy by anodic spark discharge technique. Anodizing was performed at current density 30 $mA/cm^2$ up to 300 V in electrolyte solutions containing $DL-{\alpha}$-glycerophosphate disodium salt hydrate($DL-{\alpha}$-GP) and calcium acetate (CA). Hydrothermal treatment was done at $300^{\circ}C$ for 2 hrs to produce a thin outermost layer of hydroxyapatite (HA). The bioactivity was evaluated from HA formation on the surfaces in a Hanks' solution with pH 7.4 at $36.5^{\circ}C$ for 30 days. The size of micropores and the thickness of oxide film increased and complicated multilayer by increasing the spark forming voltage. Needle-like HA crystals were observed on anodic oxide film after the hydrothermal treatment at $300^{\circ}C$ for 2 hrs. When increasing $DL-{\alpha}$-GP in electrolyte composition, the precipitated HA crystals showed the shape of thick and shorter rod. However, when increasing CA, the more fine needle shape HA crystals were appeared. The bioactivity in Hanks' solution was accelerated when the oxide films composed with strong anatase peak with presence of rutile peak. The increase of amount of Ca and P was observed in groups having bioactivity in Hanks' solution. The Ca/P ratio of the precipitated HA layer was equivalent to that of HA crystal and it was closer to 1.67 as increasing the immersion time in Hanks' solution.

• 대한치과기공학회지
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• 제27권1호
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• pp.79-88
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• 2005

This study was performed to investigate the surface properties of electrochemically oxidized pure niobium by anodic oxide and hydrothermal treatment technique. Niobium specimens of $10\times10mm$ in dimension were polished sequentially from #600, #800, #1000 emery paper. The surface pure niobium specimens were anodized in an electrolytic solution that was dissolved calcium and phosphate in water. The electrolytic voltage was set in the range of 250 V and the current density was 10 $mA/cm^2$. The specimen was hydrothermal treated in high-pressure steam at 300$^{\circ}C$ for 2 hours using an autoclave. Then, specimens were immersed in the Hanks' solution with pH 7.4 at 37$^{\circ}C$ for 30 days. The surface of specimen was characterized by scanning electron microscope(SEM), energy dispersive X-ray microanalysis(EDX), potentiostat/galvanostat test, and cytotoxicity test. The results obtained was summarized as follows; According to the result of measuring corrosion behavior at 0.9% NaCl, corrosion resistance was improved more specimens treated with anodic oxide than in hydrothermal treated ones. The multi-porous oxide layer on surface treated through anodic oxidation showed a structure that fine pores overlap one another, and the early precipitation of apatite was observed on the surface of hydrothermal treated samples. According to the result of EDX after 30 days deposition in Hanks' solution, Ca/P was 1.69 in hydrothermal treated specimens. In MTT test, specimens treated through anodic oxidation and hydrothermal treated ones showed spectrophotometer similar to that of the control group. Thus no significant difference in cytotoxicity was observed (P>0.05).

• 한국재료학회지
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• 제28권4호
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• pp.201-207
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• 2018

Infrared(IR) heating has many advantages, such as energy efficiency, reduced heating time, cleanliness, equipment compactness, high drying rate and easy automation. These features of IR heating provide widely industrial applications, such as surface heat treatment in semiconductor fabrication, thermoforming of polymers, drying and disinfection of food products, heating to metal forging, and drying of wet materials. In this study, the characteristics of a protected gold mirror were examined by spectrophotometer and the lifetime of the coating layers were evaluated by a cross-cutting method and salt spray test. The effects of manufacturing conditions on the protected gold mirror were seen and remedies for these effects were noted in order to improve the properties of the protected gold mirror in the drying process. The reflectance and lifetime of the protected gold mirror was influenced by manufacturing conditions, such as surface roughness and forming conditions of the anti-oxide layer, the adhesion layer, the reflecting layer and the protection layer. The results of this study showed that the protected gold mirror manufactured using a buffing method for pre-treatment resulted in the most effective reflectance. In addition, $Al_2O_3$ coating on an Al substrate as an anti-oxide layer was more effective than the anodizing process in the test of reflectance. Furthermore, the protected gold mirror manufactured by layers forming of various materials resulted in the most effective reflectance and lifetime when coated with $Al_2O_3$ as the anti-oxide layer, coated Cr as the adhesion layer, and coated $MgF_2$ as the protection layer.