• Korean Journal of Materials Research
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• v.10 no.5
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• pp.375-381
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• 2000

Aluminium foil for electrolytic capacitors was anodized at the voltage of 100V and 140V for 10 minutes in ammonium adipate solution to form aluminum oxide layer on aluminum substrate as an dielectric film. The thickness, the stoichiometry and the crystal structure of the layer were investigated by using RBS and TEM . In addition EIS technique was employed to study the effects of addition of sulfuric acid on the increment of the foil surface area. It was found that the thickness values of the layers anodized at 100V and 140V were about 130 nm and 190 nm respectively and the stoichiometry of the elements of aluminum and oxygen was 2:3. The anodic oxide layer was shown to be amorphous. but the structure irradiated with electron beam resulted in the transformation into crystalline structure of $${\gamma}$-Al_2$$O_3$ . From a comparison of the impedance results and the capacitance variation to investigate the ef- fects of sulfuric acid addition to the etching bath of hydrochloric acid, the EIS techinque could be useful to analyze the capacitance variation.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.8
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• pp.875-881
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• 2004

Fundamental results obtained from an atomic force microscope (AFM) chemically-induced direct nano-lithography process are presented, which is regarded as a simple method for fabrication nm-scale devices such as superconducting flux flow transistors (SFFTs) and single electron tunneling transistors (SETs). Si cantilevers with Pt coating and with 30 nm thick TiO coating were used as conducting AFM tips in this study. We observed the surfaces of superconducting strip lines modified by AFM anodization' process. First, superconducting strip lines with scan size 2 ${\mu}{\textrm}{m}$${\times}$2 ${\mu}{\textrm}{m}$ have been anodized by AFM technology. The surface roughness was increased with the number of AFM scanning, The roughness variation was higher in case of the AFM tip with a positive voltage than with a negative voltage in respect of the strip surface. Second, we have patterned nm-scale oxide lines on ${YBa}-2{Cu}_3{O}_{7-x}$ superconducting microstrip surfaces by AFM conductive cantilever with a negative bias voltage. The ${YBa}-2{Cu}_3{O}_{7-x}$ oxide lines could be patterned by anodization technique. This research showed that the critical characteristics of superconducting thin films were be controlled by AFM anodization process technique. The AFM technique was expected to be used as a promising anodization technique for fabrication of an SFFT with nano-channel.

• Journal of Dental Rehabilitation and Applied Science
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• v.21 no.1
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• pp.33-42
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• 2005

This study was performed to investigate the surface properties and in vitro biocompatibility of electrochemically oxidized Ti-6Al-7Nb alloy by anodic spark discharge technique. Discs of Ti-6Al-7Nb alloy of 20 mm in diameter and 2 mm in thickness were polished sequentially from #300 to 1000 SiC paper, ultrasonically washed with acetone and distilled water for 5 min, and dried in an oven at $50^{\circ}C$ for 24 hours. Anodizing was performed using a regulated DC power supply. The applied voltages were given at 240, 280, 320, and 360 V and current density of $30mA/cm^2$. Hydrothermal treatment was conducted by high pressure steam at $300^{\circ}C$ for 2 hours using a autoclave. Samples were soaked in the Hanks' solution with pH 7.4 at $36.5^{\circ}C$ during 30 days. The results obtained were summarized as follows; 1. The oxide films were porous with pore size of $1{\sim}5{\mu}m$. The size of micropores increased with increasing the spark forming voltage. 2. The main crystal structure of the anodic oxide film was anatase type as analyzed with thin-film X-ray diffractometery. 3. Needle-like hydroxyapatite (HA) crystals were observed on anodic oxide films after hydrothermal treatment at $300^{\circ}C$ for 2 hours. The precipitation of HA crystals was accelerated with increasing the spark forming voltage. 4. The precipitation of the fine asperity-like HA crystals were observed after being immersed in Hanks' solution at $37^{\circ}C$. The precipitation of HA crystals was accelerated with increasing the spark forming voltage and the time of immersion in Hanks' solution. 5. The Ca/P ratio of the precipitated HA layer was equivalent to that of HA crystal as increasing the spark forming voltage and the time of immersion in Hanks' solution.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.157-157
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• 2017

Titanium and its alloys that have a good biocompatibility, corrosion resistance, and mechanical properties such as hardness and wear resistance are widely used in dental and orthopedic implant applications. They can directly connect to bone. However, they do not form a chemical bond with bone tissue. Plasma electrolytic oxidation (PEO) that combines the high voltage spark and electrochemical oxidation is a novel method to form ceramic coatings on light metals such as titanium and its alloys. This is an excellent reproducibility and economical, because the size and shape control of the nano-structure is relatively easy. Silicon (Si), manganese (Mn), and magnesium (Mg) has a useful to bone. Particularly, Si has been found to be essential for normal bone, cartilage growth and development. Manganese influences regulation of bone remodeling because its low content in body is connected with the rise of the concentration of calcium, phosphates and phosphatase out of cells. Insufficience of Mn in human body is probably contributing cause of osteoporosis. Pre-studies have shown that Mg plays very important roles in essential for normal growth and metabolism of skeletal tissue in vertebrates and can be detected as minor constituents in teeth and bone. The objective of this work was to study nucleation and growth of bone-like apatite formation on Ti-6Al-4V in solution containing Mn, Mg, and Si ions after plasma electrolytic oxidation. Anodized alloys was prepared at 270V~300V voltages. And bone-like apatite formation was carried out in SBF solution for 1, 3, 5, and 7 days. The morphologies of PEO-treated Ti-6Al-4V alloy in containing Mn, Mg, and Si ions were examined by FE-SEM, EDS, and XRD.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.11a
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• pp.239-239
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• 2015

삼성, LG전자 등 다양한 사업부의 White Anodizing구현기술의 Need는 항상 존재하고 있으며, 특히 White와 Black Color의 콤비네이션으로 친환경 이미지 강조 및 핸드폰의 고급화에 필연적인 메탈화로 작년부터 White Anodizing의 수요요청이 쇄도하고 있다. 그러나 현행 공업용 Anodizing 기술(황산법)은 봉공처리 전 착색공정에서 Red, Blue, Black 등 염료분자와 달리 염료 분자가 비교적 큰 White 염료는 Anodizing으로 성장된 다공성피막 내부로 들어가지 못해 국내 Anodizing전문기업 뿐만아니라 일본 기업 및 연구소 등에서도 무수한 시도를 하고 있지만 현재까지는 완벽한 White Anodizing구현기술이 전무한 상태이다. 이에 당사는 알루미늄합금을 White의 안료나 염료가 아닌 알칼리전해액의 Pulse전류인가 PEO(Plasma electrolytic oxidation)처리 공정에 의거 White Anodizing기술을 개발하고자 하였다. 알칼리 전해질에 의한 Anodizing 처리기술로 White와 유사한 색상을 구현하고 있으나, 수요자가 요구하는 White Anodizing으로 제품을 양산하는데 어려움이 있어 기존 Anodizing 처리 대신 Pulse전류인가 PEO처리기술로 White Color를 구현하여 수요요청이 쇄도한 국내외 기업체에 공급하고자 한다. 본 기술은 알카리 전해액을 사용하므로 친환경적이며, 다공성 피막으로 인한 우수한 도장 밀착성, 실링처리에 의한 내식성 향상, PEO 피막의 우수한 경도 및 내마모성 등을 나타내며, 알루미늄뿐만 아니라 마그네슘합금, 티타늄 등에도 공히 적용이 가능하며, White Anodizing의 특화된 기술로 표면처리기술 우위 선점 및 원가절감 등이 가능하다. 당사는 알루미늄 아노다이징 전문 기업으로서 내식성 목적의 연질 아노다이징 처리 및 고내마모성을 목적으로 하는 자동차 부품 및 기계 부품용 경질 아노다이징 처리를 주로 수행하고 있다. 본 발표에서는 당사의 표면처리 기술 및 알루미늄의 아노다이징에 대한 소개를 하고자 한다.

• Journal of the Korean institute of surface engineering
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• v.51 no.3
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• pp.157-163
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• 2018

The anodic $TiO_2$ layers which are prepared in various anodization conditions exhibit their specific color depending on the thickness of $TiO_2$. In this study, the relationship between the color of $TiO_2$ layer, which is grown by PEO (Plasma electrolytic oxidation), and the thickness of the $TiO_2$ layer is investigated. To evaluate the color change of the $TiO_2$ layer, the value of color ($dE^*ab$) is measured and calculated by spectrophotometer and chromameter. As a result, it is found that $dE^*ab$ values and thickness of $TiO_2$ layers form a linear relationship with meaningful formular. This formula can be helpful to quantify the thickness of the $TiO_2$ layer by the numerical $dE^*ab$ values. In this process, the spectrophotometer shows more precise results than the chromameter dose. If fluoride ions ($F^-$) are included in the electrolyte, it will affect the $dE^*ab$ values of the $TiO_2$. layer. This is against the propensity, which is analyzed by XRD (X-ray diffraction) and XPS (X-ray photoelectron spectroscopy). It is important that the formular suggested in this study provides other metals which can be also anodized with the possibility of quantifying the thickness of the $TiO_2$ layer by the $dE^*ab$ values.

• Journal of Dental Rehabilitation and Applied Science
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• v.22 no.1
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• pp.101-110
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• 2006

This study was performed to investigate the surface properties and in vitro biocompatibility of electrochemically oxidized Ti-6Al-7Nb alloy by anodic spark discharge technique. Discs of Ti-6Al-7Nb alloy of 20 mm in diameter and 2 mm in thickness were polished sequentially from #300 to 1000 SiC paper, ultrasonically washed with acetone and distilled water for 5 min, and dried in an oven at $50^{\circ}C$ for 24 hours. Anodizing was performed using a regulated DC power supply. The applied voltages were given at 240, 280, 320, and 360 V and current density of $30mA/cm^2$. Hydrothermal treatment was conducted by high pressure steam at $300^{\circ}C$ for 2 hours using a autoclave. Samples were soaked in the Hanks' solution with pH 7.4 at $36.5^{\circ}C$ during 30 days. The results obtained were summarized as follows; 1. The oxide films were porous with pore size of $1{\sim}5{\mu}m$. The size of micropores increased with increasing the spark forming voltage. 2. The main crystal structure of the anodic oxide film was anatase type as analyzed with thin-film X-ray diffractometery. 3. Needle-like hydroxyapatie (HA) crystals were observed on anodic oxide films after hydrothermal treatment at $300^{\circ}C$ for 2 hours. The precipitation of HA crystals was accelerated with increasing the spark forming voltage. 4. The precipitation of the fine asperity-like HA crystals were observed after being immersed in Hanks' solution at $37^{\circ}C$. The precipitation of HA crystals was accelerated with increasing the spark forming voltage and the time of immersion in Hanks' solution. 5. The Ca/P ration of the precipitated HA layer was equivalent to that of HA crystal as increasing the spark forming voltage and the time of immersion in Hanks' solution.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.143-143
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• 2016

알루미늄 합금은 내구성과 내식성이 우수할 뿐만 아니라 다양한 표면개질을 통해 그 표면 특성을 더욱 향상시킬 수 있다. 특히 Al-Mg계 5083-H321 Al 합금의 경우 가공성 및 용접성이 우수하여 선체 재료로 널리 이용되는데, 이는 선체중량의 경량화가 가능하여 연료비 절감과 빠른 선속 등 다양한 이점을 지니기 때문이다. 그러나 선속의 고속화에 따라 선체에 가해지는 유체충격이 증가하고 정압 저하에 기인하여 캐비테이션-침식 손상이 증가할 뿐만 아니라 해수환경 특성 상염소이온의 존재로 부식이 가속화되는 등 침식 및 부식의 시너지효과로 손상은 크게 증가한다. 이에 대한 방지대책으로 다양한 표면개질 기법이 제안되고 있으나 강한 충격압이 동반된 캐비테이션 침식-부식 복합 손상 환경에서는 표면처리만으로는 불가능할 수 있다. 따라서 본 연구에서는 양극산화된 5083-H321을 대상으로 캐비테이션 환경 하에서 일정 전위를 인가하여 침식-부식 손상이 최소화되는 최적전위를 규명하고자 한다. 이를 위해 먼저 분극 실험을 통해 재료의 전기화학적 거동을 바탕으로 임의의 전위를 선정하고 해당 전위를 인가한 상태에서 캐비테이션 실험을 실시하였다. 이때 분극실험과 캐비테이션-전기화학 복합실험 모두 $25^{\circ}C$의 해수에서 실시하였으며, 전기화학적 분극실험은 유효면적이 $3.24cm^2$인 시편에 2 mV/s의 분극속도로 0 ~ -3 V 까지 인가하였고, Ag/AgCl 기준전극과 백금대극을 사용하였다. 캐비테이션-전기화학 복합 실험은 정전위를 인가한 상태에서 $30{\mu}m$의 진폭으로 20분간 실시하였으며, 혼팁과 시험편 사이의 거리는 1 mm로 일정하게 유지하였다. 실험 후 표면 손상의 정량적 분석을 위해 인가된 전위별 전류밀도를 비교하고, 무게감소량을 측정하였으며, 손상특성 분석을 위해 3D현미경과 주사전자현미경(SEM)을 통해 표면을 분석하였다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.146-146
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• 2016

최근 국민 소득향상과 더불어, 여가시간 증가에 따라 해양레저에 대한 관심이 크게 높아지고 있으며, 그에 따라 레저용 선박 수요도 증가하고 있다. 기존 국내 소형 선박의 경우 FRP(fiber-reinforced plastic)재료로 선박을 건조해 왔다. 그러나 해양환경 규제 강화로 FRP 선박의 건조가 감소하고 있으며, 친환경 선박에 대한 필요성이 대두되고 있다. 따라서 FRP재료를 대체하는 선박용 재료로 친환경적이고 가벼운 소재인 알루미늄 합금 재료가 선박건조 분야에서 각광을 받고 있다. 특히 5000계열 Al-Mg 합금은 가공성과 용접성이 우수하여 주로 구조용으로 많이 사용되고 있으나 경량화에 따른 빠른 선속이 유체충격을 증가시켜 선체에 캐비테이션 손상을 일으킬 수 있다. Al-Mg 합금의 경우에 부식성이 대단히 큰 해양환경에서 부식과 캐비테이션 침식이 복합적으로 일어나면 손상이 빠르게 증가되는 경향을 나타내어 선박의 수명을 현저히 단축시켜 경제적인 손실을 초래한다. 따라서 본 연구에서는 해수 내에서 Al-Mg 합금의 캐비테이션 저항성을 향상시키기 위해 알루미늄 합금 표면에 내식성 뿐만 아니라 경도 및 내마모성 등의 기계적 특성이 우수한 산화피막을 형성시키는 양극산화 기술을 적용하고, 다양한 봉공처리(sealing)방법에 따른 캐비테이션 특성을 평가하였다. 캐비테이션 실험은 압전(piezoelectric) 효과를 이용한 진동발생 장치를 사용하여 $30{\mu}m$ 진폭으로 일정하게 유지하였으며, 시편과 혼 팁 사이의 간격은 1mm로 하였다. 캐비테이션 실험 후에는 시편을 초음파 세척하여 진공 건조기에서 24시간 이상 건조한 후 정밀저울로 무게를 측정하였으며, 표면 손상 형상을 분석하기 위해 주사전자현미경(SEM)과 3D현미경을 이용하여 관찰하였다.

• Korean Chemical Engineering Research
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• v.53 no.3
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• pp.401-406
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• 2015

Getter is a class of materials used in absorbing gases such as hydrogen and moisture in microelectronics or semiconductor devices to operate properly. In this study, we developed a new device structure consisting of porous anodized alumina films on textured silicon wafer, which have cost efficiency in materials and processing aspects. Anodic aluminum oxide (AAO) with controlled pore sizes can be applied to a high-efficiency moisture absorber due to the high surface area and OH- saturated surface property. The moisture sorption capacity was 2.02% (RH=35%), obtained by analyzing isothermal adsorption/desorption curve.