• Title/Summary/Keyword: Anodized aluminum oxide

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Fabrication of Wafer-Scale Anodized Aluminum oxide(AAO)-Based capacitive biosensor

  • Kim, Bongjun;Oh, Jeseung;Yoo, Kyunghwa
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.372.2-372.2
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    • 2016
  • Various nanobiosensors have been developed and extensively investigated. For their practical applications, however, the reproducibility and uniformity should be good enough and the mass-production should be possible. To fabricate anodized aluminium oxide (AAO)-based nanobiosesnor on wafer scale, we have designed and constructed a wafer-scale anodizing system. $1{\mu}m$-thick-aluminum is deposited on 4 inch SiO2/Si substrate and then anodized, resulting in uniform nanopores with an average pore diameter of about 65 nm. Furthermore, most AAO sensors constructed on this wafer provide capacitance values of 30 nF ~ 60 nF in PBS, demonstrating their uniformity.

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Improvement of Corrosion Resistance of Aluminum Alloy with Wettability Controlled Porous Oxide films

  • Sakairi, M.;Goyal, V.
    • Corrosion Science and Technology
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    • v.15 no.4
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    • pp.166-170
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    • 2016
  • The combined process of porous type anodizing and desiccation treatment was applied to improve wettability of A1050 aluminum alloy. The water contact angles of anodized samples were increaseds considerably with desiccation treatment. However, there was no considerable effect of polishing and anodizing time on water contact angle. The corrosion behavior with the treatments was investigated electrochemically. The corrosion resistance of the samples in 3.5 mass% NaCl solutions increased with higher contact angle. Anodized and desiccated samples showed better corrosion resistance than un-desiccated samples around rest potential region.

Effect of Aluminum Purity on the Pore Formation of Porous Anodic Alumina

  • Kim, Byeol;Lee, Jin Seok
    • Bulletin of the Korean Chemical Society
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    • v.35 no.2
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    • pp.349-352
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    • 2014
  • Anodic alumina oxide (AAO), a self-ordered hexagonal array, has various applications in nanofabrication such as the fabrication of nanotemplates and other nanostructures. In order to obtain highly ordered porous alumina membranes, a two-step anodization or prepatterning of aluminum are mainly conducted with straight electric field. Electric field is the main driving force for pore growth during anodization. However, impurities in aluminum can disturb the direction of the electric field. To confirm this, we anodized two different aluminum foil samples with high purity (99.999%) and relatively low purity (99.8%), and compared the differences in the surface morphologies of the respective aluminum oxide membranes produced in different electric fields. Branched pores observed in porous alumina surface which was anodized in low-purity aluminum and the size; dimensions of the pores were found to be usually smaller than those obtained from high-purity aluminum. Moreover, anodization at high voltage proceeds to a significant level of conversion because of the high speed of the directional electric field. Consequently, anodic alumina membrane of a specific morphology, i.e., meshed pore, was produced.

Anti-Icing Characteristics of Aluminum 6061 Alloys According to Surface Nanostructure (알루미늄 6061 합금의 표면 나노 구조물 변화에 따른 방빙 특성 연구)

  • Rian, Kim;Chanyoung, Jeong
    • Corrosion Science and Technology
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    • v.21 no.6
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    • pp.476-486
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    • 2022
  • Recently, aluminum 6061 instead of copper alloy is used for cooling heat exchangers used in the internal combustion of engines due to its economic feasibility, lightweight, and excellent thermal conductivity. In this study, aluminum 6061 alloy was anodized with oxalic acid, phosphoric acid, or chromic acid as an anodizing electrolyte at the same concentration of 0.3 M. After the third anodization, FDTS, a material with low surface energy, was coated to compare hydrophobic properties and anti-icing characteristics. Aluminum was converted into an anodization film after anodization on the surface, which was confirmed through Energy Dispersive X-ray Spectroscopy (EDS). Pore distance, interpore distance, anodization film thickness, and solid fraction were measured with a Field Emission Scanning Electron Microscope (FESEM). For anti-icing, hydrophobic surfaces were anodized with oxalic acid, phosphoric acid, or chromic acid solution. The sample anodized in oxalic acid had the lowest solid fraction. It had the highest contact angle for water droplets and the lowest contact hysteresis angle. The anti-icing contact angle showed a tendency to decrease for specimens in all solutions.

AC전압 인가에 따른 알루미늄 양극산화 공정 및 박막 특성

  • Lee, Jeong-Taek;Choe, Jae-Ho;Kim, Geun-Ju
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.11a
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    • pp.242-242
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    • 2009
  • Fabrication of Anodic aluminum oxide under DC vias condition has been studied. When bias and time of anodic aluminum oxide process change, the hole distance and diameter size change. Comparison of fabricated AAO between AC vias and DC vias condition has been studied in this experiment. The first and second anodization of one aluminum is done by using DC and AC power supplier. And first and second anodization of another aluminum is done by DC power supplier. The size of the aluminum is $1cm{\times}3cm$, and second anodic aluminum oxide process takes about 45min. It is found that the hexagonal shape appears on the surface of the AAO. AC power source can fabricate aao which have a nano hole array. We can see that the hole on the surface of the AC vias has a better rounded hole than DC vias AAO. we need more data so we can get characteristic about AC power generated AAO.

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Alumina Templates on Silicon Wafers with Hexagonally or Tetragonally Ordered Nanopore Arrays via Soft Lithography

  • Park, Man-Shik;Yu, Gui-Duk;Shin, Kyu-Soon
    • Bulletin of the Korean Chemical Society
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    • v.33 no.1
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    • pp.83-89
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    • 2012
  • Due to the potential importance and usefulness, usage of highly ordered nanoporous anodized aluminum oxide can be broadened in industry, when highly ordered anodized aluminum oxide can be placed on a substrate with controlled thickness. Here we report a facile route to highly ordered nanoporous alumina with the thickness of hundreds-of-nanometer on a silicon wafer substrate. Hexagonally or tetragonally ordered nanoporous alumina could be prepared by way of thermal imprinting, dry etching, and anodization. Adoption of reusable polymer soft molds enabled the control of the thickness of the highly ordered porous alumina. It also increased reproducibility of imprinting process and reduced the expense for mold production and pattern generation. As nanoporous alumina templates are mechanically and thermally stable, we expect that the simple and costeffective fabrication through our method would be highly applicable in electronics industry.

A Miniaturized 2.5 GHz 8 W GaN HEMT Power Amplifier Module Using Selectively Anodized Aluminum Oxide Substrate (선택적 산화 알루미늄 기판을 이용한 소형 2.5 GHz 8 W GaN HEMT 전력 증폭기 모듈)

  • Jeong, Hae-Chang;Oh, Hyun-Seok;Yeom, Kyung-Whan
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.22 no.12
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    • pp.1069-1077
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    • 2011
  • In this paper, a design and fabrication of a miniaturized 2.5 GHz 8 W power amplifier using selectively anodized aluminum oxide(SAAO) substrate are presented. The process of SAAO substrate is recently proposed and patented by Wavenics Inc. which uses aluminum as wafer. The selected active device is a commercially available GaN HEMT chip of TriQuint company, which is recently released. The optimum impedances for power amplifier design were extracted using the custom tuning jig composed of tunable passive components. The class-F power amplifier are designed based on EM co-simulation of impedance matching circuit. The matching circuit is realized in SAAO substrate. For integration and matching in the small package module, spiral inductors and single layer capacitors are used. The fabricated power amplifier with $4.4{\times}4.4\;mm^2$ shows the efficiency above 40 % and harmonic suppression above 30 dBc for the second(2nd) and the third(3rd) harmonic at the output power of 8 W.

Growth Behavior and Corrosion Damage of Oxide Film According to Anodizing Time of Aluminum 1050 Alloy (알루미늄 1050 합금의 양극산화 시간에 따른 산화피막 성장 거동 및 부식 손상 연구)

  • Choi, Yeji;Jeong, Chanyoung
    • Corrosion Science and Technology
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    • v.21 no.4
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    • pp.282-289
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    • 2022
  • Aluminum 1000 series alloy, a pure aluminum with excellent workability and weldability, is mainly used in the ship field. Aluminum alloy can combine with oxygen in the atmosphere and form a natural oxide film with high corrosion resistance. However, its corrosion resistance and durability are decreased when it is exposed to a harsh environment for a long period of time. For solving this problem, a porous oxide film can be formed on the surface using an anodizing treatment method, a typical surface technique among various methods. In this study, aluminum 1050 alloy was anodized for 2 minutes, 6 minutes, and 10 minutes. The structure and shape of the oxide film were then analyzed to determine the corrosion resistance according to the thickness of the oxide film that changed depending on working condition using 15 wt% NaCl. After it was immersed in NaCl solution for 1, 5, and 10 days, corrosion damage was observed. Results confirmed that the thickness of the oxide film increased as the anodization time became longer. The depth of surface damage due to corrosion became deeper when the film was immersed in the 15 wt% NaCl solution for a longer period of time.