• 한국재료학회지
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• 제12권7호
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• pp.540-544
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• 2002

Hydration treatments were performed on the pure aluminum substrate at $100^{\circ}C$ followed by anodizing and heat treatments on the layers. The transformation behaviors of the oxide layers according to the hydration treatment were studied using TEM, XRD, RBS etc. Above $90^{\circ}C$ the hydrous oxide film could be formed, which were turned out to be hydrous oxides(AlOOH $nH_2$O). The anodization on the hydrous oxide film was more effective for the transition of amorphous anodic oxides to the crystalline $\Upsilon-Al_2$ $O_3$ comparing with the case for anodizing on the aluminum substrate without hydration treatment And additional heat treatments were also helpful for the acceleration of the transformation of the hydrous oxide to $\Upsilon-Al_2$ $O_3$. During the heat treatment the interface between $\Upsilon-Al_2$ $O_3$and the hydrous oxide layers migrated to the outer side of hydrous layer.

• Journal of Electrical Engineering and Technology
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• 제10권6호
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• pp.2364-2367
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• 2015

In this study, we fabricated an electrolyte-insulator-metal (EIM) device incorporating a high-k Al₂O₃ sensing membrane using a porous anodic aluminum oxide (AAO) through a two-step anodizing process for pH detection. The structural properties were observed by field-emission scanning electron microscopy (FE-SEM) and X-ray diffraction patterns (XRD). Electrochemical measurements taken consisted of capacitance-voltage (C-V), hysteresis voltage and drift rates. The average pore diameter and depth of the AAO membrane with a pore-widening time of 20 min were 123nm and 273.5nm, respectively. At a pore-widening time of 20 min, the EIM device using anodic aluminum oxide exhibited a high sensitivity (56mV/pH), hysteresis voltage (6.2mV) and drift rate (0.25mV/pH).

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.33-33
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• 2011

반도체 산업기술이 발달함에 따라 고청정 공정 환경이 요구되고 있으며, 반도체 공정용 장비에 이용되는 부품 중 양극산화피막법(Anodizing)으로 피막을 성장시킨 anodic aluminum oxide (AAO)부품은 플라즈마에 의해 화학적, 물리적 침식이 발생하여 코팅막과 모재에 손상을 일으키며 코팅막이 깨지거나 박리되면서 다량의 Particle이 생성됨으로써 공정상의 여러 가지 문제를 야기 시킨다고 알려져 있다. 하지만 코팅막을 평가하는 방법은 거의 전무하며 기본물성 측정방법인 피막두께, 내전압, 임피던스, 내식성 측정방법을 통하여 여러 기본물성측정방법으로 부품의 평가기술을 연구하였다. 본 연구에서는 이러한 진공 부품의 하나인 anodic aluminum oxide (AAO)부품샘플을 누설전류 및 내전압 측정하여 샘플의 전기적 특성을 측정하였고, 표면 미세구조의 변화를 관찰하였다. 부식실험으로는 HCl 가스를 발생시켜 부식정도를 알아봤으며, 부식처리와 플라즈마 처리 모두 코팅 막의 손상과 전기적 특성의 감소를 보였다. 진공장비 전극 부품평가의 유익한 평가 항목으로서 플라즈마 데미지를 주는 도중에 실시간으로 부품평가에 따른 Particle을 측정함으로써 ISPM 장비를 이용하여 진공 장비용 코팅부품이 플라즈마공정에서 발생하는 오염입자를 측정할 수 있는 방법을 연구하였다. 이러한 결과를 이용하여 진공공정에서 사용되는 코팅부품이 플라즈마에 의한 손상정도를 정량화 하고 평가방법을 개발하여 진공장비용 공정 중 실시간으로 부품의 성능평가가 가능하고 코팅부품 신뢰성 향상이 가능할 것으로 본다.

• 한국표면공학회지
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• 제51권1호
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• pp.34-39
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• 2018

Steel crucible used for molten Al has a problem of very limited lifetime because of the interaction between Fe and molten Al. This study was performed to improve the lifetime of steel crucible for molten Al by coating metallic Al and by further anodizing treatment to form thick and uniform anodic oxide films. The lifetime of the steel crucible was improved slightly by Al coating from 30 to 40 hours by metallic Al coating and largely to 120 hours by coating the surface with anodic oxide film. The improved lifetime was attributed to blocking of the reaction between Fe and molten Al with the help of anodic oxide layer with more than 20 um thickness on the crucible surface. The failure of the steel crucible arises from the formation of intermetallic compounds and pores at the steel/Al interface.

• 한국세라믹학회지
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• 제45권4호
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• pp.191-195
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• 2008

Highly ordered silver nanowire with a diameter of 10 nm was arrayed by electroless deposition in a porous anodic aluminum oxide(AAO) membrane. The AAO membrane was fabricated electrochemically in an oxalic acid solution via a two-step anodization process, while growth of the silver nanowire was initiated by using electroless deposition at the long-range-ordered nanochannels of the AAO membrane followed by thermal reduction of a silver nitrate aqueous solution by increasing the temperature up to $350^{\circ}C$ for an hour. An additional electro-chemical procedure was applied after the two-step anodization to control the pore size and channel density of AAO, which enabled us to fabricate highly-ordered silver nanowire on a large scale. Electroless deposition of silver nitrate aqueous solution into the AAO membrane and thermal reduction of silver nanowires was performed by increasing the temperature up to $350^{\circ}C$ for 1 h. The morphologies of silver nanowires arrayed in the AAO membrane were investigated using SEM. The chemical composition and crystalline structure were confirmed by XRD and EDX. The electroless-deposited silver nanowires in AAO revealed a well-crystallized self-ordered array with a width of 10 nm.

• 한국표면공학회지
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• 제49권3호
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• pp.225-230
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• 2016

The present work was conducted to investigate the effects of NaF concentration in phosphate and silicate-containing alkaline electrolyte on the morphology, thickness, surface roughness and hardness of anodic oxide films formed on AZ31 Mg alloy by plasma electrolytic oxidation (PEO) method. The PEO films showed flat surface morphology with pores in the absence of NaF in the electrolyte, but nodular features appeared on the PEO film surface prepared in NaF-containing electrolyte. Numerous pores ranging from 1 to $20{\mu}m$ in size were observed in the PEO films and the size of pores decreased with increasing NaF concentration in the electrolyte. Surface roughness and thickness of PEO films showed increases with increasing NaF concentration. Hardness of the PEO films also increased with increasing NaF concentration. It was noticed that hardness of inner part of the PEO films is lower than that of outer part of them, irrespective of the concentration of NaF. The low hardness of PEO films was explained by the presence of a number of small size pores less than $2{\mu}m$ near the PEO film/substrate interface.

• Bulletin of the Korean Chemical Society
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• 제35권2호
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• pp.349-352
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• 2014

Anodic alumina oxide (AAO), a self-ordered hexagonal array, has various applications in nanofabrication such as the fabrication of nanotemplates and other nanostructures. In order to obtain highly ordered porous alumina membranes, a two-step anodization or prepatterning of aluminum are mainly conducted with straight electric field. Electric field is the main driving force for pore growth during anodization. However, impurities in aluminum can disturb the direction of the electric field. To confirm this, we anodized two different aluminum foil samples with high purity (99.999%) and relatively low purity (99.8%), and compared the differences in the surface morphologies of the respective aluminum oxide membranes produced in different electric fields. Branched pores observed in porous alumina surface which was anodized in low-purity aluminum and the size; dimensions of the pores were found to be usually smaller than those obtained from high-purity aluminum. Moreover, anodization at high voltage proceeds to a significant level of conversion because of the high speed of the directional electric field. Consequently, anodic alumina membrane of a specific morphology, i.e., meshed pore, was produced.

• 구강회복응용과학지
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• 제24권4호
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• pp.361-369
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• 2008

본 연구의 목적은 다공성의 티타늄 산화막에 불소를 처리한 결과를 평가하는 것이다. 디스크에 양극산화법을 통하여 다공성의 티타늄산화막표면을 얻은 후 불소를 처리하고 일정시간동안 Hank액에 침전을 시켰다. 양극산화를 통해 일정거칠기의 표면을 얻었으며 SEM과 XRD를 통하여 표면의 형상과 성분을 분석하였다. 생성된 표면은 빠른 표면 활성도를 보였으며, 적절한 거칠기와 좋은 골반응으로 골유착에 기여할 수 있을 것으로 여겨진다.

• Journal of Advanced Marine Engineering and Technology
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• 제28권2호
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• pp.300-308
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• 2004

The formation mechanism of anodic oxide films on Mg alloys when anodized in NaOH solution. was investigated by focusing on the effects of anodizing potential. Al content. and anodizing time. Pure Mg and Mg-Al alloys were anodized for 10 min at various potentials in NaOH solutions. $Mg(OH)_2$ was generated by an active dissolution reaction at the surface. and the product was affected by temperature. The intensity ratio of $Mg(OH)_2$ in the XRD analysis decreased with increasing applied potential. while that of MgO increased. The anti-corrosion properties of anodized specimens at each constant potential were better than those of non-anodized specimens. The specimen anodized at an applied potential of 3 V had the best anti-corrosion property. And the intensity ratio of $Mg_{17}Al_{12}$/Mg increased with aluminum content in Mg-Al alloys. During anodizing. the active dissolution reaction occurred preferentially in ${\beta}\;phase(Mg_{17}Al_{12})$ until about 4 mins. and then the current density increased radually until 7 mins. The dissolution reaction progressed in a phase(Mg) which not formed the intermetallic compound. which had a lower Al content. In the anodic polarization test of $0.017\;mol{\cdot}dm^-3$ NaCl and $0.1\;mol{\cdot}dm^-3\;Na_2SO_4$ at 298 K. the current density of Mg-15 mass% Al alloy anodized for 10 mins increased. since the anodic film that forms on the a phase is a non-compacted film. The anodic film on the phase for 30 mins was a compact film as compared with that for 10 mins.

• 한국표면공학회지
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• 제49권4호
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• pp.331-338
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• 2016

In this work, anodic oxidation behavior of AZ31 Mg alloy was studied as a function of $Na_2CO_3$ concentration in electrolyte by voltage-time curves and observation of surface appearances and morphologies after the anodic treatments, using optical microscopy and confocal scanning laser microscopy (CSLM). The voltage-time curves of AZ31 Mg alloy surface and surface appearances after the anodic treatments showed three different regions with $Na_2CO_3$ concentration : region I, below 0.2 M $Na_2CO_3$ where shiny surface with a number of small size pits; region II, between 0.4 M and 0.6 M $Na_2CO_3$ where dark surface with relatively low number of large size burned or dark spots; region III, more than 0.8 M $Na_2CO_3$ where bright surface with or without large size dark spots were obtained. The anodically treated AZ31 Mg alloy surface became significantly brightened with increasing $Na_2CO_3$ concentration from 0.5 M to 0.8 M which was attribute to the formation of denser and smoother surface films. Pits and porous protruding reaction products were found at relatively large size and small size spots, respectively, on the AZ31 Mg alloy surface in low concentration of $Na_2CO_3$ less than 0.2 M. The formation of pits is attributed to the result of repetition of the formation and detachment of porous anodic reaction products. Based on the experimental results obtained in this work, it is concluded that more uniform, denser and smoother surface of AZ31 Mg alloy could be obtained at more than 0.8 M $Na_2CO_3$ concentration if there is no other oxide forming agent.