• Title/Summary/Keyword: Annealing atmosphere

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Effect of annealing atmosphere on the properties of chemically deposited Ag2S thin films

  • Pawar, S.M.;Shin, S.W.;Lokhande, C.D.;Kim, J.H.
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2009.05a
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    • pp.34.2-34.2
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    • 2009
  • The silver sulphide (Ag2S) thin films have been chemically deposited from an alkaline medium (pH 8 to 10) by using a silver nitrate and thiourea as a Ag and S ion precursor sources. Ethylene Damine tetraacetic acid (EDTA) was used as a complexing agent. The effect of annealing atmosphere such as Ar, N2+H2S and O2 on the structural, morphological and optical properties of Ag2S thin films has been studied. The annealed films were characterized by using X-ray diffraction (XRD), scanning electron microscopy (SEM) and optical absorption techniques for the structural, morphological, and optical properties, respectively. XRD studies reveal that the as-deposited thin films are polycrystalline with monoclinic crystal structure, is converted in to silver oxide after air annealing. The surface morphology study shows that grains are uniformly distributed over the entire surface of the substrate. Optical absorption study shows the as-deposited Ag2S thin films with band gap energy of 0.92eV and after air annealing it is found to be 2.25 eV corresponding to silver oxide thin films.

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Effect of the Addition of $Li_2CO_3$ on Dielectric Properties of Barium Strontium Titanate Thick Film with Annealing Condition ($Li_2CO_3$가 첨가된 BST후막의 열처리조건에 따른 유전특정)

  • Jeon, So-Hyun;Kim, In-Sung;Song, Jae-Sung;Min, Bok-Gi;Yoon, Jon-Do
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.06a
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    • pp.311-312
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    • 2006
  • The dielectric Properties of add $Li_2CO_3$ to ($Ba_{0.6}Sr_{0.4})TiO_3$ powder in this research, made thick film by tape casting method and annealing at $970^{\circ}C$ for 2 hours each from the $O_2$, Ar and O2-plasma atmosphere were investigated. The dielectric Properties of Ar atmosphere was to higher with tunability. The dielectric constant was increased and Curie temperature was shifted to higher temperature with increasing of annealing temperature.

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Superconducting transitions of LuBa2Cu3O7-z heated under various atmospheres

  • Lee, M.S.;Lee, H.K.
    • Progress in Superconductivity and Cryogenics
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    • v.16 no.1
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    • pp.6-8
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    • 2014
  • The influence of quenching temperature, heating atmosphere and annealing time on superconducting characteristics has been studied for $LuBa_2Cu_3O_{7-z}$ compound which has been recently synthesized in a nearly phase-pure form. Resistivity measurements for the as-prepared sample heated at $300^{\circ}C$ in oxygen and subsequently quenched into liquid nitrogen revealed that there is no significant change in $T_c$. On the other hand, $T_c$ of the sample slightly increased when the sample was heated at $300^{\circ}C$ either in air or in $N_2$ atmosphere. It was also found that $T_c$ of the sample decreased when the annealing temperature in $N_2$ atmosphere increased above $400^{\circ}C$. The experimental results indicated that the as-prepared sample is under overdoped state. The enhanced superconducting transition observed in the samples after heating at $300^{\circ}C$ in air or $N_2$ atmosphere was discussed in conjunction with a slight removal of oxygen and ordering of oxygen atoms in the as-prepared sample.

Effect of Sintering Additives and Annealing Atmospheres on the Microwave Dielectric and Sintering Characteristics of $(1-x)CaTiO_3-xLaAlO_3$ System (소결조제와 열처리 분위기가 $(1-x)CaTiO_3-xLaAlO_3$ 계의 소결 및 마이크로파 유전특성에 미치는 영향)

  • 이경태;여동훈;문종하
    • Journal of the Korean Ceramic Society
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    • v.34 no.6
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    • pp.629-635
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    • 1997
  • The effects of the annealing atmospheres(O2, N2) and sintering additives that Bi2O3 is a major composition on the microwave dielectric and sintering propertie of (1-x)CaTiO3-xLaAlO3 system were investigated. The annealing atmospheres and the increase of annealing time after sintering did not affect the relative dielectric constant($\varepsilon$r) and temperature coefficient of resonant frequency($\tau$f) of (1-x)CaTiO3-xLaAlO3 system. However, the Q.f0 values of (1-x)CaTiO3-xLaAlO3 were very sensitive to annealing atmospheres. As the annealing time increased under O2 atmosphere the Q.f0 values of (1-x)CaTiO3-xLaAlO3 enhanced untill 10 hrs in 0.3$\leq$x$\leq$0.6 region, but degraded over that time. The increasing rate of Q.f0 value increased wth increasing x. On the other hand, as the annealing time increased under N2 atmosphere the Q.f0 values were constant in x$\leq$0.6 region, increased gradually in x$\geq$0.7 region. When 0.97Bi2O3-0.03Al2O3 and 0.76Bi2O3-0.24NiO of 3wt% as sintering additives were added to (Ca0.5La0.5) (Ti0.5Al0.5)O3 (x=0.5) the sintering temperature of 1$600^{\circ}C$ was lowered to 140$0^{\circ}C$, and the relative dielectric constant($\varepsilon$r) and temperature coefficient of resonant frequency($\tau$f) were not nearly changed. The addition of 0.97Bi2O3-0.03Al2O3 and 0.76Bi2O3-0.24NiO of 3wt% to (Ca0.5La0.5)(Ti0.5Al0.5)O3 made the Q.f0 values to be lower about 15% and 34%, respectively.

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Improved Memory Characteristics by NH3 Post Annealing for ZrO2 Based Charge Trapping Nonvolatile Memory

  • Tang, Zhenjie;Zhao, Dongqiu;Li, Rong;Zhu, Xinhua
    • Transactions on Electrical and Electronic Materials
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    • v.15 no.1
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    • pp.16-19
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    • 2014
  • Charge trapping nonvolatile memory capacitors with $ZrO_2$ as charge trapping layer were fabricated, and the effects of post annealing atmosphere ($NH_3$ and $N_2$) on their memory storage characteristics were investigated. It was found that the memory windows were improved, after annealing treatment. The memory capacitor after $NH_3$ annealing treatment exhibited the best electrical characteristics, with a 6.8 V memory window, a lower charge loss ~22.3% up to ten years, even at $150^{\circ}C$, and excellent endurance (1.5% memory window degradation). The results are attributed to deep level bulk charge traps, induced by using $NH_3$ annealing.

Ferroelectric Properties of SBT Capacitors with Annealing Conditions (SBT 커패시터의 열처리 조건에 따른 강유전 특성)

  • Lee, Sung-Ill
    • Journal of the Korean Society of Safety
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    • v.19 no.1
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    • pp.72-76
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    • 2004
  • The $Sr_{0.7}Bi_{2.6}Ta_2O_9$(SBT)thin films are deposited on pt-coated electrode(Pt/$TiO_2/SiO_2/Si$) using a RF magnetron sputtering method. The electrical properties of SBT capacitors with annealing conditions were studied. In the XRD pattern, the SBT thin films in all annealing temperatures had (105) orientation. In the SEM images, Bi-layered perovskite phase was crystallized at $750^{\circ}C$,/TEX> and grains largely grew in oxygen annealing atmosphere. The maximum renanent polarization and the coercive electric field with annealing conditions are 12.40C/$cm^2$ and 30kV/cm, respectively. The dielectric constant and leakage current density with Pt electrode is 340 and 2.13${\times}10^{-10}A/cm^2$, respectively.

Effects of Annealing on the Characteristics of the Sputtered $WO_3$Film (스퍼터 퇴적 $WO_3$막에 대한 열처리효과)

  • 이동희;정진휘;유형풍;조봉희
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.07a
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    • pp.536-539
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    • 2000
  • The effects of annealing on the electrical and structural characteristics for the rf sputter deposited WO$_3$thin film. The sputtered thin films are annealed at 773K for 1 hour in air atmosphere. Oxygen flow rate were changed from 0 to 70% during sputtering. It is observed from the results of the AFM measurement that the average roughness for the rf sputter deposited WO$_3$thin film would be increased from 2.45 angstrom to 152 angstrom by annealing. The sheet resistance of the sputtered WO$_3$film is changed from insulting to MOhm after annealing. According to the results of the XRD, the as-deposited films revealed the amorphous state whereas the peaks of X-ray diffraction at 2 theta= 28 degrees and 2 theta = 25 degrees corresponding to the (111) and (200) plane of the WO$_3$film respectively are observed after annealing.

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Annealing Effects on Ultra thin MOS Capacitors

  • Ng, Alvin Chi-hai;Xu, Jun;Xu, J.B.;Cheung, W.Y.
    • Electrical & Electronic Materials
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    • v.16 no.9
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    • pp.62.1-62
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    • 2003
  • Silicon oxide with thickness lee than 9 nm is fabricated by tube furnace oxidation. Nitrogen is added to dilute the oxidation rate. Aluminum dots with radius of 0.05 cm are deposited on the oixde. High frequency capacitance-voltage(HF C-V), conductance-voltage(G-V) and current-voltage(I-V) characteristics are measured. Annealing under nitrogen atmosphere is carried out with different time and at different temperature. Densities of the interface states before and after annealing are compared. After annealing, a decrease in density of the interface states is found. Experiments show that 45$0^{\circ}C$ annealing for 30 minutes has the lowest density of the interface states.

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Effects of Thermal Annealing on the Properties of Amorphous Carbon Nitride Films Deposited by PECVD (PECVD로 제조된 비정질 질화탄소 박막의 물성에 미치는 열처리 효과)

  • Moon, Hyung-Mo;Kim, Sang-Sub
    • Korean Journal of Materials Research
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    • v.13 no.5
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    • pp.303-308
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    • 2003
  • Amorphous carbon nitride films deposited on Si(001) substrates by a plasma enhanced chemical vapor deposition (PECVD) technique using CH$_4$and $N_2$as reaction gases were thermally annealed at various temperatures under$ N_2$atmosphere, then their physical properties were investigated particularly as a function of annealing temperature. Above $600^{\circ}C$ a small amount of crystalline $\beta$-$C_3$$N_4$ phase evolves, while the film surface becomes very rough due to agglomeration of fine grains on the surface. As the annealing temperature increases, both the hardness and the $sp^3$ bonding nature are enhanced. In contrast to our expectation, higher annealing temperature results in a relatively higher friction mainly due to big increase in roughness at that temperature.

Temperature Dependence of Bonding Structure of GZO Thin Film Analyzed by X-ray Diffractometer (XRD의 결정구조로 살펴본 GZO 박막의 온도의존성)

  • Oh, Teresa
    • Journal of the Semiconductor & Display Technology
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    • v.15 no.1
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    • pp.52-55
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    • 2016
  • GZO film was prepared on p-type Si wafer and then annealed at various temperatures in an air conditions to research the bonding structures in accordance with the annealing processes. GZO film annealed in an atmosphere showed the various bonding structure depending on annealing temperatures and oxygen gas flow rate during the deposition. The difference of bonding structures of GZO films made by oxygen gas flows between 18 sccm and 22 sccm was so great. The bonding structures of GZO films made by oxygen gas flow of 18 sccm were showed the crystal structure, but that of 22 sccm were showed the amorphous structure in spite of after annealing processes. The bonding structure of GZO as oxide-semiconductor was observed the trend of becoming amorphous structures at the temperature of $200^{\circ}C$. Therefore, the characteristics of oxide semiconductor are needed to research the variation near the annealing at $200^{\circ}C$.