• Smart Structures and Systems
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• v.4 no.4
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• pp.449-464
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• 2008

An array based, outward monitoring, ultrasonic guided wave based SHM technique using a single transmitter and multiple receivers (STMR), with a small footprint is discussed here. The previous implementation of such SHM arrays used a phase-reconstruction algorithm (that is similar to the beam-steering algorithm) for the imaging of reflectors. These algorithms were found to have a limitation during the imaging of defects/reflectors that are present in the "near-field" of the array. Here, the "near-field" is defined to be approximately 3-4 times the diameter of the compact array. This limitation is caused by approximations in the beam-steering reconstruction algorithm. In this paper, a migration-based reconstruction algorithm, with dispersion correction in the frequency domain, is discussed. Simulation and experimental studies are used to demonstrate that this algorithm improves the reconstruction in the "near-field" without decreasing the ability to reconstruct defects in the "far-field" in both isotropic and anisotropic plates.

• Aerospace Engineering and Technology
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• v.8 no.2
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• pp.149-159
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• 2009

This paper deals with an analytical study on the aileron reversal characteristics of anisotropic composite aircraft wings modelled as thin-walled beam and having extension-twist structural couplings caused by Circumferentially Uniform Stiffness (CUS) layup scheme. For a study on the aileron reversal of CUS composite wings, it is essential to consider the following effects such as extension-twist structural coupling, wing aspect ratio, and ratio of span-wise and chord-wise length of aileron to wing, initial angle of attack, and sweep angle, etc. The results on the aileron reversal could have a significant role in more efficient designs of thin-walled composite wing aircraft for which this aeroelastic instability is one of the most critical ones.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.37 no.12
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• pp.1192-1200
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• 2009

This paper deals with an analytical study on the aileron reversal characteristics of anisotropic composite aircraft wings modelled as thin-walled beam and having bending-torsion structural couplings caused by Circumferentially Asymmetric Stiffness layup scheme. For a study on the aileron reversal of CAS composite wings, it is essential to consider the following effects such as warping restraint, transverse shear flexibility, bending-twist structural coupling, wing aspect ratio, ratio of span-wise and chord-wise length of aileron to wing, and sweep angle, etc. The results on the aileron reversal could have a significant role in more efficient designs of thin-walled composite wing aircraft for which this aeroelastic instability is one of the most critical ones.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.114-114
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• 2012

Metal-oxide-semiconductor field-effect transistors (MOSFETs)의 critical dimension (CD)가 sub 45 nm로 줄어듬에 따라 기존에 gate dielectric으로 사용하고 있는 SiO2에서 발생되는 high gate leakage current 때문에 새로운 high dielectric constant (k) 물질들이 연구되기 시작하였다. 여러 가지 high-k 물질 중에서, aluminum-oxide (Al2O3)는 높은 dielectric constant (~10)와 전자 터널링 barrier height (~2eV) 등을 가지기 때문에 많은 연구가 되고 있다. 그러나 Al2O3를 anisotropic한 patterning을 하기 위해 주로 사용되고 있는 halogen-based 플라즈마 식각 과정에서 나타나는 Al2O3와 하부 layer간의 낮은 식각 selectivity 뿐만 아니라 표면에 발생되는 defect, stoichiometry modification, roughness 변화 등의 많은 문제점들로 인하여 device performance가 감소하기 때문에 이를 해결하기 위한 많은 연구들이 진행중이다. 따라서 본 연구에서는 실리콘 기판위의 atomic layer deposition (ALD)로 증착된 Al2O3를 BCl3/Ar 중성빔을 이용하여 원자층 식각한 후 식각 특성을 분석해 보았다. Al2O3 표면을 BCl3로 absorption시킨 후 Ar 중성빔으로 desorption 시키는 과정에서 volatile한 aluminum-chlorides와 boron oxychloride가 형성되어 layer by layer로 제거됨을 관찰 할 수 있었다.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.8 no.3
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• pp.62-67
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• 2009

Pt thin films on Cr or Ti interlayer were deposited onto a tungsten carbide(WC) substrate by the ion beam assisted DC magnetron sputtering. The various atomic percent of Cr and Ti underneath of the Pt films were prepared to examine the total thin film characteristics. The microstructure and surface analysis of the specimen were conducted by using the SEM, XRD and AFM. Mechanical properties such as hardness and adhesion strength of Pt thin film also were examined. The interlayer of pure Ti was formed with 40 nm thickness while that of pure Cr was done with 50 nm as standard reference. The growth rate of either Cr or Ti thin film was almost same under the same deposition conditions. The SEM images showed that anisotropic grain of Pt thin films consisting of dense columnar structures irrespectively grew from the different target compositions. The values of hardness and adhesion strength of Cr/Pt thin film coated on a WC substrate were higher than those of Ti/Pt thin film.

• Journal of the Semiconductor & Display Technology
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• v.17 no.3
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• pp.70-74
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• 2018

In typical spectroscopic ellipsometry, the optical and geometrical properties of thin film and nano pattern can be obtained by measuring the polarization state of light reflected/transmitted from the object by rotating a analyzer or a compensator. We proposed a snapshot spectroscopic ellipsometric system based on a modified Michelson interferometer to overcome the time-consuring measurement principle due to rotating part. The proposed system provides spectral ellipsometric parameters (psi, delta) in real time by using a single spectral interference signal generated in the interferometric polarization module. However, it has a long-term stability problem resulting in delta(k) drift. In this paper, it is experimentally proved that the drift problem is caused by anisotropic refractive index change of the beam intersection layer in beam splitter of interferometer.

• The Journal of Korean Society for Radiation Therapy
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• v.24 no.1
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• pp.11-14
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• 2012

Purpose: Anisotropic Analytical Algorithm (AAA) provides more accurate dose calculation regarding impact on scatter and tissue inhomogeneity in comparison to Pencil Beam Convolution (PBC) algorithm. This study tries to analyze the difference of dose distribution according to PBC algorithm and dose calculation algorithm of AAA on breast cancer tangential plan. Materials and Methods: Computerized medical care plan using Eclipse treatment planning system (version 8.9, VARIAN, USA) has been established for the 10 breast cancer patients using 6 MV energy of Linac (CL-6EX, VARIAN, USA). After treatment plan of Conventional Radiation Therapy plan (Conventional plan) and Field-in-Field Intensity Modulated Radiation Therapy plan (FiF plan) using PBC algorithm has been established, MU has been fixed, implemented dose calculation after changing it to AAA, and compared and analyzed treatment plan using Dose Volume Histogram (DVH). Results: Firstly, as a result of evaluating PBC algorithm of Conventional plan and the difference according to AAA, the average difference of CI value on target volume has been highly estimated by 0.295 on PBC algorithm and as a result of evaluating dose of lung, $V_{47Gy}$ and $V_{45Gy}$ has been highly evaluated by 5.83% and 4.04% each, Mean dose, $V_{20Gy}$, $V_{5Gy}$, $V_{3Gy}$ has been highly evaluated 0.6%, 0.29%, 6.35%, 10.23% each on AAA. Secondly, in case of FiF plan, the average difference of CI value on target volume has been highly evaluated on PBC algorithm by 0.165, and dose on ipsilateral lung, $V_{47Gy}$, $V_{45Gy}$, Mean dose has been highly evaluated 6.17%, 3.80%, 0.15% each on PBC algorithm, $V_{20Gy}$, $V_{5Gy}$, $V_{3Gy}$ has been highly evaluated 0.14%, 4.07%, 4.35% each on AAA. Conclusion: When calculating with AAA on breast cancer tangential plan, compared to PBC algorithm, Conformity on target volume of Conventional plan, FiF plan has been less evaluated by 0.295, 0.165 each. For the reason that dose of high dose region of ipsilateral lung has been showed little amount, and dose of low dose region has been showed much amount, features according to dose calculation algorithm need to be considered when we evaluate dose for the lungs.

• Journal of the Korean Vacuum Society
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• v.7 no.s1
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• pp.156-158
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• 1998

This paper describes the preparation of boron-doped polycrystalline diamond thin film whose electrical resitivity is lower than $10^{-1}\Omega$cm. The 1$\times$1$\textrm{mm}^2$ microelectrodes, its conducting line with 0.2mm wide and 0.5$\times$0.5$\textrm{mm}^2$ pads was patterned by reactive ion beam etching. A glucose microsensor based on diamond film microelectrode and pyramidal containment produced on silicon by anisotropic etching was developed. Its advantages are high sensitivity and high stability.

• Journal of Mechanical Science and Technology
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• v.14 no.3
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• pp.291-297
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• 2000

Modern helicopter rotor blades with non-homogeneous cross sections, composed of anisotropic material, require highly sophisticated structural analysis because of various cross sectional geometry and material properties. They may be subjected by the combined axial, bending, and torsional loading, and the dynamic and static behaviors of rotor blades are seriously influenced by the structural coupling under rotating condition. To simplify the analysis procedure using one dimensional beam model, it is necessary to determine the principal coordinate of the rotor blade. In this study, a method for the determination of the principal coordinate including elastic and shear centers is presented, based upon continuum mechanics. The scheme is verified by comparing the results with confirmed experimental results.

• 한국정보디스플레이학회:학술대회논문집
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• 2006.08a
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• pp.1347-1350
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• 2006

We developed a new configuration of polarized light out-coupling lightguide plate (LGP) in the LCD backlight. By collimating the light into the LGP, one linear polarization component experienced total internal reflection at the planar interface of LGP and anisotropic layer, whereas the orthogonal polarization was out-coupled in the normal direction through a birefringent layer and subsequent isotropic microstructures.