• Title/Summary/Keyword: Amorphous thin film

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a-Si:H Photodiode Using Alumina Thin Film Barrier

  • Hur Chang-Wu;Dimitrijev Sima
    • Journal of information and communication convergence engineering
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    • v.3 no.4
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    • pp.179-183
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    • 2005
  • A photodiode capable of obtaining a sufficient photo/ dark current ratio at both forward bias state and reverse bias state is proposed. The photodiode includes a glass substrate, an aluminum film formed as a lower electrode over the glass substrate, an alumina film formed as an insulator barrier over the aluminum film, a hydrogenated amorphous silicon film formed as a photo conduction layer over a portion of the alumina film, and a transparent conduction film formed as an upper electrode over the hydro-generated amorphous silicon film. A good quality alumina $(Al_2O_3)$ film is formed by oxidation of aluminum film using electrolyte solution of succinic acid. Alumina is used as a potential barrier between amorphous silicon and aluminum. It controls dark-current restriction. In case of photodiodes made by changing the formation condition of alumina, we can obtain a stable dark current $(\~10^{-12}A)$ in alumina thickness below $1000{\AA}$. At the reverse bias state of the negative voltage in ITO (Indium Tin Oxide), the photo current has substantially constant value of $5{\times}10^{-9}$ A at light scan of 100 1x. On the other hand, the photo/dark current ratios become higher at smaller thicknesses of the alumina film. Therefore, the alumina film is used as a thin insulator barrier, which is distinct from the conventional concept of forming the insulator barrier layer near the transparent conduction film. Also, the structure with the insulator thin barrier layer formed near the lower electrode, opposed to the ITO film, solves the interface problem of the ITO film because it provides an improved photo current/dark current ratio.

Permeability of CoZrNb film with thickness (CoZrNb막의 두께에 따른 투자율의 변화)

  • Hoe, J.;Kim, Y.H.;Shin, K.H.;Sa-Gong, G.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.443-446
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    • 2001
  • MI(Magneto-Impedance) sensor which is made by thin films has significantly high detecting sensitivity in weak magnetic field. It also has a merit to be able to build in low power system. Its structure is simple, which makes it easier to prepare a miniature. In this study, its magnetic permeability and anisotropy field(H$\sub$k/) as a function of a thickness of sputtered amorphous CoZrNb thin film with high saturation magnetostriction and excellent soft magnetic property are investigated. In order to make a uniaxial anisotropy, thin film was subjected to post annealing with a static magnetic field with 1KOe intensity at 250, 300, and 320$^{\circ}C$ for 2 hour. Anisotropy field(H$\sub$k/)of thin film is measured by using MH loop tracer. Its magnetic permeability of thin film is measured over the frequency range from 1 MHz to 750MHz. It has shown that the magnetic permeability of amorphous CoZrNb thin film is decreased due to the skin effect with increasing a thickness of CoZrNb thin film, and hence its driving frequency is lowered.

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Effects of Deposition Conditions on the Properties of Amorphous Carbon Nitride Thin Films by PECVD (PECVD로 제조된 비정질 질화탄소 박막의 특성에 미치는 증착변수의 영향)

  • Moon, Hyung-Mo;Kim, Sang-Sub
    • Korean Journal of Materials Research
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    • v.13 no.3
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    • pp.150-154
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    • 2003
  • Amorphous carbon nitride films were deposited on Si(001) substrates by a plasma enhanced chemical vapor deposition technique (PECVD) using $CH_4$and $N_2$as reaction gases. The growth and film properties were investigated while the gas ratio and the working pressure were changed systematically. At 1 Torr working pressure, an increase in the $N_2$partial pressure results in a significant increase of the deposition rate as well as an apparent presence of C ≡N bonding, while little affecting the microstructure and amorphus nature of the films. In the case of changing the working pressure at a fixed $N_2$partial pressure of 98%, a film grown at a medium pressure of $1${\times}$10^{-2}$ Torr shows the most prominent C=N bonding nature and photoluminescent property.

Characteristics variation of CoCrTa/Si double layer thin film on variation of underlayer substrate temperature (하지층기판온도에 따른 CoCrTa/Si 이층박막의 특성변화)

  • 박원효;김용진;금민종;가출현;손인환;최형욱;김경환
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11a
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    • pp.77-80
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    • 2001
  • Crystallographic and magnetic characteristics of CoCr-based magnetic thin film for perpendicular magnetic recording media were influenced on preparing conditions. In these, there is that substrate temperature was parameter that increases perpendicular coercivity of CoCrTa magnetic layer using recording layer. While preparation of CoCr-based doublelayer, by optimizing substrate temperature, we expect to increase perpendicular anisotropy of CoCr magnetic layer and prepare ferromagnetic recording layer with a good quality by epitaxial growth. CoCrTa/Si doublelayer showed a good dispersion angle of c-axis orientation $\Delta$$\theta$$_{50}$ caused by inserting amorphous Si underlayer which prepared at underlayer substrate temperature 250C. Perpendicular coercivity was constant, in-plane coercivity was controlled a low value about 2000e. This result implied that Si underlayer could restrain growth of initial layer of CoCrTa thin film, which showed bad magnetic properties effectively without participating magnetization patterns of magnetic layer. In case of CoCrTa/Si that prepared with ultra thin underlayer, crystalline orientation of CoCrTa was improved rather underlayer thickness 1nm, it was expected that amorphous Si layer played a important role in not only underlayer but also seed layer.t also seed layer.r.

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In-situ Raman Spectroscopy of Amorphous Hydrous $RuO_2$ Thin Films

  • Hyeonsik Cheong;Jung, Bo-Young;Lee, Se-Hee
    • Journal of the Korean Vacuum Society
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    • v.12 no.S1
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    • pp.49-51
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    • 2003
  • Amorphous hydrous ruthenium oxide thin films have attracted much interest owing to the possibility of using this material in electrochemical supercapacitors. Recently, it was found that this material is also electrochromic: during the charging/discharging cycle, the optical transmittance of the thin film is modulated. The physical and chemical origin of this phenomenon is not fully understood yet. In this work, we performed in-situ Raman spectroscopy measurements on amorphous hydrous ruthenium oxide thin films during the charging/discharging cycles. Unambiguous changes in the Raman spectrum were observed as protons were injected or extracted from the thin film. When the samples were annealed to reduce the water content, there is a consistent trend in the Raman spectrum. The origins of the Raman features and their relation to the electrochromic and/or supercapacitor characteristics is discussed.

Effects of Photon Energy Spectrum on the Photocurrent of Hydrogenated Amorphous Silicon Thin Film Transistor by Using Frequency Filters

  • Cho, Eou Sik;Kwon, Sang Jik
    • Transactions on Electrical and Electronic Materials
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    • v.14 no.1
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    • pp.16-19
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    • 2013
  • Frequency filters with various filtering wavelengths were used in the photoelectric characterization of hydrogenated amorphous silicon thin film transistor (a-Si:H TFT) and the experimental results were described and analyzed in terms of the photon energy spectral characteristics calculated from the integration of the photon energy and the spectral intensity of transmitted backlight through the filters at each wavelength. From the comparison of the photocurrents and the calculated photon energy spectrums for the filtered ranges of wavelength, it was possible to conclude that the photocurrents are closely related to the photon energy spectrums of the backlight.

Holographic grating data erasure of amorphous Ag/As-Ge-Se-S multi-layer thin film (비정질 Ag/As-Ge-Se-S 다층박막에 형성된 홀로그램 격자의 소거에 관한 연구)

  • Kim, Jin-Hong;Koo, Yong-Woon;Koo, Sang-Mo;Chung, Hong-Bay
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.11a
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    • pp.112-113
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    • 2006
  • In this paper. we investigated a characteristic of holographic grating data erasure with non-polarized beam at amorphous chalcogenide As-Ge-Se-S thin film. A sample of holographic grating data was formed with DPSS laser for setup. Then, the erasure process was performed with He-Ne laser vertically at sample. As-Ge-Se-S(single layer). Ag/As-Ge-Se-S(double layer) and As-Ge-Se-S/Ag/As-Ge-Se-S(multi-layer) are manufactured to compare their characteristic of erasure.

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Efficient Approach to Measure Crystallization Temperature in Amorphous Thin Film by Infrared Reflectivity

  • Wang, Wenxiu;Saito, Shin;Yakabe, Hidetaka;Takahashi, Migaku
    • Journal of Magnetics
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    • v.18 no.2
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    • pp.86-89
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    • 2013
  • This paper shows a new effective approach to measure crystallization temperature of soft magnetic underlayer (SUL) for next generation of heat assisted perpendicular recording media. This approach uses temperature dependent reflectivity, which shows a clear jump when samples are crystallized. To achieve this measurement, an optical system is set up using hot plate and infrared laser. Reflectivity of SUL $(Co_{70}Fe_{30})_{92}Ta_3Zr_5$ shows a clear jump at its amorphous-crystalline transition temperature. Experiment results show this effect is clear in infrared region, and is weak for visible light.

Investigation of thermal Characteristics with Amorphous Chalcogenide Thin Film for Programmable Metallization Cell (PMC 응용을 위한 비정질 칼코게나이드 박막의 열적특성)

  • Ju, Long-Yun;Nam, Ki-Hyeon;Choi, Hyuk;Chung, Hong-Bay
    • Proceedings of the KIEE Conference
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    • 2007.07a
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    • pp.1331-1332
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    • 2007
  • In the present works, we investigate the thermal characteristics on Ag/$As_{2}S_{3}$ and Ag/$As_{40}Ge_{10}Se_{15}S_{35}$ amorphous chalcogenide thin film structure for PMC (Programmable Metallization Cell).As the results of resistance change with the temperature on Ag/$As_{40}Ge_{10}Se_{15}S_{35}$ amorphous chalcogenide thin film, the resistance was abruptly dropped from the initial resistance of 1.32 M ${\Omega}$ to the saturated value of 800 ${\Omega}$ at $203^{\circ}C$. On the other hand, the resistance increased to 1.3 $M{\Omega}$ at $219^{\circ}C$.

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Analysis of Electrical Characteristics of Amorphous Silicon Thin Film Photovoltaic Module Exposed Outdoor (옥외 설치된 비정질 실리콘 박막태양전지모듈의 전기적 출력 특성 분석)

  • Kim, Kyung-Soo;Kang, Gi-Hwan;Yu, Gwon-Jong
    • Journal of the Korean Solar Energy Society
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    • v.28 no.4
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    • pp.62-67
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    • 2008
  • In this study, we analyze the electrical characteristics of amorphous silicon thin film photovoltaic module which are installed about 5 years ago. Four modules from PV system are extracted and measured the maximum power change ratio using solar simulator(Class A). Also, infrared camera is used to get thermal distribution characteristics of system. The external appearance change is compared with initial module by naked eye examination. Through this experiment, 31% maximum output power drop is observed. The detail description is specified as the following paper.