Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2001.11a
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- Pages.77-80
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- 2001
Characteristics variation of CoCrTa/Si double layer thin film on variation of underlayer substrate temperature
하지층기판온도에 따른 CoCrTa/Si 이층박막의 특성변화
Abstract
Crystallographic and magnetic characteristics of CoCr-based magnetic thin film for perpendicular magnetic recording media were influenced on preparing conditions. In these, there is that substrate temperature was parameter that increases perpendicular coercivity of CoCrTa magnetic layer using recording layer. While preparation of CoCr-based doublelayer, by optimizing substrate temperature, we expect to increase perpendicular anisotropy of CoCr magnetic layer and prepare ferromagnetic recording layer with a good quality by epitaxial growth. CoCrTa/Si doublelayer showed a good dispersion angle of c-axis orientation
Keywords
- Perpendicular magnetic recording;
- CoCrTa thin film;
- Amorphous Si underlayer;
- Δ$\theta$$_{}$ 50/;
- Perpendicular and in-plane coercivities