• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2001.06a
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• pp.72-72
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• 2001

Plasma polymerized thin films have been deposited on Si(lOO) substrates at $25-400^{\circ}C$ using thiophene ($C_4H_4S$) precursor by plasma assisted chemical vapor deposition (PACVD) method for low-dielectric device application. In order to compare physical properties of the as-grown thin films, the effects of the plasma power, gas flow ratio and deposition temperature on the dielectric constant and thermal stability were mainly studied. XRD and TED studies revealed that the as-grown thin films have highly oriented amorphous polymer structure. XPS data showed that the polymerized thin films that grown under different RF power and deposition temperature as well as different gas ratio of $Ar:H_2$ have different stoichiometric ratio of C and S compared with that of monomer, indicating a formation of mixture polymers. Moreover, we also realized that oxygen free and thermally stable polymer thin films could be grown at even $400^{\circ}C$. The results of SEM, AFM and TEM showed that the polymer films with smooth surface and sharp interface could be grown under various deposition conditions. From the electrical property measurements such as I-V and C-V characteristics, the minimum dielectric constant and the best leakage current were obtained to be about 3.22 and $10-11{\;}A/\textrm{cm}^2$, respectively.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.36 no.6
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• pp.582-587
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• 2023

The effects of the annealing temperature on the structural, morphological, and luminescent properties of SrWO₄:Sm³⁺ thin films grown on quartz substrates by radio-frequency magnetron sputtering were investigated. The thin films were annealed at various annealing temperatures for 20 min in a rapid thermal annealer after growing the thin films. The experimental results showed that the annealing temperature has a significant effect on the properties of the SrWO₄:Sm³⁺ thin films. The crystal structure of the as-grown SrWO₄:Sm³⁺ thin films was transformed from amorphous to crystalline after annealing at 800℃. The preferred orientation along (112) plane and a significant increase in average grain size by 820 nm were observed with increasing the annealing temperature. The average optical transmittance in the wavelength range of 500~1,100 nm was decreased from 72.0% at 800℃ to 44.2% at an annealing temperature of 1,000℃, where the highest value in the photoluminescence intensity was obtained. In addition to the red-shift of absorption edge, a higher annealing temperature caused the optical band gap energy of the SrWO₄:Sm³⁺ thin films to fall rapidly. These results suggest that the structural, morphological, and luminescent properties of SrWO₄:Sm³⁺ thin films can be controlled by varying annealing temperature.

• Korean Journal of Materials Research
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• v.33 no.10
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• pp.400-405
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• 2023

Tb³⁺-doped CaNb₂O₆ (CaNb₂O₆:Tb³⁺) thin films were deposited on quartz substrates at a growth temperature of 300 ℃ using radio-frequency magnetron sputtering. The deposited thin films were annealed at several annealing temperatures for 20 min and characterized for their structural, morphological, and luminescent properties. The experimental results showed that the annealing temperature had a significant effect on the properties of the CaNb₂O₆:Tb³⁺ thin films. The crystalline structure of the as-grown CaNb₂O₆:Tb³⁺ thin films transformed from amorphous to crystalline after annealing at temperatures greater than or equal to 700 ℃. The emission spectra of the thin films under excitation at 251 nm exhibited a dominant emission band at 546 nm arising from the ⁵D₄→⁷F₅ magnetic dipole transition of Tb³⁺ and three weak emission bands at 489, 586, and 620 nm, respectively. The intensity of the ⁵D₄→⁷F₅ (546 nm) magnetic dipole transition was greater than that of the ⁵D₄→⁷F₆ (489 nm) electrical dipole transition, indicating that the Tb³⁺ ions in the host crystal were located at sites with inversion symmetry. The average transmittance at wavelengths of 370~1,100 nm decreased from 86.8 % at 700 ℃ to 80.5 % at an annealing temperature of 1,000 ℃, and a red shift was observed in the bandgap energy with increasing annealing temperature. These results suggest that the annealing temperature plays a crucial role in developing green light-emitting CaNb₂O₆:Tb³⁺ thin films for application in electroluminescent displays.

• Nuclear Engineering and Technology
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• v.56 no.6
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• pp.2258-2265
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• 2024

The present investigation aims to study the role of Pr₂O₃ on the structural, physical, and radiation shielding properties of a dense cadmium lead borate glass. The XRD was used to affirm the glassy amorphous structure of fabricated sample materials. Moreover, the FTIR was used to record the change in the FT-IR spectra due to the addition of Pr₂O₃ in the wavenumber interval between 400 and 4000 cm^-1. The features of glass surfaces and the elemental analyses for the synthesized Pr₂O₃-reinforced cadmium lead borate glasses were performed using a SEM, supported by an energy-dispersive spectrometer. The γ-ray protection capacity was evaluated using the Monte Carlo method in a wide energy interval ranging between 0.015 and 15 MeV. The linear attenuation coefficient (LAC) at 1 MeV was reduced by a factor of 10 % from 0.372 cm^-1 to 0.340 cm^-1. The decrease in the LAC values negatively affected the other shielding properties such as half-value thickness and the transmission factor. Although the linear attenuation coefficient is decreased slightly with the partial substitution of CdO by Pr₂O₃ compound, the fabricated glass samples still have a high shielding capacity compared to the traditional commercial glasses as well as previous similar reported glasses.

• Journal of Korean Society of Environmental Engineers
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• v.36 no.11
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• pp.771-780
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• 2014

In this study, the various organic supports (i.e., silicone, acrylonitrile-butadiene-styrene, epoxy, and, butadiene rubber) with great sorption capacity of organic contaminants were chosen to develop nano-ZnO/organic composites (NZOCs) and to prevent the detachment of nano-ZnO particles. The water resistance of the developed NZOCs were evaluated, and the feasibility of the developed NZOCs were investigated by evaluating the removal efficiency of 1,1,2-trichloroethylene (TCE) in the aqueous phase. Based on the results from water-resistance experiments, long-term water treatment usage of all NZOCs was found to be feasible. According to the FE-SEM, EDX, and imaging analysis, nano-ZnO/butadiene rubber composite (NZBC) with various sizes and types of porosity and crack was measured to be coated with relatively homogeneously-distributed nano-ZnO particles whereas nano-ZnO/silicone composite (NZSC), nano-ZnO/ABS composite (NZAC), and nano-ZnO/epoxy composite (NZEC) with poorly-developed porosity and crack were measured to be coated with relatively heterogeneously-distributed nano-ZnO particles. The sorption capacity of NZBC was close to 60% relative to the initial concentration, and this result was mainly attributed to the amorphous structure of NZBC, hence the hydrophobic partitioning of TCE to the amorphous structure of NZBC intensively occurred. The removal efficiency of TCE in aqueous phase using NZBC was close to 99% relative to the initial concentration, and the removal efficiency of TCE was improved as the amount of NZBC increased. These results stemmed from the synergistic mechanisms with great sorption capability of butadiene rubber and superior photocatalytic activities of nano-ZnO. Finally, the removal efficiency of TCE in aqueous phase using NZBC was well represented by linear model ($R^2{\geq}0.936$), and the $K_{app}$ values of NZBC were from 2.64 to 3.85 times greater than those of $K_{photolysis}$, indicating that butadiene rubber was found to be the suitable organic supporting materials with enhanced sorption capacity and without inhibition of photocatalytic activities of nano-ZnO.

• 한국신재생에너지학회:학술대회논문집
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• 2010.06a
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• pp.59.1-59.1
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• 2010

Aluminum-induced crystallization (AIC) of amorphous silicon (a-Si) is studied with the structure of a glass/Al/$SiO_2$/a-Si, in which the $SiO_2$ layer has micron-sized laser holes in the stack. An oxide layer between aluminum and a-Si thin films plays a significant role in the metal-induced crystallization (MIC) process determining the properties such as grain size and preferential orientation. In our case, the crystallization of a-Si is carried out only through the key hole because the $SiO_2$ layer is substantially thick enough to prevent a-Si from contacting aluminum. The crystal growth is successfully realized toward the only vertical direction, resulting a crystalline silicon grain with a size of $3{\sim}4{\mu}m$ under the hole. Lateral growth seems to be not occurred. For the AIC experiment, the glass/Al/$SiO_2$/a-Si stacks were prepared where an Al layer was deposited on glass substrate by DC sputter, $SiO_2$ and a-Si films by PECVD method, respectively. Prior to the a-Si deposition, a $30{\times}30$ micron-sized hole array with a diameter of $1{\sim}2{\mu}m$ was fabricated utilizing the femtosecond laser pulses to induce the AIC process through the key holes and the prepared workpieces were annealed in a thermal chamber for 2 hours. After heat treatment, the surface morphology, grain size, and crystal orientation of the polycrystalline silicon (pc-Si) film were evaluated by scanning electron microscope, transmission electron microscope, and energy dispersive spectrometer. In conclusion, we observed that the vertical crystal growth was occurred in the case of the crystallization of a-Si with aluminum by the MIC process in a small area. The pc-Si grain grew under the key hole up to a size of $3{\sim}4{\mu}m$ with the workpiece.

• Composites Research
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• v.31 no.2
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• pp.63-68
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• 2018

Thermoplastic composite has been limitedly used in high performance aerospace industry due to relatively low mechanical properties even though it has various advantages. But, thermoplastic aromatic polymer composite has recently been researched and utilized much. In this study, PEEK and PPS neat resin film as representative thermoplastic aromatic polymer were processed through continuous heating, cooling and reheating cycle. Property change such as glass transition temperature and melting temperature were identified and crystallinity variation by different cooling rate were evaluated. In the first (heating) run, polymer specimens were kept for 5 minutes at higher temperature than melting point to remove previous thermal history, and crystallization reaction was controlled by adjusting cooling rate to 2, 5, 10, 20 and $40^{\circ}C/minute$ in the second (cooling) run. In the third (heating) run, specimen crystallinity were verified by measuring the melting enthalpy. The initial specimens containing high portion of amorphous structure exhibited cold crystallization and clear glass transition in the first run whereas they did not show in the third run due to the increase of crystalline structure portion. As cooling rate decreases through the second cooling run, the crystallinity of the specimen increased. PEEK polymer had 21.9~39.3% crystallinity depending on cooling rate change whereas PPS polymer showed 29.1~31.2%.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.157-157
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• 2015

Recently, the growing interest in organic microelectronic devices including OLEDs has led to an increasing amount of research into their many potential applications in the area of flexible electronic devices based on plastic substrates. However, these organic devices require a gas barrier coating to prevent the permeation of water and oxygen because organic materials are highly susceptible to water and oxygen. In particular, high efficiency OLEDs require an extremely low water vapor transition rate (WVTR) of $1{\times}10^{-6}g/m^2day$. The Key factor in high quality inorganic gas barrier formation for achieving the very low WVTR required ($1{\times}10^{-6}g/m^2day$) is the suppression of defect sites and gas diffusion pathways between grain boundaries. In this study NBAS process was introduced to deposit enhanced film density single gas barrier layer with a low WVTR. Fig. 1. shows a schematic illustration of the NBAS apparatus. The NBAS process was used for the $Al_2O_3$ nano-crystal structure films deposition, as shown in Fig. 1. The NBAS system is based on the conventional RF magnetron sputtering and it has the electron cyclotron resonance (ECR) plasma source and metal reflector. $Ar^+$ ion in the ECR plasma can be accelerated into the plasma sheath between the plasma and metal reflector, which are then neutralized mainly by Auger neutralization. The neutral beam energy is controlled by the metal reflector bias. The controllable neutral beam energy can continuously change crystalline structures from an amorphous phase to nanocrystal phase of various grain sizes. The $Al_2O_3$ films can be high film density by controllable Auger neutral beam energy. we developed $Al_2O_3$ high dense barrier layer using NBAS process. We can verified that NBAS process effect can lead to formation of high density nano-crystal structure barrier layer. As a result, Fig. 2. shows that the NBAS processed $Al_2O_3$ high dense barrier layer shows excellent WVTR property as a under $2{\times}10^{-5}g/m^2day$ in the single barrier layer of 100nm thickness. Therefore, the NBAS processed $Al_2O_3$ high dense barrier layer is very suitable in the high efficiency OLED application.

• Journal of the Korean Society of Marine Environment & Safety
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• v.26 no.1
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• pp.114-120
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• 2020

In this study, we analyzed the structural characteristics of soot, which is one of the anticipated regulatory substances of the IMO, and used a novel classification method to distinguish between exhaust soot and engine soot in marine engines. As an extension of a recent study on exhaust soot recycling, annealing was performed at 2,000 ℃ on engine soot to determine whether it could be recycled. Soot samples before and after annealing were analyzed using HR-TEM and Raman spectroscopy. The HR-TEM results showed that exhaust soot and engine soot had similar nanostructures; the exhaust soot has a spherical primary particle with a chain-like structure, whereas engine soot particles have amorphous structures. The Raman spectroscopy showed a D-peak and a G-peak for both exhaust soot and engine soot. However, the G/D ratio indicated that the value of exhaust soot was relatively higher than that of engine soot, which implies that the exhaust soot has a more graphitized structure. The analysis of annealed engine soot confirmed that graphitization proceeded without any problems, similar to the exhaust soot. This confirmed that both exhaust soot and engine soot generated by marine diesel engines could be recycled as graphite materials.

• Journal of the Korean Ceramic Society
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• v.40 no.8
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• pp.758-764
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• 2003

The cylindrical ${\gamma}$-alumina pellets were prepared by forming, hydration, drying and calcination after mixing amorphous alumina and pore generating agent with water. Concentration of Fe(NO$_3$)$_3$ㆍ9$H_2O$ that was catalyst precursor was fixed and made mixing solution that changed concentration of $CH_3$COOH in range of 2.5~20%, and here ${\gamma}$-alumina pellets were immerged and were hydrothermaly treated for 3 h at $200^{\circ}C$. And then we investigated creation and change of crystal, pore characteristics, $N_2$ adsorption and desorption isotherms, changes of acid site and mechanical strengths etc. According to the concentration of $CH_3$COOH, the crystals grew to acicular shape of 0.5~2${\mu}m$ length, and crystal structure showed the pseudo-boehmite structure. When hydrothermaly treated in 10% $CH_3$COOH solution, pore volume between 100~1000 $\AA$ was highest by 0.86 cc/g, and width of hysteresis curved line due to $N_2$ adsorption/desorption appeared as was smallest. When concentration of $CH_3$COOH was in range of 5~15%, new C-H functional groups were formed. Mechanical strength of pellets was highest by 1.35 MPa when $CH_3$COOH concentration was 2.5%.