• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.1305-1308
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• 2003

A new technique is presented to construct a predictive model of plasma etch process. This was accomplished by combining a backpropagation neural network (BPNN) and a genetic algorithm (GA). The predictive model constructed in this way is referred to as a GA-BPNN. The GA played a role of controlling training factors simultaneously. The training factors to be optimized are the hidden neuron, training tolerance, initial weight magnitude, and two gradients of bipolar sigmoid and linear functions. Each etch response was optimized separately. The proposed scheme was evaluated with a set of experimental plasma etch data. The etch process was characterized by a $2^3$ full factorial experiment. The etch responses modeled are aluminum (A1) etch rate, silica profile angle, A1 selectivity, and dc bias. Additional test data were prepared to evaluate model appropriateness. The GA-BPNN was compared to a conventional BPNN. Compared to the BPNN, the GA-BPNN demonstrated an improvement of more than 20% for all etch responses. The improvement was significant in the case of A1 etch rate.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2003.10a
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• pp.265-268
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• 2003

In the extrusion process, the working material is forced to flow through a die with the desired profile. In general, the width of an extruded section is limited to about an inch less than the diameter of the round billet. But through the lip die, material is spreaded to produce a wider extruded section than the diameter of round billet. In this study, the extrusion process of an aluminum plate using the lip die is investigated. The width of the extruded plate is 450mm that is formed from the round billet with a diameter of 250mm. The flow characteristic through the lip die is considered to produce the wide-extruded plate with a small billet using rigid plastic FE analysis. Based on the result of FE analysis, new designs of lip die are proposed.

• Transactions of the Korean Society of Mechanical Engineers
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• v.11 no.1
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• pp.110-117
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• 1987

A new kinematically admissible velocity field for a generalized three-dimensional flow is introduced, in which the flow is bounded by an analytic die-profile function. Then, by applying the upper-bound method th the velocity field, the flow patterns as the upper-bound method are obtained. Extrusion of elliptic sections from round billets is chosen as a computational example. Computation and experiments are carried out for work-hardening material such as aluminum alloy 2024. In order to visualize the plastic flow, the grid marking technique is employed. The theoretical predictions both in extrusion load and deformed pattern are in good agreement with the experimental data.

• Journal of the Korean Society for Nondestructive Testing
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• v.26 no.6
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• pp.417-426
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• 2006

A Digital X-ray imaging system using Compton backscattering has been developed to obtain a cross-sectional profile and mass loss of corroded lap-splices of aging aircraft from density variation. A slit-type camera was designed to focus on a small scattering volume inside the material, from which the backscattered photons are collected by a collimated scintillator detector for interpretation of material characteristics. The cross section of the lap-joint is scanned by moving the scattering volume through the thickness direction of the specimen. The mass loss of each layer has been estimated from a Compton backscatter A-scan to obtain the thickness of each layer including the aluminum sheet, the corrosion layer and the sealant. Quantitative information such as location and width of planar corrosion in the lap splices of fuselages is obtained by deconvolution using a nonlinear least-square error minimization method(BFGS method): A simple reconstruction model is also introduced to overcome distortion of the Compton backscatter data due to attenuation effects attributed to beam hardening and quantum noise.

• Proceedings of the KIEE Conference
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• 2007.10c
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• pp.18-21
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• 2007

철도차량의 경량화를 위해서 오늘날 알루미늄 압출재의 사용이 증가하고 있는 추세이며, 이를 통한 차체 제작이 일반화되고 있다. 경량화에 대한 요구는 더욱더 가속화되고 있으며, 특히 자기부상열차의 경우 환경규제 및 에너지 효율성 증대의 측면에서 경량화가 더욱 절실히 요구되고 있다. 그러나, 알루미늄 압출의 특성상 폭 대비 두께에 대한 제약이 따르므로 추가 경량화를 위해서는 알루미늄 압출재의 구조적인 연구가 필요하다. 따라서, 본 연구에서는 중공형 알루미늄 압출재의 내부에 Rib 형상에 따른 굽힘 특성을 비교함으로써 알루미늄 압출재의 경량화를 이루고자 하였다.

• Journal of Korean Vacuum Science & Technology
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• v.3 no.2
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• pp.101-106
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• 1999

The main consideration factor to design a magnetron of the sputtering system for TFT-LCD metallization is high sheet resistance (Rs) uniformity which is provided by the high target erosion and high current efficiency. The present study has developed a rectangular magnetron for TFT-LCD to bve considered full target erosion and high film uniformity. After an aluminum-2 at.% and alloy target was installed in a magnetron source and the film was deposited on the glass of 600${\times}$720 mm, the Rs uniformity of the deposited film was measured as functions of the magnet tilt and magnet scanning configuration. And the target erosion profile was observed with the target voltage. When sputtered at 4mtorr and 10kW, the magnet tilt for the high Rs uniformity of 8.38% was 7mm. The plasma voltage at the dwell home and end for full-face target erosion, when scanned the magnetron was 120% compared to the mean voltage of the other area.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2000.10a
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• pp.37-41
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• 2000

Extruded Profiles of Aluminum alloys have been widely used as parts and frames in mechanical and construction structures. Nowadays, mechanical processing of extruded Al alloy profiles is often employed for various industrial applications. Especially, the bending process is more and more applied and the process is greatly influenced by the distributed mechanical properties in the extruded profiles. Due to large reduction of area or extrusion ratio in ordinary production of extruded profiles, anisotropy is naturally induced by large severe deformation during the extrusion process. Therefore, the anisotropy properties play a great role in the bending process, as a post processing of extruded profiles and errors will be involved when the extruded profiles are treated as isotropic material, ignoring the induced anisotropy in the thin-walled extruded product. In the present work, the anisotropic material change is simulated, as a simplified method, employing Barlats six-component yield criterion in the rigid-plastic finite element method. Finite element computations are carried out for extrusion of a thin-walled part.

• Proceedings of the KIEE Conference
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• 2001.07c
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• pp.1509-1511
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• 2001

In this study, etching characteristics of polyimide(Pl) film with $O_2/CF_4$ gas mixing ratio was studied using inductively coupled plasma (ICP). The etch rate and selectivity were evaluated to chamber pressure and gas mixing ratio. High etch rate (over 8000$\AA$/min) and vertical profile were acquired in $CF_4$/($CF_4+O_2$) of 0.2. The selectivities of polyimide to PR and polyimide to $SiO_2$ were 1.15, 5.85, respectively. The profiles of polyimide film etched in $CF_4/O_2$ were measured by a scanning electron microscope (SEM) with using an aluminum hard mask pattern. The chemical states on the polyimide film surface were measured by x-ray photoelectron spectroscopy (XPS).

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2002.11a
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• pp.1-6
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• 2002

In the extrusion process, the working material is forced to flow through a die with the desired profile. In general the width of m extruded section is limited to about an inch less than the diameter of the round billet But through the lip die, material is spreaded to produce a wider extruded section than the diameter of round billet. In this study, the extrusion process of an aluminum plate using the lip die is investigated. The width of extruded plate is 450nm that is formed form the round billet with a diameter of 250mm. The flow characteristic through the lip die is considered to produce the wide-extruded plate with a small billet.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.3
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• pp.228-233
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• 2007

Core technologies for integrating hydrogen gas sensor were investigated. In this study, the thermally isolated micro-hot-plate with areas of $100{\times}100-260{\times}260{\mu}m^2$ was fabricated by utilizing surface micromachining technique that provides better manufacturing yield than bulk micromachining counterpart. The optimum design of the sensor was peformed by analyzing the thermal profile of the structure obtained from a ANSYS simulator. The 400-nm-thick polysilicon films doped with phosphorus, the 300-nm-thick aluminum films, and the 200-nm-thick $SnO_2$(or ZnO)films were used as the micro-heater material, the temperature sensor material, and the gas sensitive material, respectively. The experimental results show that the developed gas sensors can detect $H_2$ concentration as low as 1 ppm.