• Title/Summary/Keyword: Alloy target

검색결과 113건 처리시간 0.025초

Physical Properties of Fe Particles Fine-dispersed in AlN Thin Films (Fe 입자를 미세 분산 시킨 AlN 박막의 물리적 성질)

  • Han, Chang-Suk;Kim, Jang-Woo
    • Korean Journal of Materials Research
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    • 제21권1호
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    • pp.28-33
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    • 2011
  • This paper describes the fabrication of AlN thin films containing iron and iron nitride particles, and the magnetic and electrical properties of such films. Fe-N-Al alloy films were deposited in Ar and $N_2$ mixtures at ambient temperature using Fe/Al composite targets in a two-facing-target DC sputtering system. X-ray diffraction results showed that the Fe-N-Al films were amorphous, and after annealing for 5 h both AlN and bcc-Fe/bct-$FeN_x$ phases appeared. Structure changes in the $FeN_x$ phases were explained in terms of occupied nitrogen atoms. Electron diffraction and transmission electron microscopy observations revealed that iron and iron nitride particles were randomly dispersed in annealed AlN films. The grain size of magnetic particles ranged from 5 to 20 nm in diameter depending on annealing conditions. The saturation magnetization as a function of the annealing time for the $Fe_{55}N_{20}Al_{25}$ films when annealed at 573, 773 and 873 K. At these temperatures, the amount of iron/iron nitride particles increased with increasing annealing time. An increase in the saturation magnetization is explained qualitatively in terms of the amount of such magnetic particles in the film. The resistivity increased monotonously with decreasing Fe content, being consistent with randomly dispersed iron/iron nitride particles in the AlN film. The coercive force was evaluated to be larger than $6.4{\times}10^3Am^{-1}$ (80 Oe). This large value is ascribed to a residual stress restrained in the ferromagnetic particles, which is considered to be related to the present preparation process.

Acoustic Nonlinear Characteristics of Ultrasonic Wave Reflected at Contact Interfaces (접촉계면 반사 초음파의 음향 비선형 특성)

  • Park, Byung-Jun;Lee, Tae-Hun;Kim, Chung-Seok;Jhang, Kyung-Young
    • Journal of the Korean Society for Nondestructive Testing
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    • 제31권1호
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    • pp.40-46
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    • 2011
  • In the field application of the conventional acoustic nonlinear technique using through transmission of bulk waves to evaluate the contact acoustic nonlinearity(CAN) in solid-solid contact interfaces like as in the closed crack, it has difficulty to access inner position for attaching the pulsing or receiving transducer. In the present study, a new reflection technique has been suggested to measure the acoustic nonlinearity in solid-solid contact interfaces, which uses both of pulsing and receiving transducers on the same side of target and so that it will be very useful for the field application. For this, based on the linear and the nonlinear contact stiffness estimated by the power-model of the contacting pressure, the nonlinear parameter of the reflected ultrasonic wave at the interfaces has been theoretically calculated. Experimental results in contact interfaces of A1606l-T6 alloy specimens with loading pressure showed good agreement with the theoretical predictions, which proves the validity of the suggested reflection mode technique.

Numerical Analysis on Penetration Reduction of a WHA Penetrator by an Impact of Linear Explosively Formed Penetrator(LEFP) (선형폭발성형탄(LEFP) 충격에 의한 WHA 관통자의 관통성능 감소에 관한 수치해석 연구)

  • Joo, Jaehyun;Choi, Joonhong;Koo, ManHoi;Kim, Dongkyu
    • Journal of the Korea Institute of Military Science and Technology
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    • 제20권3호
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    • pp.384-392
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    • 2017
  • A linear explosively formed penetrator(LEFP) is a modification of the explosively formed penetrator(EFP). An EFP is axisymmetric and has a dish-shaped liner while LEFP has a rectangular-shaped liner with curved cross section. Upon detonating LEFP forms laterally wide projectile like blade, leaving a long penetration hole on the target. On the other hand, a long-rod tungsten heavy alloy(WHA) penetrator is one of the major threats against most of the ground armored vehicles. In this paper, the feasibility of using an LEFP in protecting against a long-rod WHA penetrator by colliding LEFP into the threat was investigated through a set of numerical simulations. In this study, a scale-down WHA penetrator with length to diameter ratio(L/D) of 10.7 and 7.0 mm diameter was used to represent a long-rod WHA penetrator. LS-DYNA and Multi-Material ALE technique were employed for the simulation. For estimation of the protection effect by LEFP, residual penetration depths into RHA by the threat were compared according to various impact locations against the threat.

Growth behavior of Ti-Al-V-N Films Prepared by Dc Reactive Magnetron Sputtering (DC Reactive Magnetron Sputtering법에 의한 Ti-Al-V-N 박막의 성장거동)

  • Sohn, Yong-Un;Chung, In-Wha;Lee, Young-Ki
    • Korean Journal of Materials Research
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    • 제9권7호
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    • pp.688-694
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    • 1999
  • Ti-6Al-4V-N films have been grown onto glass substrates by dc reactive magnetron sputtering from a Ti-6Al-4V-N alloy target at different nitrogen partial pressure, input powers and sputtering times. The influence of various sputtering conditions on structural properties of Ti-6Al-4V-N films was investigated by measuring their X-ray diffraction. The quaternary Ti-6Al-4V-N film is crystallizing in a face centered cubic TiN structure, the lattice parameter is smaller than the TiN parameter as titanium atoms of the TiN lattice are replaced by aluminum and vanadium atoms. The films show the (111) preferred orientation and the (111) peak intensity decreases as the nitrogen partial pressure is increased, but the intensity increases as the sputtering time is increased. The deposition rate and the grain size are alto related with the variation of various sputtering conditions.

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Micro Structure and Surface Characteristics of NiCr Thin films Prepared by DC Magnetron Sputter according to Annealing Conditions (DC 마그네트론 스퍼터링 NiCr 박막의 열처리 조건에 따른 미세구조 및 표면특성)

  • Kwon, Yong;Kim, Nam-Hoon;Choi, Dong-You;Lee, Woo-Sun;Seo, Yong-Jin;Park, Jin-Seong
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • 제18권6호
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    • pp.554-559
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    • 2005
  • Ni/Cr thin film is very interesting material as thin film resistors, filaments, and humidity sensors because their relatively large resistivity, more resistant to oxidation and a low temperature coefficient of resistance (TCR). These interesting properties of Ni/Cr thin films are dependent upon the preparation conditions including the deposition environment and subsequent annealing treatments. Ni/Cr thin films of 250 nm were deposited by DC magnetron sputtering on $Al_2O_3/Si$ substrate with 2-inch Ni/Cr (80/20) alloy target at room temperature for 45 minutes. Annealing treatments were performed at $400^{\circ}C,\;500^{\circ}C,\;and\;600^{\circ}C$ for 6 hours in air or $H_2$ ambient, respectively. The clear crystal boundaries without crystal growth and the densification were accomplished when the pores were disappeared in air ambient. Most of surface was oxidic including NiO, $Ni_2O_3$ and $Cr_xO_y$(x=1,2, y=2,3) after annealing in air ambient. The crystal growth in $H_2$ ambient was formed and stabilized by combination with each other due to the suppression of oxidized substance on film surface. Most oxidic Ni was restored when the oxidic Cr was present due to its stability in high-temperature $H_2$ ambient.

Spark plasma sintering 소결법에 의해 제작 된 Ti-Al-Si 합금타겟의 물성과 합금타겟을 이용하여 제작한 박막에 관한 연구

  • Lee, Han-Chan;Jeong, Deok-Hyeong;Mun, Gyeong-Il;Lee, Bung-Ju;Sin, Baek-Gyun
    • Proceedings of the Korean Vacuum Society Conference
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    • 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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    • pp.237.1-237.1
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    • 2013
  • Ti 와 Al 은 금속간의 화합물이 내산화성에 우수한 성질을 가지고 있으며 낮은 밀도와 고온에도 큰 변화가 없는 성질을 가지고 있다. 그리하여 내식 및 부식 관련 연구나 고온재료를 필요로 하는 우주, 엔진 제품 등에 많은 연구가 진행되고 있다. 또한 Ti-Al-N 박막은 경도가 우수하여 고속 공구 부품에 널리 사용되고 있으며 최근 Ti-Al-N 에 Si 첨가로 인하여 40 GPa 이상의 고경도와 1,000도 이상의 산화온도를 지닌 나노 혼합물 코팅을 형성 시키는 것으로 알려져 있다. 본 연구에서는 Ti, Al, Si 원분말을 PBM (Planetary Ball Milling) 방법을 사용하여 Ti-Al-Si 혼합분말로 제조하고, 제조된 분말들은 SPS (Spark Plasma Sintering) 공정을 통하여 Ti-Al-Si 합금타겟을 제작하였다. 제작된 Ti-Al-Si 합급타겟을 사용한 Sputtering 공정을 수행하여 Ti-Al-Si 3원계 박막을 증착하였다. 그 결과 기존 Ti (82 ${\mu}m$), Al (32 ${\mu}m$), Si (16 ${\mu}m$) 크기의 원분말들이 PBM (Planetary Ball Milling) 공정 후 Ti-Al-Si (18 ${\mu}m$) 로 입도가 작아진 것을 확인 할 수 있었고, 소결 후 타겟이 99% 이상의 높은 밀도를 가졌으며 원분말의 조성과 동일한 조성을 가진 타겟이 제작되었음을 확인하였다. Ti-Al-Si 타겟의 경도는 약 1,000 Hv 이상의 값을 보였으며, Ti-Al-Si-N 박막의 경우 타겟의 조성과 동일하였고 경도는 약 35 GPa 로 높은 경도 값을 가지는 것을 확인하였다. 내산화 테스트 결과 Ti-Al-Si-N 박막은 1,000도 에서도 박막의 손상이 가지 않았다.

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A Study on Microstructure and Tribological Behavior of Superhard Ti-Al-Si-N Nanocomposite Coatings (초고경도 Ti-Al-Si-N 나노복합체 코팅막의 미세구조 및 트라이볼로지 거동에 관한 연구)

  • Heo, Sung-Bo;Kim, Wang Ryeol
    • Journal of Surface Science and Engineering
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    • 제54권5호
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    • pp.230-237
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    • 2021
  • In this study, the influence of silicon contents on the microstructure, mechanical and tribological properties of Ti-Al-Si-N coatings were systematically investigated for application of cutting tools. The composition of the Ti-Al-Si-N coatings were controlled by different combinations of TiAl2 and Ti4Si composite target powers using an arc ion plating technique in a reactive gas mixture of high purity Ar and N2 during depositions. Ti-Al-Si-N films were nanocomposite consisting of nanosized (Ti,Al,Si)N crystallites embedded in an amorphous Si3N4/SiO2 matrix. The instrumental analyses revealed that the synthesized Ti-Al-Si-N film with Si content of 5.63 at.% was a nanocomposites consisting of nano-sized crystallites (5-7 nm in dia.) and a three dimensional thin layer of amorphous Si3N4 phase. The hardness of the Ti-Al-Si-N coatings also exhibited the maximum hardness value of about 47 GPa at a silicon content of ~5.63 at.% due to the microstructural change to a nanocomposite as well as the solid-solution hardening. The coating has a low friction coefficient of 0.55 at room temperature against an Inconel alloy ball. These excellent mechanical and tribological properties of the Ti-Al-Si-N coatings could help to improve the performance of machining and cutting tool applications.

Hard TiN Coating by Magnetron-ICP P $I^3$D

  • Nikiforov, S.A.;Kim, G.H.;Rim, G.H.;Urm, K.W.;Lee, S.H.
    • Journal of Surface Science and Engineering
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    • 제34권5호
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    • pp.414-420
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    • 2001
  • A 30-kV plasma immersion ion implantation setup (P $I^3$) has been equipped with a self-developed 6'-magnetron to perform hard coatings with enhanced adhesion by P $I^3$D(P $I^3$ assisted deposition) process. Using ICP source with immersed Ti antenna and reactive magnetron sputtering of Ti target in $N_2$/Ar ambient gas mixture, the TiN films were prepared on Si substrates at different pulse bias and ion-to-atom arrival ratio ( $J_{i}$ $J_{Me}$ ). Prior to TiN film formation the nitrogen implantation was performed followed by deposition of Ti buffer layer under A $r^{+}$ irradiation. Films grown at $J_{i}$ $J_{Me}$ =0.003 and $V_{pulse}$=-20kV showed columnar grain morphology and (200) preferred orientation while those prepared at $J_{i}$ $J_{Me}$ =0.08 and $V_{pulse}$=-5 kV had dense and eqiaxed structure with (111) and (220) main peaks. X-ray diffraction patterns revealed some amount of $Ti_{x}$ $N_{y}$ in the films. The maximum microhardness of $H_{v}$ =35 GN/ $M^2$ was at the pulse bias of -5 kV. The P $I^3$D technique was applied to enhance wear properties of commercial tools of HSS (SKH51) and WC-Co alloy (P30). The specimens were 25-kV PII nitrogen implanted to the dose 4.10$^{17}$ c $m^{-2}$ and then coated with 4-$\mu\textrm{m}$ TiN film on $Ti_{x}$ $N_{y}$ buffer layer. Wear resistance was compared by measuring weight loss under sliding test (6-mm $Al_2$ $O_3$ counter ball, 500-gf applied load). After 30000 cycles at 500 rpm the untreated P30 specimen lost 3.10$^{-4}$ g, and HSS specimens lost 9.10$^{-4}$ g after 40000 cycles while quite zero losses were demonstrated by TiN coated specimens.s.

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Si and Mg doped Hydroxyapatite Film Formation by Plasma Electrolytic Oxidation

  • Park, Seon-Yeong;Choe, Han-Cheol
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 한국표면공학회 2016년도 추계학술대회 논문집
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    • pp.195-195
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    • 2016
  • Titanium and its alloys are widely used as implants in orthopedics, dentistry and cardiology due to their outstanding properties, such as high strength, high level of hemocompatibility and enhanced biocompatibility. Hence, recent works showed that the synthesis of new Ti-based alloys for implant application involves more biocompatible metallic alloying element, such as, Nb, Hf, Zr and Mo. In particular, Nb and Hf are one of the most effective Ti ${\beta}-stabilizer$ and reducing the elastic modulus. Plasma electrolyte oxidation (PEO) is known as excellent method in the biocompatibility of biomaterial due to quickly coating time and controlled coating condition. The anodized oxide layer and diameter modulation of Ti alloys can be obtained function of improvement of cell adhesion. Silicon (Si) and magnesium (Mg) has a beneficial effect on bone. Si in particular has been found to be essential for normal bone and cartilage growth and development. In vitro studies have shown that Mg plays very important roles in essential for normal growth and metabolism of skeletal tissue in vertebrates and can be detected as minor constituents in teeth and bone. The aim of this study is to research Si and Mg doped hydroxyapatite film formation by plasma electrolytic oxidation. Ti-29Nb-xHf (x= 0, 3, 7 and 15wt%, mass fraction) alloys were prepared Ti-29Nb-xHf alloys of containing Hf up from 0 wt% to 15 wt% were melted by using a vacuum furnace. Ti-29Nb-xHf alloys were homogenized for 2 hr at $1050^{\circ}C$. Each alloy was anodized in solution containing typically 0.15 M calcium acetate monohydrate + 0.02 M calcium glycerophosphate at room temperature. A direct current power source was used for the process of anodization. Anodized alloys was prepared using 270V~300V anodization voltage at room. A Si and Mg coating was produced by RF-magnetron sputtering system. RF power of 100W was applied to the target for 1h at room temperature. The microstructure, phase and composition of Si and Mg coated oxide surface of Ti-29Nb-xHf alloys were examined by FE-SEM, EDS, and XRD.

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Magnetostrictive and Magnetic Properties of Amorphous ${Tb_{45.7}}{Fe_{54.3-x}}{Co_x}$${Tb_{50.2}}{Fe_{49.8-x}}{Co_x}$ (0$\leqq$x$\leqq$9.6) Alloy Thin Films (비정질 ${Tb_{45.7}}{Fe_{54.3-x}}{Co_x}$${Tb_{50.2}}{Fe_{49.8-x}}{Co_x}$ (0$\leqq$x$\leqq$9.6) 합금박막의 자기변형 및 자기적 특성)

  • Choi, Y.S.;Cho, S.S.;Yoon, G.G.;Lee, W.S.;Li, Ying;Kim, C.O.
    • Korean Journal of Materials Research
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    • 제11권8호
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    • pp.713-717
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    • 2001
  • The magnetic and magnetostrictive properties of amorphous Tb/sub 45.7/Fe/sub 54.3-x/Co/sub x/ and Tb/sub 50.2/Fe/sub 49.8-x/Co/sub x/ (0≤x≤9.6) thin films have systematically been investigated. The films were fabricated by rf magnetron sputtering using a composite target which consists of a Fe plate and Tb, Co chips. The microstructure mainly consists of an amorphous phase. Excellent intrinsic and low magnetic-field-magnetostrictive properties were achieved in Tb/sub 45.7/Fe/sub 54.3-x/Co/sub x/ and Tb/sub 50.2/Fe/sub 49.8-x/Co/sub x/ (0≤x≤9.6). The magnetostriction of 130 ppm was obtained with low field of 100 Oe. The intrinsic magnetostriction(applied field, 5 kOe) were increased from 330ppm to 400ppm.

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